TW201837476A - 探針、探針單元及具備探針單元之半導體檢查裝置 - Google Patents

探針、探針單元及具備探針單元之半導體檢查裝置 Download PDF

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Publication number
TW201837476A
TW201837476A TW107110725A TW107110725A TW201837476A TW 201837476 A TW201837476 A TW 201837476A TW 107110725 A TW107110725 A TW 107110725A TW 107110725 A TW107110725 A TW 107110725A TW 201837476 A TW201837476 A TW 201837476A
Authority
TW
Taiwan
Prior art keywords
probe
plunger
notch
spiral
tube
Prior art date
Application number
TW107110725A
Other languages
English (en)
Chinese (zh)
Inventor
相馬一也
高橋雅宏
Original Assignee
日商日本發條股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日本發條股份有限公司 filed Critical 日商日本發條股份有限公司
Publication of TW201837476A publication Critical patent/TW201837476A/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW107110725A 2017-03-29 2018-03-28 探針、探針單元及具備探針單元之半導體檢查裝置 TW201837476A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-064993 2017-03-29
JP2017064993 2017-03-29

Publications (1)

Publication Number Publication Date
TW201837476A true TW201837476A (zh) 2018-10-16

Family

ID=63676187

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107110725A TW201837476A (zh) 2017-03-29 2018-03-28 探針、探針單元及具備探針單元之半導體檢查裝置

Country Status (3)

Country Link
JP (1) JP7023276B2 (ja)
TW (1) TW201837476A (ja)
WO (1) WO2018181273A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113495175A (zh) * 2020-04-06 2021-10-12 日本麦可罗尼克斯股份有限公司 探针和电连接装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210046676A (ko) * 2018-08-23 2021-04-28 니혼덴산리드가부시키가이샤 검사 지그, 검사 장치 및 접촉 단자

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7046021B2 (en) * 2004-06-30 2006-05-16 Microprobe Double acting spring probe
JP4031007B2 (ja) * 2005-07-15 2008-01-09 日本電子材料株式会社 垂直コイルスプリングプローブ及びこれを用いたプローブユニット
US7491069B1 (en) * 2008-01-07 2009-02-17 Centipede Systems, Inc. Self-cleaning socket for microelectronic devices
JP5504698B2 (ja) * 2009-06-02 2014-05-28 日本電産リード株式会社 検査用治具及び検査用接触子
JP2010281583A (ja) * 2009-06-02 2010-12-16 Nidec-Read Corp 検査用治具
WO2011132613A1 (ja) * 2010-04-19 2011-10-27 日本電産リード株式会社 検査用接触子及び検査用治具
JP5821432B2 (ja) * 2011-09-05 2015-11-24 日本電産リード株式会社 接続端子及び接続治具
TWI548879B (zh) * 2014-01-28 2016-09-11 Spring sleeve probe
TW201533449A (zh) * 2014-02-24 2015-09-01 Mpi Corp 具有彈簧套筒式探針之探針裝置
JP6484137B2 (ja) * 2014-11-26 2019-03-13 株式会社日本マイクロニクス プローブ及び接触検査装置
JP6317270B2 (ja) * 2015-02-03 2018-04-25 株式会社日本マイクロニクス 電気的接続装置およびポゴピン
KR101996789B1 (ko) * 2016-11-30 2019-07-04 니혼덴산리드가부시키가이샤 접촉 단자, 검사 지그 및 검사 장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113495175A (zh) * 2020-04-06 2021-10-12 日本麦可罗尼克斯股份有限公司 探针和电连接装置
TWI788813B (zh) * 2020-04-06 2023-01-01 日商日本麥克隆尼股份有限公司 探針及電性連接裝置

Also Published As

Publication number Publication date
JP7023276B2 (ja) 2022-02-21
JPWO2018181273A1 (ja) 2019-11-07
WO2018181273A1 (ja) 2018-10-04

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