TW201024717A - Wiring pattern inspection device - Google Patents

Wiring pattern inspection device Download PDF

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Publication number
TW201024717A
TW201024717A TW98137943A TW98137943A TW201024717A TW 201024717 A TW201024717 A TW 201024717A TW 98137943 A TW98137943 A TW 98137943A TW 98137943 A TW98137943 A TW 98137943A TW 201024717 A TW201024717 A TW 201024717A
Authority
TW
Taiwan
Prior art keywords
pattern
illumination
illumination means
light
wiring pattern
Prior art date
Application number
TW98137943A
Other languages
English (en)
Chinese (zh)
Inventor
Ryozo Matsuda
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW201024717A publication Critical patent/TW201024717A/zh

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Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Wire Bonding (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW98137943A 2008-12-24 2009-11-09 Wiring pattern inspection device TW201024717A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008327369A JP2010151479A (ja) 2008-12-24 2008-12-24 配線パターン検査装置

Publications (1)

Publication Number Publication Date
TW201024717A true TW201024717A (en) 2010-07-01

Family

ID=42493902

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98137943A TW201024717A (en) 2008-12-24 2009-11-09 Wiring pattern inspection device

Country Status (4)

Country Link
JP (1) JP2010151479A (ja)
KR (1) KR20100075371A (ja)
CN (1) CN101762611A (ja)
TW (1) TW201024717A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI571629B (zh) * 2014-03-12 2017-02-21 Omron Tateisi Electronics Co Sheet inspection device
TWI682162B (zh) * 2015-06-25 2020-01-11 日商仁力克股份有限公司 帶體檢測裝置及檢測方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8766192B2 (en) 2010-11-01 2014-07-01 Asm Assembly Automation Ltd Method for inspecting a photovoltaic substrate
JP5562906B2 (ja) * 2011-06-09 2014-07-30 ヤマハ発動機株式会社 部品撮像方法、部品撮像装置および同装置を備えた部品実装装置
CN102590226A (zh) * 2012-01-12 2012-07-18 北京凌云光视数字图像技术有限公司 用于检测具有图案的透明包装膜的检测***
JP5825278B2 (ja) * 2013-02-21 2015-12-02 オムロン株式会社 欠陥検査装置および欠陥検査方法
KR200474087Y1 (ko) * 2013-11-29 2014-09-19 피에스아이트레이딩 주식회사 필름 결함 검사 장치
JP6370177B2 (ja) 2014-09-05 2018-08-08 株式会社Ｓｃｒｅｅｎホールディングス 検査装置および検査方法
JP6559601B2 (ja) * 2016-03-23 2019-08-14 信越半導体株式会社 検出装置及び検出方法
JP6903449B2 (ja) * 2017-02-22 2021-07-14 Hoya株式会社 欠陥検査装置、および欠陥検査方法
JP6895768B2 (ja) * 2017-03-01 2021-06-30 Hoya株式会社 欠陥検査装置、および欠陥検査方法
CN107764835A (zh) * 2017-09-30 2018-03-06 长沙派数控股份有限公司 一种电子产品玻璃盖板检测装置及方法
JP7511875B2 (ja) 2020-06-01 2024-07-08 株式会社 システムスクエア 検査装置
CN117147586A (zh) * 2023-10-26 2023-12-01 江苏纳沛斯半导体有限公司 一种cof树脂区异物检测方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI571629B (zh) * 2014-03-12 2017-02-21 Omron Tateisi Electronics Co Sheet inspection device
TWI682162B (zh) * 2015-06-25 2020-01-11 日商仁力克股份有限公司 帶體檢測裝置及檢測方法

Also Published As

Publication number Publication date
CN101762611A (zh) 2010-06-30
KR20100075371A (ko) 2010-07-02
JP2010151479A (ja) 2010-07-08

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