TW201323118A - High surface energy of ultrafine spherical metal powders, and manufacturing method and device for the same - Google Patents
High surface energy of ultrafine spherical metal powders, and manufacturing method and device for the same Download PDFInfo
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本發明係關於一種金屬粉末，尤其涉及一種具有晶格缺陷之金屬粉末。The present invention relates to a metal powder, and more particularly to a metal powder having a lattice defect.
本發明還涉及一種生產金屬粉末之生產方法和生產設備，尤其涉及一種生產具有晶格缺陷金屬粉末之生產方法和設備。The present invention also relates to a production method and production apparatus for producing metal powder, and more particularly to a production method and apparatus for producing metal powder having lattice defects.
金屬粉末係一種重要原料，其於電子工業、機械製造業、汽車工業等多個領域都有著廣泛之應用。目前生產金屬粉末之方法分為物理法和化學法。Metal powder is an important raw material, which has been widely used in many fields such as electronics industry, machinery manufacturing, and automobile industry. Current methods for producing metal powders are divided into physical methods and chemical methods.
常用物理法生產金屬粉末之方法有氣霧化法、水霧化法、離心霧化法、球磨和氣流磨粉碎法等。The methods for producing metal powder by a common physical method include a gas atomization method, a water atomization method, a centrifugal atomization method, a ball milling method, and a jet mill pulverization method.
氣霧化和水霧化分別係採用空氣、氮氣、氦氣、氬氣、水或油來擊碎熔融之金屬流體，熔融金屬流體快速冷卻而形成金屬粉末。Aerosolization and water atomization use air, nitrogen, helium, argon, water or oil to crush the molten metal fluid, respectively, and the molten metal fluid is rapidly cooled to form a metal powder.
離心霧化係將塊體材料送入等離子焰中使之以極快速度熔化，熔融金屬之液滴散射到基片上碎裂成小顆粒。Centrifugal atomization feeds the bulk material into a plasma flame to melt it at a very rapid rate, and droplets of molten metal scatter onto the substrate and break into small particles.
球磨法係將大顆粒金屬粉末與磨球介質進行長時間攪拌或混合，大顆粒金屬顆粒於磨球之衝擊及擠壓下破碎成細小顆粒。The ball milling method stirs or mixes the large particle metal powder with the grinding ball medium for a long time, and the large particle metal particles are broken into fine particles under the impact and extrusion of the grinding ball.
氣流磨係藉由高速氣流衝擊方式，使粗顆粒粉末與工作腔體內壁碰撞，或使粗顆粒粉末之間相互碰撞，而裂解成細小顆粒，氣流磨係製備脆性粉末之有效方法。The jet mill system is a high-speed airflow impact method, which causes the coarse particle powder to collide with the inner wall of the working chamber, or the coarse particle powder collides with each other to be cracked into fine particles, and the jet mill is an effective method for preparing the brittle powder.
上述方法雖然都於實際生產中得到了不同程度應用，但是该等方法各自都存在著一定缺失：Although the above methods have been applied to different degrees in actual production, there are certain defects in each of these methods:
普通水霧化可大批量生產金屬粉末，但其生產之粉末粒徑範圍較寬，顆粒尺寸較大。若生產更細小之粉末(如粒徑<30μm)則需採用高壓水霧化設備，所述設備投資大，且細粉產率較低。同時，水霧化粉末團化顆粒之比例高，形狀不規則，松裝密度和振實密度低，對注射成型產品之注射成型及燒結性均有不利影響。Ordinary water atomization can produce metal powder in large quantities, but the powder produced by it has a wide particle size range and a large particle size. If a finer powder (for example, particle size <30 μm) is produced, a high-pressure water atomizing device is required, which has a large investment and a low fine powder yield. At the same time, the proportion of the water atomized powder agglomerated particles is high, the shape is irregular, the bulk density and the tap density are low, and the injection molding and the sinterability of the injection molded product are adversely affected.
氣霧化法可生產30μm以下之金屬粉末，生產過程中需採用空氣、氬氣或氮氣進行霧化，因細粉產率較低成本高，粉末形狀雖接近球形，但由於緩冷因素其粉體之表面能低，燒結活性一般。The gas atomization method can produce metal powder of 30μm or less. It needs to be atomized by air, argon or nitrogen during the production process. The yield of fine powder is low and the cost is high. The shape of the powder is close to spherical, but the powder is slow due to slow cooling. The surface energy of the body is low and the sintering activity is general.
離心霧化法可製備小尺寸金屬粉末，但設備成本高，生產效率低，不適於大規模生產。The centrifugal atomization method can prepare small-sized metal powder, but the equipment cost is high, the production efficiency is low, and it is not suitable for mass production.
球磨法工藝簡單，設備成本低，採用所述方法製造之金屬粉末形狀不規則，甚至成片狀，粉末和粉末之間易發生團聚和焊合，且採用球磨法無法有效地生產超細金屬粉末。The ball milling method is simple in process and low in equipment cost. The metal powder produced by the method has irregular shape or even flake shape, and agglomeration and welding are prone to occur between the powder and the powder, and the ultrafine metal powder cannot be efficiently produced by the ball milling method. .
氣流磨過程中粉末表層受到之衝擊力和衝擊時間有限，致使對韌性高或延展性好之金屬材料之破碎能力有限，而無法獲得超細球型金屬粉末。During the airflow grinding process, the impact of the powder surface layer and the impact time are limited, resulting in limited fracture ability of the metal material with high toughness or ductility, and the ultrafine spherical metal powder cannot be obtained.
採用化學法生產金屬粉末之方法為液相沉澱法。液相沉澱法是將硝酸鹽、氯化物、氫氧化物或硫化物等物質溶解，而後通過處理於溶液中沉澱下來，得到粉末。但液相還原法制得之粉末易團聚，填充密度低，產量有限，無法滿足注射成型產品之要求。The method of producing a metal powder by a chemical method is a liquid phase precipitation method. The liquid phase precipitation method dissolves a substance such as nitrate, chloride, hydroxide or sulfide, and then precipitates in a solution by a treatment to obtain a powder. However, the powder obtained by the liquid phase reduction method is easy to agglomerate, has low packing density, and has limited yield, and cannot meet the requirements of injection molding products.
有鑑於此，有必要對上述生產金屬粉末之方法予以改進，以解決上述問題。In view of this, it is necessary to improve the above method for producing metal powder to solve the above problems.
本發明目的之一在於提供一種生產設備，所述生產設備能夠生產出具有高表面能同時表層具有晶格缺陷之金屬粉末，且所述生產設備投資小、生產成本低、有效粉末產率高。One of the objects of the present invention is to provide a production apparatus capable of producing a metal powder having a high surface energy and having a lattice defect on the surface layer, and the production equipment has a small investment, a low production cost, and a high effective powder yield.
本發明另一目的在於提供一種利用上述生產設備生產金屬粉末之生產方法，所述方法工藝簡單，產率高，能夠生產出具有高燒結活性之金屬粉末。Another object of the present invention is to provide a production method for producing metal powder by using the above production apparatus, which is simple in process, high in yield, and capable of producing a metal powder having high sintering activity.
本發明還提供一種由上述生產設備和生產方法生產之金屬粉末，所述金屬粉末表層具有晶格缺陷，同時表面能高，燒結活性好。The present invention also provides a metal powder produced by the above production apparatus and production method, the metal powder surface layer having lattice defects, high surface energy, and good sintering activity.
根據本發明的一種實施例，提供一種金屬粉末之生產設備，所述生產設備包括：殼體，其內形成有工作腔體；進料口，設置於所述殼體壁上，用於供生產金屬粉末之原料顆粒通過並進入工作腔體內；進風口和出風口，設置於所述殼體壁上，並與所述工作腔體氣體連通；氣流驅動裝置，其可作動地驅動所述工作腔體內氣流之流動；導流裝置，至少部分設置於所述工作腔體內，並可被驅動以帶動氣流按特定形式流動。According to an embodiment of the present invention, there is provided a metal powder production apparatus, the production apparatus comprising: a casing having a working cavity formed therein; and a feed port disposed on the casing wall for production The raw material particles of the metal powder pass through and enter the working cavity; the air inlet and the air outlet are disposed on the wall of the casing and are in gas communication with the working cavity; and the airflow driving device can actuately drive the working cavity The flow of airflow in the body; the flow guiding device is at least partially disposed within the working chamber and can be driven to drive the airflow to flow in a specific form.
於本發明的一具體實施例中，所述氣流驅動裝置包括離心風機，其與所述出風口相連接。In a specific embodiment of the invention, the airflow driving device includes a centrifugal fan that is coupled to the air outlet.
於本發明的一具體實施例中，所述導流裝置包括旋轉件和用於驅動所述旋轉件之馬達，所述旋轉件旋轉以驅動氣流按螺旋方式流動。In a specific embodiment of the invention, the flow guiding device includes a rotating member and a motor for driving the rotating member, and the rotating member rotates to drive the airflow to flow in a spiral manner.
於本發明的一具體實施例中，所述進風口位於殼體下方，所述出風口位於殼體之頂部。In an embodiment of the invention, the air inlet is located below the housing, and the air outlet is located at the top of the housing.
根據本發明的另一種實施例，提供一種採用上述生產設備製備金屬粉末之方法，所述方法包括如下步驟：提供金屬粉末之原料顆粒，並將所述原料顆粒通過進料口送入生產設備之工作腔體中；通過進風口向工作腔體內輸入氣體，並啟動氣流驅動裝置和導流裝置特定時長，以使氣體於所述工作腔體內形成螺旋氣流；所述原料顆粒隨螺旋氣流運動而與殼體內壁或相互之間產生碰撞，並於撞擊力和剪切力作用下，表層產生大量晶體缺陷，該等晶體缺陷促進了裂紋形成，從而進一步快速破碎至數個小顆粒，最終形成具有晶格缺陷之球形或者類球形金屬粉末。According to another embodiment of the present invention, there is provided a method of preparing a metal powder using the above-described production apparatus, the method comprising the steps of: providing raw material particles of a metal powder, and feeding the raw material particles into a production facility through a feed port In the working cavity; introducing gas into the working chamber through the air inlet, and starting the airflow driving device and the guiding device for a specific length of time, so that the gas forms a spiral airflow in the working cavity; the raw material particles move with the spiral airflow Collision with the inner wall of the casing or between each other, and under the action of the impact force and the shearing force, the surface layer generates a large number of crystal defects, which promote the formation of cracks, thereby further rapidly breaking up to several small particles, and finally forming A spherical or spheroidal metal powder with lattice defects.
於本發明的一具體實施例中，所述氣體選自空氣、惰性氣體或者氮氣。In a specific embodiment of the invention, the gas is selected from the group consisting of air, inert gas or nitrogen.
於本發明的一具體實施例中，所述特定時長範圍為：1~30min；優選為：5~15min。In a specific embodiment of the present invention, the specific duration ranges from 1 to 30 min; preferably from 5 to 15 min.
根據本發明的再一種實施例，提供一種金屬粉末，所述金屬粉末形貌為球形或者類球形，其顆粒表面具有塑性變形，包含晶格缺陷，並具有高表面能。According to still another embodiment of the present invention, there is provided a metal powder having a spherical or spheroidal shape, a particle surface having plastic deformation, including lattice defects, and having a high surface energy.
於本發明的一具體實施例中，所述金屬粉末之松裝密度範圍為：3.5~5.5g/cm3；振實密度範圍為：4.0~5.8 g/cm3。In a specific embodiment of the invention, the loose density of the metal powder ranges from 3.5 to 5.5 g/cm 3 ; and the tap density ranges from 4.0 to 5.8 g/cm 3 .
於本發明的一具體實施例中，所述金屬粉末顆粒之平均粒徑範圍為：0.1~500μm；優選為：20~30μm。In a specific embodiment of the present invention, the metal powder particles have an average particle diameter ranging from 0.1 to 500 μm; preferably from 20 to 30 μm.
藉由本發明可令人驚訝地發現：It is surprisingly found by the present invention that:
金屬粉末顆粒表面產生塑性變形，進而導致其表面有大量之晶格缺陷(如位錯)，為原子之擴散遷移提供了通道，使其易燒結。同時所述金屬粉末具有高表面能。The surface of the metal powder particles is plastically deformed, which leads to a large number of lattice defects (such as dislocations) on the surface, which provides a channel for the diffusion and migration of the atoms, making them easy to sinter. At the same time, the metal powder has a high surface energy.
本發明之金屬粉末為球形或接近於球形，內部密實，具有高松裝密度和振實密度。金屬粉末之間具有很好之分散性，它們之間不發生團聚和粘連。The metal powder of the present invention is spherical or nearly spherical, dense inside, and has a high bulk density and tap density. The metal powders have good dispersibility between them, and no agglomeration and adhesion occur between them.
具有以上特性之金屬粉末可被用於習知粉末冶金零件、注射成型零件、電容、導電導熱膠及電磁遮罩材料。Metal powders having the above characteristics can be used in conventional powder metallurgy parts, injection molded parts, capacitors, conductive heat conductive glues, and electromagnetic mask materials.
對於易發生氧化之金屬粉末，本發明之生產方法可利用惰性氣體進行保護。For the metal powder which is susceptible to oxidation, the production method of the present invention can be protected by an inert gas.
同時，所述生產方法工藝簡單，產率高。採用此種方法可對脆性及延展性佳之金屬粉末進行破碎，可將其破碎至5μm以下，細粉產率高。At the same time, the production method has a simple process and a high yield. This method can be used to crush the metal powder with good brittleness and ductility, and it can be crushed to below 5 μm, and the fine powder yield is high.
本發明方法所用之生產設備投資小，生產成本低，有效粉末產率高。The production equipment used in the method of the invention has small investment, low production cost and high effective powder yield.
現對本發明如何實施進行舉例說明，該等舉例說明係採用有限之實施例來說明本發明如何實施並不能作為對本發明權利要求範圍之限制。The invention is described by way of example only, and is not intended to limit the scope of the invention.
如第一圖所示，為本發明之生產設備實施例示意圖，該生產設備100用於生產具有晶格缺陷之金屬粉末，其包括：殼體110、工作腔體120、進料口114、進風口113、出風口111、氣流驅動裝置130、導流裝置140。As shown in the first figure, a schematic view of an embodiment of a production apparatus of the present invention for producing a metal powder having a lattice defect, comprising: a housing 110, a working chamber 120, a feed port 114, and a feed The tuyere 113, the air outlet 111, the airflow driving device 130, and the flow guiding device 140.
殼體110，其形成生產設備100之外壁，其內形成有工作腔體120，用於生產金屬粉末之原料於該工作腔體120內被進一步破碎成表層具有晶格缺陷之細小顆粒。The housing 110, which forms an outer wall of the production apparatus 100, has a working cavity 120 formed therein, and the raw material for producing metal powder is further broken into the fine particles of the surface layer having lattice defects in the working cavity 120.
進料口114，位於所述殼體110之下部，用於生產金屬粉末之原料，實踐中一般為經過初步粉碎之粗顆粒，從進料口114處進入工作腔體120內，進料口之數量可以根據需要設計成一個或者多個，本實施例中為一個。The feed port 114 is located at the lower part of the casing 110 and is used for producing the raw material of the metal powder. In practice, it is generally coarsely pulverized by the preliminary pulverization, and enters the working cavity 120 from the inlet port 114, and the feed port The number can be designed as one or more as needed, and is one in this embodiment.
進風口113,位於殼體110之下部，並與工作腔體120氣體連通，用於形成高速旋風之氣體從進風口113處進入工作腔體120內部，進風口113之數量為一個或者多個，本實施例中為兩個。The air inlet 113 is located at a lower portion of the casing 110 and is in gas communication with the working cavity 120. The gas for forming a high-speed cyclone enters the interior of the working cavity 120 from the air inlet 113, and the number of the air inlets 113 is one or more. There are two in this embodiment.
進風口113和進料口114被設計於殼體110之下部，保證了粗顆粒於工作腔體120之底部進入，經過較長時間才能到達工作腔體120之頂部，藉此，粗顆粒之停留時間較長，得到充分粉碎。The air inlet 113 and the feed port 114 are designed on the lower part of the housing 110 to ensure that the coarse particles enter at the bottom of the working cavity 120, and it takes a long time to reach the top of the working cavity 120, thereby stopping the coarse particles. It takes a long time and is fully shattered.
出風口111，位於所述殼體110之頂部，並與工作腔體120氣體連通，用於排出工作腔體120內氣體，出風口111之數量為一個或者多個，本實施例中出風口111為一個。The air outlet 111 is located at the top of the housing 110 and is in gas communication with the working cavity 120 for discharging the gas in the working cavity 120. The number of the air outlets 111 is one or more. In this embodiment, the air outlet 111 is provided. For one.
氣流驅動裝置130，可作動地驅動所述工作腔體120內氣流之流動，其包括離心風機131，該離心風機131與上述出風口111通過管道相連接。The airflow driving device 130 operatively drives the flow of the airflow in the working cavity 120, and includes a centrifugal fan 131. The centrifugal fan 131 is connected to the air outlet 111 through a pipeline.
本實施例中，導流裝置140位於工作腔體120之底部，並可被驅動以帶動氣流按特定形式流動。其包括：旋轉件141和用於驅動所述旋轉件141之馬達142，本實施例中，旋轉件為上述旋轉件141旋轉以驅動氣流按螺旋方式流動。In this embodiment, the flow guiding device 140 is located at the bottom of the working chamber 120 and can be driven to drive the airflow to flow in a specific form. It includes a rotating member 141 and a motor 142 for driving the rotating member 141. In this embodiment, the rotating member rotates the rotating member 141 to drive the airflow to flow in a spiral manner.
下面針對本發明之生產方法結合具體實施例進行詳細說明，本生產方法實施例係利用上一實施例之生產設備實現。The production method of the present invention will be described in detail below in conjunction with specific embodiments, and the production method embodiment is realized by the production apparatus of the previous embodiment.
本發明之生產方法能夠生產表層具有晶格缺陷之金屬粉末，該生產方法包括如下步驟：提供用於生產金屬粉末之原料顆粒，本實施例中為經過初步粉碎之粗顆粒，將所述粗顆粒送入生產設備工作腔體中；通過進風口向工作腔體中輸入氣體，啟動所述生產設備之氣流驅動裝置和導流裝置特定時長，特定時長範圍為：1~30min，較佳者為5~15 min。於所述生產設備內部形成高速旋風；進入生產設備之粗顆粒於高速旋風作用下，於生產設備中作旋轉運動，形成螺旋運動軌跡。同時，粗顆粒之間、粗顆粒與生產設備殼體之內壁產生無數次長時間強烈碰撞。粗顆粒於強烈撞擊力和剪切力作用下，粗顆粒表層產生嚴重塑性變形，同時其產生大量晶體缺陷，該等晶體缺陷促進了裂紋之形成並使粗顆粒塑性降低，從而進一步快速破碎至數個小顆粒，該小顆粒於不斷變形、包覆、破碎之循環下，逐漸形成細小、球形及具有高表面能和晶格缺陷之超細球形及/或類球形金屬粉末。生產設備中形成高速旋風之氣體通過該出風口而排出。The production method of the present invention is capable of producing a metal powder having a lattice defect in a surface layer, the production method comprising the steps of: providing a raw material particle for producing a metal powder, in this embodiment, a coarsely pulverized coarse particle, the coarse particle It is sent into the working chamber of the production equipment; the gas is input into the working chamber through the air inlet, and the airflow driving device and the flow guiding device of the production device are activated for a specific length of time, and the specific length ranges from 1 to 30 minutes, preferably It is 5~15 min. A high-speed cyclone is formed inside the production equipment; the coarse particles entering the production equipment are rotated by the high-speed cyclone, and are rotated in the production equipment to form a spiral motion track. At the same time, between the coarse particles and the coarse particles and the inner wall of the casing of the production equipment, there are numerous strong collisions for a long time. Under the action of strong impact force and shearing force, the coarse particles produce severe plastic deformation, and at the same time, they produce a large number of crystal defects, which promote the formation of cracks and reduce the plasticity of the coarse particles, thereby further rapidly breaking up to several Small particles, which gradually form fine, spherical and ultra-fine spherical and/or spheroidal metal powder with high surface energy and lattice defects under the cycle of continuous deformation, coating and crushing. A gas that forms a high-speed cyclone in the production equipment is discharged through the air outlet.
對於易氧化之金屬粉末，則可採用空氣、惰性氣體或者不活潑氣體如氮氣來製造旋風，以避免金屬粉末氧化。For easily oxidized metal powders, cyclones can be produced using air, an inert gas or an inert gas such as nitrogen to avoid oxidation of the metal powder.
於本發明之金屬粉末顆粒表面形貌為球形或者類球形，同時表面具有塑性變形，包含晶格缺陷，並具有高表面能。The surface morphology of the metal powder particles of the present invention is spherical or spheroidal, while the surface has plastic deformation, contains lattice defects, and has high surface energy.
金屬粉末可以選自銅、銀、鎳、鋁、錫、鐵或者銅與鎳、鋅、錫、鐵、磷中之一種或多種組成之合金。The metal powder may be selected from the group consisting of copper, silver, nickel, aluminum, tin, iron or an alloy of copper and one or more of nickel, zinc, tin, iron, and phosphorus.
該金屬粉末之松裝密度範圍為：3.5~5.5g/cm3；振實密度範圍為：4.0~5.8 g/cm3。The loose density of the metal powder ranges from 3.5 to 5.5 g/cm 3 ; and the tap density ranges from 4.0 to 5.8 g/cm 3 .
松裝密度係指於規定條件下粉末自由填充單位容劑之質量。Bulk density refers to the mass of the powder freely filled with unit capacity under specified conditions.
振實密度係指於規定條件下容器中之粉末經振實所測得之密度。Tap density refers to the density measured by the tapping of the powder in the container under specified conditions.
上述金屬粉末之平均粒徑範圍為：0.1~500μm，作為一種優選實施例，該粒徑範圍為：20~30μm。The above metal powder has an average particle diameter ranging from 0.1 to 500 μm, and as a preferred embodiment, the particle diameter ranges from 20 to 30 μm.
如第二圖所示，為金屬粉末一實施例粒徑範圍為20~30μm之銅粉表面形貌圖，該銅粉為球形或接近於球形，與習知銅粉相比，本實施例中之銅粉具有較高之松裝密度和振實密度，內部密實。同時，該銅粉分散性好，無團聚現象。As shown in the second figure, the surface profile of the copper powder having a particle size ranging from 20 to 30 μm is a metal powder, and the copper powder is spherical or nearly spherical, compared with the conventional copper powder. The copper powder has a high bulk density and tap density, and is dense inside. At the same time, the copper powder has good dispersibility and no agglomeration.
如第三圖所示，為1000倍放大圖，圖中所示銅粉之表面產生塑性變形，並包含大量晶格缺陷，這有利於原子之擴散，大大提高了粉末之燒結活性。As shown in the third figure, the magnified glass is 1000 times. The surface of the copper powder shown in the figure is plastically deformed and contains a large number of lattice defects, which is beneficial to the diffusion of atoms and greatly improves the sintering activity of the powder.
對熟於此技藝者而言，顯然本發明不限於上述示範性實施例之細節，而且於不背離本發明精神或基本特徵之情況下，能夠以其他之具體形式實現本發明。因此，無論從哪一點來看，均應將實施例看作係示範性，而非限制性，本發明之範圍由所附申請專利範圍而不係上述說明限定，因此將落於申請專利範圍之等同要件之含義和範圍內之所有變化囊括於本發明內。不應將申請專利範圍中之任何附圖標記視為限制所涉及之申請專利範圍。It is apparent that the invention is not limited to the details of the above-described exemplary embodiments, and the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments are to be considered as illustrative and not restrictive, and the scope of the invention is defined by the scope of the appended claims All changes that come within the meaning and range of equivalents are included in the invention. Any reference signs in the scope of the patent application should not be construed as limiting the scope of the patent application.
此外，應當理解，雖然本說明書按照實施例加以描述，但並非每個實施例僅包含一個獨立之技術方案，說明書之此種敘述方式僅僅為清楚起見，本領域技術人員應當將說明書作為一個整體，各實施例之技術方案亦可以經適當組合，形成本領域技術人員可以理解之其他實施例。In addition, it is to be understood that the description is not to be construed as a single embodiment of the invention. The technical solutions of the embodiments may also be combined as appropriate to form other embodiments that can be understood by those skilled in the art.
100．．．金屬粉末之生產設備100. . . Metal powder production equipment
110．．．殼體110. . . case
111．．．出風口111. . . Air outlet
113．．．進風口113. . . Inlet
114．．．進料口114. . . Inlet
120．．．工作腔體120. . . Working cavity
130．．．氣流驅動裝置130. . . Air flow drive
131．．．離心風機131. . . Centrifugal fan
140．．．導流裝置140. . . Flow guiding device
141．．．旋轉件141. . . Rotating piece
142．．．馬達142. . . motor
第一圖為本發明之生產設備一實施例示意圖；The first figure is a schematic diagram of an embodiment of a production apparatus of the present invention;
第二圖為本發明之金屬粉末一實施例的形貌圖；The second figure is a top view of an embodiment of the metal powder of the present invention;
第三圖為第二圖所示金屬粉末之1000倍放大圖。The third figure is a 1000-fold enlarged view of the metal powder shown in the second figure.
100．．．金屬粉末之生產設備100. . . Metal powder production equipment
110．．．殼體110. . . case
111．．．出風口111. . . Air outlet
113．．．進風口113. . . Inlet
114．．．進料口114. . . Inlet
120．．．工作腔體120. . . Working cavity
130．．．氣流驅動裝置130. . . Air flow drive
131．．．離心風機131. . . Centrifugal fan
140．．．導流裝置140. . . Flow guiding device
141．．．旋轉件141. . . Rotating piece
142．．．馬達142. . . motor
Claims (10)
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| TWI547328B (en) * | 2013-12-06 | 2016-09-01 | Metal Ind Res & Dev Ct | Metal powder manufacturing method and device |
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