201206561 六、發明說明： I：發明戶斤屬之技術領域3 發明領域 本發明係有關一種喷霧裝置及粉體製造裝置。 L· Jt 發明背景 習知，成為鋰離子2次電池之極的材料之粉體等，例如 係藉由將原料水溶液喷霧乾燥且粉體化，且將該等粉體放 入陶瓷容器在爐内燒成且使熱變性而製造。在如此之方法 中，考慮對陶瓷容器之損害，於燒成中必須30分鐘到數小 時，效率不佳。又，在如此之方法中，為了在將粉體堆積 並靜置的狀態進行燒成，於燒成時也有所謂粒子間熔著的 問題。 於專利文獻1，揭示了一種在將原料水溶液喷霧於具有 進行電漿放電之電極的粉體生成爐内，藉由電漿放電而形 成之超高溫的電漿空間中，將原料水溶液乾燥且進一步熱 分解而使融合之粉體製造裝置。 以如此之粉體製造裝置所製出之粉體粒子，形狀歪斜 且不均勻。此係因原料水溶液之液滴在超高溫之電漿空間 瞬間被加熱，粒子内的水分一瞬間氣化膨脹，粒子蒸氣爆 發而被破壞之故。 又，如專利文獻2所載，將原料溶液與熱風一起吹入容 器内，在浮游狀態使其乾燥之喷霧乾燥器（喷霧乾燥）係公 知。在如此之噴霧乾燥器中，必須經由貫通吹入熱風之噴 201206561 嘴的管子供給原料溶液。因此，習知之喷霧乾燥器中，若 使熱風之溫度變高時’原料液滴會產生蒸氣爆發的問題， 又’因使供給原料溶液之管子於高溫悶熱而會有招致其他 各種問題的情況。 即使於習知之喷霧乾燥器中，也有將冷卻空氣供給至 供給原料溶液之管子周圍，以於原料溶液之喷霧不產生問 題者。然而，在使用如進一步使喷霧乾燥後之粒子熱變性 之南溫熱風時，由於在熱風之喷嘴内冷卻空氣變高溫，再 者原料溶液也於喷霧前被悶熱，所以在原料溶液噴霧前固 化而喷嘴閉塞’無法充分防止在原料溶液剛喷霧後蒸氣爆 發的情事》 【先行技術文獻】 【專利文獻】 【專利文獻1】特開2004-263257號說明書 【專利文獻2】特開2002-58981號說明書 C 明内 發明概要 【發明所欲解決的課題】 本發明鑑於前述問點題而以提出一種可防止原料液滴 之蒸氣爆發之喷霧裝置及粉體製造裝置為課題。 【用以解決課題之手段】 為了解決前述課題，本發明之喷霧裝置之紅態樣係包 含·原料喷嘴，係喷霧原料溶液者；冷卻喷嘴，係配置以 包圍前述原料倾，且將冷Μ氣吹人到被健之前述原 201206561 料溶液的周圍者；及冷卻套，係設於前述冷卻喷嘴的外側， 且可插通冷媒者。 依據該構成，由於藉由冷卻套防止冷卻空氣的升溫， 所以可藉由少量的冷卻空氣覆蓋噴霧於高溫氣體中之原料 液滴，使溫度上升延遲，而不會原料液滴瞬間升溫蒸氣爆 發。 又，本態樣之喷霧裝置也可更具有隔著間隔覆蓋前述 冷卻套之外層板。 依據該構成，由於以外層板隔著間隔覆蓋冷卻套，所 以於高溫氣體與直接冷卻套之夾雜著熱傳導率低的空氣之 層。藉此，自高溫氣體朝冷卻水之放熱量變小，不會使使 用本喷霧裝置之粉體製造裝置的熱效率降低。 又，依據本發明之喷霧裝置之第2態樣，係使包含：原 料喷嘴，係噴霧原料溶液者；1次冷卻喷嘴，係配置以包圍 前述原料喷嘴，且將冷卻空氣吹入到被喷霧之前述原料溶 液的周圍者；及2次冷卻喷嘴，係配置以包圍前述1次冷卻 喷嘴，且更將冷卻空氣吹入到自前述1次冷卻喷嘴吹入之冷 卻空氣的周圍。 依據該構成，藉由2次冷卻喷嘴之冷卻空氣抑制1次冷 卻喷嘴之冷卻空氣的溫度上升，所以有效地使原料液滴之 溫度上升延遲。 又，本態樣之喷霧裝置也可更包含隔著間隔覆蓋2次冷 卻喷嘴之外層板。 依據該構成，於2次冷卻喷嘴内之冷卻空氣與熱風之間 201206561 形成空氣之層，防止冷卻空氣與熱風之熱交換，提高熱效 率。 又，本發明之粉體製造裝置，係使包含：前述喷霧裝 置之任一者；粉體生成爐，係藉由前述喷霧裝置而將前述 原料溶液喷霧至内部者；及熱風喷嘴，係於内部配置有前 述喷霧裝置，且沿著前述喷霧裝置之外面將熱風導入到前 述粉體生成爐者。 依據該構成，不破壞原料液滴而將原料液滴喷霧乾燥 且將其粉體化，再者，就在粉體浮游狀態將粉體加熱並進 行熱處理，而可製造所希望之粉體。 又，於本發明之粉體製造裝置，前述冷卻空氣之流速 也可較前述熱風之流速慢。 依據該構成，由於只導入用以只覆蓋剛喷霧後之原料 液滴以防止水蒸汽爆發所必須最低限度的冷卻空氣，所以 熱效率變高。 圖式簡單說明 第1圖係本發明第1實施形態之粉體製造裝置的概略 圖。 第2圖係第1圖之喷霧裝置的詳細斷面圖。 第3圖係本發明第2實施形態之粉體製造裝置的概略 圖。 第4圖係第3圖之喷霧裝置的詳細斷面圖。 第5圖係本發明第3實施形態之喷霧裝置的詳細斷面 圖。201206561 VI. Description of the Invention: I: Technical Field of Inventions 3 Field of the Invention The present invention relates to a spray device and a powder manufacturing device. L·Jt BACKGROUND OF THE INVENTION It is known that a powder or the like which is a material of a lithium ion secondary battery is sprayed and dried, and powdered, for example, by placing an aqueous solution of the raw material in a ceramic container. It is produced by firing inside and densifying heat. In such a method, it is considered that damage to the ceramic container is inefficient in the firing for 30 minutes to several hours. Further, in such a method, in order to perform baking in a state in which the powder is deposited and left to stand, there is a problem of so-called inter-particle fusion at the time of firing. Patent Document 1 discloses that an aqueous solution of an aqueous material is dried in an ultrahigh-temperature plasma space formed by spraying a raw material aqueous solution in a powder generating furnace having an electrode for plasma discharge and formed by plasma discharge. Further thermal decomposition to make the fused powder manufacturing apparatus. The powder particles produced by such a powder manufacturing apparatus are skewed and uneven in shape. This is because the droplets of the aqueous solution of the raw material are heated instantaneously in the ultra-high temperature plasma space, and the moisture in the particles is vaporized and expanded instantaneously, and the particle vapor is destroyed and destroyed. Further, as disclosed in Patent Document 2, a spray dryer (spray drying) in which a raw material solution is blown into a container together with hot air and dried in a floating state is known. In such a spray dryer, it is necessary to supply the raw material solution through a pipe which is blown through the nozzle of the hot air jet 201206561. Therefore, in the conventional spray dryer, when the temperature of the hot air is increased, the raw material droplets cause a problem of vapor explosion, and the case where the tube for supplying the raw material solution is sultry at a high temperature causes various other problems. . Even in the conventional spray dryer, there is a supply of cooling air to the periphery of the pipe for supplying the raw material solution so that the spray of the raw material solution does not cause a problem. However, when the southerly hot air which is thermally denatured by the spray drying is further used, since the cooling air in the hot air nozzle becomes high temperature, and the raw material solution is also sultry before the spraying, the raw material solution is sprayed. [Pre-curing and clogging of the nozzles] It is not possible to sufficiently prevent the vapor explosion after the raw material solution has just been sprayed. [PRIOR ART DOCUMENT] [Patent Document 1] JP-A-2004-263257 (Patent Document 2) SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and proposes a spray device and a powder production device capable of preventing vapor burst of raw material droplets. [Means for Solving the Problem] In order to solve the above problems, the red-state of the spray device of the present invention includes a raw material nozzle, which is a spray material solution, and a cooling nozzle is disposed to surround the raw material and is cooled. The helium blows the person around the original 201206561 solution; and the cooling jacket is placed outside the cooling nozzle and can be inserted into the refrigerant. According to this configuration, since the temperature of the cooling air is prevented by the cooling jacket, the droplets of the raw material sprayed in the high-temperature gas can be covered with a small amount of cooling air to delay the temperature rise without instantaneously raising the vapor burst of the material droplets. Further, the spray device of the present aspect may further have a laminate which covers the outer layer of the cooling jacket at intervals. According to this configuration, since the outer layer plate covers the cooling jacket with an interval therebetween, the high temperature gas and the direct cooling jacket are interposed with a layer of air having a low thermal conductivity. Thereby, the amount of heat released from the high-temperature gas to the cooling water becomes small, and the thermal efficiency of the powder producing apparatus using the present spray device is not lowered. Further, according to the second aspect of the spray device of the present invention, the raw material nozzle is configured to spray the raw material solution, and the primary cooling nozzle is disposed to surround the raw material nozzle and to blow the cooling air into the sprayed portion. The surrounding of the raw material solution of the mist; and the secondary cooling nozzle are arranged to surround the primary cooling nozzle, and further blow the cooling air around the cooling air blown from the primary cooling nozzle. According to this configuration, the temperature of the cooling air of the primary cooling nozzle is suppressed by the cooling air of the secondary cooling nozzle, so that the temperature rise of the raw material droplets is effectively delayed. Further, the spray device of the present aspect may further include a laminate which is covered with the cooling nozzle twice at intervals. According to this configuration, a layer of air is formed between the cooling air and the hot air in the secondary cooling nozzle 201206561 to prevent heat exchange between the cooling air and the hot air, thereby improving the heat efficiency. Further, the powder producing apparatus of the present invention comprises: any one of the spraying devices; the powder generating furnace, wherein the raw material solution is sprayed inside by the spraying device; and a hot air nozzle; The spray device is disposed inside, and hot air is introduced into the powder generating furnace along the outer surface of the spray device. According to this configuration, the raw material droplets are spray-dried and powdered without destroying the raw material droplets. Further, the powder is heated and heat-treated in the powder floating state to produce a desired powder. Further, in the powder producing apparatus of the present invention, the flow rate of the cooling air may be slower than the flow rate of the hot air. According to this configuration, since only the cooling air which is required to cover only the raw material droplets immediately after the spray to prevent the water vapor explosion is introduced, the thermal efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a powder manufacturing apparatus according to a first embodiment of the present invention. Fig. 2 is a detailed sectional view of the spray device of Fig. 1. Fig. 3 is a schematic view showing a powder manufacturing apparatus according to a second embodiment of the present invention. Figure 4 is a detailed cross-sectional view of the spray device of Figure 3. Fig. 5 is a detailed sectional view showing a spray device according to a third embodiment of the present invention.
S 6 201206561 C實施方或】 較佳實施例之詳細説明 第1圖係顯示本發明第1實施形態之粉體製造裝置1。粉 體製造裝置1具有粉體生成爐2、燃燒室3、熱風噴嘴4與喷 霧裝置5，粉體生成爐2係直立请狀並具有鏡板狀之上端與 縮小半徑成圓錐狀之下部’且於内部形成隔離的處裡空 間，燃燒室3係圓筒狀並配置於粉體生成爐2之上方且朝水 平方向延伸，熱風嗔嘴4係連接燃燒室3與粉體生成爐2，並 將燃燒室3内所生成之燃燒排氣（熱風)從粉體生成爐2之上 端朝下吹入，喷霧裝置5係貫通燃燒室3並配置成延伸至熱 風噴嘴4之内部，用以將含有粉體原料之料漿從粉體生成 爐2之上端朝下喷霧° 燃燒室3於一端設有燃燒器6，且從一端朝另一端形成 水平方向之火焰。燃燒器6係可以任意比率供給例如如天然 氣之燃料與燃燒用空氣者’也可具有公知之點火裝置及導 燃器。 燃燒室3可收容燃燒器6所形成之火焰，且使具有使燃 料完全燃燒所必須之最低限度之容積者’所以使其較小者 為佳。因為可使來自燃燒室3之爐壁的熱損失抑制於最低限 度。例如，本實施形態之燃燒室3相對於燃燒器6之燃燒容 量116kW，較佳者為内徑130〜250mm、長度500〜 1000mm，更佳者為具有内徑150〜200mm、長度600〜 800mm之細長形狀。 熱風喷嘴4配設成朝與燃燒室3之燃燒器6相反側之端 201206561 部附近開口，垂直地將燃燒排氣（熱風)取出，且沿著喷霧裝 置5之外面直線地吹入粉體生成爐2。又，熱風喷嘴4之流路 斷面積小於燃燒室3，較佳者為内徑7〇〜12〇mm，更佳者為 内徑90〜110mm。藉此，以使熱風噴嘴4之燃燒排氣的流速 為燃燒室3下游側之流速的1.5倍到2.5倍。 利用將燃燒排氣從流動比較慢的燃燒室3到流路面積 小的熱風喷嘴4取出，而於流入至熱風喷嘴4時急遽地提高 砧k排氣的流速。藉由該流速變化，即使於燃燒室3内燃燒 排氣之溫度林均的情況，由於直角地變更燃燒排氣的流 動方向，所以也可攪拌燃燒排氣而使溫度均勻。又，於熱 噴嘴4内，燃燒排氣係整流成流速大略均勻的直線流動， 而吹入粉體生成爐2。 再者，第2圖顯示了喷霧裝置5之細部。喷霧裝置5具有 供給原料料漿且於前端設有喷射尖端7的原料喷嘴8、配設 成覆蓋原料噴嘴8且用以通過與原料噴嘴8之間隙將冷卻空 氣供給至從原料噴嘴8噴霧之原料的周圍之冷卻噴嘴9、設 於冷部喷嘴9外周之冷卻套1G、及隔著間隙配設於水冷套1〇 之外側的外層板1 ^。 冷卻水循環於水冷套10，且水冷套1〇内之冷卻水溫度 保持於約5Gt。水冷套1G與外層板⑽之空氣係作為隔熱 層的功能。因此，曝露於約12(K)t燃燒排氣之外層板此 裏面的溫度成為約96〇°c ’然而水冷套1Q與燃燒排氣間之熱 交換里僅有一點點。因而，相較於無外層板n且燃燒排氣 直接接觸於水冷套之外面的場合，燃燒排氣被原料喷嘴8S 6 201206561 C. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Fig. 1 shows a powder manufacturing apparatus 1 according to a first embodiment of the present invention. The powder manufacturing apparatus 1 includes a powder generating furnace 2, a combustion chamber 3, a hot air nozzle 4, and a spray device 5, and the powder generating furnace 2 is in an upright shape and has a mirror-like upper end and a reduced radius into a conical lower portion' The inner space of the partition is formed inside, and the combustion chamber 3 is cylindrical and disposed above the powder generating furnace 2 and extends in the horizontal direction, and the hot air nozzle 4 connects the combustion chamber 3 and the powder generating furnace 2, and The combustion exhaust gas (hot air) generated in the combustion chamber 3 is blown downward from the upper end of the powder generating furnace 2, and the spray device 5 passes through the combustion chamber 3 and is disposed to extend inside the hot air nozzle 4 for containing The slurry of the powder raw material is sprayed downward from the upper end of the powder generating furnace 2. The combustion chamber 3 is provided with a burner 6 at one end, and a horizontal flame is formed from one end toward the other end. The burner 6 can be supplied to, for example, a fuel such as natural gas and combustion air in an arbitrary ratio, and can also have a known ignition device and a pilot burner. The combustion chamber 3 can accommodate the flame formed by the burner 6 and has a minimum volume necessary to completely burn the fuel, so it is preferable to make it smaller. This is because the heat loss from the furnace wall of the combustion chamber 3 can be suppressed to a minimum. For example, the combustion chamber 3 of the present embodiment has a combustion capacity of 116 kW with respect to the burner 6, preferably an inner diameter of 130 to 250 mm, a length of 500 to 1000 mm, and more preferably an inner diameter of 150 to 200 mm and a length of 600 to 800 mm. Slender shape. The hot air nozzle 4 is disposed so as to open near the end 201206561 of the side opposite to the burner 6 of the combustion chamber 3, vertically extracts the combustion exhaust gas (hot air), and blows the powder linearly along the outer surface of the spray device 5. The furnace 2 is produced. Further, the flow path of the hot air nozzle 4 is smaller than that of the combustion chamber 3, preferably an inner diameter of 7 〇 to 12 〇 mm, and more preferably an inner diameter of 90 to 110 mm. Thereby, the flow rate of the combustion exhaust gas of the hot air nozzle 4 is 1.5 times to 2.5 times the flow rate of the downstream side of the combustion chamber 3. The combustion exhaust gas is taken out from the relatively slow flowing combustion chamber 3 to the hot air nozzle 4 having a small flow path area, and the flow rate of the anvil k exhaust is sharply increased when flowing into the hot air nozzle 4. By changing the flow rate, even if the temperature of the combustion exhaust gas in the combustion chamber 3 is uniform, the flow direction of the combustion exhaust gas is changed at right angles, so that the combustion exhaust gas can be stirred to make the temperature uniform. Further, in the hot nozzle 4, the combustion exhaust gas is rectified to flow in a straight line having a substantially uniform flow velocity, and is blown into the powder generating furnace 2. Furthermore, Fig. 2 shows a detail of the spray device 5. The spray device 5 has a raw material nozzle 8 that supplies a raw material slurry and has a spray tip 7 at its tip end, and is disposed to cover the raw material nozzle 8 for supplying cooling air to the spray from the raw material nozzle 8 through a gap with the raw material nozzle 8. The cooling nozzle 9 around the raw material, the cooling jacket 1G provided on the outer circumference of the cold nozzle 9, and the outer layer 1 ^ disposed on the outer side of the water jacket 1 隔 with a gap therebetween. The cooling water is circulated through the water jacket 10, and the temperature of the cooling water in the water jacket 1 is maintained at about 5 Gt. The air system of the water jacket 1G and the outer panel (10) functions as a heat insulating layer. Therefore, the temperature exposed inside the laminate outside the burner of about 12 (K) t is about 96 ° C. However, there is only a little bit of heat exchange between the water jacket 1Q and the combustion exhaust. Therefore, the combustion exhaust gas is blown by the raw material nozzle 8 as compared with the case where the outer layer plate n is not present and the combustion exhaust gas directly contacts the outer surface of the water cooling jacket.
S 8 201206561 奪去的熱量非常小。是故’常溫的空氣雖供給至冷卻喷嘴 9’然而就溫度幾乎未上升的情況而吹人到粉體生成爐2。 冷卻空氣覆蓋從原料喷嘴8嘴霧之原料，且就在喷霧後 之原料液滴直接曝露於高溫(例如刪。c )的燃燒排氣，藉由 瞬時升溫而水分爆發喊發，而防錄子被破壞之蒸氣爆 發。藉此’藉由喷霧乾燥而獲得的原料粉體便成為以整齊 的球形具有一定的粒子半徑。 由於稱微使原料液滴之溫度上升延遲便可防止粒子的 破壞’所以冷卻空氣為了避免燃燒排氣的稀釋以少量即 可’且相對於燃燒排氣190m3N/h，以5〜20m3N/h為佳，以 1〇〜15m3N/h為更佳。又’由於冷卻空氣只覆蓋剛喷霧後之 原料液滴便可，所以其流速也可較燃燒排氣慢，在本實施 形態中，為燃燒排氣之流速的4〇%左右。 由於原料料漿的蒸發潛熱相較於燃燒排氣之熱量不過 疋數百分比，所以燃燒排氣在使原料液滴之水分全部蒸發 後，也充分保持高的溫度。是故，在使將原料液滴乾燥後 之粒子浮游於高溫之燃燒排氣中的狀態，進而藉由燃燒排 氣加熱到所希望的溫度(在本實施形態中為7〇〇〜丨2〇(rc)， 而可進行熔融、燒成、發泡化及熱變性等要求之熱處理。 於本實施形態，由於燃燒排氣在粉體生成爐2内之寬廣 範圍中形成大略均勻的高溫環境，所以於粉體粒子之熱歷 程較少不均，而可進行均質的熱處理。又，由於在已分散 浮游於燃燒排氣中之狀態加熱粉體到高溫，所以粒子間不 干涉，粒子形狀便成均勻。 201206561 接著，第3圖係顯示本發明之第2實施形態之粉體製造 裝置la »而且，於之後的實施形態中，與之前說明之實施 形態相同之構成要件附予相同符號，而省略重複說明。 在第1實施形態之粉體製造裝置丨中，雖將具有燃燒器6 之燃燒室3的燃燒排氣從熱風噴嘴4導入到粉體生成爐2之 内部，然而在本實施形態之粉體製造裝置13中，係成為將 由風扇12供給之空氣藉由電加熱器13加熱直到例如13〇〇它 左右，且透過熱風噴嘴4a而沿著噴霧裝置5之外面吹入到粉 體生成爐2内。 在本實施形態中，於熱風喷嘴4a之内部配置有詳細顯 示於第4圖的喷霧裝置5a。喷'霧裂置5a具有與第1實施形態 相同的原料喷嘴8、配設以覆蓋原料喷嘴8且通過與原料喷 嘴8之間隙用以將冷卻空氣供給至自噴射尖端7喷霧之原料 的周圍之第1冷卻喷嘴14、配設以更覆蓋第丨冷卻喷嘴14且 通過與第1冷卻喷嘴14之間隙而更將冷卻空氣供給至自第i 冷卻喷嘴14供給之冷卻空氣的外側之第2冷卻喷嘴丨5。 如此’利用使冷卻噴嘴多層’而可抑制較外側為内側 之嗔嘴的熱交換，所以相較第2冷卻噴嘴，第1冷卻喷嘴之 冷卻空氣成低溫’可形成複數溫度階段變化之冷卻空氣之 層。藉此，藉由少量冷卻空氣，而可防止燃燒室3及熱風噴 嘴4内之原料喷嘴8之溫度上升、以及剛噴霧後之原料液滴 之瞬間因昇溫所產生的蒸氣爆發。因此，藉由本實施形餘 之粉體製造裝置1a而得的粉體也可是粒子半徑及粒子形狀 均勻。 201206561 再者，依據本發明，如第5圖所示之第3實施形態的喷 霧裝置5b般，也可更設有隔著間隔而覆蓋第2冷卻噴嘴15之 外周的外層板16。 【圖式簡單說明3 第1圖係本發明第1實施形態之粉體製造裝置的概略 圖。 第2圖係第1圖之喷霧裝置的詳細斷面圖。 第3圖係本發明第2實施形態之粉體製造裝置的概略 圖。 第4圖係第3圖之喷霧裝置的詳細斷面圖。 第5圖係本發明第3實施形態之喷霧裝置的詳細斷面 圖。 【主要元件符號說明】 1...粉體製造裝置 8...原料喷嘴 la...粉體製造裝置 9...冷卻喷嘴 2...粉體生成爐 10...冷卻套 3...燃燒室 11...外層板 4...熱風喷嘴 12...風扇 4a...熱風喷嘴 13...電加熱器 5...喷霧裝置 14...第1冷卻喷嘴 5a...喷霧裝置 15...第2冷卻喷嘴 5b...喷霧裝置 16...外層板 6...燃燒器 7...喷射尖端 11S 8 201206561 The amount of heat taken is very small. Therefore, the air at normal temperature is supplied to the cooling nozzle 9', but the temperature is hardly increased, and the powder is generated in the powder generating furnace 2. The cooling air covers the raw material of the mist from the raw material nozzle 8, and the raw material droplets immediately after the spraying are directly exposed to the high-temperature (for example, c.c.) combustion exhaust gas, and the moisture is bursting by instantaneous temperature rise, and the anti-recording is prevented. The destroyed steam exploded. Thereby, the raw material powder obtained by spray drying has a certain particle radius in a neat spherical shape. Since it is said that the temperature of the raw material droplets is delayed to prevent the destruction of the particles, the cooling air can be prevented from being diluted by a small amount in order to avoid dilution of the combustion exhaust gas, and is 190 m3 N/h with respect to the combustion exhaust gas, and is 5 to 20 m 3 N/h. Good, with 1〇~15m3N/h as better. Further, since the cooling air can cover only the droplets of the raw material immediately after the spraying, the flow velocity can be slower than that of the combustion exhaust gas. In the present embodiment, it is about 4% of the flow rate of the combustion exhaust gas. Since the latent heat of vaporization of the raw material slurry is not more than a few percent of the heat of the combustion exhaust gas, the combustion exhaust gas sufficiently maintains a high temperature after the moisture of the raw material droplets is completely evaporated. Therefore, the particles in which the raw material droplets are dried are floated in the high-temperature combustion exhaust gas, and further heated to a desired temperature by the combustion exhaust gas (in the present embodiment, 7〇〇~丨2〇) (rc), heat treatment required for melting, firing, foaming, heat denaturation, etc. In the present embodiment, since the combustion exhaust gas forms a substantially uniform high temperature environment in a wide range in the powder generating furnace 2, Therefore, the thermal history of the powder particles is less uneven, and a homogeneous heat treatment can be performed. Further, since the powder is heated to a high temperature in a state of being dispersed and floating in the combustion exhaust gas, the particles do not interfere with each other, and the particle shape is formed. In the following embodiment, the same components as those of the embodiment described above will be denoted by the same reference numerals, and will be omitted. In the powder manufacturing apparatus according to the first embodiment, the combustion exhaust gas having the combustion chamber 3 of the burner 6 is introduced into the powder generating furnace 2 from the hot air nozzle 4, but In the powder manufacturing apparatus 13 of the embodiment, the air supplied from the fan 12 is heated by the electric heater 13 up to, for example, about 13 Torr, and is blown into the powder along the outside of the spray device 5 through the hot air nozzle 4a. In the present embodiment, the spray device 5a shown in detail in Fig. 4 is disposed inside the hot air nozzle 4a. The spray mist split 5a has the same material nozzle 8 as that of the first embodiment. A first cooling nozzle 14 disposed to cover the raw material nozzle 8 and having a gap with the raw material nozzle 8 for supplying cooling air to the periphery of the material sprayed from the ejection tip 7 is disposed to cover the second cooling nozzle 14 and By the gap with the first cooling nozzle 14, the cooling air is supplied to the second cooling nozzle 丨5 outside the cooling air supplied from the i-th cooling nozzle 14. Thus, by using the cooling nozzle multilayer, it is possible to suppress the outer side. The heat exchange of the inside of the mouth is so that the cooling air of the first cooling nozzle becomes lower than the second cooling nozzle, and a layer of cooling air which changes in a plurality of temperature stages can be formed. Thereby, a small amount of cooling air is used. Therefore, it is possible to prevent the temperature of the raw material nozzle 8 in the combustion chamber 3 and the hot air nozzle 4 from rising, and the vapor burst generated by the temperature rise immediately after the atomization of the raw material immediately after the spraying. Therefore, the powder manufacturing apparatus of the present embodiment The powder obtained in 1a may have a uniform particle radius and a uniform particle shape. 201206561 Further, according to the present invention, as in the spray device 5b of the third embodiment shown in Fig. 5, the space may be further provided. The outer layer plate 16 covering the outer circumference of the second cooling nozzle 15 is a schematic view of the powder manufacturing apparatus according to the first embodiment of the present invention. Fig. 2 is a view of the spray device of the first embodiment. Fig. 3 is a schematic view showing a powder manufacturing apparatus according to a second embodiment of the present invention. Fig. 4 is a detailed sectional view showing a spray apparatus of Fig. 3. Fig. 5 is a detailed sectional view showing a spray device according to a third embodiment of the present invention. [Description of main component symbols] 1: Powder manufacturing apparatus 8: Raw material nozzle la... Powder manufacturing apparatus 9: Cooling nozzle 2: Powder generating furnace 10: Cooling jacket 3. .. Combustion chamber 11...outer plate 4...hot air nozzle 12...fan 4a...hot air nozzle 13...electric heater 5...spray device 14...first cooling nozzle 5a ...spraying device 15...second cooling nozzle 5b...spraying device 16...outer plate 6...burner 7...jet tip 11