TW201435422A - 具有一用形狀嵌合方式保持住的光學構件的對熱影響作補償的光學構造組 - Google Patents

具有一用形狀嵌合方式保持住的光學構件的對熱影響作補償的光學構造組 Download PDF

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Publication number
TW201435422A
TW201435422A TW103102206A TW103102206A TW201435422A TW 201435422 A TW201435422 A TW 201435422A TW 103102206 A TW103102206 A TW 103102206A TW 103102206 A TW103102206 A TW 103102206A TW 201435422 A TW201435422 A TW 201435422A
Authority
TW
Taiwan
Prior art keywords
ring
annular blade
optical
support
expansion coefficient
Prior art date
Application number
TW103102206A
Other languages
English (en)
Chinese (zh)
Inventor
Lutz Reichmann
Birgit Massino
Original Assignee
Jenoptik Optical Sys Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Optical Sys Gmbh filed Critical Jenoptik Optical Sys Gmbh
Publication of TW201435422A publication Critical patent/TW201435422A/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/028—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lens Barrels (AREA)
TW103102206A 2013-01-23 2014-01-22 具有一用形狀嵌合方式保持住的光學構件的對熱影響作補償的光學構造組 TW201435422A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013001460 2013-01-23
DE201310104159 DE102013104159A1 (de) 2013-01-23 2013-04-24 Thermisch kompensierte optische Baugruppe mit einem formschlüssig gehaltenen optischen Bauelement

Publications (1)

Publication Number Publication Date
TW201435422A true TW201435422A (zh) 2014-09-16

Family

ID=51064349

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103102206A TW201435422A (zh) 2013-01-23 2014-01-22 具有一用形狀嵌合方式保持住的光學構件的對熱影響作補償的光學構造組

Country Status (3)

Country Link
DE (2) DE102013104159A1 (de)
TW (1) TW201435422A (de)
WO (1) WO2014114288A1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107907963A (zh) * 2017-11-07 2018-04-13 丹阳丹耀光学有限公司 镜头专用调心机构及使用该机构的同心度调节装置
CN111919156A (zh) * 2018-03-02 2020-11-10 古奇及豪斯格公共有限公司 用于保持光学装置对准的安装环
CN112352179A (zh) * 2018-06-29 2021-02-09 3M创新有限公司 用于在热膨胀或收缩期间保持光学套管对准的设备和方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104317031B (zh) * 2014-09-28 2017-06-09 中国科学院长春光学精密机械与物理研究所 一种用于光刻投影物镜热效应矫正的轴对称镜组结构
DE102017205043A1 (de) * 2017-03-24 2018-04-12 Carl Zeiss Smt Gmbh Optisches system sowie lithographieanlage
DE102022201007A1 (de) 2022-01-31 2022-11-17 Carl Zeiss Smt Gmbh Vorrichtung zur Verbindung wenigstens einer ersten und einer zweiten Modulkomponente, Modul eines Lithografiesystems, optisches Element und Lithografiesystem

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DE1928240U (de) * 1964-10-17 1965-12-02 Rodenstock Optik G Kraeftefreie pagerungsvorrichtung optischer elemente.
DD151230A1 (de) * 1980-06-02 1981-10-08 Gerhard Meister Fassung fuer optische bauelemente
SE458072B (sv) 1987-07-03 1989-02-20 Ericsson Telefon Ab L M Anordning foer att vid varierande temperatur haalla en optisk lins i oenskat laege i en linsfattning
DE4118523A1 (de) * 1991-02-19 1992-08-20 Leica Industrieverwaltung Axialsymmetrische fuegeverbindung hoher thermischer belastbarkeit
US5523893A (en) * 1994-08-24 1996-06-04 Northrop Grumman Corporation Strain free temperature-compensated optical mounts
US6239924B1 (en) 1999-08-31 2001-05-29 Nikon Corporation Kinematic lens mounting with distributed support and radial flexure
DE10042844C1 (de) 2000-08-17 2002-04-04 Jenoptik Jena Gmbh Radial justierbare Linsenfassung
JP2005215503A (ja) * 2004-01-30 2005-08-11 Olympus Corp レンズ保持機構並びにレンズユニット
EP1577693B1 (de) * 2004-02-26 2011-07-13 Carl Zeiss SMT GmbH Objektiv mit wenigstens einem optischen Element
JP2006100315A (ja) 2004-09-28 2006-04-13 Canon Inc 保持機構、光学装置、及びデバイス製造方法
WO2007010011A2 (en) * 2005-07-19 2007-01-25 Carl Zeiss Smt Ag Optical element module
DE102006038634A1 (de) 2006-08-17 2008-02-21 Carl Zeiss Smt Ag Halteeinrichtung für ein optisches Element mit Stützkraftausgleich
DE102006060088A1 (de) 2006-12-15 2008-06-19 Carl Zeiss Sms Gmbh Optische Baugruppe und optische Komponente
JP5317624B2 (ja) * 2008-10-17 2013-10-16 キヤノン株式会社 保持装置、望遠鏡および光学装置
WO2010061604A1 (ja) * 2008-11-28 2010-06-03 住友電気工業株式会社 レンズユニット及び車載用赤外線レンズユニット

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107907963A (zh) * 2017-11-07 2018-04-13 丹阳丹耀光学有限公司 镜头专用调心机构及使用该机构的同心度调节装置
CN107907963B (zh) * 2017-11-07 2023-12-01 丹阳丹耀光学股份有限公司 镜头专用调心机构及使用该机构的同心度调节装置
CN111919156A (zh) * 2018-03-02 2020-11-10 古奇及豪斯格公共有限公司 用于保持光学装置对准的安装环
CN111919156B (zh) * 2018-03-02 2022-07-15 古奇及豪斯格公共有限公司 用于保持光学装置对准的安装环
CN112352179A (zh) * 2018-06-29 2021-02-09 3M创新有限公司 用于在热膨胀或收缩期间保持光学套管对准的设备和方法
CN112352179B (zh) * 2018-06-29 2022-06-28 3M创新有限公司 用于在热膨胀或收缩期间保持光学套管对准的设备和方法

Also Published As

Publication number Publication date
WO2014114288A1 (de) 2014-07-31
DE202013011933U1 (de) 2014-10-28
DE102013104159A1 (de) 2014-07-24

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