TW201639665A - Rotary vacuum sucking mechanism - Google Patents
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Abstract
Description
本發明係與真空吸盤有關，特別是有關於一種迴轉式真空吸盤機構。 The present invention relates to vacuum chucks, and more particularly to a rotary vacuum chuck mechanism.
一般習知的加工方式，係利用夾具夾持固定住工件來進行加工；然而，有一些較為精密之加工作業，如半導體製程、研磨拋光玻璃片、基板塗佈機...等等，必須考量到整體工件表面需要有較佳之精度，通常會使用真空吸盤來吸附固定工件，真空吸盤係與桿件固定相結合，利用馬達驅動桿件轉動而帶動真空吸盤旋轉，如TWI310333、TWI443724等所揭露之真空吸盤即屬此類。 Generally, the conventional processing method uses a clamp to hold and hold the workpiece for processing; however, there are some relatively precise processing operations, such as semiconductor manufacturing, grinding and polishing glass, substrate coating machine, etc., which must be considered. It is necessary to have better precision to the surface of the whole workpiece. Usually, a vacuum chuck is used to adsorb and fix the workpiece. The vacuum chuck is combined with the rod to fix the vacuum chuck to rotate the motor, such as TWI310333 and TWI443724. Vacuum suction cups are such.
然而，在此類習知之真空吸盤技術中，馬達驅動中心桿件轉動時，較不易控制真空吸盤的轉動角度，無法對轉動角度做精密的調整；且利用桿件帶動真空吸盤轉動，在桿件與真空吸盤結合處，極易產生應力集中而產生裂痕，若係增設補強肋則又會增加真空吸盤之重量，相對地需要增加動力源之強度，存在亟待改善之缺弊。 However, in such a conventional vacuum chuck technology, when the motor drives the center rod to rotate, it is difficult to control the rotation angle of the vacuum chuck, and the rotation angle cannot be precisely adjusted; and the rod is used to drive the vacuum chuck to rotate, in the rod In combination with the vacuum chuck, stress concentration is generated and cracks are generated. If the reinforcing ribs are added, the weight of the vacuum chuck is increased, and the strength of the power source is relatively increased. There is a drawback that needs to be improved.
因此，有必要提供一種新穎且具有進步性之迴轉式真空吸盤機構，以解決上述之問題。 Therefore, it is necessary to provide a novel and progressive rotary vacuum chuck mechanism to solve the above problems.
本發明之主要目的在於提供一種迴轉式真空吸盤機構，不僅可以分別單獨控制真空吸盤升降、及使真空吸盤旋轉，更可較精密地控制真空吸盤的水平高度及轉動的角度。 The main object of the present invention is to provide a rotary vacuum chuck mechanism capable of separately controlling the vacuum chuck lifting and the vacuum chuck, and more precisely controlling the horizontal height and the angle of the vacuum chuck.
為達成上述目的，本發明提供一種迴轉式真空吸盤機構，包括一基座、一升降組件、一轉動組件及一吸引組件。該升降組件具有一第一桿件、及一與該第一桿件相結合之升降台，該第一桿件可活動地設於該基座，該升降台可相對該基座升降移動。該轉動組件可轉動地設於該升降台。該吸引組件具有至少一氣壓管路、一設於該轉動組件之真空吸盤、及一真空產生器，該真空吸盤設有至少一通口，各該氣壓管路之一端與該至少一通口連通、另一端與該真空產生器連通。 To achieve the above object, the present invention provides a rotary vacuum chuck mechanism comprising a base, a lifting assembly, a rotating assembly and a suction assembly. The lifting assembly has a first rod member and a lifting platform coupled to the first rod member. The first rod member is movably disposed on the base, and the lifting platform is movable up and down relative to the base. The rotating assembly is rotatably disposed on the lifting platform. The suction assembly has at least one air pressure pipeline, a vacuum suction cup disposed on the rotating component, and a vacuum generator, wherein the vacuum suction cup is provided with at least one opening, one end of each of the pneumatic pipelines is in communication with the at least one opening, and the other One end is in communication with the vacuum generator.
為達成上述目的，本發明另提供一種迴轉式真空吸盤機構，包括一基座、一升降組件、一轉動組件及一吸引組件。該升降組件具有一可活動地設於該基座之第一桿件、一升降台、及一可移動地設於該第一桿件且與該升降台相抵頂之抵頂組件，該升降台可相對該抵頂組件升降移動。該轉動組件可轉動地設於該升降台。該吸引組件具有至少一氣壓管路、一設於該轉動組件之真空吸盤、及一真空產生器，該真空吸盤設有至少一通口，各該氣壓管路之一端與該至少一通口連通、另一端與該真空產生器連通。 To achieve the above object, the present invention further provides a rotary vacuum chuck mechanism comprising a base, a lifting assembly, a rotating assembly and a suction assembly. The lifting assembly has a first rod movablely disposed on the base, an lifting platform, and an abutting assembly movably disposed on the first rod and abutting the lifting platform, the lifting platform It can be moved up and down with respect to the abutting assembly. The rotating assembly is rotatably disposed on the lifting platform. The suction assembly has at least one air pressure pipeline, a vacuum suction cup disposed on the rotating component, and a vacuum generator, wherein the vacuum suction cup is provided with at least one opening, one end of each of the pneumatic pipelines is in communication with the at least one opening, and the other One end is in communication with the vacuum generator.
1‧‧‧迴轉式真空吸盤機構 1‧‧‧Rotary vacuum chuck mechanism
2,2A,2B,2C‧‧‧基座 2, 2A, 2B, 2C‧‧‧ base
21‧‧‧容置空間 21‧‧‧ accommodating space
3,3A‧‧‧升降組件 3,3A‧‧‧ lifting assembly
5‧‧‧吸引組件 5‧‧‧Attraction components
51,51A‧‧‧氣壓管路 51, 51A‧‧‧ pneumatic line
52‧‧‧真空吸盤 52‧‧‧vacuum suction cup
521‧‧‧通口 521‧‧‧ mouth
31,31A,31B‧‧‧第一桿件 31, 31A, 31B‧‧‧ first member
311‧‧‧第一螺紋段 311‧‧‧First thread segment
312‧‧‧皮帶 312‧‧‧Land
32,32A,32B,32C,32D‧‧‧升降台 32,32A,32B,32C,32D‧‧‧lifting platform
321‧‧‧第二螺紋段 321‧‧‧Second thread segment
33,33A‧‧‧抵頂組件 33,33A‧‧‧Abutment component
34‧‧‧線性滑軌組件 34‧‧‧Linear rail assembly
4‧‧‧轉動組件 4‧‧‧Rotating components
41‧‧‧蝸輪組件 41‧‧‧ worm gear assembly
411‧‧‧承載平台 411‧‧‧bearing platform
4111‧‧‧第一結合部 4111‧‧‧ first joint
412‧‧‧蝸輪部 412‧‧‧ worm gear
42‧‧‧蝸桿 42‧‧‧ worm
53‧‧‧真空產生器 53‧‧‧Vacuum generator
54,54A‧‧‧第二桿件 54,54A‧‧‧second rod
541‧‧‧第二結合部 541‧‧‧Second junction
542‧‧‧開口 542‧‧‧ openings
55‧‧‧旋轉接頭 55‧‧‧Rotary joint
551‧‧‧固定部 551‧‧‧Fixed Department
552‧‧‧轉動部 552‧‧‧Rotation
5521‧‧‧通道 5521‧‧‧ channel
6‧‧‧第一驅動源 6‧‧‧First drive source
61‧‧‧第二驅動源 61‧‧‧Second drive source
7‧‧‧第一交叉滾柱軸承 7‧‧‧First crossed roller bearing
71‧‧‧第二交叉滾柱軸承 71‧‧‧Second crossed roller bearing
圖1為本發明之第一較佳實施例之立體圖。 1 is a perspective view of a first preferred embodiment of the present invention.
圖2為本發明之第一較佳實施例之內部部分示意圖。 Figure 2 is a schematic illustration of the internal portion of the first preferred embodiment of the present invention.
圖3及圖4為本發明之第一較佳實施例之局部剖面升降作動圖。 3 and 4 are partial cross-sectional elevation diagrams of the first preferred embodiment of the present invention.
圖5為本發明之第一較佳實施例之局部分解圖。 Figure 5 is a partially exploded view of the first preferred embodiment of the present invention.
圖6為圖4之俯視局部剖面圖。 Figure 6 is a top plan cross-sectional view of Figure 4.
圖7為圖3之局部剖面放大圖。 Figure 7 is an enlarged partial cross-sectional view of Figure 3.
圖8為本發明之第二較佳實施例之局部剖面放大圖。 Figure 8 is a partial cross-sectional enlarged view of a second preferred embodiment of the present invention.
圖9為本發明第三較佳實施例之局部剖面圖。 Figure 9 is a partial cross-sectional view showing a third preferred embodiment of the present invention.
圖10為本發明之第四較佳實施例之側視局部剖面圖。 Figure 10 is a side elevational cross-sectional view of a fourth preferred embodiment of the present invention.
圖11為本發明之第五較佳實施例之部分透視示意圖。 Figure 11 is a partial perspective view of a fifth preferred embodiment of the present invention.
圖12及圖13為本發明之第五較佳實施例之升降作動圖。 12 and 13 are elevation diagrams of a fifth preferred embodiment of the present invention.
圖14及圖15為本發明之第六較佳實施例之局部剖面升降作動圖。 14 and 15 are partial cross-sectional elevation diagrams of a sixth preferred embodiment of the present invention.
以下僅以實施例說明本發明可能之實施態樣，然並非用以限制本發明所欲保護之範疇，合先敘明。 The following is a description of the possible embodiments of the present invention, and is not intended to limit the scope of the invention as claimed.
請參考圖1至圖7，其顯示本發明之第一較佳實施例，本發明之迴轉式真空吸盤機構1包括一基座2、一升降組件3、一轉動組件4及一吸引組件5。 Referring to FIGS. 1 through 7, there is shown a first preferred embodiment of the present invention. The rotary vacuum chuck mechanism 1 of the present invention includes a base 2, a lifting assembly 3, a rotating assembly 4 and a suction assembly 5.
該升降組件3具有一第一桿件31、及一與該第一桿件31相結合之升降台32，該第一桿件31可活動地設於該基座2，該升降台32可相對該基座2升降移動。該轉動組件4可轉動地設於該升降台32。該吸引組件5具有至少一氣壓管路51、一設於該轉動組件4之真空吸盤52、及一真空產生器53，該真空吸盤52設有至少一通口521，各該氣壓管路51之一端與該至少一通口521連通、另一端與該真空產生器53連通。其中，該 升降組件3及該轉動組件4係同軸心地相配置，而該基座2設有一容置空間21，該升降組件3設於該容置空間21，當該迴轉式真空吸盤機構1受到非預期之撞擊時，該基座2可以有效地保護該升降組件3的完整性。可以理解的是，當工件放置在該真空吸盤52時，可依據工件厚度的不同，或是加工進度的需求不同，透過該升降台32來調整適當的水平高度(Z軸方向)，以方便進行加工作業，該轉動組件4則係使工件能以Z軸為軸心方向而轉動(θ方向)。 The lifting assembly 3 has a first rod member 31 and a lifting platform 32 coupled to the first rod member 31. The first rod member 31 is movably disposed on the base 2, and the lifting platform 32 is opposite The base 2 moves up and down. The rotating assembly 4 is rotatably disposed on the lifting platform 32. The suction assembly 5 has at least one air pressure line 51, a vacuum suction cup 52 disposed on the rotating assembly 4, and a vacuum generator 53. The vacuum suction cup 52 is provided with at least one opening 521, one end of each of the pneumatic lines 51. The at least one port 521 is in communication with the other end in communication with the vacuum generator 53. Among them, the The lifting assembly 3 and the rotating assembly 4 are disposed coaxially, and the base 2 is provided with an accommodating space 21, and the lifting assembly 3 is disposed in the accommodating space 21 when the rotary vacuum chuck mechanism 1 is unexpectedly The base 2 can effectively protect the integrity of the lifting assembly 3 upon impact. It can be understood that when the workpiece is placed on the vacuum chuck 52, the appropriate level (Z-axis direction) can be adjusted through the lifting platform 32 according to the difference in the thickness of the workpiece or the processing progress. In the machining operation, the rotating assembly 4 rotates the workpiece in the axial direction of the Z axis (theta direction).
較詳細地說，該升降組件3及該轉動組件4兩者係獨立分開運作的，該轉動組件4包括一連接該真空吸盤52之蝸輪組件41、及一與該蝸輪組件41相嚙接之蝸桿42，該蝸桿42可受一第二驅動源61驅動而帶動該蝸輪組件41轉動。更詳細地說，該蝸輪組件41包括有一連接該真空吸盤52之承載平台411、及一環設於該承載平台411之外周面的蝸輪部412，該蝸輪部412與該蝸桿42相嚙接，當該蝸輪部412轉動時會同步地帶動該承載平台411及該真空吸盤52一起旋轉，因此可以單獨控制該第二驅動源61來調整轉動的角度，且該蝸輪部412具有複數齒部，故可做較精密地角度定位，使得加工後之工件能具有較佳的加工面，若需要更加精密角度控制，只要更換具有更多齒部的另一該蝸輪部412即可。其中，該承載平台411及該蝸輪部412可以係一體成型，或是透過組合而成亦可，並不限制其結合方式。值得一提的是，於該承載平台411之下方較佳另配置有一環型之第一交叉滾柱軸承7，藉此該承載平台411能較順暢地轉動及具有較佳的轉動精度，同可承受來自各種不同方向的受力，而提升其耐用度延長使用期限。 In more detail, the lifting assembly 3 and the rotating assembly 4 are independently operated separately. The rotating assembly 4 includes a worm gear assembly 41 connected to the vacuum chuck 52, and a worm meshing with the worm gear assembly 41. 42. The worm 42 can be driven by a second driving source 61 to drive the worm gear assembly 41 to rotate. In more detail, the worm gear assembly 41 includes a carrier platform 411 connected to the vacuum chuck 52, and a worm wheel portion 412 disposed on the outer circumferential surface of the carrier platform 411. The worm wheel portion 412 is engaged with the worm 42. When the worm wheel portion 412 rotates, the bearing platform 411 and the vacuum chuck 52 rotate together, so that the second driving source 61 can be separately controlled to adjust the angle of rotation, and the worm wheel portion 412 has a plurality of teeth. The more precise angular positioning enables the machined workpiece to have a better machined surface. If more precise angle control is required, only another worm gear portion 412 having more teeth can be replaced. The bearing platform 411 and the worm wheel portion 412 may be integrally formed or combined, and the manner of bonding is not limited. It is worth mentioning that a ring-shaped first cross roller bearing 7 is preferably disposed under the carrying platform 411, whereby the bearing platform 411 can rotate smoothly and has better rotation precision. Withstands forces from a variety of different directions and increases their durability for extended life.
較佳地，該吸引組件5另設有一固接於該第一桿件31之旋轉接頭55，該旋轉接頭55包括一固定部551、及一可相對該固定部551轉動之轉動部552，該轉動部552之內部設有至少一常態地與該固定部551之內部相連通的通道5521，各該氣壓管路51之一端連通該至少一通道5521及該至少一通口521，各該氣壓管路51之另一端連通該固定部551之內部與該真空產生器53。其中，該固定部551固設於該第一桿件31，當該真空吸盤52及該承載平台411轉動時，該轉動部552可以跟著一起轉動，不僅可避免該迴轉式真空吸盤機構1之內部的電線線路纏繞打結，並且可避免該第一桿件31及該轉動組件4兩者分別同時在獨立運轉作動時，會有干涉的情況發生。 Preferably, the suction assembly 5 is further provided with a rotary joint 55 fixed to the first rod member 31. The rotary joint 55 includes a fixing portion 551 and a rotating portion 552 rotatable relative to the fixing portion 551. The inside of the rotating portion 552 is provided with at least one passage 5521 that normally communicates with the interior of the fixing portion 551. One end of each of the pneumatic conduits 51 communicates with the at least one passage 5521 and the at least one opening 521, each of the pneumatic conduits. The other end of the 51 communicates with the inside of the fixing portion 551 and the vacuum generator 53. The fixing portion 551 is fixed to the first rod member 31. When the vacuum chuck 52 and the carrying platform 411 are rotated, the rotating portion 552 can be rotated together, thereby avoiding the inside of the rotary vacuum chuck mechanism 1 The wire line is wound and knotted, and the interference between the first rod member 31 and the rotating member 4 at the same time when the independent operation is performed at the same time can be avoided.
較詳細地說，如圖3至圖7所示該吸引組件5另設有一具有該至少一氣壓管路51之第二桿件54，該第二桿件54之一端穿設過該承載平台411且連通該真空吸盤52、另端與該旋轉接頭55之轉動部552相結合，該承載平台411設有至少一第一結合部4111，該第二桿件54設有至少一軸向延伸之第二結合部541，各該第一結合部4111可升降移動地與各該第二結合部541相結合。於本實施例中，各該第一結合部4111係為一凸部，各該第二結合部541係為一溝槽，各該凸部與各該溝槽側向相抵靠且可上下移動於各該凹槽內，故該承載平台411可相對該第二桿件54上下移動，並該承載平台411及該第二桿件54可同步旋轉，於其他實施例中，亦可以係相反之配置。另外，在該第二桿件54之一端較佳徑向開設有至少一與該至少一氣壓管路51相通之開口542，可確保在升降過程中該真空吸盤52之通口521可與該真空產生器53保持連通。 In more detail, as shown in FIG. 3 to FIG. 7 , the attraction assembly 5 is further provided with a second rod 54 having the at least one pneumatic line 51 , and one end of the second rod 54 passes through the bearing platform 411 . And connecting the vacuum chuck 52 and the other end to the rotating portion 552 of the rotary joint 55. The bearing platform 411 is provided with at least one first joint portion 4111, and the second rod member 54 is provided with at least one axial extension. The second joint portion 541 is coupled to each of the second joint portions 541 so as to be movable up and down. In this embodiment, each of the first joint portions 4111 is a convex portion, and each of the second joint portions 541 is a groove, and each of the convex portions is laterally abutted with each of the grooves and can be moved up and down. In each of the grooves, the carrying platform 411 can move up and down relative to the second rod 54 , and the carrying platform 411 and the second rod 54 can rotate synchronously. In other embodiments, the opposite configuration can also be performed. . In addition, at least one opening 542 communicating with the at least one air pressure line 51 is preferably radially open at one end of the second rod member 54 to ensure that the vacuum port 52 of the vacuum chuck 52 can be connected to the vacuum during the lifting process. The generator 53 remains in communication.
值得一提的是，於本實施例中的各該氣壓管路51係由該第二桿件54開設所形成，因此各該氣壓管路51係為固定之形狀及長度。然而，亦可以如參考圖8所示之第二較佳實施例之至少一氣壓管路51A及一第二桿件54A，各該氣壓管路51A係為一氣壓軟管，因此各該氣壓管路51A可視升降距離之不同，直接更換不同長度的各該氣壓管路51A，而不需要更換整個該第二桿件54A。且視使用情況之不同，甚至可不需配置該第二桿件。 It should be noted that each of the air pressure lines 51 in the present embodiment is formed by the second rod member 54. Therefore, each of the air pressure lines 51 has a fixed shape and length. However, it is also possible to refer to at least one pneumatic line 51A and a second rod 54A of the second preferred embodiment shown in FIG. 8, each of the pneumatic lines 51A being a pneumatic hose, and thus each of the pneumatic tubes The road 51A can directly change each of the pneumatic lines 51A of different lengths by different lifting distances without replacing the entire second rod 54A. And depending on the use, the second member may not even be configured.
請再進一步參考圖1至圖7所示之本實施例中，當該第一桿件31被一第一驅動源6(如：馬達)驅動朝一方向轉動時，該升降台32會相對該基座2上升，反之，該升降台32則下降。較詳細地說，該第一桿件31係可轉動地設於該基座2，該第一桿件31設有一第一螺紋段311，該升降台32設有一與該第一螺紋段311相螺接之第二螺紋段321，該第一驅動源6係透過一皮帶312來帶動該第一桿件31轉動，配合螺接之方式而能較精準地控制該升降台32的水平高度。或是，於其他實施例中可以配置其他零組件來輔助該升降台32作動，使其在升降過程中能更為順暢，舉例來說，可以如圖9所示之第三實施例之一升降台32A及一基座2A，在該升降台32A及該基座2A之間設有一線性滑軌組件34，該線性滑軌組件34可輔助該升降台32A在上下升降(Z軸方向)移動時，能更加地順暢、快速。 Referring to the embodiment shown in FIG. 1 to FIG. 7 again, when the first rod member 31 is driven to rotate in a direction by a first driving source 6 (eg, a motor), the lifting platform 32 is opposite to the base. The seat 2 is raised, whereas the lifting platform 32 is lowered. In more detail, the first rod member 31 is rotatably disposed on the base 2, and the first rod member 31 is provided with a first thread segment 311, and the lifting platform 32 is provided with the first thread segment 311. The second threaded section 321 is screwed, and the first driving source 6 drives the first rod member 31 to rotate through a belt 312, and the level of the lifting platform 32 can be controlled more precisely by means of screwing. Alternatively, in other embodiments, other components may be configured to assist the lifting platform 32 to operate, so that it can be more smoothly during the lifting process. For example, one of the third embodiments shown in FIG. 9 can be raised and lowered. The table 32A and a base 2A are provided with a linear slide assembly 34 between the lift table 32A and the base 2A. The linear slide assembly 34 can assist the lift table 32A in moving up and down (Z-axis direction). , can be smoother and faster.
值得一提的是，升降方式也不侷限於本實施中的方式，請進一步配合參考圖10所示之第四實施例之一基座2B及一升降組件3A，該升降組件3A具有一可活動地設於該基座2B之第一桿件31A、一升降台32B、及一可移動地設於該第一桿件31A且與該升降台32B相抵頂之抵頂組件 33(如：螺母座)，該升降台32B可相對該抵頂組件33升降移動。較詳細地說，該第一桿件31A可轉動地設於該基座2B，該抵頂組件33係螺設於該第一桿件31A，當第一桿件31A轉動時，該抵頂組件33會相對該基座2B移動，同時該升降台32B的高度會隨著該抵頂組件33升降。換言之，該升降組件3A係設計斜臂式方式來驅動該升降台32B於Z軸方向升降移動。其中，該升降台32B與該抵頂組件33相抵頂之一端係為一斜向平面，能提供較穩定的支撐效果，然而，亦可以係一圓形球面，使該升降台32B與該抵頂組件33為點接觸，較能快速地升降。 It is to be noted that the lifting method is not limited to the method in the present embodiment. Please further cooperate with the base 2B and the lifting assembly 3A according to the fourth embodiment shown in FIG. 10, the lifting assembly 3A has an active a first rod member 31A disposed on the base 2B, a lifting platform 32B, and an abutting assembly movably disposed on the first rod member 31A and abutting the lifting platform 32B 33 (eg, a nut seat), the lifting platform 32B is movable up and down relative to the abutting assembly 33. In more detail, the first rod member 31A is rotatably disposed on the base 2B, and the abutting assembly 33 is screwed to the first rod member 31A. When the first rod member 31A rotates, the abutting assembly 33 will move relative to the base 2B while the height of the lift table 32B will rise and fall with the abutment assembly 33. In other words, the lifting unit 3A is designed to drive the lifting table 32B to move up and down in the Z-axis direction by designing a tilting arm type. Wherein, one end of the lifting platform 32B and the abutting assembly 33 abuts an oblique plane, which can provide a relatively stable supporting effect, however, a circular spherical surface can also be used to make the lifting platform 32B and the topping The assembly 33 is a point contact and can be lifted and lowered relatively quickly.
請進一步配合參考圖11至圖13所示之第五實施例之一基座2C、一升降台32C及一抵頂組件33A，第五實施例係以第四實施例為基礎後再做進一步之改良，其中，該升降台32C未被該基座2C所完全包覆住，並且另有至少一第二交叉滾柱軸承71被設置於該抵頂組件33A及該升降台32C之間，當該升降台32C受到該抵頂組件33A驅動而升降時，各該第二交叉滾柱軸承71可以幫助該升降台32C有較佳的移動精度、及較順暢的升降作動，而且由於各該第二交叉滾柱軸承71之內部的圓筒滾子相互交錯排列，可承受來自各種不同方向的受力，提升該升降台32C的耐用度。而可以理解的是，亦可以在該基座2C及該升降台32C設置有該第二交叉滾柱軸承71。 Please further cooperate with the base 2C, the lifting platform 32C and the abutting assembly 33A according to the fifth embodiment shown in FIG. 11 to FIG. 13, and the fifth embodiment is further based on the fourth embodiment. The improvement, wherein the lifting platform 32C is not completely covered by the base 2C, and at least one second crossed roller bearing 71 is disposed between the abutting assembly 33A and the lifting platform 32C. When the lifting table 32C is driven by the abutting assembly 33A to move up and down, each of the second crossed roller bearings 71 can help the lifting table 32C to have better movement accuracy and smoother lifting operation, and because of the second cross The cylindrical rollers inside the roller bearing 71 are staggered with each other to withstand forces from various directions, and the durability of the lifting table 32C is improved. It can be understood that the second crossed roller bearing 71 can also be disposed on the base 2C and the lifting platform 32C.
請進一步配合參考圖14及圖15所示之第六較佳實施例之一升降台32D及一第一桿件31B，該第一桿件31B亦可以設計成僅控制該升降台32D之升降，而不與該升降台32D連結，而該旋轉接頭55係固接於該升降台32D，會隨該升降台32D一起升降作動，故該真空吸盤52與該真 空產生器53的距離係固定不變，換言之，各該氣壓管路51係保持相同的長度。因此，該承載平台411與該第二桿件54可以設計成固接的配置方式。其中，該旋轉接頭55之結構已於上述中說明，在此不再贅述。可以理解的是，各該氣壓管路51亦可係為一氣壓軟管。 Referring to the lifting platform 32D and the first lever member 31B of the sixth preferred embodiment shown in FIG. 14 and FIG. 15, the first lever member 31B can also be designed to control only the lifting and lowering of the lifting platform 32D. Instead of being coupled to the lifting platform 32D, the rotary joint 55 is fixed to the lifting platform 32D, and moves up and down along with the lifting platform 32D, so the vacuum chuck 52 and the true The distance of the empty generator 53 is fixed, in other words, each of the pneumatic lines 51 is maintained at the same length. Therefore, the carrying platform 411 and the second rod 54 can be designed in a fixed manner. The structure of the rotary joint 55 has been described above, and will not be described herein. It can be understood that each of the pneumatic lines 51 can also be a pneumatic hose.
綜上，本發明迴轉式真空吸盤機構，具有調整真空吸盤水平高度的升降功能，以及旋轉放置在真空吸盤上工件之功能，升降及旋轉之功能係分別由不同的動力源驅動，故可以分別單獨控制。 In summary, the rotary vacuum chuck mechanism of the present invention has the function of adjusting the level of the vacuum chuck and the function of rotating the workpiece placed on the vacuum chuck. The functions of lifting and rotating are respectively driven by different power sources, so they can be separately control.
並且，轉動組件係透過驅動蝸桿來帶動蝸輪部轉動，藉由真空吸盤與蝸輪部同動來調整角度。此外，在蝸輪部上設有複數齒部，可以做較精密地角度調整，且可針對不同精度要求更換不同的蝸輪部。 Moreover, the rotating component drives the worm wheel to rotate by driving the worm, and the angle is adjusted by the vacuum chuck and the worm wheel portion. In addition, a plurality of teeth are provided on the worm wheel portion, which can be adjusted with a relatively precise angle, and different worm gear portions can be replaced for different precision requirements.
綜上所述，本發明之整體結構設計、實用性及效益上，確實是完全符合產業上發展所需，且所揭露之結構發明亦是具有前所未有的創新構造，所以其具有「新穎性」應無疑慮，又本發明可較之習知結構更具功效之增進，因此亦具有「進步性」，其完全符合我國專利法有關發明專利之申請要件的規定，乃依法提起專利申請，並敬請 鈞局早日審查，並給予肯定。 In summary, the overall structural design, practicability and efficiency of the present invention are indeed fully in line with the needs of industrial development, and the disclosed structural invention is also an unprecedented innovative structure, so it has "novelty" should Undoubtedly, the invention can be more effective than the conventional structure, and therefore has "progressiveness", which fully complies with the requirements of the application requirements of the invention patents of the Chinese Patent Law, and is filed according to law, and please The bureau will review it early and give it affirmation.
1‧‧‧迴轉式真空吸盤機構 1‧‧‧Rotary vacuum chuck mechanism
2‧‧‧基座 2‧‧‧Base
21‧‧‧容置空間 21‧‧‧ accommodating space
32‧‧‧升降台 32‧‧‧ Lifting table
411‧‧‧承載平台 411‧‧‧bearing platform
412‧‧‧蝸輪部 412‧‧‧ worm gear
52‧‧‧真空吸盤 52‧‧‧vacuum suction cup
6‧‧‧第一驅動源 6‧‧‧First drive source
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| TW104114729A TW201639665A (en) | 2015-05-08 | 2015-05-08 | Rotary vacuum sucking mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104114729A TW201639665A (en) | 2015-05-08 | 2015-05-08 | Rotary vacuum sucking mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201639665A true TW201639665A (en) | 2016-11-16 |
Family
ID=57850529
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| Application Number | Title | Priority Date | Filing Date |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111660223A (en) * | 2020-05-15 | 2020-09-15 | 北京点域科技有限公司 | Clamping structure of qualified product detection equipment for mechanical parts |
| CN112405387A (en) * | 2020-11-04 | 2021-02-26 | 滁州市精美家电设备股份有限公司 | Economical double-power plate rotating type clamp |
| CN113524061A (en) * | 2020-04-15 | 2021-10-22 | 盛方源科技股份有限公司 | Vacuum chuck structure capable of continuously rotating |
| CN114141685A (en) * | 2021-11-29 | 2022-03-04 | 苏州科韵激光科技有限公司 | Automatic wafer carrying platform and using method thereof |
-
2015
- 2015-05-08 TW TW104114729A patent/TW201639665A/en unknown
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113524061A (en) * | 2020-04-15 | 2021-10-22 | 盛方源科技股份有限公司 | Vacuum chuck structure capable of continuously rotating |
| CN111660223A (en) * | 2020-05-15 | 2020-09-15 | 北京点域科技有限公司 | Clamping structure of qualified product detection equipment for mechanical parts |
| CN112405387A (en) * | 2020-11-04 | 2021-02-26 | 滁州市精美家电设备股份有限公司 | Economical double-power plate rotating type clamp |
| CN114141685A (en) * | 2021-11-29 | 2022-03-04 | 苏州科韵激光科技有限公司 | Automatic wafer carrying platform and using method thereof |
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