201140898 六、發明說明： 【發明所屬之技術領域】 [0001] 本發明涉及一種電致動結構及電致動元件，尤其涉及一 種含有奈米碳管的電致動結構及電致動元件。 [先前技術] [0002] 致動器的工作原理為將其他能量轉換為機械能’實現這 一轉換經常採用的途徑有三種：通過靜電场轉化為靜電 力，即靜電驅動；通過電磁場轉化為磁力，即磁驅動； 利用材料的熱膨脹或其他熱特性實現能量的轉換’即熱 ❹ 驅動。 [0003] 靜電驅動的致動器一般包括兩個電極及設置在兩個電極 之間的電致動元件，其工作過程為在兩個電極上分別注 入電荷，利用電荷間的相互吸引和排斥，通過控制電荷 數量和電負性來控制電極間電致動元件^相對運動。由 於靜電力反比於電容板之間距離的平方，因此一般只有 在電極間距很小時靜電力才比較顯著，該距離的要求使 Q 該致動器的結構設計敕為複雜。磁驅動的致動器一般包 括兩個磁極及設置在兩個磁極之間的電致動元件，其工 作係通過磁場的相互吸引和排斥作用使兩磁極之間的電 致動元件產生相對的運動，磁驅動的缺點和靜電驅動相 同’即由於磁場作用範圍有限，導致電致動元件的上下 兩個表面必須保持較小的距離，該結構的設計要求嚴格 且也限制了該致動器的應用範圍。 [0004] 奈米碳管紙等已被發現可用來製備電致伸縮複合材料（請 參見 Carbon Nanotube Actuators”，Ray H. 099114470 表單編號A0101 第3頁/共37頁 0992025549-0 201140898201140898 VI. Description of the Invention: [Technical Field] [0001] The present invention relates to an electrically actuated structure and an electrically actuated component, and more particularly to an electrically actuated structure and an electrically actuated component comprising a carbon nanotube. [Prior Art] [0002] The working principle of the actuator is to convert other energy into mechanical energy. There are three ways to achieve this conversion: the electrostatic field is converted into an electrostatic force, that is, the electrostatic drive; the electromagnetic field is converted into a magnetic force. , that is, magnetic drive; the use of thermal expansion of materials or other thermal characteristics to achieve energy conversion 'ie hot ❹ drive. [0003] An electrostatically driven actuator generally includes two electrodes and an electrically actuated element disposed between the two electrodes, the operation of which is to inject a charge on each of the two electrodes, utilizing mutual attraction and repulsion between the charges, The relative motion of the electrically actuated elements between the electrodes is controlled by controlling the amount of charge and electronegativity. Since the electrostatic force is inversely proportional to the square of the distance between the capacitive plates, the electrostatic force is generally significant only when the electrode spacing is small. The requirement of this distance makes the structural design of the actuator complex. A magnetically actuated actuator generally comprises two magnetic poles and an electrically actuated element disposed between the two magnetic poles, the operation of which causes relative movement of the electrically actuated elements between the two magnetic poles by mutual attraction and repulsion of the magnetic fields. The disadvantage of the magnetic drive is the same as that of the electrostatic drive. That is, due to the limited range of the magnetic field, the upper and lower surfaces of the electrically actuated element must be kept at a small distance. The design requirements of the structure are strict and the application of the actuator is also limited. range. [0004] Nano carbon tube paper and the like have been found to be useful in the preparation of electrostrictive composites (see Carbon Nanotube Actuators), Ray H. 099114470 Form No. A0101 Page 3 of 37 0992025549-0 201140898
Baughman, et a 1., Science, vol 284，pi 340 ( 1 999 ))。先前技術提供一種含有奈米碳管的奈米柔性電 熱材料。所述奈米柔性電熱材料包括柔性高分子基底材 料及分散在柔性高分子基底材料中的奈米竣管。奈米柔 性電熱材料可以導電，通電以後可發熱，發熱後，所述 的奈米柔性電熱材料體積發生膨脹。然而，電壓通過該 奈米柔性電熱材料的兩端加入該奈米柔性電熱材料，由 於該奈米柔性電熱材料在伸縮的同時，沿伸縮方向上的 兩端都必須連接有電極，使得該奈米柔性電熱材料難以 實現器件化，不利於該奈米柔性電熱材料的實際應用。 【發明内容】 [0005] 有鑒於此，提供一種有利於器件化的含奈米碳管的電致 動結構及電致動元件實為必要。 [0006] 一種電致動結構，具有一第一端，以及與該第一端相對 設置的第二端。該電致動結構包括至少兩個電致動材料 層，該至少兩個電致動材料層在所述電致動結構的第一 端和第二端之間延伸且所述延伸部分相互電絕緣，該至 少兩個電致動材料層在電致動結構的第一端處電連接， 在第二端處分開設置。 [0007] —種電致動元件包括一電致動結構以及至少兩個電極。 該電致動結構具有一第一端，以及與該第一端相對設置 的第二端。該電致動結構包括至少兩個電致動材料層， 該至少兩個電致動材料層在所述電致動結構的第一端和 第二端之間延伸且所述延伸部分相互電絕緣，該至少兩 個電致動材料層在電致動結構的第一端處電連接，在第 099114470 表單編號A0101 第4頁/共37頁 0992025549-0 201140898 二端處分開設置。所述至少兩個電極間隔設置於所述第 一端’且一個電極對應一個電致動材料層設置。 [0008] 與先前技術相比較’本發明提供的電致動結構及採用該 電致動結構的電致動元件，使用時，電極可以全部設置 在電致動結構或電致動元件的同一端，而且電流通過所 述至少兩個電致動材料層形成由第二端流經第一端再後 到第二端的電流，從而所述至少兩個電致動材料層均句 發熱而膨脹，使得該電致動結構將發生形變。由於所塊 Ο 電致動結構及採用該電致動結構的電致動元件使用時， 電極均設置於第一端，麵此’可以屬轉電致動結構或電 致動元件的同一端控制其形變，從而有利於該電致動結 構或電致動元件的實際應用。 【實施方式】 [0009]Baughman, et a 1., Science, vol 284, pi 340 (1 999 )). The prior art provides a nano-flexible electrothermal material containing a carbon nanotube. The nano flexible electrothermal material comprises a flexible polymer base material and a nano tube disposed in the flexible polymer base material. The nanometer soft electrothermal material can be electrically conductive, and can be heated after being energized. After the heat is generated, the volume of the nanometer flexible electrothermal material expands. However, a voltage is applied to the nano-flexible electrothermal material through both ends of the nano-flexible electrothermal material. Since the nano-flexible electrothermal material is stretched, electrodes must be connected at both ends in the telescopic direction, so that the nanometer The flexible electrothermal material is difficult to realize deviceization, which is not conducive to the practical application of the nano flexible electrothermal material. SUMMARY OF THE INVENTION [0005] In view of the above, it is necessary to provide a nano-carbon nanotube-containing electrically actuated structure and an electrically actuated component that are advantageous for deviceization. An electrically actuated structure having a first end and a second end disposed opposite the first end. The electrically actuated structure includes at least two layers of electrically actuated material extending between a first end and a second end of the electrically actuated structure and the extensions are electrically insulated from each other The at least two layers of electrically actuated material are electrically connected at a first end of the electrically actuated structure and separately at the second end. An electroactive element includes an electrically actuated structure and at least two electrodes. The electrically actuated structure has a first end and a second end disposed opposite the first end. The electrically actuated structure includes at least two layers of electrically actuated material extending between a first end and a second end of the electrically actuated structure and the extensions are electrically insulated from each other The at least two layers of electrically actuated material are electrically connected at the first end of the electrically actuated structure and are disposed at the two ends of Form 099114470 Form No. A0101, Page 4 of 37, 0992025549-0, 201140898. The at least two electrodes are spaced apart from the first end' and one electrode is disposed corresponding to one layer of electrically actuated material. [0008] Compared to the prior art, the present invention provides an electrically actuated structure and an electrically actuated element using the same, in which the electrodes can all be disposed at the same end of the electrically actuated or electrically actuated element. And a current flows through the at least two layers of electrically actuated material to form a current flowing from the second end through the first end to the second end, such that the at least two layers of electrically actuated material expand and expand, such that The electrically actuated structure will deform. Since the Ο electrically actuated structure and the electrically actuated component using the electrically actuated structure are used, the electrodes are disposed at the first end, and the surface may be controlled by the same end of the electrically actuated or electrically actuated component. Its deformation facilitates the practical application of the electrically actuated structure or electrically actuated element. Embodiments [0009]
本發明提供一種電致動結構’該電致動結構為立體結構 ，比如平板狀體、柱狀體、橢圓球體或者錐形體，也$ 以為彎曲狀體等。該電致動结鼻具有一第一端以及與讀 第一端相對設置的一第二端。请謂第一端以及第二端的 選擇係根據實際情況定的，比如平板狀體時可以根棣需 要取任意兩個相對的兩端；如果柱狀體或者橢圓球趙等 ，那麼可以取長轴方向上的相對兩端；如果係彎曲狀趙 ，可以取自延伸方向相對的兩端。該電致動結構包括 -3Ε* 少兩個電致動材料層，該至少兩個電致動材料層在電I 動結構的第一端和第二端之間延伸，該至少兩個電敢動 材料層在第一端和第二端之間延伸部分相互電絕緣。診 至少兩個電致動材料層可以平行，也可以不平行， 099114470 表單編號A0101 第5頁/共37頁 201140898 平板狀體或柱狀Μ平行，衫少兩個電軸材料層可 以你橢圓球體、錐形體或者彎曲狀體時，該至少兩 個電致動材料層可以不平行。 [0010] [0011] 該至少兩個電致詩料層在電致減構的第_端或第二 端中的任意一端處相連接，在另一端處不相連。在該至 少兩個電致動材料層之間可以設置絕緣層，該絕緣層的 作用係該絕緣層也可以係平板狀，也可以係圓柱狀，其 形狀視所述電致動結構_狀而定。絕緣I。、要能使得 所述至少兩個電致動材料層在第—端和第二端之間延伸 邛分相互電絕緣即可。當然’所述至少兩個電致動材料 層之間也可以直接通過空氣間隔，使得所述至少兩個電 致動材料層在第-端和第二端之間延伸部分相互間隔地 電絕緣。 所述至少兩個電致動材料層為一種電致動的伸縮材料構 成，即只要給該電致動材料層通電，該電致動材料層就 會發熱膨脹，只要係能夠通電膨脹的村料，均可以實現 本發明。所述至少兩個電致黪材料層在電致動結構的第 一端或第二端任意一端處相連接係指電連接，可以通過 體开)成的方式相連，也可以借第三導電結構來實現電 相連。以下實施例中的電致動材料，至少兩個電致動材 料層在電致動結構係在第一端處電連接，當通過電致動 、-、σ構的第一端提供電流時，所述至少兩個電致動材料層 將熱膨脹，由於兩個電致動材料層的材料相同或者熱膨 脹係數相同或相近，因此電致動結構將在由發生形變， 由於本發明提供的電致動結構可以將電極均設置於電致 099114470 表單編號Α0101 第6頁/共37頁 0992025549-0 201140898 [0012] [0013] Ο [0014]Ο 動結構相同的/端’從而更加有利於該電致動結構的器 件化，以及實際應用。 為了更清楚地説明本發明的電致動結構以及電致動元件 ，下面以具據實施例予以說明。 請參考圖1及圖2，本發明第一實施例提供一種電致動結 構10，該電致動結構10為平面片狀（也可稱為薄板）結 構。該電致動結構10具有一第一端13 ’以及與該第-端 13相對的第，端17。該電致動結構10包括兩個電致動材 料層12，一電速接部15，以及一絕緣層16。所述兩個電 致動材料層12乎行間隔設置，並在端13與第二端17 之間延伸。所述絕緣層16設單於所述兩個電致動材料層 12之間，所述兩個電致動材料層12在所述電致動結構1〇 的第一端13通過電連接部15電連接。所述兩個電致動材 料層12在所述電致動結構1〇的第二端17通過所述絕緣層 16電絕緣。 . 所述電致動材料層12為複數個奈米碳管122分散於柔性高 刀子基體124中形成的奈米碳管複合材料。所述奈米碳管 122在所述柔性高分子基體124中均勻分佈，奈米碳管 互相搭接在柔性高分子基體124中形成大量導電網路 。本實施例中，所述電致動材料層12為長方形平面結構 ’厚度為1毫米。 所述柔性高分子基體124可選自矽橡膠彈性體、聚氨脂、 裒氧樹脂、聚甲基丙烯酸曱酯中的一種及其任竟組合。 本實施例中，所述柔性高分子基體124為矽橡膠彈性體構 099114470 表單鴂號A0101 第7頁/共37頁 0992025549-0 [0015] 201140898 成的矽橡膠薄膜，該矽橡膠薄膜為厚度為1毫米厚的一長 方形薄片，長度為20毫米，寬度為10毫米。 [0016] 所述奈米碳管122在所述電致動材料層12的質量百分含量 為0. 1%〜10%。所述奈米碳管122可為單壁奈米碳管、雙 壁奈米碳管及多壁奈米碳管中的一種或其任意組合。其 中，所述單壁奈米碳管的直徑為0.5奈米〜50奈米，雙壁 奈米碳管的直徑為1.0奈米〜50奈米，多壁奈米碳管的直 徑為1.5奈米~50奈米。所述奈米碳管122的長度不限。 優選地，所述奈米碳管122的長度為50〜900微米。所述 複數個奈米碳管122互相搭接在柔性高分子基體124中形 成大量導電網路。由於奈米碳管122具有良好的電熱轉換 效率，且於柔性高分子基體124中多次彎折而不易斷裂。 所以當施加一電壓後，該導電網路可以迅速發熱，對柔 性高分子基體124進行加熱，從而使所述電致動材料層12 可以迅速膨脹，可以較快的伸縮，使得該電致動結構10 具有較快的響應速度。 [0017] 所述絕緣層16為具有柔性的高分子材料構成，可以起到 電絕緣的作用。所述絕緣層16的厚度小於所述電致動材 料層12的厚度，由於絕緣層16的厚度小於所述第一電致 動材料層的厚度，該電致動結構10在伸縮時絕緣層16具 有較小的阻力，使該電致動結構10具有較好的響應速度 。構成所述絕緣層16的材料可選自矽橡膠彈性體、聚氨 脂、環氧樹脂、聚曱基丙烯酸曱酯中的一種及其任意組 合。本實施例中，所述絕緣層16矽橡膠彈性體構成的矽 橡膠薄膜，厚度為0.5毫米，長度為18毫米，寬度為10毫 099114470 表單編號A0101 第8頁/共37頁 0992025549-0 201140898 [0018] 來。 所述絕緣層16還可以為空氣’當該絕緣廣16為工乳時’ 所述兩個電致動材料層12之間通過所述絕緣層16形成一 個絕緣的空間。由於該電致動結構10的絕緣曰為個 $間，使得該電致動結構10在伸縮時絕緣廣’、有較] 的降力，使該電致動結構10具有較好的響應速度以及 [0019]The present invention provides an electrically actuated structure. The electrically actuated structure is a three-dimensional structure, such as a flat body, a columnar body, an elliptical sphere or a cone, and is also a curved body or the like. The electrically actuated nose has a first end and a second end disposed opposite the first end of the reading. Please refer to the selection of the first end and the second end according to the actual situation. For example, when the flat body is used, it is necessary to take any two opposite ends. If the column or the elliptical ball is used, the long axis can be taken. The opposite ends of the direction; if it is curved, it can be taken from opposite ends of the extending direction. The electrically actuated structure includes -3Ε* less two layers of electrically actuated material extending between the first end and the second end of the electrically active structure, the at least two electric dare The layer of dynamic material is electrically insulated from each other between the first end and the second end. At least two layers of electrically actuated material may or may not be parallel. 099114470 Form No. A0101 Page 5 of 37 201140898 Flat or columnar Μ Parallel, two less layers of shaft material can be used for your ellipsoid The at least two layers of electrically actuated material may not be parallel when the cone or the curved body is present. [0011] The at least two electro-acoustic layers are connected at either one of the first or second ends of the electro-deductive, and are not connected at the other end. An insulating layer may be disposed between the at least two layers of the electrically actuating material, and the insulating layer may function as a flat plate or a cylindrical shape, the shape of which depends on the electrically actuated structure. set. Insulation I. It is sufficient that the at least two layers of electrically actuated material extend between the first end and the second end to be electrically insulated from each other. Of course, the at least two layers of electrically actuated material may also be directly spaced apart by air such that the at least two layers of electrically actuated material are electrically insulated from each other at intervals between the first end and the second end. The at least two layers of electrically actuated material are constructed of an electrically actuated stretch material, that is, as long as the layer of electrically actuated material is energized, the layer of electrically actuated material will expand and expand, as long as it is capable of energizing and expanding the material. The invention can be implemented. The at least two layers of the electroconductive material are electrically connected at either end of the first end or the second end of the electrically actuated structure, and may be connected by means of a body opening or a third conductive structure. To achieve electrical connection. In the electrically actuated material of the following embodiments, at least two layers of electrically actuated material are electrically connected at the first end of the electrically actuated structure, when current is supplied through the first end of the electrically actuated, -, sigma configuration, The at least two layers of electrically actuated material will thermally expand, and since the materials of the two layers of electrically actuated material are the same or the coefficients of thermal expansion are the same or similar, the electrically actuated structure will be deformed by electrical actuation provided by the present invention. The structure can be used to set the electrodes to the electric 099114470. Form No. 101 0101 Page 6 / Total 37 Page 0992025549-0 201140898 [0013] [0014] [0014] The same structure / end '' is more advantageous for the electric actuation Deviceization of the structure, as well as practical applications. In order to more clearly illustrate the electrically actuated structure and the electrically actuated component of the present invention, the following description is by way of example. Referring to Figures 1 and 2, a first embodiment of the present invention provides an electrically actuated structure 10 that is planar (also referred to as a thin plate) structure. The electrically actuated structure 10 has a first end 13' and a first end 17 opposite the first end 13. The electrically actuated structure 10 includes two electrically actuated material layers 12, an electrical velocity junction 15, and an insulating layer 16. The two layers of electrically actuated material are disposed 12 apart and extend between end 13 and second end 17. The insulating layer 16 is disposed between the two layers of electrically actuated material 12, and the two layers of electrically actuated material 12 pass through the electrical connection 15 at the first end 13 of the electrically actuated structure 1 Electrical connection. The two electrically actuated material layers 12 are electrically insulated by the insulating layer 16 at a second end 17 of the electrically actuated structure 1 . The electrically actuated material layer 12 is a carbon nanotube composite material in which a plurality of carbon nanotubes 122 are dispersed in a flexible high knife base 124. The carbon nanotubes 122 are evenly distributed in the flexible polymer matrix 124, and the carbon nanotubes are overlapped with each other to form a large number of conductive networks in the flexible polymer matrix 124. In this embodiment, the electrically actuated material layer 12 has a rectangular planar structure ' thickness of 1 mm. The flexible polymer matrix 124 may be selected from the group consisting of ruthenium rubber elastomer, polyurethane, oxime resin, polymethyl methacrylate, and any combination thereof. In this embodiment, the flexible polymer matrix 124 is made of a ruthenium rubber elastomer. The thickness of the ruthenium rubber film is 099114470, Form No. A0101, Page 7/37, 0992025549-0 [0015] 201140898 A rectangular sheet of 1 mm thick with a length of 20 mm and a width of 10 mm. 1%〜10百分比。 [0016] The mass percentage of the carbon nanotubes 122 is 0.1% ~ 10%. The carbon nanotubes 122 may be one of a single-walled carbon nanotube, a double-walled carbon nanotube, and a multi-walled carbon nanotube, or any combination thereof. Wherein, the single-walled carbon nanotube has a diameter of 0.5 nm to 50 nm, the double-walled carbon nanotube has a diameter of 1.0 nm to 50 nm, and the multi-walled carbon nanotube has a diameter of 1.5 nm. ~50 nm. The length of the carbon nanotube 122 is not limited. Preferably, the carbon nanotubes 122 have a length of 50 to 900 microns. The plurality of carbon nanotubes 122 overlap each other to form a plurality of conductive networks in the flexible polymer matrix 124. Since the carbon nanotubes 122 have good electrothermal conversion efficiency and are bent many times in the flexible polymer matrix 124, they are not easily broken. Therefore, when a voltage is applied, the conductive network can rapidly heat up, and the flexible polymer substrate 124 is heated, so that the electrically actuated material layer 12 can be rapidly expanded, and can be quickly expanded and contracted, so that the electrically actuated structure 10 has a faster response speed. [0017] The insulating layer 16 is made of a flexible polymer material and can function as an electrical insulator. The thickness of the insulating layer 16 is smaller than the thickness of the electro-active material layer 12. Since the thickness of the insulating layer 16 is smaller than the thickness of the first electro-active material layer, the insulating structure 16 of the electrically-actuated structure 10 during expansion and contraction With less resistance, the electrically actuated structure 10 has a better response speed. The material constituting the insulating layer 16 may be selected from the group consisting of ruthenium rubber elastomer, polyurethane, epoxy resin, phthalic acid acrylate, and any combination thereof. In this embodiment, the insulating layer 16 is made of a rubber elastic rubber film having a thickness of 0.5 mm, a length of 18 mm, and a width of 10 mm 099114470. Form No. A0101 Page 8 of 37 pages 0992025549-0 201140898 [ 0018] Come. The insulating layer 16 may also be air' when the insulating layer 16 is a working emulsion. Between the two electrically actuating material layers 12, an insulating space is formed by the insulating layer 16. Since the insulating raft of the electrically actuated structure 10 is a space, the electrically actuated structure 10 is insulated and has a lowering force during expansion and contraction, so that the electrically actuated structure 10 has a better response speed and [0019]
[0020] 099114470 #大的形變量° 所述電連接部15為片狀結構，其設置於所述電致動結構 10的第一端13，並與所述兩個電致動材料層12電連接。 該電連接部15的材料與所述電致動材料層i2相同，均由 均勻分佈在柔性高分子基體124中的複數個奈米碳管122 組成，該複數個奈米碳管122相互搭接並形成導電網路。 該電連接部15與兩個電致動材料層12形歲一個整體結構 ，並且所述複數個奈米碳管122在所述電連接部15與兩個 電致動材料層12連接形成的整體結構中相互搭接形成一 個完整的導電網路。 本實施例中，該電致動結構1〇長度為2〇毫米，寬度為1〇 毫米，厚為2. 5毫米。絕緣層丨6的厚度為〇. 5毫米，所述 電致動材料層12的厚度為1毫米。對該電致動結構10進行 伸縮特性測量’請參見圖3，對該電致動結構施加幾十 伏特的電壓’即可以獲得較大的形變，當電壓為伏特 時’形變量可達到Q. 5毫米，應變可大於3%。圖4給出了 連續測量10次循環，楳〇權π 展樣獲仵的最大形變值。從圖4可以 看出’樣品的形變吾其士去 置土本為一水準直線，從而說明該電 致動結構10具有較好的可重複性。 表單編號Α0101 « „ ^ . 0992025549-0 201140898 [0021] [0022] [0023] 099114470 本發明第-實施職供的電致動結構1()在使料，在該 電致動結構1G的第二端17的兩個電致騎料層12分別接 入電源的兩個電極’電流將在兩個電致動材料層12，以 及電連接部15形成的整體結構中的複數個奈米碳管122相 互搭接形賴導電網路巾傳輸。由於奈米碳管122的熱導 率很高，從錢得料電致祕_的溫度快速升高， 所述複數個奈米碳管122可迅速加熱柔性高分子基體124 ，熱量從所述電致動結構1G中奈米碳管122的周圍快速地 向整個電致動結構1G中擴散。由於所述電致動 第-端13向第二端17_向長聽長，從 構_沿第二額到第—賴的方向膨服 電致動結構10的第二端17輸入’從而 ° ^ 結構10的第-端13伸縮’從而使得該電致電致動 容易器件化，佾而古釗认 勒〜構10更加 面的應用從而有利於該電致動結構1〇在電敎伸縮方 可以理解，上述平板狀”致_構1()在 致動結構Π)在其長度較長的方向上延伸該電 結構10第一端13到第二端Π的方向長度較長;:亥電致動 動結構10在第-端13到第二端17的方向上伸S亥電致 電致動結㈣在垂直於第—端u到第二端17=;如當該 度較長時，該電致動結構1G在垂直於第—方向的長 1 7的方向上伸縮。 到第二端 請參見圖5，本發明第二實施例提供—電 結構與第—實施例的電致動結構Μ基本。構20，其 絕緣層2S的結構與第—實施例中的絕緣層16^別在於 表羊編號A0101 第1〇頁/共37頁 201140898 [0024] 所述絕緣層2 6為柔性尚分子材料組成的片狀結構，該片 狀結構中進一步包括複數個空氣柱162。所述空氣柱162 可以為電致動結構20的第一端13向第二端17延伸的方向 上延伸，形成一個長條狀的空氣柱。由於該絕緣層2 6包 括複數個空氣柱162，使得該絕緣層26與所述兩個電致動 材料層12之間的接觸面積較小，絕緣層16具有較小的阻 力，從而使得該電致動結構20在伸縮時具有較快的響應 速度，較大的伸縮率。[0020] 099114470 #大形变化° The electrical connection portion 15 is a sheet-like structure disposed at the first end 13 of the electrically actuated structure 10 and electrically coupled to the two layers of electrically actuated material 12 connection. The electrical connection portion 15 is made of the same material as the electro-active material layer i2, and is composed of a plurality of carbon nanotubes 122 uniformly distributed in the flexible polymer substrate 124. The plurality of carbon nanotubes 122 overlap each other. And form a conductive network. The electrical connection portion 15 is formed integrally with the two layers of electrically actuated material 12, and the plurality of carbon nanotubes 122 are integrally connected to the two electrically actuated material layers 12 at the electrical connection portion 15. The structures overlap each other to form a complete conductive network. 5毫米。 The second embodiment of the present invention, the length of the second embodiment of the second embodiment of the present invention. The thickness of the insulating layer 6 is 〇5 mm, and the thickness of the electrically actuated material layer 12 is 1 mm. The measurement of the expansion and contraction characteristics of the electrically actuated structure 10 'see FIG. 3, applying a voltage of several tens of volts to the electrically actuated structure' can obtain a large deformation, and the shape variable can reach Q when the voltage is volt. 5 mm, the strain can be greater than 3%. Figure 4 shows the maximum deformation value obtained by continuously measuring 10 cycles and obtaining the 仵. It can be seen from Fig. 4 that the deformation of the sample is a straight line of the soil, indicating that the electrically actuated structure 10 has good repeatability. Form number Α0101 « „ ^ . 0992025549-0 201140898 [0022] [0023] 099114470 The first embodiment of the present invention provides an electrically actuated structure 1 () in the material, in the second of the electrically actuated structure 1G The two electrocavitation layers 12 of the terminal 17 are respectively connected to the two electrodes of the power source. The current will be in the two layers of the electrically actuated material 12, and the plurality of carbon nanotubes 122 in the overall structure formed by the electrical connection portion 15. The mutual bonding is formed by the conductive network towel. Since the thermal conductivity of the carbon nanotubes 122 is high, the temperature of the carbon nanotubes 122 is rapidly increased, and the plurality of carbon nanotubes 122 can be rapidly heated. The flexible polymer matrix 124, heat is rapidly diffused from the periphery of the carbon nanotube 122 in the electrically actuated structure 1G to the entire electrically actuated structure 1G. Since the electrically actuated first end 13 is toward the second end 17 _To lengthen, the second end 17 of the electrically actuated structure 10 is in the direction of the second to the first to input 'and thus the first end 13 of the structure 10 is stretched' to make the call The actuation is easy to deviceize, and the application of the structure is better, so that the electric actuation structure is facilitated. It can be understood that the above-mentioned flat-shaped "I" structure 1 () in the direction of the longer length extends the first end 13 of the electrical structure 10 to the second end 长度 in a longer direction; The electro-mechanical structure 10 extends in the direction from the first end 13 to the second end 17 so that the electro-acoustic actuation node (four) is perpendicular to the first end u to the second end 17 =; if the degree is long The electrically actuated structure 1G expands and contracts in a direction perpendicular to the length of the first direction of 17. Referring to Figure 2, a second embodiment of the present invention provides an electrical structure that is substantially identical to the electrically actuated structure of the first embodiment. Structure 20, the structure of the insulating layer 2S and the insulating layer 16 in the first embodiment are in the form of a sheep. No. A0101, page 1 / page 37, 201140898. [0024] The insulating layer 26 is composed of a flexible molecular material. The sheet structure further includes a plurality of air columns 162 in the sheet structure. The air column 162 may extend in a direction in which the first end 13 of the electrically actuated structure 20 extends toward the second end 17 to form an elongated column of air. Since the insulating layer 26 includes a plurality of air pillars 162 such that the contact area between the insulating layer 26 and the two electrically actuating material layers 12 is small, the insulating layer 16 has less resistance, thereby making the electricity The actuating structure 20 has a faster response speed and a larger expansion ratio when telescopic.
[0025] G Ο [0026] 另外’請參閱圖6 ’實施例二中的電連接部15還可以為— 導電層，該導電層設置在所述電致動結構10的第—端13 ，覆蓋所述電致動結構10的第一端13的側面的兩個間隔 設置的電致動材料層12。從而該兩個電致動材料層12可 以通過該電連接部15在所述第一端13電連接。該導電層 可以為金屬材料’如金、始、把、銀、竭、鐵、鎳等導 電性較好的金屬，可以通過沈積的方法將一金屬材料沈 積在所述電連接部15 ’形成一定厚度的金屬薄膜。該導 電增強層也可巧為導電漆，如銀膠，通過印刷的方法形 成。 請參見圖7及圖8，本發明第三實施例提供一電致動結構 30，其具有一個第一端13，以及與該第一端13相對的第 二端17。該電致動結構30的結構與第一實施例的電致動 結構10基本相同’區別在於該電致動結構30包括複數個 電致動材料層12以及複數個絕緣層16。本實施例中，該 電致動結構30包括4個電致動材料層12，以及3個絕緣層 099114470 表單編號Α0101 第11頁/共37頁 0992025549-0 201140898 [0027] [0028] [0029] 所述複數個電致動#料層12相互平行間隔設置，每兩個 相鄰的電致動材料層12之間設置有一個絕緣㈣。該複 數個電致動材料層12，在電致動結構_第-端13通過 電連接σρΐ5電連接’該複數個電致動材料層Μ在電致動 結構3㈣第二端17·所述複數健緣層16電絕緣。使 用時，該電致動結構3〇的第二額的複數個電致動材料 層12與電源的正極和負極交替電連接從而可以實現複數 個電致動材料層12並聯，從而可以降低驅動電壓。 可以理解，為了增加所述電致動結構3〇的響應速度，本 實施例中的絕緣層16的結構可以與本發明第二實施例中 的絕緣層26完全相同。 請參閱圖9和圖10，本發明第四實施例進一步提供一具有 圓柱體形狀立體結構的電致動結構40。該電致動結構40 具有一第一端43 ’以及與該第一端43相對的第二端47。 該電致動結構40包括一個第一電致動材料層42，以及一 個第二電致動材料層.46，以.及·-絕緣層,44。該第一電致 動材料層42，絕緣層44，以及第士電致動材料層46同軸 設置，並由該圓柱體立體結構的電致動結構40的圓軸向 外依次設置。第一電致動材料層4 2 ’以及一個第二電致 動材料層46 ’以及一絕緣層44由所述第一端43向所述第 二端47方向延伸。所述第一電致動材料層42與所述第二 電致動材料層46在所述電致動結構40的第一端43通過電 連接部45電連接。所述第一電致動材料層42與所述第二 電致動材料層46在所述電致動結構40的第二端47通過所 述絕緣層44電絕緣。所述第一電致動材料層42内部圍成 099114470 表單編號Α0101 第12頁/共37頁 0992025549-0 201140898 [0030] [0031] Ο Ο [0032] [0033] 一個圓枉體空間48。 本實施例的電致動結構40的第一電致動材料層42以及第 二電致動材料層46與本發明第一實施例的電致動材料層 12的組成相同’均係由複數個奈米碳管122分散與柔性高 分子基體124 _組成。所述電連接部45與第一實施例中的 電連接部15的材料相同’所述絕緣層44與所述絕緣層16 的材料相同。 請參見圖11，本發明第五實施例提供一種圓筒狀的電致 動結構50，該電致動結構50异有一第一端53，以及與該 第一端53相對的第土端57。該電致勢結構50包括至少兩 個間隔設置的電致動材料層52以及一電電連接部55，該 至少兩個電致動材料層52在電致動結構50的第一端53處 通過電連接部55相連’在第一端53向第关端57延伸的部 分分開。本實施例包括4個電致動材料層52相互間隔設置 ，該電致動材料層52與所述電連接部55的材料與第一實 施例中的電致動材料層52與所述電連接部15完全相同。 所述電致動結構遠可以進一步包括一絕緣柱56 ’所述 至少兩個電致動材料層52相對該絕緣柱56對稱設置，環 繞設置於該絕緣柱56的外侧。本實施例中，該絕緣柱56 的材料與第一實施例中的絕緣層16完全相同。 請參見圖12及圖13 ’本發明第六實施例提供一電致動結 構60，其具有一個第一端63，以及與該第一端63相對的 第二端67。該電致動結構6〇包括兩個電致動材料層12以 及一電連接部65 ’其結構與第一實施例相似’區別在於 099114470 表單編號Α0101 第13頁/共37頁 0992025549-0 201140898 本實施例中的電連接部6 5與第一實施例中的電連接部1 5 不同。 [0034] [0035] [0036] 099114470 所述兩個電致動材料層12在所述電致動結構6 〇的第—端 通過所述電連接部65電連接。所述電連接部65包括偶數 個導電材料層6 0 5相互絕緣設置於電致動結構6 〇。所述偶 數個導電材料層605在所述電致動結構60的第一端63或第 二端67電連接，形成一連續的導電通路，使得所述兩個 電致動材料層12在所述電致動結構60的第一端電連接。 本實施例中，所述電連接部65包括兩個導電材料層605， | 該導電材料層605的結構材料與所述電致動材料層12完全 相同，並且在第二端67相互逹接，在所述第一端63分別 於所述兩個電致動材料層12電連接°本實施例中，所述 電連接部65為一個完整的結構，該完整結構與所述兩個 電致動材料層12共同構成一個完整的導電結構，複數個 奈米碳管在該完整的導電結構中形成一個完整的導電網 路。 本發明第七實施例提供一可考曲的電致動結構70，該可 彎曲的電致動結構70係在本發明第一至第五實施例提供 的電致動結構（10，20，30，60)的基礎上，增加第二材 料層72覆蓋於所述電致動結構（ι〇，20，30，60)之上獲 得。 請參閱圖14，以第一實施例中的電致動結構1 0為例，所 述可彎曲的電致動結構7〇包括第二材料層72覆蓋於所述 電致動結構10的表面，並與所述電致動材料層12相互平 行。 表單編號A0101 第14頁/共37頁 0992025549-0 201140898 [0037] 所述第—材料層72的熱膨脹係數不同於電致動結構10， 該第二材料層72至少包括-第二聚合物基體，該第二聚 。土體的材料為柔性材料，包括石夕橡膠聚甲基丙嫌 酸甲S旨、聚|胳 班片 长虱树脂、聚丙稀酸乙酯、聚丙稀酸 聚笨乙烯、聚丁二烯、聚丙烯腈、聚苯胺、聚吡 Ο [0038] ，及聚嘆吩等中的—種或幾種的組合。該第：材料層72 可僅包括—第二聚合物基體，因電致動結構10中的奈求 碳e 122對電致動結構1〇的熱膨脹係數影響較小，所以此 時該第—聚合物基體的材料需不同於電致動結構10中的 柔冋刀子基體124的材料具产者的熱膨脹係數不同。本 實施例中~述第二聚合物基體為聚甲基丙稀酸甲醋。 所述可彎曲的電致動結構7〇在應用時，將電壓施加於電 致動結構70的電致動材料層12的第二端1營，電流可通過 〇 上述奈米碳管122所形成的導電網路進行傳輸。由於条米 碳管122的熱導率报高，從而使得所述電致動結構7〇的溢 度快速升高’熱量從所述可彎曲的電致動結構7〇中奈米 碳管122的周圍妹速地向整個可灣曲的電致動結構7〇擴散 ’即電致動結構10可迅速加熱第二材料層72。由於熱膨 脹量與材料的體積及熱膨脹係數成正比，且本實施例的 可彎曲的電致動結構7〇由兩層具有不同熱膨脹係數的電 致動結構10和第二材料層72複合而成，從而使得加熱後 的可彎曲的電致動結構7〇將向熱膨脹係數小的材料層彎 曲。 本發明實施例進一步提供一採用本發明提供的電致動結 構的電致動元件10 0。該電致動元件10 0可以為在本發明 099114470 表單編號Α0101 第15頁/共37頁 0992025549-0 [0039] 201140898 任意實施例提供的電致動結構（10，20，30，40，50， 60 ’ 70)的基礎上增加對應的電極獲得。 [0040]請參閱圖15，所述電致動元件1〇〇為平面片狀結構，具有 —第一端13，以及與該第一端13相對的第二端17。該電 致動元件100包栝兩個電致動材料層12，一電連接部15， 以及一絕緣層1 6，以及兩個電極。所述兩個電致動材料 層12平行間隔設置。所述絕緣層16設置於所述兩個電致 動材料層12之間，所述兩個電致動材料層12在所述電致 動元件100的第一端13通過電連接部15電連接。所述兩個 電致動材料層12在所述電致動元件1〇〇的第二端17通過所 述絕緣層16電絕緣。所述兩個電極102間隔設置在所述電 致動元件100的第二端17，並相互電絕緣，還分別與所述 兩個電致動材料層12電連接。 [〇〇41] 所述電極102為長條形金屬。本實施例中，所述電極1〇2 為銅片。可以理解，當該電致動无件100包括複數個電致 動材料層12時，該電致動元件1〇 包括複數個電極1 〇 2， 每個一個電極102對應於一個電致動材料層12。 [0042] 與先前技術相比較’本發明提供的電致動結構及採用該 電致動結構的電致動元件，其包括一第一端以及一第二 端’至少兩個電致動材料層與間隔設置，所述至少兩個 電致動材料層在所述電致動材料的第一端通過電連接部 電連接，在所述電致動材料的第二端通過所述絕緣層電 絕緣。因此可以在所述電致動材料的第二端，通過所述 至少兩個電致動材料層輸入電流給該電致動材料。由於 電流通過該材料的第二端輸入，因此可以在該電致動結 099114470 表單編號A0101 第16頁/共37頁 0992025549-0 201140898 構或電致動元件的同一端控制其伸長或彎曲，從而有利 於電致動結構及採用該電致動結構的電致動元件在電致 動器件方面的應用。 [0043] 綜上所述，本發明確已符合發明專利之要件，遂依法提 出專利申請。惟，以上所述者僅為本發明之較佳實施例 ，自不能以此限制本案之申請專利範圍。舉凡熟悉本案 技藝之人士援依本發明之精神所作之等效修飾或變化， 皆應涵蓋於以下申請專利範圍内。 【圖式簡單說明】 [0044] 圖1為本發明第一實施例提供的電致動結構的立體結構示 意圖。 [0045] [0046] [0047] 圖2為圖1所示的電致動結構沿11 -11線的剖視圖。 圖3為圖1所示的電致動結構形變與電壓的關係曲線圖。 圖4為圖1所示的電致動結構在連續測量10次迴圈的最大 形變量值。 〇 [0048] 圖5為本發明第二實施例提供的電致動結構的剖視圖。 [0049] 圖6為本發明第二實施例中的電連接部為導電薄膜時的電 致動結構的刮視圖。 [0050] 圖7為本發明第三實施例提供的電致動結構的立體結構示 意圖。 [0051] 圖8為本發明第三實施例的電致動結構沿VIII-VIII線的 剖視圖。 圖9為本發明第四實施例提供的電致動結構的立體結構示 099114470[0025] Further, please refer to FIG. 6 'The electrical connection portion 15 in the second embodiment may also be a conductive layer disposed at the first end 13 of the electrically actuated structure 10, covering Two spaced apart layers of electrically actuated material 12 disposed on the sides of the first end 13 of the electrically actuated structure 10. Thereby the two layers of electrically actuating material 12 can be electrically connected at the first end 13 through the electrical connection 15. The conductive layer may be a metal material such as gold, tin, silver, iron, nickel, nickel, etc., and a metal material may be deposited on the electrical connection portion 15' by a deposition method. Thick metal film. The conductive reinforcing layer may also be formed by a conductive paint such as silver paste by printing. Referring to Figures 7 and 8, a third embodiment of the present invention provides an electrically actuated structure 30 having a first end 13 and a second end 17 opposite the first end 13. The structure of the electrically actuated structure 30 is substantially identical to that of the electrically actuated structure 10 of the first embodiment. The difference is that the electrically actuated structure 30 includes a plurality of electrically actuated material layers 12 and a plurality of insulating layers 16. In this embodiment, the electrically actuated structure 30 includes four layers of electrically actuated material 12, and three layers of insulation 099114470. Form number Α 0101 page 11 / page 37 0992025549-0 201140898 [0028] [0029] The plurality of electrically actuated layers 12 are spaced apart from each other with an insulation (four) disposed between each two adjacent layers of electrically actuated material 12. The plurality of electrically actuated material layers 12 are electrically connected to the first end 13 through an electrical connection σρΐ5 at the first end 13 of the plurality of electrically actuated material layers Μ at the second end 17 of the electrically actuated structure 3 (four) 17 The health edge layer 16 is electrically insulated. In use, the second plurality of electrically actuated material layers 12 of the electrically actuated structure 3〇 are alternately electrically connected to the positive and negative electrodes of the power source so that a plurality of layers of electrically actuated material 12 can be connected in parallel, thereby reducing the driving voltage. . It can be understood that the structure of the insulating layer 16 in this embodiment may be identical to the insulating layer 26 in the second embodiment of the present invention in order to increase the response speed of the electrically actuated structure 3A. Referring to Figures 9 and 10, a fourth embodiment of the present invention further provides an electrically actuated structure 40 having a cylindrically shaped three-dimensional structure. The electrically actuated structure 40 has a first end 43' and a second end 47 opposite the first end 43. The electrically actuated structure 40 includes a first layer of electrically actuated material 42 and a second layer of electrically actuated material .46, and an insulating layer. The first layer of electrically actuated material 42, the layer of insulating layer 44, and the layer of electrically conductive material 46 are disposed coaxially and are disposed in series from the outer circumference of the circularly-actuated electrically actuated structure 40 of the cylindrical body. A first electrically actuated material layer 4 2 'and a second electrically activating material layer 46' and an insulating layer 44 extend from the first end 43 toward the second end 47. The first electrically actuated material layer 42 and the second electrically actuated material layer 46 are electrically coupled at a first end 43 of the electrically actuated structure 40 by an electrical connection 45. The first electrically actuated material layer 42 and the second electrically actuated material layer 46 are electrically insulated at the second end 47 of the electrically actuated structure 40 by the insulating layer 44. The first electrically actuated material layer 42 is internally encircled. 099114470 Form No. Α0101 Page 12/37 Page 0992025549-0 201140898 [0030] [0031] [0033] A round body space 48. The first electrically actuated material layer 42 and the second electrically actuated material layer 46 of the electrically actuated structure 40 of the present embodiment are identical in composition to the electrically actuated material layer 12 of the first embodiment of the present invention. The carbon nanotube 122 is dispersed and composed of a flexible polymer matrix 124. The electrical connection portion 45 is of the same material as the electrical connection portion 15 in the first embodiment. The insulating layer 44 is made of the same material as the insulating layer 16. Referring to Figure 11, a fifth embodiment of the present invention provides a cylindrical electrically actuated structure 50 having a first end 53 and a first earth end 57 opposite the first end 53. The electro-active structure 50 includes at least two spaced apart layers of electrically actuated material 52 and an electrical connection 55 that passes electricity at a first end 53 of the electrically actuated structure 50. The connecting portion 55 is connected to the portion where the first end 53 extends toward the closing end 57. The present embodiment includes four electrically actuated material layers 52 spaced apart from one another, the electrically actuated material layer 52 and the material of the electrical connection portion 55 being electrically connected to the electrically actuated material layer 52 of the first embodiment. Part 15 is identical. The electrically actuated structure can further include an insulating post 56'. The at least two layers of electrically actuated material 52 are disposed symmetrically with respect to the insulating post 56 and are disposed around the outer side of the insulating post 56. In this embodiment, the material of the insulating pillar 56 is completely the same as that of the insulating layer 16 in the first embodiment. Referring to Figures 12 and 13, a sixth embodiment of the present invention provides an electrically actuated structure 60 having a first end 63 and a second end 67 opposite the first end 63. The electrically actuated structure 6A includes two layers of electrically actuated material 12 and an electrical connection 65' having a structure similar to that of the first embodiment. The difference is that 099114470 Form No. 1010101 Page 13/37 Page 0992025549-0 201140898 The electrical connection portion 657 in the embodiment is different from the electrical connection portion 15 in the first embodiment. [0036] 099114470 The two layers of electrically actuated material 12 are electrically connected through the electrical connection 65 at a first end of the electrically actuated structure 6 . The electrical connection portion 65 includes an even number of conductive material layers 605 which are insulated from each other and disposed on the electrically actuated structure 6 〇. The even number of conductive material layers 605 are electrically connected at a first end 63 or a second end 67 of the electrically actuated structure 60 to form a continuous conductive path such that the two layers of electrically actuated material 12 are The first end of the electrically actuated structure 60 is electrically connected. In this embodiment, the electrical connection portion 65 includes two conductive material layers 605. The conductive material layer 605 has the same structural material as the electrically actuated material layer 12, and is connected to each other at the second end 67. The first end 63 is electrically connected to the two electrically actuated material layers 12 respectively. In the embodiment, the electrical connection portion 65 is a complete structure, and the complete structure and the two electrical actuations The material layers 12 together form a complete electrically conductive structure in which a plurality of carbon nanotubes form a complete electrically conductive network. A seventh embodiment of the present invention provides a testable electrically actuated structure 70 that is an electrically actuated structure (10, 20, 30) provided by the first to fifth embodiments of the present invention. On the basis of 60), an additional second material layer 72 is obtained overlying the electrically actuated structure (ι, 20, 30, 60). Referring to FIG. 14 , taking the electrically actuated structure 10 in the first embodiment as an example, the bendable electrically actuated structure 7 includes a second material layer 72 covering the surface of the electrically actuated structure 10 . And parallel to the electrically actuated material layer 12. Form No. A0101 Page 14 of 37 0992025549-0 201140898 [0037] The first material layer 72 has a different coefficient of thermal expansion than the electrically actuated structure 10, and the second material layer 72 includes at least a second polymer matrix. The second gathering. The material of the soil is flexible material, including Shixi rubber polymethyl propylene succinic acid, S, poly slab, sputum resin, polyethyl acrylate, polyacrylic acid polystyrene, polybutadiene, poly A combination of acrylonitrile, polyaniline, polypyridyl, and polysap. The first: material layer 72 may include only the second polymer matrix, since the thermal expansion coefficient of the electrically actuated structure 1〇 in the electrically actuated structure 10 is less affected, so the first polymerization The material of the substrate needs to be different from the material of the flexible blade substrate 124 in the electrically actuated structure 10 to have a different coefficient of thermal expansion. In the present embodiment, the second polymer matrix is polymethyl methacrylate. The bendable electrically actuated structure 7 施加 applies a voltage to the second end of the electrically actuated material layer 12 of the electrically actuated structure 70 when applied, and current can be formed by the above-described carbon nanotubes 122 The conductive network is transmitted. Since the thermal conductivity of the strip of carbon nanotubes 122 is high, the overflow of the electrically actuated structure 7〇 is rapidly increased 'heat from the bendable electrically actuated structure 7 〇 in the carbon nanotubes 122 The surrounding babies are rapidly diffusing toward the entire electrically actuated structure 7 of the slab. That is, the electrically actuated structure 10 can rapidly heat the second material layer 72. Since the amount of thermal expansion is proportional to the volume of the material and the coefficient of thermal expansion, and the bendable electrically actuated structure 7 of the present embodiment is composed of two layers of electrically actuated structure 10 and second material layer 72 having different coefficients of thermal expansion, Thereby, the heated bendable electrically actuated structure 7〇 will be bent toward a layer of material having a small coefficient of thermal expansion. Embodiments of the present invention further provide an electrically actuated component 100 that employs an electrically actuated structure as provided by the present invention. The electrically actuated component 100 can be an electrically actuated structure (10, 20, 30, 40, 50, provided in any of the embodiments of the invention 099114470 Form No. 101 0101, page 15 / 37 page 0992025549-0 [0039] 201140898, 60' 70) is based on the addition of the corresponding electrode obtained. Referring to FIG. 15, the electrically actuated element 1 is a planar sheet-like structure having a first end 13 and a second end 17 opposite the first end 13. The electrically actuated component 100 encloses two layers of electrically actuated material 12, an electrical connection 15, and an insulating layer 16, and two electrodes. The two layers of electrically actuated material 12 are arranged in parallel. The insulating layer 16 is disposed between the two layers of electrically actuated material 12, and the two layers of electrically actuated material 12 are electrically connected at a first end 13 of the electrically actuated element 100 via an electrical connection 15 . The two layers of electrically actuated material 12 are electrically insulated by the insulating layer 16 at the second end 17 of the electrically actuated element 1 . The two electrodes 102 are spaced apart from each other at a second end 17 of the electro-active element 100 and are electrically insulated from one another and are also electrically coupled to the two layers of electrically actuated material 12, respectively. [〇〇41] The electrode 102 is an elongated metal. In this embodiment, the electrode 1〇2 is a copper piece. It will be understood that when the electrically actuated element 100 comprises a plurality of electrically actuated material layers 12, the electrically actuated element 1 includes a plurality of electrodes 1 〇 2, each of which corresponds to an electrically actuated material layer 12. [0042] Compared with the prior art, the present invention provides an electrically actuated structure and an electrically actuated element using the same, comprising a first end and a second end 'at least two layers of electrically actuated material And spaced apart, the at least two layers of electrically actuated material being electrically connected at the first end of the electrically actuated material by an electrical connection, electrically insulated at the second end of the electrically actuated material by the insulating layer . Thus, a current can be supplied to the electrically actuated material through the at least two layers of electrically actuated material at the second end of the electrically actuated material. Since the current is input through the second end of the material, it can be controlled to extend or bend at the same end of the electrically actuated junction 099114470 Form No. A0101, page 18/37 pages 0992025549-0 201140898, or The use of an electrically actuated structure and an electrically actuated component employing the electrically actuated structure in an electrically actuated device is advantageous. [0043] In summary, the present invention has indeed met the requirements of the invention patent, and the patent application is filed according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by those skilled in the art to the spirit of the invention are intended to be included within the scope of the following claims. BRIEF DESCRIPTION OF THE DRAWINGS [0044] FIG. 1 is a perspective view showing the configuration of an electrically actuated structure according to a first embodiment of the present invention. 2 is a cross-sectional view of the electrically actuated structure of FIG. 1 taken along line 11-11. [0047] FIG. 3 is a graph showing the relationship between the deformation of the electrically actuated structure shown in FIG. 1 and the voltage. Figure 4 is the maximum shape variable value of the electrically actuated structure shown in Figure 1 for continuous measurement of 10 turns. 5 is a cross-sectional view of an electrically actuated structure provided by a second embodiment of the present invention. 6 is a plan view showing an electrically actuated structure when the electrical connection portion is a conductive film in the second embodiment of the present invention. 7 is a perspective view showing the structure of an electrically actuated structure according to a third embodiment of the present invention. 8 is a cross-sectional view of the electrically actuated structure taken along line VIII-VIII of the third embodiment of the present invention. FIG. 9 is a perspective view showing the structure of an electrically actuated structure according to a fourth embodiment of the present invention. 099114470
表單編號A0101 第17頁/共37頁 09SForm No. A0101 Page 17 of 37 09S
[0052] 201140898 意圖。 [0053] 圖10為圖9所示的電致動結構沿X-X線的剖視圖。 [0054] 圖11為本發明第五實施例提供的電致動結構的立體結構 示意圖。 [0055] 圖12為本發明第六實施例提供的電致動結構的立體結構 示意圖。 [0056] 圖13為圖12沿XI11-XI11線的剖視圖。 [0057] 圖14為本發明第七實施例提供的電致動結構的剖面圖。 [0058] 圖15為本發明提供的電致動元件的示意圖。 【主要元件符號說明】 [0059] 電致動結構：10, 20, 30, 40, 50, 60, 70 [0060] 電致動材料層：12, 52 [0061] 第一端：13, 43, 53, 63 [0062] 電連接部：15,45,55,65 [0063] 絕緣層：16, 26, 44 [0064] 第二端：17, 47, 57, 67 [0065] 第一電致動材料層：42 [0066] 第二電致動材料層：46 [0067] 圓柱體空間：4 8 [0068] 絕緣柱：56 099114470 表單編號A0101 第18頁/共37頁 0992025549-0 201140898 [0069] 第二材料層：72 [0070] 電致動元件：100 [0071] 電極：102 [0072] 奈米碳管：122 [0073] 柔性高分子基體：124 [0074] 導電材料層：605[0052] 201140898 Intent. 10 is a cross-sectional view of the electrically actuated structure shown in FIG. 9 taken along line X-X. 11 is a perspective view showing the structure of an electrically actuated structure according to a fifth embodiment of the present invention. 12 is a perspective view showing the structure of an electrically actuated structure according to a sixth embodiment of the present invention. Figure 13 is a cross-sectional view taken along line XI11-XI11 of Figure 12; 14 is a cross-sectional view showing an electrically actuated structure according to a seventh embodiment of the present invention. [0058] FIG. 15 is a schematic illustration of an electrically actuated component provided by the present invention. [Explanation of main component symbols] [0059] Electrically actuated structure: 10, 20, 30, 40, 50, 60, 70 [0060] Electroactive actuating material layer: 12, 52 [0061] First end: 13, 43, 53, 63 [0062] Electrical connection: 15, 45, 55, 65 [0063] Insulation: 16, 26, 44 [0064] Second end: 17, 47, 57, 67 [0065] First electric actuation Material layer: 42 [0066] Second electrically actuated material layer: 46 [0067] Cylinder space: 4 8 [0068] Insulation column: 56 099114470 Form number A0101 Page 18 of 37 0992025549-0 201140898 [0069] Second material layer: 72 [0070] Electrically actuated element: 100 [0071] Electrode: 102 [0072] Carbon nanotube: 122 [0073] Flexible polymer matrix: 124 [0074] Conductive material layer: 605
099114470 表單編號ΑΟΙΟΙ 第19頁/共37頁 0992025549-0099114470 Form Number ΑΟΙΟΙ Page 19 of 37 0992025549-0