TW201714851A

TW201714851A - Methods and apparatuses for edge finishing glass substrates

Info

Publication number: TW201714851A
Application number: TW105122840A
Authority: TW
Inventors: 詹姆斯威廉布朗; 尤瑟夫凱德庫羅許; 夏伊尼蓋芙賽菲; 唐玉銀; 乃越周
Original assignee: 康寧公司
Priority date: 2015-07-21
Filing date: 2016-07-20
Publication date: 2017-05-01
Also published as: TW202140203A; TWI754615B; WO2017015205A1; TWI792229B; CN107921601A; US20180215008A1; KR20180021914A; CN107921601B; JP2018522810A

Abstract

A glass support system for a glass edge finishing apparatus includes a vacuum member that is configured to extend lengthwise in a glass feed direction and along an edge of a glass substrate. The vacuum member has a vacuum body that includes a pressure chamber located therein and a support surface having an array of vacuum openings extending therethrough and in communication with the pressure chamber. The array of vacuum openings is arranged in multiple, side-by-side rows with substantially uniform spacing between the vacuum openings along each one of the multiple rows.

Description

用於邊緣加工玻璃基板的方法及裝置Method and device for edge processing glass substrate

本揭示案關於用於邊緣加工玻璃基板的方法及裝置，且更具體而言是關於用以增加邊緣斜切對稱性的方法及裝置。The present disclosure relates to methods and apparatus for edge processing of glass substrates, and more particularly to methods and apparatus for increasing edge bevel symmetry.

已主要是針對相對於較薄的玻璃基板具有相對高剛性之相對厚的玻璃基板發展傳統的玻璃邊緣加工裝置。作為一個示例，在已使用機械刻痕及斷裂程序來形成之後的玻璃片一般具有使用磨料磨輪來磨圓的邊緣。在某些應用中（例如在汽車工業中），提供在玻璃片的外周邊上具有圓頭輪廓的玻璃片邊緣可能是理想的。A conventional glass edge processing apparatus has been developed primarily for relatively thick glass substrates having relatively high rigidity relative to thinner glass substrates. As an example, a glass sheet after it has been formed using mechanical scoring and breaking procedures typically has edges that are rounded using an abrasive grinding wheel. In certain applications, such as in the automotive industry, it may be desirable to provide a sheet edge having a rounded outline on the outer periphery of the glass sheet.

平板顯示器及其他應用相較於汽車工業中所採用的通常使用遠遠較薄的玻璃片。較薄的玻璃片相較於較厚的玻璃片可具有減少的剛性及增加的可撓性。邊緣加工具有減少的剛性及增加的可撓性的如此薄玻璃片可能至少部分地由於邊緣加工處理中所涉及的力而引入挑戰。據此，存在用於邊緣加工包括相對薄之玻璃基板的玻璃基板的方法及裝置的需要。Flat panel displays and other applications typically use much thinner glass sheets than those used in the automotive industry. Thinner glass sheets can have reduced stiffness and increased flexibility compared to thicker glass sheets. Edge processing such thin glass sheets with reduced stiffness and increased flexibility may introduce challenges at least in part due to the forces involved in edge processing. Accordingly, a need exists for a method and apparatus for edge processing a glass substrate comprising a relatively thin glass substrate.

一個用以改良可撓玻璃基板之機械可靠性的技術是輪磨及拋光可撓玻璃基板的邊緣，以移除可撓玻璃層中不想要的破裂及斷裂，例如以達成預定的邊緣強度。為此，本文中描述用於加工玻璃基板的方法及裝置，其中邊緣加工裝置用以有效地加工玻璃基板，同時在本文中稱為斜切的處理中提供邊緣圓頭的形狀。One technique for improving the mechanical reliability of flexible glass substrates is to grind and polish the edges of the flexible glass substrate to remove unwanted cracks and breaks in the flexible glass layer, for example to achieve a predetermined edge strength. To this end, methods and apparatus for processing glass substrates are described herein in which edge processing apparatus is used to efficiently process glass substrates while providing the shape of the edge rounds in a process referred to herein as beveling.

依據一個實施例，一種用於一玻璃邊緣加工裝置的玻璃支撐系統，該玻璃邊緣加工裝置包括一真空構件（例如一真空夾），該真空構件配置為縱向地以一玻璃饋送方向且沿一玻璃基板的一邊緣延伸。該真空構件包括一真空主體，該真空主體包括一壓力腔室及一支撐面，該壓力腔室位於該真空主體中，該支撐面包括一真空開口陣列，該真空開口陣列延伸通過該支撐面且與該壓力腔室連通。該真空開口陣列佈置於多個、並排的列中，該多個列沿該多個列中的各者在該等真空開口之間包括實質均勻的間隔。According to one embodiment, a glass support system for a glass edge processing apparatus, the glass edge processing apparatus including a vacuum member (eg, a vacuum clamp) configured to longitudinally follow a glass feed direction and along a glass An edge of the substrate extends. The vacuum member includes a vacuum body including a pressure chamber and a support surface, the pressure chamber being located in the vacuum body, the support surface including an array of vacuum openings through which the array of vacuum openings extends It is in communication with the pressure chamber. The array of vacuum openings is arranged in a plurality of side-by-side columns that include substantially uniform spacing between the vacuum openings along each of the plurality of columns.

依據另一實施例，一種玻璃邊緣加工裝置包括一玻璃輸送系統及一玻璃支撐系統，該玻璃支撐系統由該玻璃輸送系統以一玻璃饋送方向移動。該玻璃支撐系統可配置為支撐具有不大於約0.7 mm之一厚度的一玻璃基板。該玻璃基板包括一大致平坦的表面及正交於該大致平坦的表面的一平面外方向。該玻璃饋送方向正交於該平面外方向。該玻璃支撐系統可包括一真空構件（例如一真空夾），該真空構件配置為縱向地以該玻璃饋送方向及沿該玻璃基板的一邊緣延伸。該真空構件包括一真空主體，該真空主體包括一壓力腔室且可進一步包括一支撐面，該壓力腔室位於該真空主體中，該支撐面包括一真空開口陣列，該真空開口陣列延伸通過該支撐面且與該壓力腔室連通。該真空開口陣列可包括至少約每100 cm² 的支撐面區域25個開口。In accordance with another embodiment, a glass edge processing apparatus includes a glass delivery system and a glass support system that is moved by the glass delivery system in a glass feed direction. The glass support system can be configured to support a glass substrate having a thickness of no greater than about 0.7 mm. The glass substrate includes a substantially planar surface and an out-of-plane direction orthogonal to the substantially planar surface. The glass feed direction is orthogonal to the out-of-plane direction. The glass support system can include a vacuum member (e.g., a vacuum clamp) configured to extend longitudinally in the glass feed direction and along an edge of the glass substrate. The vacuum member includes a vacuum body including a pressure chamber and further including a support surface, the pressure chamber being located in the vacuum body, the support surface including an array of vacuum openings through which the vacuum opening array extends The support surface is in communication with the pressure chamber. The array of vacuum openings can include at least about 25 openings per 100 cm ² of support surface area.

依據又另一實施例，提供了一種加工具有等於或小於約0.7 mm之一厚度之一玻璃基板的一邊緣的方法。該方法包括以下步驟：將該玻璃基板支撐於一玻璃支撐系統上。該玻璃基板包括一大致平坦的表面、正交於該大致平坦的表面的一平面外方向及正交於該平面外方向的一玻璃饋送方向。該玻璃支撐系統可包括一真空構件（例如一真空夾），該真空構件配置為縱向地以該玻璃饋送方向及沿該玻璃基板的一邊緣延伸。該真空構件可包括一真空主體，該真空主體包括一壓力腔室及一支撐面，該壓力腔室位於該真空主體中，該支撐面包括一真空開口陣列，該真空開口陣列延伸通過該支撐面且與該壓力腔室連通。該真空開口陣列可包括至少約每100 cm² 的支撐面區域25個開口。可通過該真空開口陣列向面向該真空構件之該大致平坦的表面施加一負壓。可使用一磨輪組件斜切該玻璃基板的該邊緣。According to still another embodiment, a method of processing an edge of a glass substrate having a thickness equal to or less than about 0.7 mm is provided. The method includes the steps of supporting the glass substrate on a glass support system. The glass substrate includes a substantially planar surface, an out-of-plane direction orthogonal to the substantially planar surface, and a glass feed direction orthogonal to the out-of-plane direction. The glass support system can include a vacuum member (e.g., a vacuum clamp) configured to extend longitudinally in the glass feed direction and along an edge of the glass substrate. The vacuum member may include a vacuum body including a pressure chamber and a support surface, the pressure chamber being located in the vacuum body, the support surface including an array of vacuum openings through which the array of vacuum openings extends And communicating with the pressure chamber. The array of vacuum openings can include at least about 25 openings per 100 cm ² of support surface area. A vacuum may be applied to the substantially flat surface facing the vacuum member through the array of vacuum openings. The edge of the glass substrate can be beveled using a grinding wheel assembly.

依據又另一實施例，一種玻璃邊緣加工裝置包括一玻璃輸送系統及一玻璃支撐系統，該玻璃支撐系統由該玻璃輸送系統以一玻璃饋送方向移動。該玻璃支撐系統可配置為支撐具有不大於約0.7 mm之一厚度的一玻璃基板。該玻璃基板包括一大致平坦的表面及正交於該大致平坦的表面的一平面外方向。該玻璃饋送方向正交於該平面外方向。該玻璃支撐系統可包括一真空構件（例如一真空夾），該真空構件配置為縱向地以該玻璃饋送方向及沿該玻璃基板的一邊緣延伸。該真空構件可包括一真空主體，該真空主體包括一壓力腔室及一支撐面，該壓力腔室位於該真空主體中，該支撐面具有複數個真空開口，該複數個真空構件延伸通過該支撐面且與該壓力腔室連通。亦可提供一種磨輪組件，該磨輪組件配置為在該玻璃基板藉由該玻璃輸送系統由該磨輪組件以該玻璃饋送方向移動時，斜切該玻璃基板的該邊緣。一種邊緣引導組件可位於該磨輪組件及該真空構件之間，且可包括一上邊緣引導構件及一下邊緣引導構件，該下邊緣引導構件隔離自該上邊緣引導構件以提供一路徑，該玻璃基板可前行通過該路徑。In accordance with yet another embodiment, a glass edge processing apparatus includes a glass delivery system and a glass support system that is moved by the glass delivery system in a glass feed direction. The glass support system can be configured to support a glass substrate having a thickness of no greater than about 0.7 mm. The glass substrate includes a substantially planar surface and an out-of-plane direction orthogonal to the substantially planar surface. The glass feed direction is orthogonal to the out-of-plane direction. The glass support system can include a vacuum member (e.g., a vacuum clamp) configured to extend longitudinally in the glass feed direction and along an edge of the glass substrate. The vacuum member may include a vacuum body including a pressure chamber and a support surface, the pressure chamber being located in the vacuum body, the support surface having a plurality of vacuum openings through which the plurality of vacuum members extend And communicating with the pressure chamber. A grinding wheel assembly can also be provided that is configured to chamfer the edge of the glass substrate as the glass substrate is moved by the glass transport system in the glass feed direction. An edge guiding assembly can be located between the grinding wheel assembly and the vacuum member and can include an upper edge guiding member and a lower edge guiding member, the lower edge guiding member is isolated from the upper edge guiding member to provide a path, the glass substrate You can go through this path.

本文中所述的額外特徵及優點將闡述於隨後的詳細說明中，且本領域中具技藝者將從該說明容易理解部分的該等特徵及優點，或藉由實行本文中所述之實施例辨識該等特徵及優點，該等實施例包括了隨後的詳細說明、請求項以及隨附的繪圖。The additional features and advantages of the invention will be set forth in the Detailed Description, which will be <RTIgt; These features and advantages are identified, and such embodiments include the following detailed description, claims, and accompanying drawings.

要了解的是，上述的一般說明及以下的詳細說明兩者描述各種實施例，且係欲提供概觀或架構以供了解所請標的的本質及特質。隨附的繪圖被包括來提供各種實施例的進一步了解，且被併入此說明書且建構此說明書的一部分。該等繪圖繪示本文中所述的各種實施例，且與說明書一起用以解釋所請標的的原理及操作。It is to be understood that the foregoing general description and the following detailed description The accompanying drawings are included to provide a further understanding of the various embodiments and are incorporated in this specification. The drawings depict various embodiments described herein, and together with the description, are used to explain the principles and operation of the claimed.

雖然玻璃是先天強力的材料，其強度及機械可靠性為其表面缺陷或瑕疵尺寸密度分佈及將材料隨時間累積暴露於應力的函數。邊緣強度可為玻璃基板之機械可靠性的重要因素。在整個產品生命週期期間，玻璃基板可能經受各種種類的靜態及動態的機械應力。本文中所述的實施例大致關於用於加工玻璃基板的方法及裝置，其中邊緣加工裝置用以有效地加工玻璃基板且改良玻璃基板的邊緣強度及機械可靠性。Although glass is a congenitally strong material, its strength and mechanical reliability are a function of surface defects or 瑕疵 size density distribution and cumulative exposure of the material over time to stress. Edge strength can be an important factor in the mechanical reliability of a glass substrate. The glass substrate may be subjected to various kinds of static and dynamic mechanical stress throughout the product life cycle. The embodiments described herein relate generally to methods and apparatus for processing glass substrates in which edge processing apparatus is used to efficiently process glass substrates and to improve edge strength and mechanical reliability of the glass substrates.

從玻璃條帶或從更大的玻璃基板裁切的玻璃基板傾向於具有在裁切操作期間所形成的尖銳邊緣。玻璃基板的尖銳邊緣在處置期間容易受到損傷。邊緣瑕玼（例如碎屑、破裂等等）可能減少玻璃的強度。玻璃基板的邊緣可經處理以藉由輪磨及調整形狀（例如斜切）以消除容易損傷的尖銳邊緣，來移除尖銳邊緣。藉由從玻璃基板移除尖銳邊緣，玻璃基板中的瑕玼可被最小化，藉此減少在處置期間對於玻璃板之損傷的可能性。Glass substrates cut from glass strips or from larger glass substrates tend to have sharp edges that are formed during the cutting operation. The sharp edges of the glass substrate are susceptible to damage during handling. Edge defects (such as debris, cracks, etc.) may reduce the strength of the glass. The edges of the glass substrate can be treated to remove sharp edges by wheel grinding and adjusting the shape (e.g., beveling) to eliminate sharp edges that are susceptible to damage. By removing sharp edges from the glass substrate, defects in the glass substrate can be minimized, thereby reducing the likelihood of damage to the glass sheet during disposal.

各種磨輪可用以輪磨及塑形玻璃基板的邊緣，包括使用「杯形」輪及「形成的」輪。杯形輪在形狀上大致為圓形，且包括從杯形輪周圍隔開的凹入的中心區域。係使杯形輪與玻璃基板接觸，其中杯形輪的平坦面接觸玻璃基板，同時杯形輪的周圍面從玻璃基板隔開。成形輪（formed wheel）包括定位於成形輪之周圍面之邊緣中的溝槽。溝槽包括相對應於基板邊緣之經處理形狀的輪廓。係使成形輪的溝槽與玻璃基板的邊緣接觸，以輪磨及塑形該等邊緣。Various grinding wheels can be used to wheel and shape the edges of the glass substrate, including the use of "cup" wheels and "formed" wheels. The cup wheel is generally circular in shape and includes a concave central region spaced from around the cup wheel. The cup wheel is brought into contact with the glass substrate, wherein the flat surface of the cup wheel contacts the glass substrate while the peripheral surface of the cup wheel is spaced from the glass substrate. The forged wheel includes a groove positioned in the edge of the peripheral face of the forming wheel. The trench includes a contour that corresponds to the processed shape of the edge of the substrate. The grooves of the forming wheel are brought into contact with the edges of the glass substrate to grind and shape the edges.

參照圖1（繪示示例性基板邊緣12），用語「第一表面」及其其他變化在本文中用以表示玻璃基板10之第一的、相對扁平的區域。第一表面由圖1中的14所標示。類似地，用語「第二表面」及其其他變化在本文中用以表示基板10之第二的、相對扁平的表面區域，該表面區域實質平行於第一表面14。第二表面由圖1中的16所標示。Referring to Figure 1 (illustrating an exemplary substrate edge 12), the term "first surface" and other variations thereof are used herein to refer to the first, relatively flat region of the glass substrate 10. The first surface is indicated by 14 in Figure 1. Similarly, the term "second surface" and other variations thereof are used herein to mean a second, relatively flat surface area of the substrate 10 that is substantially parallel to the first surface 14. The second surface is indicated by 16 in Figure 1.

用語「第一斜面」、「第一斜面區段」及其其他變化在本文中用以表示基板邊緣的第一部分，其位於第一表面14及基板邊緣12的頂點18之間。第一斜面由圖1中的20所標示。類似地，用語「第二斜面」及「第二斜面區段」及其其他變化在本文中用以表示基板邊緣的第二部分，其位於第二表面16及頂點18之間。第二斜面由圖1中的22所標示。在某些實施例中，第一及第二斜面20及22可為彎曲的，如圖1中所示；然而，第一及第二斜面在其他非限制性的實施例中可為相對平面的。The terms "first bevel", "first bevel segment" and other variations are used herein to refer to a first portion of the edge of the substrate between the first surface 14 and the apex 18 of the substrate edge 12. The first bevel is indicated by 20 in Figure 1. Similarly, the terms "second bevel" and "second bevel segment" and other variations are used herein to refer to a second portion of the edge of the substrate that lies between the second surface 16 and the apex 18. The second bevel is indicated by 22 in Figure 1. In some embodiments, the first and second ramps 20 and 22 can be curved, as shown in FIG. 1; however, the first and second ramps can be relatively planar in other non-limiting embodiments. .

用語「頂點」及其其他變化在本文中用以表示基板邊緣12的末端區域，第一及第二斜面20及22收斂於該末端區域處。注意的是，圖1將頂點18描繪為具有給定長度的扁平區域；然而，頂點18亦可為第一及第二斜面相會的有限點，使得基板12邊緣從表面14到表面16為實質連續的曲線。The term "vertex" and other variations thereof are used herein to refer to the end regions of the substrate edge 12 to which the first and second slopes 20 and 22 converge. Note that Figure 1 depicts apex 18 as a flat region of a given length; however, apex 18 may also be a finite point at which the first and second bevels meet such that the edge of substrate 12 is substantially from surface 14 to surface 16. Continuous curve.

用語「第一斜面-表面介面」及其其他變化在本文中用以表示第一斜面區段相會相對扁平的第一表面14的區域。第一斜面-表面介面由圖1中的26所標示。類似地，用語「第二斜面-表面介面」及其其他變化在本文中用以表示第二斜面區段相會相對扁平的第二表面16的區域。第二斜面-表面介面由圖1中的28所標示。The term "first bevel-surface interface" and other variations thereof are used herein to refer to the region of the first bevel segment that faces the relatively flat first surface 14. The first bevel-surface interface is indicated by 26 in Figure 1. Similarly, the term "second bevel-surface interface" and other variations thereof are used herein to refer to the region of the second beveled portion that faces the relatively flat second surface 16. The second bevel-surface interface is indicated by 28 in Figure 1.

玻璃基板10可為具有約0.3 mm或更少之厚度30的可撓玻璃基板，包括（但不限於）例如從約0.01至約0.200 mm之範圍中的厚度，例如在從約0.05 mm至約0.1 mm、從約0.1至約0.15 mm、從約0.15至約0.3 mm、從約0.100至約0.200 mm的範圍中，包括其間的所有範圍及子範圍。示例性厚度可包括0.3、0.275、0.25、0.225、0.2、0.19、0.18、0.17、0.16、0.15、0.14、0.13、0.12、0.11、0.10、0.09、0.08、0.07、0.06、0.05、0.04、0.03、0.02或0.01 mm。在某些實施例中，玻璃基板10可具有等於或小於約0.7 mm的厚度30。玻璃基板10可以玻璃、玻璃陶瓷、或其合成物形成。形成高品質玻璃基板的熔融處理（例如下拉製處理）可用於各種裝置中，且一個這樣的應用是平板顯示器。熔融處理中所產生的玻璃基板具有表面，該等表面在相較於由其他方法所產生的玻璃基板時具有優越的扁平度及平滑度。熔融處理係描述於序號第3,338,696及3,682,609號的美國專利。其他合適的玻璃基板形成方法包括浮製處理、上拉製及槽拉方法。The glass substrate 10 can be a flexible glass substrate having a thickness 30 of about 0.3 mm or less, including but not limited to, for example, a thickness ranging from about 0.01 to about 0.200 mm, such as from about 0.05 mm to about 0.1. Mm, from about 0.1 to about 0.15 mm, from about 0.15 to about 0.3 mm, from about 0.100 to about 0.200 mm, including all ranges and subranges therebetween. Exemplary thicknesses can include 0.3, 0.275, 0.25, 0.225, 0.2, 0.19, 0.18, 0.17, 0.16, 0.15, 0.14, 0.13, 0.12, 0.11, 0.10, 0.09, 0.08, 0.07, 0.06, 0.05, 0.04, 0.03, 0.02. Or 0.01 mm. In certain embodiments, the glass substrate 10 can have a thickness 30 that is equal to or less than about 0.7 mm. The glass substrate 10 may be formed of glass, glass ceramic, or a composite thereof. Melt processing (e.g., pull-down processing) to form a high quality glass substrate can be used in various devices, and one such application is a flat panel display. The glass substrate produced in the melt processing has a surface which has superior flatness and smoothness when compared with a glass substrate produced by other methods. The melt processing is described in U.S. Patent Nos. 3,338,696 and 3,682,609. Other suitable methods of forming glass substrates include floatation, pull-up, and groove drawing.

在不希望被理論束縛的情況下，對於相對薄的玻璃基板10（等於或小於約0.7 mm）而言，水平定向之玻璃基板10之關於第一斜面-表面介面26及第二斜面-表面介面28的對稱形狀特性可具有對於彎曲玻璃基板10期間之塑膠變形之邊緣抗性上的直接效應。第一斜面區段20及第二斜面區段22之間的邊緣不對稱性（在本文中有時稱為「邊緣斜面不對稱性」）直接相關於玻璃基板10的邊緣強度。邊緣斜面不對稱性可由基板厚度30的方向上相對於頂點18之第一及第二斜面區段20及22的各別寬度W₁ 及W₂ 所測量。在斜切處理期間將基板邊緣12徧斜出玻璃基板10的平面（垂直位移）可產生邊緣斜面不對稱性。圖2繪示針對具有約0.5 mm之厚度之玻璃基板10之基板邊緣12的徧斜及造成之邊緣斜面不對稱性之間的示例性關係。如可見的，於位置範圍R處，基板邊緣12的徧斜實質增加（如由線31所示），造成邊緣斜面不對稱性上的增加（如由線32及40所示）。Without wishing to be bound by theory, for a relatively thin glass substrate 10 (equal to or less than about 0.7 mm), the horizontally oriented glass substrate 10 is associated with a first bevel-surface interface 26 and a second bevel-surface interface. The symmetrical shape characteristic of 28 may have a direct effect on the edge resistance of the plastic deformation during bending of the glass substrate 10. The edge asymmetry between the first bevel section 20 and the second bevel section 22 (sometimes referred to herein as "edge bevel asymmetry") is directly related to the edge strength of the glass substrate 10. Edge bevel asymmetry thickness direction of the substrate 30 is measured with respect to the _two vertices of the width W 18 of the respective first and second inclined surfaces 20 and 22 of section ₁ and W may be. Skipping the edge 12 of the substrate out of the plane (vertical displacement) of the glass substrate 10 during the beveling process can produce edge bevel asymmetry. 2 illustrates an exemplary relationship between the slanting of the substrate edge 12 of the glass substrate 10 having a thickness of about 0.5 mm and the resulting asymmetry of the edge bevel. As can be seen, at the position range R, the traverse of the substrate edge 12 substantially increases (as indicated by line 31), resulting in an increase in the asymmetry of the edge bevel (as indicated by lines 32 and 40).

邊緣水平扁平度（亦即最小垂直位移）（特別是對於薄的玻璃基板10而言）可受斜切處理期間的支撐效應影響。參照圖3，適於執行斜切處理的玻璃邊緣加工裝置40包括支撐裝置42，該支撐裝置42包括玻璃輸送系統44及玻璃支撐系統46。玻璃輸送系統44可以饋送方向移動（例如平移）玻璃支撐系統46，該饋送方向可大致對準（平行）於玻璃基板50的邊緣48。可以饋送方向以玻璃輸送系統44承載或在其他情況下由玻璃輸送系統44移動玻璃支撐系統46。玻璃支撐系統46包括真空系統52，該真空系統52包括邊緣真空構件54及56（例如真空夾），該等邊緣真空構件54及56沿玻璃基板50的相反邊緣48及58延伸，且在某些實施例中實質上以饋送方向沿玻璃基板50的整個長度延伸。在某些實施例中，真空構件54及56可形成自單一的、伸長的真空構件。在其他實施例中，可使用多個真空構件，且該等真空構件例如以饋送方向並排地對準。雖然僅繪示邊緣真空構件54及56，亦可利用內側的真空構件（參照圖14）。The edge flatness (i.e., the minimum vertical displacement) (especially for a thin glass substrate 10) can be affected by the support effect during the beveling process. Referring to FIG. 3, a glass edge processing apparatus 40 adapted to perform a beveling process includes a support device 42 that includes a glass delivery system 44 and a glass support system 46. The glass delivery system 44 can feed a directionally moving (eg, translating) glass support system 46 that can be substantially aligned (parallel) to the edge 48 of the glass substrate 50. The glass support system 46 can be carried by the glass delivery system 44 or otherwise moved by the glass delivery system 44. The glass support system 46 includes a vacuum system 52 that includes edge vacuum members 54 and 56 (e.g., vacuum clamps) that extend along opposite edges 48 and 58 of the glass substrate 50, and in certain The embodiment extends substantially along the entire length of the glass substrate 50 in the feed direction. In certain embodiments, vacuum members 54 and 56 can be formed from a single, elongated vacuum member. In other embodiments, a plurality of vacuum members can be used, and the vacuum members are aligned side by side, for example, in the feed direction. Although only the edge vacuum members 54 and 56 are shown, the inner vacuum member (see FIG. 14) can be used.

圖4繪示真空構件56及玻璃基板50的細節圖。真空構件56可施用足以抑制玻璃基板50的邊緣48在斜切處理期間移動（水平及垂直）的真空吸力。如本文中所使用的，「真空吸力」指的是真空構件56之所有真空開口的累積區域乘以吸入壓力。如可見的，真空吸力可由玻璃基板50之邊緣48附近且與隔離自該邊緣48的真空構件56所施用。真空構件56的此位置形成具有懸伸距離D_OH 之玻璃基板50的懸伸區域60，該懸伸距離以垂直於邊緣48的方向（或饋送方向）測量自懸伸開始之真空構件56的外緣62至邊緣48。在某些實施例中，懸伸距離D_OH 可不小於約6 mm，例如不小於約10 mm、例如不小於約15 mm，例如不小於約20 mm。在某些實施例中，懸伸距離D_OH 可在約5 mm及約30 mm之間。4 is a detailed view of the vacuum member 56 and the glass substrate 50. The vacuum member 56 can apply a vacuum suction sufficient to inhibit the edge 48 of the glass substrate 50 from moving (horizontal and vertical) during the beveling process. As used herein, "vacuum suction" refers to the cumulative area of all vacuum openings of vacuum member 56 multiplied by the suction pressure. As can be seen, the vacuum suction can be applied by the vicinity of the edge 48 of the glass substrate 50 and with the vacuum member 56 isolated from the edge 48. This position of the vacuum member 56 forms an overhanging region 60 of the glass substrate 50 having an overhanging distance D _{OH which} is measured outside the vacuum member 56 from the overhang in a direction perpendicular to the edge 48 (or feed direction). Edge 62 to edge 48. In certain embodiments, the overhang distance D _OH can be no less than about 6 mm, such as no less than about 10 mm, such as no less than about 15 mm, such as no less than about 20 mm. In certain embodiments, the overhang distance D _OH can be between about 5 mm and about 30 mm.

如以下將描述的，真空構件56被提供為具有真空開口66的陣列64，其中陣列64的一或更多個區域可具有整齊的、規律的或均勻的真空開口66的分佈（例如列及/或行）。真空開口66之陣列64的如此佈置可在斜切或其他邊緣加工處理期間針對自由懸掛邊緣48產生相對扁平的玻璃基板50的邊緣48，這可針對水平定向的玻璃基板50（圖1）改良第一斜面-表面介面26及第二斜面-表面介面28之間的對稱性。例如，圖5繪示不同懸伸距離及壓力值處之具有0.5 mm及0.3 mm厚度之玻璃基板的邊緣扁平度。如可見的，可達成玻璃邊緣之最小化的垂直位移，例如在玻璃基板長度的至少一部分、大部分或所有部分上小於約0.1 mm。As will be described below, vacuum member 56 is provided as an array 64 having vacuum openings 66, wherein one or more regions of array 64 may have a uniform, regular or uniform distribution of vacuum openings 66 (eg, columns and / Or line). Such an arrangement of the array 64 of vacuum openings 66 can create a relatively flat edge 48 of the glass substrate 50 for the free hanging edge 48 during beveling or other edge processing, which can be improved for the horizontally oriented glass substrate 50 (Fig. 1) The symmetry between a bevel-surface interface 26 and a second bevel-surface interface 28. For example, Figure 5 illustrates the edge flatness of a glass substrate having a thickness of 0.5 mm and 0.3 mm at different overhang distances and pressure values. As can be seen, a minimized vertical displacement of the glass edge can be achieved, such as less than about 0.1 mm over at least a portion, most or all of the length of the glass substrate.

參照圖6，真空構件56被單獨繪示，且包括提供壓力腔室及真空開口66之陣列64的真空主體70，該壓力腔室位於該真空主體70中。真空開口66與通道67連通（圖8）且與位於真空主體70內的壓力腔室連通，該等通道67延伸自真空構件56的支撐面72。簡要參照圖7及8，在某些實施例中，支撐面72可由形成為層一層順應材料（例如聚矽氧、橡膠、軟塑膠等等）的順應構件74所提供，該層順應材料適於在無損傷的情況下接觸玻璃基板50及將玻璃基板支撐於其上。順應構件74可包括真空開口66的陣列64，該等真空開口66同由真空主體70所提供的開口陣列76呈現（register）以提供真空開口66及壓力腔室78之間的通道67（圖8）。在其他實施例中，真空主體可包括槽及/或開口，該等槽及/或開口不匹配支撐面72之真空開口66之陣列64，但可從壓力腔室78向該陣列64分佈負壓。由箭頭75所表示的出口可被提供為從壓力腔室78抽取空氣或其他合適的氣體。Referring to Figure 6, vacuum member 56 is depicted separately and includes a vacuum body 70 that provides an array 64 of pressure chambers and vacuum openings 66 in which the pressure chambers are located. The vacuum opening 66 is in communication with the passage 67 (Fig. 8) and is in communication with a pressure chamber located within the vacuum body 70 that extends from the support surface 72 of the vacuum member 56. Referring briefly to Figures 7 and 8, in certain embodiments, the support surface 72 can be provided by a compliant member 74 formed as a layer of compliant material (e.g., polyoxyxene, rubber, soft plastic, etc.) that is suitable for the compliant material. The glass substrate 50 is contacted and the glass substrate is supported thereon without damage. The compliant member 74 can include an array 64 of vacuum openings 66 that are registered with the array of openings 76 provided by the vacuum body 70 to provide a passage 67 between the vacuum opening 66 and the pressure chamber 78 (Fig. 8 ). In other embodiments, the vacuum body can include slots and/or openings that do not match the array 64 of vacuum openings 66 of the support surface 72, but can distribute negative pressure from the pressure chamber 78 to the array 64. . An outlet, indicated by arrow 75, can be provided to draw air or other suitable gas from pressure chamber 78.

真空構件可為單件式或多件式配置。參照圖9，例如，真空構件81可具有真空主體83，該真空主體83具有單件式的單塊配置。真空主體83可包括提供於其中的壓力腔室85及連接佈置87，該連接佈置87形成為真空主體83的一部分、分離自壓力腔室85且允許真空構件82連接至玻璃輸送系統。入口77及出口79可向壓力腔室85供應正及負壓。圖10繪示多件式配置，其中真空構件91包括由腔室收容構件95及蓋構件97所形成的真空主體93。連接佈置99可提供為用於將真空構件91連接至玻璃輸送系統。The vacuum member can be configured in a single piece or in multiple pieces. Referring to FIG. 9, for example, the vacuum member 81 may have a vacuum body 83 having a one-piece monolithic configuration. The vacuum body 83 can include a pressure chamber 85 and a connection arrangement 87 provided therein that is formed as part of the vacuum body 83, separates from the pressure chamber 85 and allows the vacuum member 82 to be coupled to the glass delivery system. The inlet 77 and the outlet 79 can supply positive and negative pressure to the pressure chamber 85. FIG. 10 illustrates a multi-piece configuration in which the vacuum member 91 includes a vacuum body 93 formed by a chamber housing member 95 and a cover member 97. A connection arrangement 99 can be provided for connecting the vacuum member 91 to the glass delivery system.

再次參照圖6，陣列64的真空開口66可位於列R₁ -R_x 及行C₁ -C_x 兩者中，藉此提供局部化的吸引點。在此示例中，特定列R中的真空開口66具有實質相同的寬度或在此示例中具有實質相同的半徑（例如不大於約5 mm，例如2 mm或更少），且相等地沿特定列R彼此隔開。在其他實施例中，真空開口中的一或更多者可具有一或更多者不同的半徑。作為一個示例，相鄰的真空開口66可相等地跨特定列R隔離約20 mm。在其他實施例中，相鄰真空開口66之間的間隔可小於20 mm，例如約15 mm或約10 mm或甚至更少，例如取決於玻璃基板尺寸、加工操作的類型等等。在圖6的實施例中，真空開口66中心對中心相等地隔開10 mm，如由S₁ 所表示。Referring again to Figure 6, vacuum opening 66 of array 64 may be located in both ₁ -C _{_x x} and row R, column C ₁ -R, thereby providing localized attraction. In this example, the vacuum openings 66 in a particular column R have substantially the same width or, in this example, substantially the same radius (eg, no greater than about 5 mm, such as 2 mm or less), and equally along a particular column. R is separated from each other. In other embodiments, one or more of the vacuum openings may have one or more different radii. As an example, adjacent vacuum openings 66 may equally be separated by about 20 mm across a particular column R. In other embodiments, the spacing between adjacent vacuum openings 66 can be less than 20 mm, such as about 15 mm or about 10 mm or even less, such as depending on the size of the glass substrate, the type of processing operation, and the like. In the embodiment of FIG. 6, the vacuum ports 66 equally spaced center to center of 10 mm, as represented by S _1.

特定行C中的真空開口66具有實質相同的半徑（例如不大於約5 mm，例如約2 mm或更少），且各相等地沿特定行C彼此隔開。在其他實施例中，真空開口中的一或更多者可具有一或更多者不同的半徑。作為一個示例，相鄰的真空開口66可相等地沿特定行C隔開約20 mm。在其他實施例中，相鄰真空開口66沿特定行C之間的間隔可小於20 mm，例如約15 mm或約10 mm或甚至更少，例如取決於玻璃基板的尺寸、加工操作的類型等等。在圖6的實施例中，真空開口66如由S₂ 所表示中心對中心相等地隔開10 mm，形成真空開口的矩形矩陣。The vacuum openings 66 in a particular row C have substantially the same radius (e.g., no greater than about 5 mm, such as about 2 mm or less), and are equally spaced apart from each other along a particular row C. In other embodiments, one or more of the vacuum openings may have one or more different radii. As an example, adjacent vacuum openings 66 may equally be spaced about 20 mm along a particular row C. In other embodiments, the spacing between adjacent vacuum openings 66 along a particular row C may be less than 20 mm, such as about 15 mm or about 10 mm or even less, such as depending on the size of the glass substrate, the type of processing operation, and the like. Wait. In the embodiment of FIG. 6, vacuum opening 66 as indicated by the S ₂ equally spaced center to center of 10 mm, an opening of a vacuum forming a rectangular matrix.

可使用任何形成局部化吸引點的合適真空開口陣列。在某些實施例中，可提供每100 cm² 具有約25個真空開口至約200個真空開口的陣列，該等真空開口具有不大於約10 mm（例如4 mm或更少）的寬度（或直徑）。在圖6的實施例中，陣列64每100 cm² 具有約100個真空開口66。Any suitable array of vacuum openings that form localized attraction points can be used. In certain embodiments, an array having from about 25 vacuum openings to about 200 vacuum openings per 100 cm ² can be provided, the vacuum openings having a width of no more than about 10 mm (eg, 4 mm or less) (or diameter). In the embodiment of Figure 6, array 64 has about 100 vacuum openings 66 per 100 cm ² .

圖11-13繪示具有用於真空開口之其他陣列配置的其他真空構件實施例。在圖11的實施例中，真空構件80包括以上針對真空構件56所述的許多特徵。在此示例性實施例中，真空構件80包括位於列R₁ -R_x 及行C₁ -C_x 兩者中之真空開口84的陣列，藉此提供局部化的吸引點。然而，在此實施例中，列間隔S₁ 大於沿行的行間隔S₂ 。圖12繪示真空構件81的另一示例性實施例，其中沿列的列間隔S₁ 大於沿行的行間隔S₂ 。圖13繪示真空構件86的另一實施例，其中沿列的列間隔S₁ 大於沿行的行間隔S₂ 。在此實施例中，列彼此徧移而形成對角行。以下的表格繪示使用0.2 mm厚之玻璃基板之50 KPa的經施加壓力下之由圖5及圖11-13所描繪之真空構件實施例的某些屬性。這些值僅為示例性的，且不意味著是限制性的。表格：真空構件實施例Figures 11-13 illustrate other vacuum member embodiments having other array configurations for vacuum openings. In the embodiment of FIG. 11, vacuum member 80 includes many of the features described above for vacuum member 56. In this exemplary embodiment, the vacuum member 80 comprises both row and R ₁ -R _x C ₁ -C _x column of the array located in the vacuum openings 84, thereby providing localized attraction. However, in this embodiment, the column spacing S _{1 is} greater than the row spacing S ₂ along the row. FIG. 12 illustrates another exemplary embodiment of a vacuum member 81 in which the column spacing S ₁ along the column is greater than the row spacing S ₂ along the row. Figure 13 illustrates another member vacuo embodiment 86, wherein the column interval along row lines S ₁ is greater than the row spacing S _2. In this embodiment, the columns are moved over each other to form a diagonal row. The following table illustrates certain properties of the vacuum member embodiment depicted by Figures 5 and 11-13 under applied pressure using a 50 mm film of a 0.2 mm thick glass substrate. These values are merely exemplary and are not meant to be limiting. Table: Vacuum Member Examples

如可從表格所見，使用有限元素分析（FEA）來決定的最大主應力可在使用期間造成小於20MPa的應力，這可減少玻璃基板邊緣附近或處之玻璃損傷的可能性。最大主應力是玻璃基板上之總張應力效應的指示。As can be seen from the table, the maximum principal stress determined using finite element analysis (FEA) can cause stresses of less than 20 MPa during use, which reduces the likelihood of glass damage near or at the edge of the glass substrate. The maximum principal stress is an indication of the total tensile stress effect on the glass substrate.

參照圖14，示例玻璃支撐系統100（例如用於圖3的加工裝置中）繪示為包括多個真空構件102、104、106及108。作為一示例，真空構件可為上述之真空構件中的任何一者或更多者。如可見的，真空構件102及108是最靠近玻璃基板114的最近邊緣110及112的最外真空構件，而真空構件104及106為離邊緣110及112最遠的最內真空構件。真空構件102、104、106及108可全具有相同的尺度（或不同尺度），且可實質上沿玻璃基板114的整個長度延伸。懸伸區域116及118可提供（如上所述）為用於玻璃加工操作。Referring to Figure 14, an exemplary glass support system 100 (e.g., for use in the processing apparatus of Figure 3) is illustrated as including a plurality of vacuum members 102, 104, 106, and 108. As an example, the vacuum member can be any one or more of the vacuum members described above. As can be seen, vacuum members 102 and 108 are the outermost vacuum members closest to the nearest edges 110 and 112 of glass substrate 114, while vacuum members 104 and 106 are the innermost vacuum members furthest from edges 110 and 112. The vacuum members 102, 104, 106, and 108 can all have the same dimensions (or different dimensions) and can extend substantially along the entire length of the glass substrate 114. Overhang regions 116 and 118 can be provided (as described above) for use in glass processing operations.

參照回圖3，一旦玻璃基板50受玻璃支撐系統46支撐，玻璃基板50及玻璃支撐系統46藉由玻璃輸送系統44向加工裝置40的邊緣輪磨系統120平移。邊緣輪磨系統120可大致包括位於玻璃基板50之相反邊緣48及58處的磨輪組件122及124。在其他實施例中，可只使用單一的磨輪組件，或可存在高達四個磨輪組件或玻璃基板50的每個邊緣48、58、126及128一個磨輪組件。Referring back to FIG. 3, once the glass substrate 50 is supported by the glass support system 46, the glass substrate 50 and the glass support system 46 are translated by the glass delivery system 44 to the edge wheel grinding system 120 of the processing device 40. The edge wheel grinding system 120 can generally include grinding wheel assemblies 122 and 124 at opposite edges 48 and 58 of the glass substrate 50. In other embodiments, only a single grinding wheel assembly may be used, or there may be up to four grinding wheel assemblies or one edge 48, 58, 126, and 128 of each of the glass substrates 50.

磨輪組件122及124可各包括磨輪127及馬達129，該磨輪127用以輪磨及塑形玻璃基板50的邊緣48及58，該馬達129用以旋轉磨輪127。在某些實施例中，磨輪組件122及124可各更包括驅動機構130，該等驅動機構130可用以朝向及遠離各別邊緣48及58而移動磨輪127。控制器135可提供為控制磨輪組件122及124、玻璃支撐系統46及玻璃輸送系統44的操作。在所繪示的實施例中，磨輪127為成形輪。然而，可使用其他磨輪。簡要參照圖15，成形輪127具有大致圓柱形的形狀，且包括一或更多個凹部132，該等凹部132具有互補於各別邊緣48、58所需之輪廓的輪廓，且充當成形輪127的磨面。在其他實施例中，磨輪127中的一或兩者可包括杯形輪對偶，該杯形輪對偶以它們的平坦面接觸玻璃基板50的邊緣。The grinding wheel assemblies 122 and 124 can each include a grinding wheel 127 and a motor 129 for grinding and shaping the edges 48 and 58 of the glass substrate 50 for rotating the grinding wheel 127. In some embodiments, the grinding wheel assemblies 122 and 124 can each further include a drive mechanism 130 that can be used to move the grinding wheel 127 toward and away from the respective edges 48 and 58. Controller 135 can be provided to control the operation of grinding wheel assemblies 122 and 124, glass support system 46, and glass delivery system 44. In the illustrated embodiment, the grinding wheel 127 is a forming wheel. However, other grinding wheels can be used. Referring briefly to Figure 15, the forming wheel 127 has a generally cylindrical shape and includes one or more recesses 132 having contours that are complementary to the desired contours of the respective edges 48, 58 and that serve as forming wheels 127 Grinding surface. In other embodiments, one or both of the grinding wheels 127 may include a cup-shaped wheel pair that contacts the edges of the glass substrate 50 with their flat faces.

再次參照圖3，在玻璃基板50受包括真空構件54及56的玻璃支撐系統46支撐的情況下，玻璃輸送系統44向磨輪組件122及124平移支援系統46及玻璃基板50，其中磨輪127接合玻璃基板50的邊緣48及58。現參照圖16，一表示性圖表繪示由真空開口的規律分佈（例如由圖6的真空構件56所展現的）所提供之減少的邊緣斜面不對稱性。如可見的，真空構件56進一步穩定邊緣48，這在第一斜面-表面介面26（由線140所表示）及第二斜面-表面介面28（由線142所表示）之間維持了相對高度的對稱性。由線144所表示，不對稱因素（FOA）繪示第一斜面-表面介面26及第二斜面-表面介面28間之對稱性上相對小的改變。FOA等於第一斜面-表面介面26及第二斜面-表面介面28及玻璃基板50之厚度之間的斜面差量（斜面寬度上的差異）。FOA越高，第一斜面-表面介面26及第二斜面-表面介面28之間的對稱性越少。Referring again to FIG. 3, in the case where the glass substrate 50 is supported by the glass support system 46 including the vacuum members 54 and 56, the glass delivery system 44 translates the support system 46 and the glass substrate 50 toward the grinding wheel assemblies 122 and 124, wherein the grinding wheel 127 engages the glass. Edges 48 and 58 of substrate 50. Referring now to Figure 16, a representative graph depicts reduced edge bevel asymmetry provided by a regular distribution of vacuum openings (e.g., as exhibited by vacuum member 56 of Figure 6). As can be seen, the vacuum member 56 further stabilizes the edge 48, which maintains a relative height between the first bevel-surface interface 26 (represented by line 140) and the second bevel-surface interface 28 (represented by line 142). symmetry. As indicated by line 144, the asymmetry factor (FOA) depicts a relatively small change in symmetry between the first bevel-surface interface 26 and the second bevel-surface interface 28. The FOA is equal to the amount of slope difference (difference in the width of the slope) between the first bevel-surface interface 26 and the second bevel-surface interface 28 and the thickness of the glass substrate 50. The higher the FOA, the less symmetry between the first bevel-surface interface 26 and the second bevel-surface interface 28.

仍參照圖16，可見的是，FOA可能傾向於在玻璃基板50的前區域150及背區域152處（亦即於角落處）增加。參照圖17，這可能是因為邊緣48及58的剛性在前導及尾端角落154、156、158及160處相對於整體懸伸邊緣48及58（圖3）而言是相對較低的（例如低到高達百分之60）。進一步地，如由圖18所繪示，抗撓剛度（D）對於小於約0.6 mm的玻璃基板厚度（於約0.25 mm處變得相對扁平）而言傾向於維持相對低的。抗撓剛度（D）是楊氏模量（E）、厚度（t）及泊松比（υ）的函數，且由以下等式所給定：除了具有轉低剛性以外，玻璃基板50之（圖3）輸入的前導角落154及156可經受冷卻流體（例如水）的直接噴射及磨輪127的突然衝擊，這可在斜切處理期間造成玻璃基板50更大的垂直位移。在某些實例中，靠近角落154、156、158及160的邊緣品質可能由於邊緣斜面不對稱性而低於所期望的品質，這可導致玻璃斷裂及破裂問題，尤其是在處置期間。Still referring to FIG. 16, it can be seen that the FOA may tend to increase at the front region 150 and the back region 152 of the glass substrate 50 (ie, at the corners). Referring to Figure 17, this may be because the stiffness of the edges 48 and 58 is relatively low at the leading and trailing corners 154, 156, 158 and 160 relative to the integral overhanging edges 48 and 58 (Figure 3) (e.g. As low as 60%). Further, as illustrated by Figure 18, the flexural rigidity (D) tends to remain relatively low for a glass substrate thickness of less than about 0.6 mm (which becomes relatively flat at about 0.25 mm). Flexural stiffness (D) is a function of Young's modulus (E), thickness (t), and Poisson's ratio (υ) and is given by the following equation: In addition to having low rigidity, the leading corners 154 and 156 of the glass substrate 50 (Fig. 3) can be subjected to direct injection of a cooling fluid (e.g., water) and a sudden impact of the grinding wheel 127, which can cause a glass substrate during the beveling process. 50 greater vertical displacement. In some instances, the edge quality near corners 154, 156, 158, and 160 may be lower than the desired quality due to edge bevel asymmetry, which can cause glass breakage and cracking problems, especially during disposal.

參照回圖3，加工裝置40可包括邊緣引導組件170，該等邊緣引導組件170於輪/玻璃介面處向玻璃邊緣48及58提供局部支撐。如可見的，邊緣引導組件170可位於或定位於真空構件54及56外面，相對於玻璃輸送系統44是靜止的，且在真空構件54及56及它們各別的磨輪127之間，以供增加玻璃邊緣48及58的垂直支撐。圖19圖示磨輪127及邊緣引導組件170的示意說明。在此實施例中，接觸及支撐玻璃基板的引導長度L小於或等於磨輪的輪直徑D。與玻璃基板50接觸之邊緣引導組件170及磨輪127之間的距離T可至少部分地基於玻璃厚度來調整，以最小化懸伸距離D_OH ，這可提供增加的邊緣穩定性。Referring back to FIG. 3, processing apparatus 40 can include edge guide assemblies 170 that provide local support to glass edges 48 and 58 at the wheel/glass interface. As can be seen, the edge guide assembly 170 can be located or positioned outside of the vacuum members 54 and 56, stationary relative to the glass delivery system 44, and between the vacuum members 54 and 56 and their respective grinding wheels 127 for additional Vertical support of the glass edges 48 and 58. FIG. 19 illustrates a schematic illustration of the grinding wheel 127 and the edge guide assembly 170. In this embodiment, the guiding length L of the contact and supporting glass substrate is less than or equal to the wheel diameter D of the grinding wheel. The distance T between the edge guide assembly 170 in contact with the glass substrate 50 and the grinding wheel 127 can be adjusted based, at least in part, on the thickness of the glass to minimize the overhang distance D _OH , which can provide increased edge stability.

參照圖20，邊緣引導組件170的示意說明包括下邊緣引導構件172及上邊緣引導構件174。下邊緣引導構件172包括引導面176，該引導面176佈置為接觸玻璃基板50的廣面178。上邊緣引導構件174亦包括面向引導面176的引導面180，該引導面180佈置為接觸玻璃基板50的廣面182。引導面176及180可為固形的，或可形成自移動元件，例如輥、帶等等，如以下將描述的。引導面176及180可形成自用於接觸及引導玻璃基板50的任何合適材料。邊緣引導組件可進一步包括一或更多個定位致動器184及186（例如氣壓缸），該等定位致動器184及186可在關閉及開啟配置（由虛線所示）之間朝向彼此及遠離彼此移動上邊緣引導構件174及下邊緣引導構件172中的一或兩者，以供在斜切處理期間定位玻璃基板50。在其他實施例中，上邊緣引導構件174及下邊緣引導構件172中的一或兩者可相對於彼此固定到位。Referring to Figure 20, a schematic illustration of the edge guide assembly 170 includes a lower edge guide member 172 and an upper edge guide member 174. The lower edge guiding member 172 includes a guiding surface 176 that is arranged to contact the wide face 178 of the glass substrate 50. The upper edge guiding member 174 also includes a guiding surface 180 that faces the guiding surface 176 that is arranged to contact the wide face 182 of the glass substrate 50. The guiding faces 176 and 180 can be solid or can be formed from a moving element, such as a roller, belt, etc., as will be described below. Guide faces 176 and 180 can be formed from any suitable material for contacting and guiding glass substrate 50. The edge guide assembly can further include one or more positioning actuators 184 and 186 (e.g., pneumatic cylinders) that can be oriented toward each other between the closed and open configurations (shown by dashed lines) and One or both of the upper edge guiding member 174 and the lower edge guiding member 172 are moved away from each other for positioning the glass substrate 50 during the beveling process. In other embodiments, one or both of the upper edge guiding member 174 and the lower edge guiding member 172 can be fixed in position relative to each other.

參照圖21及22，加工裝置200被繪示為包括磨輪組件202，該磨輪組件202包括磨輪204及支撐結構206，該支撐結構206以所繪示的升起的、水平的定向支撐磨輪204。加工裝置200可更包括邊緣引導組件208。邊緣引導組件208可包括下邊緣引導構件210及上邊緣引導構件212。下邊緣引導構件210及上邊緣引導構件212兩者包括輥205、215（205在圖21中而215在圖22中），該等輥205、215形成配置為接觸及引導玻璃基板之邊緣的動態支撐面。在圖21繪示的示例中，邊緣引導組件208圖示為處於開啟配置下，其中上邊緣引導構件212藉由致動器組件214從下邊緣引導構件210回縮。下邊緣引導構件210可被固定到位。在某些實施例中，邊緣引導組件208可至少部分地受支撐磨輪204的支撐結構206支撐。在某些實施例中，邊緣引導組件208的至少一部分包括其本身獨立於支撐結構206的支撐結構。致動器組件214可向較靠近下邊緣引導構件210的延伸位置移動上邊緣引導構件212，以如以上所討論地支撐玻璃基板的邊緣（圖22）。Referring to Figures 21 and 22, the processing apparatus 200 is illustrated as including a grinding wheel assembly 202 that includes a grinding wheel 204 and a support structure 206 that supports the grinding wheel 204 in a raised, horizontal orientation as depicted. Processing device 200 can further include edge guide assembly 208. The edge guide assembly 208 can include a lower edge guide member 210 and an upper edge guide member 212. Both the lower edge guiding member 210 and the upper edge guiding member 212 comprise rollers 205, 215 (205 in Figure 21 and 215 in Figure 22) that form a dynamic configured to contact and guide the edges of the glass substrate Support surface. In the example depicted in FIG. 21, the edge guide assembly 208 is illustrated in an open configuration wherein the upper edge guide member 212 is retracted from the lower edge guide member 210 by the actuator assembly 214. The lower edge guiding member 210 can be fixed in place. In certain embodiments, the edge guide assembly 208 can be at least partially supported by the support structure 206 that supports the grinding wheel 204. In certain embodiments, at least a portion of the edge guide assembly 208 includes a support structure that is itself independent of the support structure 206. The actuator assembly 214 can move the upper edge guiding member 212 toward an extended position closer to the lower edge guiding member 210 to support the edge of the glass substrate as discussed above (Fig. 22).

參照圖23及24，另一加工裝置220包括磨輪組件222，該磨輪組件222包括磨輪224及支撐結構226，該支撐結構226以所繪示的升起的、水平的定向支撐磨輪224。加工裝置220更包括邊緣引導組件228。邊緣引導組件228包括下邊緣引導構件230及上邊緣引導構件232。下邊緣引導構件230及上邊緣引導構件232兩者包括輥235，該等輥235形成配置為接觸及引導玻璃基板236之邊緣234的動態支撐面。在圖23及24繪示的示例中，邊緣引導組件228圖示為處於經關閉或關閉的配置下，其中下邊緣引導構件230藉由致動器組件238朝上邊緣引導構件232延伸。上邊緣引導構件232可被固定到位。Referring to Figures 23 and 24, another processing device 220 includes a grinding wheel assembly 222 that includes a grinding wheel 224 and a support structure 226 that supports the grinding wheel 224 in a raised, horizontal orientation as depicted. Processing device 220 further includes an edge guiding assembly 228. The edge guide assembly 228 includes a lower edge guide member 230 and an upper edge guide member 232. Both the lower edge guiding member 230 and the upper edge guiding member 232 include rollers 235 that form a dynamic support surface configured to contact and guide the edge 234 of the glass substrate 236. In the example illustrated in FIGS. 23 and 24, the edge guide assembly 228 is illustrated in a closed or closed configuration with the lower edge guide member 230 extending toward the upper edge guide member 232 by the actuator assembly 238. The upper edge guiding member 232 can be fixed in place.

參照圖25，另一邊緣引導組件250被繪示，且可包括下引導構件252及上引導構件254。在此實施例中，下及上引導構件252及254中的兩者包括帶組件256及258。下引導構件252的帶組件256包括帶260，該帶260具有適於接觸及引導玻璃基板的引導面262。帶260可由端輥264及266以及中間輥268所驅動及支撐，帶260前行於端輥264及266周圍，該等中間輥268可支撐端輥264及266之間的帶260的區段。上引導構件254的帶組件258包括帶269，該帶269具有適於接觸及引導玻璃基板的引導面270。在不使用中間輥的情況下，帶269由端輥272及274所驅動及支撐，帶260前行於該等端輥272及274周圍。雖然邊緣引導組件250繪示具有不同輥佈置的下及上引導構件252及254，它們可具有相同的輥佈置。Referring to Figure 25, another edge guide assembly 250 is illustrated and can include a lower guide member 252 and an upper guide member 254. In this embodiment, both of the lower and upper guiding members 252 and 254 include strap assemblies 256 and 258. The belt assembly 256 of the lower guiding member 252 includes a belt 260 having a guiding surface 262 adapted to contact and guide the glass substrate. The belt 260 can be driven and supported by end rollers 264 and 266 and intermediate rollers 268 that are advanced around end rollers 264 and 266 that can support sections of belt 260 between end rollers 264 and 266. The belt assembly 258 of the upper guiding member 254 includes a strap 269 having a guiding surface 270 adapted to contact and guide the glass substrate. Without the use of an intermediate roll, belt 269 is driven and supported by end rolls 272 and 274, and belt 260 is advanced around the end rolls 272 and 274. While the edge guide assembly 250 depicts the lower and upper guide members 252 and 254 having different roller arrangements, they may have the same roller arrangement.

參照圖26，另一邊緣引導組件280被繪示，且包括下引導構件282及上引導構件284。在此實施例中，下及上引導構件282及284中的兩者可形成為適於接觸玻璃基板之材料的固體棒286及288。下引導構件282及上引導構件284可彼此隔離，形成以饋送方向延伸且經調整尺寸以接收玻璃基板的整個厚度的溝槽290。在某些實施例中，溝槽290可包括導入部分292及導出部分294。導入部分292及導出部分294可寬於其間之溝槽290的其餘部分，以將玻璃基板引導進及出溝槽。Referring to Figure 26, another edge guide assembly 280 is illustrated and includes a lower guide member 282 and an upper guide member 284. In this embodiment, both of the lower and upper guiding members 282 and 284 can be formed as solid rods 286 and 288 adapted to contact the material of the glass substrate. The lower guiding member 282 and the upper guiding member 284 may be isolated from each other to form a groove 290 that extends in the feeding direction and is sized to receive the entire thickness of the glass substrate. In some embodiments, the groove 290 can include an introduction portion 292 and a lead portion 294. The lead-in portion 292 and the lead-out portion 294 can be wider than the remainder of the trench 290 therebetween to direct the glass substrate into and out of the trench.

參照圖27，另一邊緣引導組件300被繪示，且包括下引導構件302及上引導構件304。在此實施例中，上引導構件304形成為適於接觸玻璃基板之材料的固體棒306。下引導構件302具有由輥310所形成的動態引導面308。在其他實施例中，上及/或下引導構件可使用空氣軸承、空氣/壓力軸承或超音波非接觸式軸承來形成。Referring to Figure 27, another edge guide assembly 300 is illustrated and includes a lower guide member 302 and an upper guide member 304. In this embodiment, the upper guiding member 304 is formed as a solid rod 306 adapted to contact the material of the glass substrate. The lower guiding member 302 has a dynamic guiding surface 308 formed by a roller 310. In other embodiments, the upper and/or lower guiding members may be formed using air bearings, air/pressure bearings, or ultrasonic non-contact bearings.

圖28繪示一表示性圖表，圖示通過使用邊緣引導組件（例如如由圖27之邊緣引導組件300所展現的）所提供之減少的邊緣斜面不對稱性。如可見的，邊緣引導組件300進一步穩定邊緣，這在第一斜面-表面介面（由線312所表示）及第二斜面-表面介面（由線314所表示）之間維持了相對高度的對稱性。由線316所表示，FOA繪示第一斜面-表面介面及第二斜面-表面介面間之對稱性上相對小的改變。28 depicts an illustrative graph illustrating reduced edge bevel asymmetry provided by the use of an edge guiding assembly (eg, as exhibited by edge guiding assembly 300 of FIG. 27). As can be seen, the edge guide assembly 300 further stabilizes the edge, which maintains a relatively high degree of symmetry between the first bevel-surface interface (represented by line 312) and the second bevel-surface interface (represented by line 314). . As indicated by line 316, the FOA depicts a relatively small change in symmetry between the first bevel-surface interface and the second bevel-surface interface.

上述玻璃支撐系統及方法可提供具有規律分隔之局部化吸引點之陣列的真空構件以及可用以在斜切或其他加工處理期間減少玻璃邊緣不對稱性的邊緣引導組件中的一或兩者。可藉由減少玻璃基板的平面外徧斜及將扁平的邊緣呈現至磨輪來完成玻璃邊緣不對稱性上的減少。改良玻璃邊緣對稱性可改良玻璃邊緣強度，這可減少玻璃斷裂或破裂的可能性。The glass support systems and methods described above can provide vacuum members having an array of regularly spaced localized attraction points and one or both of the edge guide assemblies that can be used to reduce glass edge asymmetry during beveling or other processing. The reduction in glass edge asymmetry can be accomplished by reducing the out-of-plane traverse of the glass substrate and presenting the flat edges to the grinding wheel. Improved glass edge symmetry improves the edge strength of the glass, which reduces the likelihood of glass breakage or cracking.

對於本領域中具技藝者而言將是清楚的是，可在不脫離所請標的之精神及範圍的情況下對本文中所述的實施例作出各種更改及變化。因此，意欲者為，本說明書涵蓋本文中所述之各種實施例的更改及變化，若是這樣的更改及變化落於隨附請求項及它們等效物的範圍內的話。It will be apparent to those skilled in the art that various modifications and changes can be made to the embodiments described herein without departing from the spirit and scope of the invention. Therefore, it is intended that the present invention cover the modifications and variations of the various embodiments described herein, and such changes and variations are within the scope of the appended claims and their equivalents.

10‧‧‧玻璃基板
12‧‧‧基板邊緣
14‧‧‧第一表面
16‧‧‧第二表面
18‧‧‧頂點
20‧‧‧第一斜面
22‧‧‧第二斜面
26‧‧‧第一斜面-表面介面
28‧‧‧第二斜面-表面介面
30‧‧‧厚度
31‧‧‧線
32‧‧‧線
40‧‧‧玻璃邊緣加工裝置
42‧‧‧支撐裝置
44‧‧‧玻璃輸送系統
46‧‧‧玻璃支撐系統
48‧‧‧邊緣
50‧‧‧玻璃基板
52‧‧‧真空系統
54‧‧‧邊緣真空構件
56‧‧‧邊緣真空構件
58‧‧‧邊緣
60‧‧‧懸伸區域
62‧‧‧外緣
64‧‧‧陣列
66‧‧‧真空開口
70‧‧‧真空主體
72‧‧‧支撐面
74‧‧‧順應構件
75‧‧‧出口
74‧‧‧順應構件
76‧‧‧開口陣列
77‧‧‧入口
78‧‧‧壓力腔室
79‧‧‧出口
80‧‧‧真空構件
81‧‧‧真空構件
83‧‧‧真空主體
84‧‧‧真空開口
85‧‧‧壓力腔室
86‧‧‧真空構件
87‧‧‧連接佈置
91‧‧‧真空構件
93‧‧‧真空主體
95‧‧‧腔室收容構件
97‧‧‧蓋構件
99‧‧‧連接佈置
100‧‧‧玻璃支撐系統
102‧‧‧真空構件
104‧‧‧真空構件
106‧‧‧真空構件
108‧‧‧真空構件
110‧‧‧邊緣
112‧‧‧邊緣
114‧‧‧玻璃基板
116‧‧‧懸伸區域
118‧‧‧懸伸區域
120‧‧‧邊緣輪磨系統
122‧‧‧磨輪組件
124‧‧‧磨輪組件
126‧‧‧邊緣
127‧‧‧磨輪
128‧‧‧邊緣
129‧‧‧馬達
130‧‧‧驅動機構
132‧‧‧凹部
135‧‧‧控制器
140‧‧‧線
142‧‧‧線
144‧‧‧線
150‧‧‧前區域
152‧‧‧背區域
154‧‧‧角落
156‧‧‧角落
158‧‧‧角落
160‧‧‧角落
170‧‧‧邊緣引導組件
172‧‧‧下邊緣引導構件
174‧‧‧上邊緣引導構件
176‧‧‧引導面
178‧‧‧廣面
180‧‧‧引導面
182‧‧‧廣面
184‧‧‧定位致動器
186‧‧‧定位致動器
200‧‧‧加工裝置
202‧‧‧磨輪組件
204‧‧‧磨輪
205‧‧‧輥
206‧‧‧支撐結構
208‧‧‧邊緣引導組件
210‧‧‧下邊緣引導構件
212‧‧‧上邊緣引導構件
214‧‧‧致動器組件
215‧‧‧輥
220‧‧‧加工裝置
222‧‧‧磨輪組件
224‧‧‧磨輪
226‧‧‧支撐結構
228‧‧‧邊緣引導組件
230‧‧‧下邊緣引導構件
232‧‧‧上邊緣引導構件
234‧‧‧邊緣
235‧‧‧輥
236‧‧‧玻璃基板
238‧‧‧致動器組件
250‧‧‧邊緣引導組件
252‧‧‧下引導構件
254‧‧‧上引導構件
256‧‧‧帶組件
258‧‧‧帶組件
260‧‧‧帶
262‧‧‧引導面
264‧‧‧端輥
266‧‧‧端輥
268‧‧‧中間輥
269‧‧‧帶
270‧‧‧引導面
272‧‧‧端輥
274‧‧‧端輥
280‧‧‧邊緣引導組件
282‧‧‧下引導構件
284‧‧‧上引導構件
286‧‧‧固體棒
288‧‧‧固體棒
290‧‧‧溝槽
292‧‧‧導入部分
294‧‧‧導出部分
300‧‧‧邊緣引導組件
302‧‧‧下引導構件
304‧‧‧上引導構件
306‧‧‧固體棒
308‧‧‧動態引導面
310‧‧‧輥
312‧‧‧線
314‧‧‧線
316‧‧‧線
C₁‧‧‧行
C_x‧‧‧行
D‧‧‧直徑
L‧‧‧引導長度
R₁‧‧‧列
R_x‧‧‧列
S₁‧‧‧間隔
S₂‧‧‧間隔
T‧‧‧距離
W₁‧‧‧寬度
W₂‧‧‧寬度10‧‧‧ glass substrate
12‧‧‧Shelf edge
14‧‧‧ first surface
16‧‧‧ second surface
18‧‧‧ apex
20‧‧‧ first slope
22‧‧‧Second slope
26‧‧‧First bevel-surface interface
28‧‧‧Second bevel-surface interface
30‧‧‧thickness
31‧‧‧ line
32‧‧‧ line
40‧‧‧Glass edge processing device
42‧‧‧Support device
44‧‧‧Glass conveyor system
46‧‧‧glass support system
48‧‧‧ edge
50‧‧‧ glass substrate
52‧‧‧vacuum system
54‧‧‧Edge vacuum components
56‧‧‧Edge vacuum components
58‧‧‧ edge
60‧‧‧Overhanging area
62‧‧‧ outer edge
64‧‧‧Array
66‧‧‧vacuum opening
70‧‧‧vacuum body
72‧‧‧Support surface
74‧‧‧ compliant components
75‧‧‧Export
74‧‧‧ compliant components
76‧‧‧Open array
77‧‧‧ entrance
78‧‧‧pressure chamber
79‧‧‧Export
80‧‧‧vacuum components
81‧‧‧Vacuum components
83‧‧‧vacuum body
84‧‧‧vacuum opening
85‧‧‧pressure chamber
86‧‧‧Vacuum components
87‧‧‧ Connection arrangement
91‧‧‧Vacuum components
93‧‧‧Vacuum body
95‧‧‧Case containment members
97‧‧‧Cover components
99‧‧‧ Connection arrangement
100‧‧‧glass support system
102‧‧‧Vacuum components
104‧‧‧Vacuum components
106‧‧‧Vacuum components
108‧‧‧Vacuum components
110‧‧‧ edge
112‧‧‧ edge
114‧‧‧ glass substrate
116‧‧‧Overhanging area
118‧‧‧Overhanging area
120‧‧‧Edge wheel grinding system
122‧‧‧Wheel wheel assembly
124‧‧‧Wheel wheel assembly
126‧‧‧ edge
127‧‧‧ grinding wheel
128‧‧‧ edge
129‧‧‧Motor
130‧‧‧ drive mechanism
132‧‧‧ recess
135‧‧‧ Controller
140‧‧‧ line
142‧‧‧ line
144‧‧‧ line
150‧‧‧ front area
152‧‧‧ Back area
154‧‧‧ corner
156‧‧‧ corner
158‧‧‧ corner
160‧‧‧ corner
170‧‧‧Edge Guide Components
172‧‧‧Bottom edge guiding member
174‧‧‧Upper edge guiding member
176‧‧‧Guide
178‧‧‧Face
180‧‧‧ Guide surface
182‧‧‧Face
184‧‧‧ Positioning actuator
186‧‧‧ Positioning actuator
200‧‧‧Processing device
202‧‧‧Wheel wheel assembly
204‧‧‧Wheel
205‧‧‧roll
206‧‧‧Support structure
208‧‧‧Edge Guide
210‧‧‧Bottom edge guiding member
212‧‧‧Upper edge guiding member
214‧‧‧Actuator assembly
215‧‧‧ Roll
220‧‧‧Processing device
222‧‧‧Wheel wheel assembly
224‧‧‧ grinding wheel
226‧‧‧Support structure
228‧‧‧Edge Guide
230‧‧‧Bottom edge guiding member
232‧‧‧Upper edge guiding member
234‧‧‧ edge
235‧‧‧roll
236‧‧‧ glass substrate
238‧‧‧Actuator assembly
250‧‧‧Edge Guide Components
252‧‧‧ Lower guiding member
254‧‧‧Upper guiding member
256‧‧‧With components
258‧‧‧With components
260‧‧‧With
262‧‧‧Guide
264‧‧‧End roller
266‧‧‧End roller
268‧‧‧Intermediate roller
269‧‧‧带
270‧‧‧ Guide surface
272‧‧‧End roller
274‧‧‧End roller
280‧‧‧Edge Guide
282‧‧‧Lower guiding member
284‧‧‧Upper guiding member
286‧‧‧ solid rod
288‧‧‧ solid rod
290‧‧‧ trench
292‧‧‧Imported part
294‧‧‧Exporting section
300‧‧‧Edge Guide Components
302‧‧‧ Lower guiding member
304‧‧‧Upper guiding member
306‧‧‧ solid rod
308‧‧‧ Dynamic guiding surface
310‧‧‧roll
312‧‧‧ line
Line 314‧‧
Line 316‧‧
C ₁ ‧‧‧
C _x ‧‧‧
D‧‧‧diameter
L‧‧‧Guide length
R ₁ ‧‧‧
R _x ‧‧‧
S ₁ ‧‧‧ interval
S ₂ ‧‧‧ interval
T‧‧‧ distance
W ₁ ‧‧‧Width
W ₂ ‧‧‧Width

在參照隨附繪圖來閱讀以下的本揭示案詳細說明時，本揭示案的這些及其他特徵、態樣及優點被更佳地了解，在該等繪圖中：These and other features, aspects, and advantages of the present disclosure will be better understood from the following detailed description of the disclosure.

圖1繪示玻璃基板的斜切邊緣；Figure 1 shows the beveled edge of the glass substrate;

圖2繪示一圖表，圖示玻璃邊緣之平面外垂直位移及造成之邊緣斜面不對稱性之間的關係；Figure 2 is a diagram showing the relationship between the out-of-plane vertical displacement of the edge of the glass and the asymmetry of the edge bevel;

圖3為玻璃加工裝置的示意說明；Figure 3 is a schematic illustration of a glass processing apparatus;

圖4為用於圖3之加工裝置中之真空構件及玻璃基板的細節圖；Figure 4 is a detailed view of a vacuum member and a glass substrate used in the processing apparatus of Figure 3;

圖5繪示一圖表，圖示玻璃邊緣扁平度；Figure 5 is a diagram showing the flatness of the glass edge;

圖6為單獨圖示之圖4之真空構件的頂視圖；Figure 6 is a top plan view of the vacuum member of Figure 4, shown separately;

圖7繪示示例性真空構件的透視圖；Figure 7 depicts a perspective view of an exemplary vacuum member;

圖8繪示圖7之真空構件的截面圖；Figure 8 is a cross-sectional view of the vacuum member of Figure 7;

圖9繪示另一示例性真空構件的截面圖；Figure 9 depicts a cross-sectional view of another exemplary vacuum member;

圖10繪示另一示例性真空構件的截面圖；Figure 10 depicts a cross-sectional view of another exemplary vacuum member;

圖11繪示另一示例性真空構件的頂視圖；Figure 11 depicts a top view of another exemplary vacuum member;

圖12繪示又另一示例性真空構件的頂視圖；Figure 12 depicts a top view of yet another exemplary vacuum member;

圖13繪示另一示例性真空構件的頂視圖；Figure 13 depicts a top view of another exemplary vacuum member;

圖14為包括多個真空構件之玻璃支撐結構的示意說明；Figure 14 is a schematic illustration of a glass support structure comprising a plurality of vacuum members;

圖15繪示用於圖3之玻璃加工裝置中之磨輪的示意細節圖；Figure 15 is a schematic detail view of a grinding wheel used in the glass processing apparatus of Figure 3;

圖16為一圖表，繪示通過使用真空開口的規律分佈所提供之減少的邊緣斜面不對稱性；Figure 16 is a graph showing reduced edge bevel asymmetry provided by the use of a regular distribution of vacuum openings;

圖17為玻璃剛性對上沿玻璃基板之位置的圖表；Figure 17 is a graph showing the position of the glass rigid upper edge along the glass substrate;

圖18為一圖表，繪示玻璃基板的抗撓剛度對上玻璃基板的厚度；Figure 18 is a diagram showing the flexural rigidity of the glass substrate versus the thickness of the upper glass substrate;

圖19為邊緣引導組件及磨輪的示意說明；Figure 19 is a schematic illustration of the edge guiding assembly and the grinding wheel;

圖20為邊緣引導組件的示意說明；Figure 20 is a schematic illustration of an edge guiding assembly;

圖21繪示玻璃邊緣加工裝置；Figure 21 illustrates a glass edge processing apparatus;

圖22繪示圖21之玻璃邊緣加工裝置的另一視圖；Figure 22 is another view of the glass edge processing apparatus of Figure 21;

圖23繪示另一玻璃邊緣加工裝置；Figure 23 illustrates another glass edge processing apparatus;

圖24繪示圖23之玻璃邊緣加工裝置的另一視圖；Figure 24 is a view showing another view of the glass edge processing apparatus of Figure 23;

圖25為邊緣引導組件的示意說明；Figure 25 is a schematic illustration of an edge guiding assembly;

圖26為邊緣引導組件的另一說明；Figure 26 is another illustration of the edge guiding assembly;

圖27為邊緣引導組件的另一說明；及Figure 27 is another illustration of the edge guiding assembly; and

圖28繪示一表示性圖表，繪示通過使用邊緣引導組件所提供之減少的邊緣斜面不對稱性。Figure 28 depicts an illustrative graph showing reduced edge bevel asymmetry provided by the use of edge guiding assemblies.

國內寄存資訊 (請依寄存機構、日期、號碼順序註記) 無Domestic deposit information (please note according to the order of the depository, date, number)

國外寄存資訊 (請依寄存國家、機構、日期、號碼順序註記) 無Foreign deposit information (please note in the order of country, organization, date, number)

(請換頁單獨記載) 無(Please change the page separately) No

40‧‧‧玻璃邊緣加工裝置 40‧‧‧Glass edge processing device

42‧‧‧支撐裝置 42‧‧‧Support device

44‧‧‧玻璃輸送系統 44‧‧‧Glass conveyor system

46‧‧‧玻璃支撐系統 46‧‧‧glass support system

48‧‧‧邊緣 48‧‧‧ edge

50‧‧‧玻璃基板 50‧‧‧ glass substrate

52‧‧‧真空系統 52‧‧‧vacuum system

54‧‧‧邊緣真空構件 54‧‧‧Edge vacuum components

56‧‧‧邊緣真空構件 56‧‧‧Edge vacuum components

58‧‧‧邊緣 58‧‧‧ edge

120‧‧‧邊緣輪磨系統 120‧‧‧Edge wheel grinding system

122‧‧‧磨輪組件 122‧‧‧Wheel wheel assembly

124‧‧‧磨輪組件 124‧‧‧Wheel wheel assembly

126‧‧‧邊緣 126‧‧‧ edge

127‧‧‧磨輪 127‧‧‧ grinding wheel

128‧‧‧邊緣 128‧‧‧ edge

129‧‧‧馬達 129‧‧‧Motor

130‧‧‧驅動機構 130‧‧‧ drive mechanism

135‧‧‧控制器 135‧‧‧ Controller

154‧‧‧角落 154‧‧‧ corner

156‧‧‧角落 156‧‧‧ corner

158‧‧‧角落 158‧‧‧ corner

160‧‧‧角落 160‧‧‧ corner

170‧‧‧邊緣引導組件 170‧‧‧Edge Guide Components

Claims

一種玻璃支撐系統，包括：一真空構件，配置為沿一玻璃基板的一邊緣縱向地以一玻璃饋送方向延伸，該真空構件包括一真空主體，該真空主體包括一壓力腔室及一支撐面，該壓力腔室位於該真空主體中，該支撐面包括一真空開口陣列，該真空開口陣列延伸通過該支撐面且與該壓力腔室連通；及其中該真空開口陣列佈置於多個、並排的列中，且沿該多個列中的各者以該等真空開口間之實質均勻的間隔佈置。A glass support system comprising: a vacuum member configured to extend longitudinally along an edge of a glass substrate in a glass feed direction, the vacuum member comprising a vacuum body, the vacuum body comprising a pressure chamber and a support surface The pressure chamber is located in the vacuum body, the support surface includes an array of vacuum openings extending through the support surface and in communication with the pressure chamber; and wherein the array of vacuum openings is disposed in a plurality of side by side columns And along each of the plurality of columns are arranged at substantially uniform intervals between the vacuum openings.

如請求項1所述之玻璃支撐系統，其中該真空開口陣列佈置於多個、並排的行中，該多個行沿該多個行中的各者在該等真空開口之間具有實質均勻的間隔。The glass support system of claim 1, wherein the vacuum opening array is disposed in a plurality of side-by-side rows, the plurality of rows having substantially uniform between the vacuum openings along each of the plurality of rows interval.

如請求項1或請求項2所述之玻璃支撐系統，更包括一邊緣引導組件，該邊緣引導組件包括一上邊緣引導構件及一下邊緣引導構件，該下邊緣引導構件隔離自該上邊緣引導構件以提供一路徑，該玻璃基板可前行通過該路徑。The glass support system of claim 1 or claim 2, further comprising an edge guiding assembly comprising an upper edge guiding member and a lower edge guiding member, the lower edge guiding member is isolated from the upper edge guiding member To provide a path, the glass substrate can be advanced through the path.

如請求項3所述之玻璃支撐系統，其中該上邊緣引導構件及該下邊緣引導構件中的至少一者包括輥，該等輥形成配置為接觸該玻璃基板的一動態支撐面。The glass support system of claim 3, wherein at least one of the upper edge guiding member and the lower edge guiding member comprises a roller configured to contact a dynamic support surface of the glass substrate.

如請求項3所述之玻璃支撐系統，其中該上邊緣引導構件及該下邊緣引導構件中的至少一者包括配置為接觸該玻璃基板之一材料的一棒。The glass support system of claim 3, wherein at least one of the upper edge guiding member and the lower edge guiding member comprises a rod configured to contact a material of the glass substrate.

如請求項3所述之玻璃支撐系統，其中該上邊緣引導構件及該下邊緣引導構件中的至少一者包括一帶組件，該帶組件包括一帶，該帶包括配置為接觸該玻璃基板的一引導面。The glass support system of claim 3, wherein at least one of the upper edge guiding member and the lower edge guiding member comprises a belt assembly, the belt assembly comprising a belt comprising a guide configured to contact the glass substrate surface.

一種玻璃邊緣加工裝置，包括：一玻璃輸送系統；及一玻璃支撐系統，由該玻璃輸送系統以一玻璃饋送方向移動，該玻璃支撐系統配置為支撐具有不大於約0.7 mm之一厚度的一玻璃基板，該玻璃基板包括一大致平坦的表面及正交於該大致平坦的表面的一平面外方向，該玻璃支撐系統包括：一真空構件，配置為縱向地以該玻璃饋送方向且沿該玻璃基板的一邊緣延伸，該真空構件包括一真空主體及一支撐面，該真空主體包括位於其中的一壓力腔室，該支撐面包括一真空開口陣列，該真空開口陣列具有至少約每100 cm² 的支撐面區域25個開口的一開口密度，該真空開口陣列延伸通過該支撐面且與該壓力腔室連通。A glass edge processing apparatus comprising: a glass delivery system; and a glass support system moved by the glass delivery system in a glass feed direction configured to support a glass having a thickness of no greater than about 0.7 mm a substrate comprising a substantially planar surface and an out-of-plane direction orthogonal to the substantially planar surface, the glass support system comprising: a vacuum member configured to longitudinally follow the glass feed direction and along the glass substrate Extending from one edge, the vacuum member includes a vacuum body and a support surface, the vacuum body including a pressure chamber therein, the support surface including an array of vacuum openings having an array of at least about every 100 cm ² An opening density of the 25 openings of the support surface region, the array of vacuum openings extending through the support surface and in communication with the pressure chamber.

如請求項7所述之玻璃邊緣加工裝置，更包括一邊緣引導組件，該邊緣引導組件包括一上邊緣引導構件及一下邊緣引導構件，該下邊緣引導構件隔離自該上邊緣引導構件以提供一路徑，該玻璃基板可前行通過該路徑。The glass edge processing apparatus of claim 7, further comprising an edge guiding assembly including an upper edge guiding member and a lower edge guiding member, the lower edge guiding member is isolated from the upper edge guiding member to provide a Path, the glass substrate can be advanced through the path.

如請求項8所述之玻璃邊緣加工裝置，其中該上邊緣引導構件及該下邊緣引導構件中的至少一者包括輥，該等輥形成配置為接觸該玻璃基板的一動態支撐面。The glass edge processing apparatus of claim 8, wherein at least one of the upper edge guiding member and the lower edge guiding member comprises a roller configured to contact a dynamic support surface of the glass substrate.

如請求項8所述之玻璃邊緣加工裝置，其中該上邊緣引導構件及該下邊緣引導構件中的至少一者包括配置為接觸該玻璃基板之一材料的一棒。The glass edge processing apparatus of claim 8, wherein at least one of the upper edge guiding member and the lower edge guiding member comprises a rod configured to contact a material of the glass substrate.

如請求項8所述之玻璃邊緣加工裝置，其中該上邊緣引導構件及該下邊緣引導構件中的至少一者包括一帶組件，該帶組件包括一帶，該帶包括配置為接觸該玻璃基板的一引導面。The glass edge processing apparatus of claim 8, wherein at least one of the upper edge guiding member and the lower edge guiding member comprises a belt assembly, the belt assembly comprising a belt comprising a member configured to contact the glass substrate Guide surface.

一種加工一玻璃基板之一邊緣的方法，該方法包括以下步驟：將該玻璃基板支撐在一玻璃支撐系統上，該玻璃基板包括一大致平坦的表面及等於或小於約0.7 mm的厚度及正交於該大致平坦的表面的一平面外方向，該玻璃支撐系統包括：一真空構件，配置為縱向地以該玻璃饋送方向且沿該玻璃基板的一邊緣延伸，該真空構件包括一真空主體，該真空主體包括一壓力腔室及一支撐面，該壓力腔室位於該真空主體中，該支撐面包括一真空開口陣列，該真空開口陣列具有至少約每100 cm² 25個開口的一開口密度，該真空開口陣列延伸通過該支撐面且與該壓力腔室連通；通過該真空開口陣列向該大致平坦的表面施加一負壓；及使用一磨輪組件斜切該玻璃基板的該邊緣。A method of processing an edge of a glass substrate, the method comprising the steps of: supporting the glass substrate on a glass support system comprising a substantially planar surface and a thickness equal to or less than about 0.7 mm and orthogonal In an out-of-plane direction of the substantially planar surface, the glass support system includes: a vacuum member configured to extend longitudinally in the glass feed direction and along an edge of the glass substrate, the vacuum member including a vacuum body, The vacuum body includes a pressure chamber and a support surface, the pressure chamber being located in the vacuum body, the support surface comprising an array of vacuum openings having an opening density of at least about 25 openings per 100 cm ² The array of vacuum openings extends through the support surface and is in communication with the pressure chamber; a vacuum is applied to the substantially planar surface through the array of vacuum openings; and the edge of the glass substrate is beveled using a grinding wheel assembly.

如請求項12所述之方法，更包括以下步驟：使用一邊緣引導組件來支撐該玻璃基板，該邊緣引導組件包括一上邊緣引導構件及一下邊緣引導構件，該下邊緣引導構件隔離自該上邊緣引導構件以提供一路徑，該玻璃基板可前行通過該路徑。The method of claim 12, further comprising the step of supporting the glass substrate using an edge guiding assembly, the edge guiding assembly comprising an upper edge guiding member and a lower edge guiding member, the lower edge guiding member is isolated from the upper The edge guiding member provides a path through which the glass substrate can be advanced.

如請求項12或請求項13所述之方法，其中該真空開口陣列佈置於多個、並排的行中，該多個行沿該多個行中的各者在該等真空開口之間具有實質均勻的間隔。The method of claim 12 or claim 13, wherein the vacuum opening array is disposed in a plurality of side by side rows, the plurality of rows having substantial between the vacuum openings along each of the plurality of rows Even spacing.

如請求項14所述之方法，其中該真空開口陣列佈置於多個、並排的列中，該多個列沿該多個列中的各者在該等真空開口之間具有實質均勻的間隔。The method of claim 14, wherein the array of vacuum openings is disposed in a plurality of side-by-side columns having substantially uniform spacing between the vacuum openings along each of the plurality of columns.