CN117202994A

CN117202994A - Height-adjustable electrohydrodynamic pump head assembly

Info

Publication number: CN117202994A
Application number: CN202280023761.1A
Authority: CN
Inventors: 洪承珉; 金建熙; 李大镛
Original assignee: PROTEC CO Ltd
Current assignee: PROTEC CO Ltd
Priority date: 2021-03-23
Filing date: 2022-03-21
Publication date: 2023-12-08
Also published as: TW202237978A; KR102486132B1; TWI819535B; WO2022203317A1; KR20220132196A

Abstract

The present invention relates to an Electrohydrodynamic (EHD) pump head assembly, and more particularly to a height adjustable electro-hydrodynamic (Electro Hydro Dynamic, EHD) pump head assembly that applies a potential difference to a viscous solution and dispenses the viscous solution through a nozzle. The height-adjustable electrohydrodynamic pump head assembly of the present invention has the effect of enabling the EHD pump to easily adjust the conditions for dispensing the viscous solution, thereby improving the dispensing quality. The height-adjustable electrohydrodynamic pump head combination of the present invention has the effect of stably maintaining the dispensing quality of the height-adjustable electrohydrodynamic pump head combination for dispensing viscous solutions.

Description

Height-adjustable electrohydrodynamic pump head assembly

Technical Field

The present invention relates to an electrohydrodynamic (Electro Hydro Dynamic, EHD) pump head assembly and, more particularly, to a height adjustable electro-hydrodynamic (Electro Hydro Dynamic, EHD) pump head assembly that applies a potential difference to a viscous solution and dispenses the viscous solution through a nozzle.

Background

Pumps for dispensing viscous solutions at high rates of dosing are widely used in a variety of technical fields including semiconductor processing.

As described above, pumps of various forms and structures such as screw (Auger) pumps, pneumatic pumps, piezoelectric (piezo) pumps, and inkjet (inkjet) pumps are used as pumps for dispensing viscous solutions.

In order to more finely adjust the dispensing capacity of the viscous solution and dispense a pattern of fine line width to the material, there is also a case where an electrohydrodynamic (Electro Hydro Dynamic, EHD) pump is used.

The electrohydrodynamic pump is a pump that ejects the viscous solution through a nozzle by using energy generated by an electric field generated by applying a high voltage to the viscous solution stored in the storage unit.

Although the electrohydrodynamic pump as described above can discharge a viscous solution in a small volume, it has a disadvantage that the dispensing characteristics are greatly affected by the viscosity of the solution, the surrounding environment, the shape of the electrode, and the like.

Therefore, in order to be effectively used in various fields such as semiconductor manufacturing process, a height-adjustable electrohydrodynamic pump head assembly of the following structure is required: it is also possible to easily dispense a viscous solution of a relatively high viscosity, and to easily control the ejection shape, pattern, flow rate, etc. of the viscous solution while maintaining stable dispensing characteristics.

Disclosure of Invention

Technical problem to be solved

The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a height-adjustable electro-hydrodynamic pump head assembly having a structure that is excellent in the performance of dispensing a viscous solution, that can stably maintain the dispensing characteristics, and that can easily adjust the dispensing characteristics.

Technical means for solving the problems

The height adjustable electrohydrodynamic pump head assembly of the present invention for addressing the objects set forth above is characterized by comprising: a storage section for storing the viscous solution; an insulating nozzle made of insulating material, connected to the storage unit and formed to extend in a longitudinal direction so as to discharge the viscous solution; an internal electrode disposed on a path for transferring the viscous solution stored in the storage unit to the insulating nozzle; and an external electrode formed to surround at least a portion of the insulating nozzle and formed to extend upward and downward.

Effects of the invention

The height-adjustable electrohydrodynamic pump head assembly of the present invention has the effect of enabling the EHD pump to easily adjust the conditions under which the viscous solution is dispensed, thereby improving the dispensing quality.

The height-adjustable electrohydrodynamic pump head combination of the present invention has the effect of stably maintaining the dispensing quality of the height-adjustable electrohydrodynamic pump head combination for dispensing viscous solutions.

Drawings

Fig. 1 is a perspective view of a height adjustable electrohydrodynamic pump head assembly according to one embodiment of the present invention.

Fig. 2 and 3 are front views of the height adjustable electrohydrodynamic pump head assembly of fig. 1.

Fig. 4 and 5 are a VI-VI sectional view and a partially enlarged view, respectively, of the height adjustable electrohydrodynamic pump head assembly of fig. 1.

Fig. 6 is a front view of a portion of a height adjustable electrohydrodynamic pump head assembly as shown in fig. 1.

Fig. 7 is an enlarged cross-sectional view of a portion of the height adjustable electrohydrodynamic pump head assembly of fig. 1.

Fig. 8 is a view for explaining a state in which the height-adjustable electrohydrodynamic pump unit shown in fig. 1 is mounted to a dispenser for use.

Fig. 9 shows another structure of an external electrode with respect to the electrohydrodynamic pump head assembly as shown in fig. 1.

Detailed Description

Hereinafter, a height-adjustable electro-hydrodynamic pump head combination according to an embodiment of the present invention will be described with reference to the accompanying drawings.

The height adjustable electrohydrodynamic pump head combination of the present invention is used to apply a viscous solution to a material disposed on a substrate. When a voltage is applied to the viscous solution in a state where the material is disposed on the grounded substrate, the viscous solution is discharged to the material through the nozzle due to a potential difference between the substrate and the viscous solution.

Fig. 1 is a perspective view of a height adjustable electrohydrodynamic pump head assembly according to an embodiment of the present invention, fig. 2 and 3 are front views of the height adjustable electrohydrodynamic pump head assembly shown in fig. 1, and fig. 4 and 5 are a VI-VI sectional view and a partially enlarged view of the height adjustable electrohydrodynamic pump head assembly shown in fig. 1, respectively.

Referring to fig. 1 to 5, the height-adjustable electro-hydrodynamic pump head assembly according to the present embodiment includes a storage part (110), an inner electrode (310), an insulating nozzle (330), and an outer electrode (350).

The storage unit (110) is configured to store a viscous solution to be ejected through the insulating nozzle (330). The storage unit (110) can be configured to store various forms of viscous solutions. A storage unit in the form of a pipe (tube) for transferring the viscous solution stored in the separate container may be used. In this embodiment, as shown in fig. 1 to 5, a case where a storage section (110) formed of a container structure in the form of a cylindrical cartridge (cartridge) is used will be described as an example. The storage unit (110) as described above may be connected to a pneumatic regulator (regulator) capable of applying pressure to the viscous solution stored therein.

As shown in fig. 4 and 5, an internal electrode (310) is provided at the lower end of the storage section (110). The inner electrode (310) is formed of a conductive material so that a voltage can be applied to the viscous solution stored in the storage part (110). The inner electrode (310) of this embodiment is formed in the form of a metal pipe having an inner diameter and a fixed thickness in the longitudinal direction. With the above-described structure, the internal electrode (310) can apply a voltage to the viscous solution stored in the storage part (110) while transferring the viscous solution to the insulating nozzle (330).

As shown in fig. 4, 5 and 7, the insulating nozzle (330) is formed to extend in the longitudinal direction. The insulating nozzle (330) is preferably formed such that the inner diameter decreases at least partially toward the lower side. In the case of the present embodiment, as shown in fig. 7, the upper portion of the insulating nozzle (330) is formed so that the inner diameter thereof is fixed in the longitudinal direction, and the lower portion is formed in the form of a pipe in which the inner diameter is reduced as going to the lower side.

The insulating nozzle (330) is made of an insulating material such as glass. In the case of the present embodiment, the insulating nozzle (330) is manufactured by a method of drawing a glass material pipe. The insulating nozzle (330) is assembled to the lower end of the storage section (110) in the same manner as the inner electrode (310).

In the case of the present embodiment, as shown in fig. 7, the insulating nozzle (330) is assembled to the storage section (110) in a state in which the inner electrode (310) is inserted into the inside. Preferably, the insulating nozzle (330) is assembled to the storage unit (110) by screwing in a state of being coupled to a nut-shaped synthetic resin structure. At this time, the insulating nozzle (330) is connected to the storage section (110) in a state in which the inner electrode (310) provided so as to protrude toward the lower end of the storage section (110) is inserted into the insulating nozzle (330). With the above-described structure, the internal electrode (310) can apply a voltage to the viscous solution while directly supplying the viscous solution to the insulating nozzle (330). In the case of the present embodiment, as shown in fig. 7, the inner electrode (310) is formed to be inserted only into an upper portion where the inner diameter of the insulating nozzle (330) is fixedly formed. By the structure as described above, the internal electrode (310) can transfer the viscous solution to a position very close to the outlet (outlet) of the insulating nozzle (330) and apply a voltage to the viscous solution.

The interval between the inner diameter of the insulating nozzle (330) and the outer diameter of the inner electrode (310) is preferably as narrow as possible. If the interval between the inner diameter of the insulating nozzle (330) and the outer diameter of the inner electrode (310) is narrowed, the pressure loss and the electromagnetic force loss transmitted to the insulating nozzle (330) can be reduced, and the viscous solution can be effectively discharged through the insulating nozzle (330).

Preferably, the interval between the inner diameter of the insulating nozzle (330) and the outer diameter of the inner electrode (310) is 0.05mm to 0.1 mm. If the interval between the inner diameter of the insulating nozzle (330) and the outer diameter of the inner electrode (310) is less than 0.05mm, it is difficult to assemble the insulating nozzle (330) and the inner electrode (310), and in the case that the interval between the inner diameter of the insulating nozzle (330) and the outer diameter of the inner electrode (310) is greater than 0.1mm, the viscous solution may flow between the insulating nozzle (330) and the inner electrode (310), or bubbles may be formed between the inner wall of the insulating nozzle (330) and the outer wall of the inner electrode (310), or the bubbles may be discharged together with the viscous solution through the insulating nozzle (330).

The insulating nozzle (330), the inner electrode (310), and the storage portion (110) are assembled to the upper body (210). The upper body (210) is configured to be supported by combining the storage unit (110), the inner electrode (310), and the insulating nozzle (330). The upper body (210) and the lower body (230) are assembled and used as described above.

As shown in fig. 4 and 5, the lower body (230) has an assembly groove (231) formed to extend upward and downward. The upper body (210) has an assembly extension (211) formed in a shape corresponding to the assembly groove (231). The upper body (210) and the lower body (230) are assembled with each other by a method in which the assembly extension (211) of the upper body (210) is inserted into the assembly groove (231) of the lower body (230).

An external electrode (350) is fixed to the lower body (230). That is, the external electrode (350) is disposed and supported on the lower body (230). The external electrode (350) of this embodiment is formed in the form of a pipe extending upward and downward. In the case of the present invention, the external electrode (350) formed of a structure having an inner diameter and a constant thickness in the up-down direction is described as an example, but the structure and shape of the external electrode (350) may be variously modified. For example, the inner diameter of the external electrode may be increased or decreased in the up-down direction. As shown in fig. 9, an external electrode (360) formed of a plurality of external electrode members (361) arranged at regular angular intervals in the circumferential direction and extending in the longitudinal direction may also be used.

If the assembly extension (211) is inserted into the assembly groove (231) to assemble the upper body (210) and the lower body (230) to each other, the external electrode (350) surrounds the outer circumference of at least a portion of the insulating nozzle (330) in a non-contact state. In the case of the present embodiment, as shown in fig. 5, the end portion of the insulating nozzle (330) is in a state of being inserted into the external electrode (350). At this time, the inner electrode (310) is inserted into the insulating nozzle (330) and the outer electrode (350).

In the state described above, the upper body (210) is provided so as to be movable up and down relative to the lower body (230). In the case of the present embodiment, the upper body (210) is provided so as to be vertically movable with respect to the lower body (230) along a guide rail provided to the lower body (230). The height-adjustable electrohydrodynamic pump head assembly of the present embodiment is constructed as follows: after the height of the upper body (210) is manually adjusted, the height of the upper body (210) is fixed using an additional fixing member (250). Optionally, the height adjustable electrohydrodynamic pump head assembly may also be constructed in the following manner: a lifting member in the form of a linear motor is provided, which can adjust the height of the upper body (210) by a control signal, so that the upper body (210) can be automatically lifted up and down relative to the lower body (230). If the height of the upper body (210) is adjusted by the elevating member as described above, the final height of the insulating nozzle (330) with respect to the external electrode (350) is adjusted.

The height adjustable electrohydrodynamic pump head assembly of this embodiment has a gas flow path (410) connected between an insulating nozzle (330) and an outer electrode (350). The gas flow path (410) as described above is connected between the insulating nozzle (330) and the external electrode (350) to transfer positive pressure gas or negative pressure gas between the insulating nozzle (330) and the external electrode (350).

The gas flow path (410) as described above is connected to an external gas pressure device between the insulating nozzle (330) and the external electrode (350) via the inside of the lower body (230). In the case of the present embodiment, the gas flow passage (410) passes through a path between the assembly extension (211) of the upper body (210) and the assembly groove (231) of the lower body (230).

The assembly groove (231) is formed in a cylindrical shape, and the assembly extension (211) is formed in a cylindrical shape having an outer diameter completely matching the assembly groove (231). A groove-shaped partial flow channel (213) extending upward and downward at equal intervals (90 degree intervals) in the circumferential direction is formed on the outer surface of the assembly extension (211). An annular groove (211) formed in an annular shape along the outer diameter of the assembly extension (211) is formed and connected at the upper end portion of the partial flow passage (213). The gas flow passage (410) is connected between the assembly extension (211) and the assembly groove (231) along a path formed by the partial flow passage (213) and the annular groove (211) as described above. The gas flow passage (410) extends so as to be continuous from the annular groove (211) to the side direction of the lower body (230). The gas flow path (410) is connected to an external gas pressure device through a path as described above.

If the external air pressure device is made to generate positive pressure, compressed air is dispersed between the external electrode (350) and the insulating nozzle (330). Conversely, when the external air pressure device is caused to generate negative pressure, the pressure between the external electrode (350) and the insulating nozzle (330) is reduced, and air around the insulating nozzle (330) is sucked through the air flow path (410).

On the other hand, the relative position of the insulating nozzle (330) with respect to the external electrode (350) is automatically aligned by inserting the assembly extension (211) of the upper body (210) into the assembly groove (231) of the lower body (230). When the assembly extending part (211) and the assembly groove (231) are processed in a manner of making the tolerance between the assembly extending part (211) and the assembly groove (231) very small, the insulating nozzle (330) is fixed in a horizontal direction after the assembly extending part (211) is inserted into the assembly groove (231). Therefore, if the assembly extension portion (211) is inserted into the assembly groove (231) and guided by the assembly groove (231) while sliding, the insulating nozzle (330) is easily inserted into the external electrode (350). Damage to the insulating nozzle (330) can be prevented by the method as described above. Since the insulating nozzle 330 is formed of a very brittle glass material to be very thin and long, it is easily damaged even by a small impact. As described above, the insulating nozzle 330 is easily introduced into the external electrode 350 due to the shape and structure of the assembly groove 231 and the assembly extension 211. When the upper body (210) and the lower body (230) are assembled in a state in which the insulating nozzle (330) is aligned with respect to the horizontal direction of the external electrode (350), damage to the insulating nozzle (330) is prevented and the insulating nozzle (330) is easily introduced into the external electrode (350).

For this purpose, the length of the insulating nozzle 330 protruding toward the lower side of the upper body 210 is preferably shorter than the depth of the assembly groove 231. With the above configuration, the assembly extension portion (211) starts to be inserted into the assembly groove (231) before the insulation nozzle (330) contacts the bottom of the assembly groove (231). The assembly extension (211) is aligned by the assembly slot (231) and also automatically aligns the position of the insulating nozzle (330).

As described above, since the assembly groove (231) and the assembly extension (211) are formed with very small tolerance, the assembly groove (231) and the assembly extension (211) are airtight except for the gas flow passage (410). Optionally, a sealing member such as an O-ring may be provided in the assembly extension portion (211) or the assembly groove (231), so that the assembly groove (231) and the assembly extension portion (211) can be more reliably sealed from each other by gas.

On the other hand, an insulating cover (233) made of an insulating material is provided on the lower body (230). The insulating cover (233) is formed with an electrode hole that penetrates up and down. The insulating cover (233) is coupled to the lower body (230) in a state that an external electrode (350) can be disposed inside the electrode hole. The insulating cover (233) serves to fix the external electrode (350) to the lower body (230) and to protect an operator from a high voltage applied to the external electrode (350).

Hereinafter, the operation of the height-adjustable electro-hydrodynamic pump head assembly configured as described above will be described.

First, an assembly sequence of the height-adjustable electrohydrodynamic pump head assembly according to the present embodiment will be described.

Referring to fig. 1, 2 and 4, the external electrode (350) is assembled to the lower body (230). As described above, the external electrode (350) is fixed to the lower portion of the lower body (230) using the insulating cover (233). At this time, the external electrode (350) is exposed to the lower side through the electrode hole of the insulating cover (233).

The external electrode (350) is electrically connected to the power supply device through the lower body (230). The power supply device applies a DC voltage to the external electrode (350) at a voltage set by the control unit.

Next, referring to fig. 1, 2 and 7, the internal electrode (310) and the insulating nozzle (330) are assembled to the storage portion (110). The viscous solution stored in the storage part (110) is in a state that the viscous solution can be discharged to the outside through the inner electrode (310). As shown in fig. 7, the insulating nozzle (330) is assembled to the storage unit (110) so that the inner electrode (310) is inserted into a portion where the inner diameter of the insulating nozzle (330) is fixedly formed. In the state described above, the viscous solution stored in the storage unit (110) can be directly transferred to the insulating nozzle (330) through the internal electrode (310). The storage unit (110) is connected to a pneumatic regulator. The air pressure regulator can apply pressure to the viscous solution stored in the storage unit (110) at the pressure set in the control unit.

In the state described above, as shown in fig. 1 and 2, the combination of the storage section (110), the internal electrode (310), and the insulating nozzle (330) is attached to the upper body (210). As shown in fig. 1 and 2, the storage unit (110) and its peripheral structure are attached to the upper body (210) while the upper body (210) is raised relative to the lower body (230). As described above, the inner electrode (310) and the insulating nozzle (330) can be easily attached to the upper body (210) without being engaged with the lower body (230) in a state where the upper body (210) is raised.

The inner electrode (310) is connected to a power supply device through the upper body (210). The power supply device applies a DC voltage set in the control unit to the internal electrode (310).

When the upper body (210) is slid downward, as shown in fig. 3 and 5, the assembly extension (211) is inserted into the assembly groove (231), and the upper body (210) and the lower body (230) are assembled with each other. At this time, the insulating nozzle 330 is also inserted into the external electrode 350. The above-described process may be performed manually, or may be performed by a lifting member that is actuated in response to a signal from the control unit. The relative position between the upper body (210) and the lower body (230) may be adjusted according to various parameters such as the working conditions or the characteristics of the viscous solution.

As described above, if the insulating nozzle 330 is formed to have a length protruding toward the lower side of the upper body 210 shorter than the depth of the assembly groove 231, there is an advantage in that the risk of damage to the assembly groove 231 can be reduced. Since the assembly extension (211) starts to be inserted into the assembly groove (231) before the insulation nozzle (330) contacts with the bottom of the assembly groove (231) or enters the inside of the external electrode (350), the position of the insulation nozzle (330) is automatically aligned while the position of the assembly extension (211) is aligned through the assembly groove (231). Accordingly, the insulating nozzle (330) enters the inside of the external electrode (350) at an accurate position. In addition, the insulating nozzle (330) is not in contact with the external electrode (350) during the entrance of the insulating nozzle (330).

Upon completion of the assembly of the upper body (210) and the lower body (230), as shown in fig. 6, the end portion of the insulating nozzle (330) is exposed to the lower portion of the outer electrode (350). The height of the upper body (210) is optionally adjusted so that the dispensing operation can be performed in a state where the end portion of the insulating nozzle (330) is not exposed to the lower portion of the outer electrode (350).

The height-adjustable electrohydrodynamic pump unit of the present embodiment assembled in the order described above can be used in a state as shown in fig. 8. As shown in fig. 8, the electrohydrodynamic pump of the present embodiment is used by being installed in a separate transfer device in a state where the electrohydrodynamic pump is installed on a support panel together with other components such as a camera and a sensor. The viscous solution is transferred in the vertical direction and the horizontal direction by a transfer device, and is dispensed to the material disposed at the bottom by various methods.

As described above, when the material is disposed on the grounded substrate (bottom) and a dc voltage is applied to the inner electrode (310) and the outer electrode (350) by the power supply device, the viscous solution inside the insulating nozzle (330) is ejected downward by the potential difference generated between the inner electrode (310) and the outer electrode (350) with respect to the substrate. In the case of the present embodiment, a fixed direct current voltage is applied to the inner electrode (310), and a pulse voltage of various patterns and frequencies is applied to the outer electrode (350), thereby ejecting the viscous solution through the insulating nozzle (330). Alternatively, the height-adjustable electrohydrodynamic pump head assembly may be formed by applying a fixed DC voltage to the outer electrode (350) and applying a pulse voltage of a specific frequency to the inner electrode (310).

As shown in fig. 7, since the internal electrode (310) enters the inside of the insulating nozzle (330), a direct voltage can be more effectively applied to spray out the viscous solution. The dispensing performance of the viscous solution can be improved by the structure as described above. In addition, since the inner electrode (310) of the present embodiment is formed in a pipe shape, a function of supplying the viscous solution to the insulating nozzle (330) is performed while a potential difference is formed, so that the dispensing performance can be further improved.

Due to the structure between the inner electrode (310) and the insulating nozzle (330), the distance between the portion where the viscous solution stored in the storage part (110) is supplied to the insulating nozzle (330) and the portion where the viscous solution is ejected from the insulating nozzle (330) can be made very close. With this structure, the possibility of generating bubbles during the dispensing process can be significantly reduced. In addition, since the structure as described above applies a voltage to the viscous solution with the internal electrode (310) at a position very close to the ejection orifice of the insulating nozzle (330), the height-adjustable electrohydrodynamic pump head combination of the present embodiment is made to have excellent dispensing performance. In addition, the structure as described above has an advantage that it is very easy to directly control the distribution characteristics.

In addition, since the external electrode (350) can also apply a direct voltage at a position very close to the internal electrode (310) and the insulating nozzle (330), the height-adjustable electrohydrodynamic pump head combination of the present embodiment has more excellent distribution performance. In particular, the external electrode (350) of the height-adjustable electrohydrodynamic pump assembly of the present embodiment is formed in a pipe shape, thereby forming a space surrounding the outer circumference of the insulating nozzle (330) and extending up and down. In the state described above, since the direct current voltage is applied to the external electrode (350), the height-adjustable electro-hydrodynamic pump head combination of the present invention can reduce the influence caused by interference of external environment or noise. As a result, the highly adjustable electrohydrodynamic pump head assembly of the present invention has the ability to dispense viscous solutions more stably.

In addition, in the case where both the inner electrode (310) and the outer electrode (350) are formed in a cylindrical shape, the height-adjustable electrohydrodynamic pump head assembly of the present invention has a structure capable of transmitting electromagnetic force to a viscous solution more effectively by further increasing the area and space where a potential difference is generated between the inner electrode (310) and the outer electrode (350).

Next, the operation of the gas flow path (410) will be described. A gas flow passage (410) connected to an external pneumatic pump is connected to lower portions of the upper body (210) and the lower body (230) by means of an annular groove (211) and a partial flow passage (213) formed in the assembly extension (211). At the lower end of the partial flow channel (213), the gas flow channel (410) extends radially again and is connected to the inner space of the external electrode (350). As a result, the end portion of the gas flow path (410) is connected to the space between the external electrode (350) and the insulating nozzle (330). The gas flow path (410) supplies positive pressure gas or negative pressure gas between the external electrode (350) and the insulating nozzle (330) according to the actuation of the external pneumatic pump.

In general, a pump dispensing a viscous solution is common in the case of removing internal bubbles in a step of starting a job or performing a purge job in the course of performing calibration (calibration). When the purging operation as described above is performed, if positive pressure is generated through the gas flow path (410), the viscous solution is discharged through the insulating nozzle (330). In addition, when a gas flow of a fixed pressure is generated around the insulating nozzle 330 through the gas flow path 410 not only when the purge operation is started but also when the dispensing operation is performed for the product, an effect is produced that the time for forming a stable meniscus (meniscus) for ejection can be shortened.

If the magnitude of the gas pressure or the flow rate of the gas transmitted through the gas flow passage (410) is adjusted, the height-adjustable electrohydrodynamic pump head assembly of the present embodiment can be operated to dispense the viscous solution in a spray form, instead of ejecting the viscous solution in droplet (droplet) units.

Alternatively, a height adjustable electrohydrodynamic pump head assembly may be operated to deliver negative pressure through the gas flow path (410) to create a vacuum around the insulating nozzle (330). If a negative pressure is generated in the gas flow passage (410) during the execution of the purging operation as described above, the viscous solution purged through the insulating nozzle (330) is sucked (sub) and discharged to the outside through the gas flow passage (410). That is, in the step of correcting or preparing the height-adjustable electrohydrodynamic pump assembly, the viscous solution is not dropped to the lower side of the insulating nozzle 330 and is discharged to the outside through the gas flow passage 410, thereby preventing contamination of the working space due to the viscous solution. In addition, as described above, even in the case of dispensing the viscous solution in the form of a spray, a negative pressure may be applied to the gas flow path (410) during the period in which the viscous solution is not dispensed to the material, so that fine particles of the viscous solution are sucked through the gas flow path (410) and discharged to the outside.

Since the height-adjustable electrohydrodynamic pump head assembly of the present embodiment is configured in such a manner that the external electrode (350) surrounds the insulating nozzle (330) in a non-contact state, there is an advantage in that it is easy to connect the gas flow path (410) between the insulating nozzle (330) and the external electrode (350). The gas flow path (410) can be brought close to a position very close to the insulating nozzle (330) by the structure described above, and thus, there is an advantage that the effect of the positive or negative pressure gas pressure transmitted from the gas flow path (410) can be improved.

On the other hand, it is important that the dispensing pump, such as the height adjustable electrohydrodynamic pump head assembly of the present invention, maintain the nozzle height at a set value. In the case of the present invention, the heights of the external electrode (350) and the insulating nozzle (330) can be corrected (calibration) and controlled using the method described below.

As shown in fig. 1, 2 and 4, the height of the external electrode (350) is measured by lowering the entire structure as shown in fig. 7 in a state where the upper body (210) is raised with respect to the lower body (230). In the case of using a linear variable displacement sensor (Linear Variable Displacement Transducer, LVDT), the outer electrode (350) is lowered until the outer electrode (350) comes into contact with the LVDT sensor, thereby grasping the reference height of the outer electrode (350). The relative displacement of the inner electrode (310) or the insulating nozzle (330) with respect to the outer electrode (350) can be easily measured or adjusted by the relative displacement between the upper body (210) and the lower body (230). Therefore, if the height of the external electrode (350) is directly measured by the method described above and the height of the internal electrode (310) or the insulating nozzle (330) is measured by an indirect method, the internal electrode (310) or the insulating nozzle (330) can be prevented from being damaged, and the height of the main component can be accurately grasped and adjusted. The factors related to the height of the main constitution can be easily adjusted by the method as described above, thereby controlling the dispensing characteristics of the viscous solution.

On the other hand, as described above, the height-adjustable electrohydrodynamic pump unit of the present embodiment is assembled to have a structure in which the storage unit (110) in the form of a container, the internal electrode (310) and the insulating nozzle (330) can be mounted as a set to the upper body (210), and thus has convenience in use and excellent performance. Conventionally, a structure in which a viscous solution is stored in a container such as a vial (device) and is transferred to a nozzle through a tube has been often used, but in the case of the present invention, a structure in which a storage portion (110) in the form of a container is directly connected to an internal electrode (310) and an insulating nozzle (330) at a short distance is used. Accordingly, loss of pressure of the regulator connected to the storage part (110) can be minimized while being transferred to the inner electrode (310). In addition, since the intermediate connection pipe is not used, the height-adjustable electrohydrodynamic pump head assembly of the present embodiment has the advantage of simplifying the structure and also making the size small.

The structure of the present invention as described above can maintain the advantages as described above and can be variously modified. In the above, the case where the storage portion (110), the inner electrode (310) and the insulating nozzle (330) are mounted to the upper body (210) in a state of being assembled as a group is described, but the structure as described above may be modified as necessary. For example, the structure may be as follows: the storage unit (110) is detachably coupled to the upper body (210) in a state where the inner electrode (310) and the insulating nozzle (330) are assembled to the upper body (210), and is coupled to the inner electrode (310) and the insulating nozzle (330).

The present invention has been described above by way of preferred examples, but the scope of the present invention is not limited to the embodiments described and shown above.

For example, the structures of the inner electrode (310), the insulating nozzle (330) and the outer electrode (350) may be deformed into various other structures in addition to the cylindrical structure, and the outer diameter and the inner diameter may be variously deformed as needed. In addition, as shown in fig. 9, the external electrode (360) may be deformed as follows: an external electrode (360) having a structure similar to a cylindrical shape is constituted by a plurality of external electrode members (361) arranged in the circumferential direction. The structure of the internal electrode (310) may be modified as described above for use.

In addition, the height-adjustable electrohydrodynamic pump head assembly of the present invention may be configured such that either one of the inner electrode and the insulating nozzle is height-adjustable with respect to the other, unlike the structure described above with reference to the drawings. As described above, the height between the inner electrode and the insulating nozzle is adjusted, so that the dispensing characteristic of the viscous solution can be adjusted.

In addition, the case where the internal electrode (310) is inserted into the insulating nozzle (330) was described above, but the height-adjustable electrohydrodynamic pump head assembly may be configured in such a manner that the internal electrode is not inserted into the insulating nozzle, as the case may be. Optionally, an inner electrode other than a tube may be used.

Further, although the case where the internal electrode (310) and the insulating nozzle (330) are directly connected to the container-shaped storage portion (110) has been described and illustrated, a height-adjustable electrohydrodynamic pump head assembly may be configured such that the container-shaped storage portion is connected to the internal electrode and the insulating nozzle through a tubular intermediate structure.

In the above, the upper body (210) is described as being provided to be liftable with respect to the lower body (230), but the lower body may be modified to be provided to be liftable with respect to the upper body. In this case, the lifting member lifts and lowers the lower body relative to the upper body.

The assembled structure of the upper body and the lower body may be variously deformed into a structure screwed to each other, a structure engaged with each other, or the like, instead of sliding with each other. Instead of being separated into the upper body and the lower body, the height-adjustable electrohydrodynamic pump head assembly having a body portion integrally formed may be constructed.

In addition, the height-adjustable electro-hydrodynamic pump head combination having the structure of the gas flow path (410) is described above as an example, but the structure of the gas flow path may be variously modified, and the height-adjustable electro-hydrodynamic pump head combination having no structure of the gas flow path may be constituted. In addition to the annular groove (211) and part of the flow channel (213) described above, the structure of the gas flow channel can be modified into other various forms.

Claims

1. A height adjustable electrohydrodynamic pump head assembly comprising:

a storage section for storing the viscous solution;

an insulating nozzle made of insulating material, connected to the storage unit and formed to extend in a longitudinal direction so as to discharge the viscous solution;

an internal electrode disposed on a path for transferring the viscous solution stored in the storage unit to the insulating nozzle; and

an external electrode formed so as to surround at least a part of the insulating nozzle and formed so as to extend upward and downward,

either one of the insulating nozzle and the external electrode is provided in such a manner that the relative position with respect to the other can be adjusted.

2. The height adjustable electrohydrodynamic pump head assembly of claim 1, wherein

Either one of the insulating nozzle and the external electrode is provided so as to be capable of being lifted with respect to the other.

3. The height adjustable electrohydrodynamic pump head assembly of claim 2, further comprising:

and a lifting member lifting one of the insulating nozzle and the external electrode with respect to the other so that a relative position between the insulating nozzle and the external electrode can be adjusted.

4. The height adjustable electrohydrodynamic pump head assembly of claim 3, wherein

The external electrode is formed in a pipe shape.

5. The height adjustable electrohydrodynamic pump head assembly of claim 4, wherein

The external electrode is formed in such a manner as to have a fixed inner diameter in a length direction.

6. The height adjustable electrohydrodynamic pump head assembly of claim 4, wherein

The external electrode is formed in such a manner that an inner diameter gradually decreases in a length direction.

7. The height adjustable electrohydrodynamic pump head assembly of claim 1, wherein

The external electrode includes a plurality of external electrode members arranged in a circumferential direction centering on the insulating nozzle.

8. The height adjustable electrohydrodynamic pump head assembly of any one of claims 1 to 7, wherein

The insulating nozzle is formed in a pipe shape in which at least a part of the inner diameter gradually decreases toward the lower side.

9. The height adjustable electrohydrodynamic pump head assembly of claim 8, wherein

The storage portion is formed in the form of a container,

the internal electrode is disposed in the storage portion.

10. The height adjustable electrohydrodynamic pump head assembly of claim 9, wherein

At least a portion of the inner electrode is disposed inside the insulating nozzle.

11. The height adjustable electrohydrodynamic pump head assembly of claim 10, wherein

The inner electrode is formed in a pipe shape extending in a length direction so as to be capable of transferring the viscous solution stored in the storage part to the insulating nozzle.

12. The height adjustable electrohydrodynamic pump head assembly of claim 11, wherein

The inner electrode is formed in a cylindrical shape with an inner diameter fixed in a longitudinal direction.

13. The height adjustable electrohydrodynamic pump head assembly of claim 11, wherein

The internal electrode and the insulating nozzle are respectively coupled to the storage part to be disposed.