201020544 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種微流體晶片’特別是指一種用以 進行液體之微量取樣的微流體晶片。 【先前技術】 在許多科技領域中，尤其是生物及化學…等領域中， 在進行一些檢體之檢測分析或定量時，通常需要精確控制 所取之樣品體積。現有最常見的取樣器，是利用人力手動 • 控制之微量取樣器（pipette)，此種取樣装置通常是將一吸 管頭套設於一吸引取樣器上，藉由取樣器内部構件作動產 生之吸力’將預定量之液體吸入吸管頭中。但因該吸管頭 套設於該取樣器上時’可能會因套接時的氣密度不夠而有 縫隙產生，或液體樣品殘留黏附於吸管頭套上，進而會影 響取樣量的準確度’尤其是對於極微量樣品的取樣時，例 如小至1 X 10·9公升（nano liter，nl)，其影響程度更大，且 市售之取樣此取樣的最小流體单位量僅為〇.2μ1，無法適 ® 用於更微量之流體的取樣。 【發明内容】 因此，本發明之目的，即在提供一種可精準微量取樣 及送樣之微流體晶片。 - 於是’本發明可精準微量取樣及送樣之微流體晶片， ’ 包含由下往上依序疊接之一基板、一流道層板，及一氣室 層板，且該基板與流道層板相配合界定出一微流道，而該 流道層板與氣室層板相配合界定出一位於微流道上方並 3 201020544 可被灌注高壓氣體之氣室機構，該微流體晶片具有間隔貫 穿流道層板與氣室層板之一儲液槽與一取樣槽，該微流道 具有一媒動段、一連通於取樣槽與驅動段間之取樣段，及 一連通於儲液槽與取樣段間之進料段，該氣室機構包括一 · 間隔位於驅動段上方之驅動氣室、一間隔位於進料段上方/ 且與該驅動氣室連通之第一閥門氣室，及一間隔位於該取 樣段介於進料段與取樣槽間之部位上方的第二閥門氣 室’該流道層板具有一可被第一閥門氣室中之高壓氣體往 下彈性擠推變形而氣密塞封該進料段的第一閥門部、一可φ 被第二閥門氣室中之高壓氣體往下彈性擠推變形而氣密 塞抵於取樣段内之第二閥門部’及一介於驅動氣室與驅動 段間之驅動部’且該驅動部可隨驅動氣室中之高壓氣體的 壓力變化而於驅動段中上下彈性變形，而於取樣段内對應 產生驅動液體流動之正壓推力與負壓吸力。 本發明之功效：透過該基板、流道層板與氣室層板疊 接構成之微流道與氣室機構的結構設計，使該微流體晶片 可應用於微量液體之精確取樣與送樣，且其取樣量遠小於© 市售取樣器之取樣量，而取樣準確度亦較市售取樣器佳。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之一個較佳實施例的詳細說明中，將可-清楚的呈現* 如圖1、2所示，本發明可精準微量取樣及送樣之微 流體晶片的較佳實施例，適用於進行微量液體之採樣，該 201020544 微流體晶片2包含由下往上依序疊接之一基板3、一流道 層板4與一氣室層板5，且該基板3與流道層板4相配合 界定出一微流道6,該流道層板4與氣室層板5相配合界 定出一氣室機構7，且該微流體晶片2具有開口朝上之一 儲液槽201、一取樣槽202、一第一氣孔203、一第二氣孔 204，及一清洗槽205 ’其中，儲液槽201、取樣槽202與 清洗槽205都是由分別貫穿氣室層板5與流道層板4之穿 孔40、50和該基板3相配合所構成，而第一氣孔203與 第二氣孔204則是穿設於該氣室層板5上。 在本實施例中，該流道層板4與氣室層板5是由PDMS 製成’而該基板3是由玻璃製成，但實施時，基板3、流 道層板4與氣室層板5之材質不以此為限。 該微流道6是凹設於流道層板4底面，且具有一圓形 驅動段61、一左右延伸地連通於該驅動段61與該取樣槽 202間之取樣段62、一連通於該儲液槽2〇1與該取樣段62 間的進料段63 ,及一連通於清洗槽2〇5與驅動段61間之 注水段64，其中，該驅動段61容積大於該取樣段62，該 取樣段62具有一連通於驅動段61與該進料段63間之取 樣部621，及一連通於進料段63與取樣槽2〇2間之連通部 622 〇 该氣室機構7是凹設於氣室層板5底面，且包括一間 隔=於驅動段62上方之圓形驅動氣室71、一間隔位於進 料& 63上方且連通於該驅動氣室71與第一氣孔間的 第閥門氣至72，及一間隔位於該取樣段62之連通部 201020544 上方且與第—氣孔2〇4連通的第二閥門氣室73。該驅動氣 室71具有一位於驅動段61上方之圓形氣室部π〗，及一 左右延伸連通於氣室部711與第—間門氣室72間之連通部 712且及連通部712容積小於氣室部711與第-閥門氣室 Ί1。 該流道層板4具有一界定出該驅動段61頂緣且被該 驅動氣至71之氣室部71丨涵蓋的彈性薄膜狀驅動部41、 一刀別自5亥驅動部41底面一體往下突伸入驅動段61中並 抵靠於基板3頂面之頂抵部42、一介於進料段63與第一 閥門氣室72間之彈性薄膜狀第一閥門部43，及一介於取 樣段62之連通部622與第二閥門氣室73間之彈性薄膜狀 第二閥門部44。 該驅動部41可被灌注於該氣室部711中之高壓氣體往 下彈性擠推變形而突伸入該驅動段61中，該第一閥門部 43可被灌注於第一閥門氣室72中之高壓氣體往下彈性擠 推變形’而往下彈性突伸並氣密塞封該進料段63 ’第二閥 門部44則可被灌注於第二閥門氣室73中之高壓氣體往下 彈性擠推變形，而往下彈性突伸並氣密塞封該取樣段62 之連通部622。 如圖3〜5所示，該微流體晶片2使用時，會於第一氣 孔203與第二氣孔204分別連通接設〆氣壓源（圖未示）， 並程式化控制該等氣壓源對該微流體晶片2灌注與釋放高 壓氣體之時序’且會先將該清洗槽205之開口氣密封閉。 當要以該微流體晶片2進行微量液體之取用時，是先 201020544 經由該等氣孔203、204公s丨丨拟斗站 2υ4刀別對該等閥門氣室v72、73與 通於第一閥門氣室72之驅動氣室71灌注高壓氣體，圖連3 所示灰色部位即Μ較高職體部位，迫錢道層板4 之第-閥門部43與驅動部41分別往下彈性突伸，而分別 封閉該進料段63與塞置於該驅動段61中並驅使第二閱 門部44往下彈性突伸塞封該取樣段62之連通部622，然 後，便可將待取樣之樣品液9〇〇置入該儲液槽2〇1中。’、、、 接著，依據預定取樣量，經由第一氣孔2〇3局部釋出 第-閥Η氣室72與驅動氣室71中的高壓氣體，如圖4所 示，透過控制該第一閥門氣室72與驅動氣室71之高壓氣 體釋放之時間，來調整該第一閥門部43與驅動部41分別 往上彈性回縮復形之程度，由於該驅動氣室71之連通部 712容積遠小於該氣室部711與第一閥門氣室72，所以第 一閥門氣室72與該驅動氣室71之氣室部711的高壓氣體 會先後依序釋出，使得第一閥門部72會先局部往上彈性 回縮復形，而局部開啟該進料段63，使進料段63連通該 儲液槽201與取樣段62’緊接著，該氣室部711中之高展 氣體也會局部釋放，而連動使該驅動部41局部，往上回縮 復形’並於該取樣段02中產生一負壓吸力，該負壓吸力 會將儲液槽2Ό1中之預定體積的樣品液9〇〇經由潘進料段 63吸入該取樣段62中。 然後，將第二閥門氣室73之高壓氣體釋放，開啟該 取樣段62之連通部622’使取樣段62與取樣槽2〇2連通， 如圖5所示，並同時經由第一氣孔203對第一間門氣室72 201020544 與驅動氣室71灌注高壓氣體，藉由第一閥門氣室72與驅 動氣室71被充填高壓氣體的先後時間差，可於第一閥.門 部43氣密封閉該進料段63後，藉由該驅動部41往下突 伸入驅動段61中所產生之正壓推力，將已被吸入取樣段 62之取樣部621中之樣品液900推送至取樣槽202中。最 後’再對第二閥門氣室73灌注高壓氣體，迫使第二閥門 部44氣密阻隔於取樣段62與取樣槽2〇2間，便完成微量 液體之取樣與送樣。 於完成液體之微量取樣後’可將該清洗槽2〇5開封，@ 並於清洗槽205中注入清洗液，並透過於該氣室部7丨〗中 灌注與釋放高壓氣體的方式，驅使清洗槽2〇5中之清洗液 沿微流道62流動，藉以清洗微流道62，使該微流體晶片 2於清洗後能夠再重複使用，但實施時，該清洗槽2〇5並 非必要。 如圖2、6所示，為該微流體晶片2進行微量液體之 取樣量對應該驅動氣室71之高壓氣體釋放時間的曲線 圖，由圖式資料可知，該微流體晶片2確實可進行極微量 © 之液體的取用’並具由很好的再現性，且其取樣量可小至 0 05 ///。 如圖2、7所示，將該微流體晶片2之取樣量與市售 取樣器之取樣量及理論取樣值進行比對，其中，取樣量分 別為1、2、3、4、5、6#/ ’每一取樣量之取樣1〇次，由 圖式資料可知，該微流體晶片2之取樣誤差值都比市售取 樣器小。 201020544 如圖2、8所示，以該微流體晶片2進行他〇h溶液 (0.04M ’ pH12,616)之取樣，並將取樣所得之Ν_溶 液對苯甲酸（總量50〆’ 0.002M)進行酸鹼滴定實驗\ 並與市售之取樣器進行比較’每次顧溶液取樣 量為3^/，且於當量點附近，將滴定之Na〇H溶液取樣量 改為0.25 y /。由圖式資料可知，該微流體晶片2所得之滴 定曲線與市售取樣器所得之滴定曲線幾乎相同。 在本實施例中，該流道層板4之頂抵部42的設置目 的，是要避免整個驅動部4!被往下彈性頂推而完全貼抵 於基板3頂面，而影響該驅動部41往上回縮復形之速度， 但實施時，該等頂抵部42並非必要。 綜上所述，透過該基板3、流道層板4與氣室層板5 疊接構成之微流道6與氣室機構7的結構設計，使該微流 體晶片2可應用於微量液體之精確取樣與送樣，且其取樣 量遠小於市售取樣器之取樣量’取樣準確度亦較市售取樣 器佳’而可適用於珍貴樣品的精準取樣與送樣，並可搭配 可程式化控制之氣壓源系統，而達到自動化取樣與送樣之 功能，相當方便實用，故確實能達成本發明之目的。 惟以上所述者，僅為本發明之較佳實施例而已，當不 能以此限定本發明實施之範圍，即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾，皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1疋本發明可精準微量取樣及送樣之微流體晶片的 201020544 一較佳實施例之立體分解圖； 圖2是該較佳實施例之組合仰視示意圖，說明該微流 道與該氣室機構之相對應位置； 圖3是該較佳實施例之組合俯視圖，說明第一閥門氣 室、第二閥門氣室與驅動氣室皆已被灌注高壓氣體時的情 況； 圖4是類似圖3之視圖，說明第一閥門氣室與驅動氣 室之高壓氣體被卸除，而樣品液被局部吸入取樣段時的情 況； 圖5是是類似圖4之視圖，說明第二閥門氣室之高壓 氣體被卸除’而第一閥門氣室與驅動氣室被灌注高壓氣 體； 圖6是該較佳實施例進行不同容積之樣品液取量對應 驅動氣室之壓力釋放時間時的曲線圖； 圖7是該較佳實施例與市售取樣器之取樣誤差比較的 柱狀圖；及 圖8是該較佳實施例與市售取樣器進行酸鹼滴定之曲❹ 線圖 10 201020544 【主要元件符號說明】 2 …-·微流體晶片 6 · · .......微流道 201… •…儲液槽 61 * •......•驅動段_ 202 ·· …··取樣槽 62- •……取樣段 203… …··第一氣孔 621 •-.....取樣部 204 •…·第二氣孔 622 ......•連通部 205… .....清洗槽 63·· …·…進料段 3 "…, …* ·基板 64… .....* ·注水段 * Κ φ X ♦ | .....流道層板 '"J « . .......氣室機構 Ϊ t » I "…穿孔 71 ·· —…驅動氣室 1 * * * * 1 …* ·驅動部 711 …·…氣室部. 42**** .....頂抵部 712 —…連通部 43、"* .....第一閥門部 72·· 。……第一闊_門氣室 K ♦ * ♦ 1 ••…第二閥門部 73 ·· .......第二閥門氣室 5 ...... …··氣室層板 900 •……樣品液 5 0…… -…穿孔201020544 VI. Description of the Invention: [Technical Field] The present invention relates to a microfluidic wafer, particularly to a microfluidic wafer for performing micro sampling of a liquid. [Prior Art] In many fields of technology, especially in the fields of biology and chemistry, it is often necessary to precisely control the volume of the sample taken during the detection analysis or quantification of some samples. The most common sampler available is a hand-operated • controlled pipette. This type of sampling device usually sets a pipette tip on a suction sampler and generates suction by the internal components of the sampler. A predetermined amount of liquid is drawn into the pipette tip. However, when the straw head cover is set on the sampler, there may be a gap due to insufficient air density at the time of socketing, or the liquid sample remains adhered to the straw head cover, which may affect the accuracy of the sample amount, especially for When sampling very small samples, for example, as small as 1 X 10·9 liters (nano liter, nl), the degree of influence is greater, and the minimum fluid unit quantity for sampling this sample is only 〇.2μ1, which is not suitable. For the sampling of a smaller amount of fluid. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a microfluidic wafer that can accurately sample and deliver samples. - Thus, the present invention is capable of accurately micro-sampling and delivering microfluidic wafers, 'including one substrate, a first-order layer laminate, and a gas chamber laminate, which are sequentially stacked from bottom to top, and the substrate and the flow channel laminate Cooperating to define a micro flow channel, the flow channel laminate cooperates with the gas chamber laminate to define a gas chamber mechanism above the micro flow channel and 3 201020544 can be filled with high pressure gas, the microfluidic wafer has a spacing through a liquid storage tank and a sampling tank of the gas chamber laminate, the microfluid prop has a medium section, a sampling section connected between the sampling tank and the driving section, and a communication tank and sampling a feed section between the sections, the chamber mechanism includes a driving chamber spaced above the driving section, a first valve chamber spaced above the feeding section and communicating with the driving chamber, and a spacing The sampling section is located above the second valve chamber above the portion between the feeding section and the sampling tank. The flow channel laminate has a high-pressure gas in the first valve chamber and is elastically squeezed downward to deform the airtight plug. Sealing the first valve portion of the feed section, a φ can be The high pressure gas in the second valve chamber is elastically pushed and deformed downward, and the airtight plug is abutted against the second valve portion 'in the sampling section' and a driving portion between the driving air chamber and the driving section and the driving portion can follow The pressure of the high-pressure gas in the driving chamber is elastically deformed up and down in the driving section, and the positive pressure thrust and the negative pressure suction which drive the liquid flow are generated in the sampling section. The effect of the invention: the microfluidic channel and the gas chamber mechanism formed by the substrate, the flow channel laminate and the gas chamber laminate are designed to make the microfluidic wafer can be accurately sampled and sampled for a small amount of liquid. The sample size is much smaller than that of the commercially available sampler, and the sampling accuracy is better than that of the commercially available sampler. [Embodiment] The foregoing and other technical contents, features and effects of the present invention will be apparently shown in the following detailed description of a preferred embodiment of the reference drawings. The preferred embodiment of the microfluidic wafer capable of accurately micro-sampling and sample-feeding is suitable for sampling a small amount of liquid. The 201020544 microfluidic wafer 2 comprises a substrate 3 and a first-order layer layer sequentially stacked from bottom to top. The plate 4 and a gas chamber laminate 5, and the substrate 3 cooperates with the flow channel laminate 4 to define a micro flow channel 6, which cooperates with the gas chamber laminate 5 to define a gas chamber mechanism 7, The microfluidic wafer 2 has a liquid storage tank 201 with an opening upward, a sampling tank 202, a first air hole 203, a second air hole 204, and a cleaning tank 205', wherein the liquid storage tank 201 and the sampling tank 202 And the cleaning tank 205 is formed by the holes 40, 50 penetrating through the air chamber layer plate 5 and the flow channel layer 4, and the substrate 3, and the first air hole 203 and the second air hole 204 are disposed there. On the air chamber laminate 5. In the present embodiment, the flow channel laminate 4 and the gas chamber laminate 5 are made of PDMS and the substrate 3 is made of glass, but when implemented, the substrate 3, the flow channel laminate 4 and the gas chamber layer The material of the plate 5 is not limited thereto. The micro flow path 6 is recessed on the bottom surface of the flow channel laminate 4, and has a circular driving section 61, and a sampling section 62 extending between the driving section 61 and the sampling slot 202. a feed section 63 between the reservoir 2〇1 and the sampling section 62, and a water injection section 64 connected between the cleaning tank 2〇5 and the driving section 61, wherein the driving section 61 has a larger volume than the sampling section 62, The sampling section 62 has a sampling portion 621 connected between the driving section 61 and the feeding section 63, and a communicating portion 622 communicating between the feeding section 63 and the sampling slot 2〇. The gas chamber mechanism 7 is concave. It is disposed on the bottom surface of the air chamber laminate 5 and includes a circular driving air chamber 71 spaced above the driving portion 62, a space above the feeding & 63 and communicating between the driving air chamber 71 and the first air hole. The first valve gas is 72, and a second valve plenum 73 is disposed above the communication portion 201020544 of the sampling section 62 and communicates with the first air hole 2〇4. The driving plenum 71 has a circular plenum portion π above the driving section 61, and a left and right extending communication between the venting portion 712 of the plenum portion 711 and the first door plenum 72 and the volume of the communicating portion 712 It is smaller than the air chamber portion 711 and the first valve chamber Ί1. The flow channel laminate 4 has an elastic film-like driving portion 41 that defines a top edge of the driving portion 61 and is covered by the driving chamber to the air chamber portion 71 of the driving portion 71, and a blade is integrally formed from the bottom surface of the 5H driving portion 41. Projecting into the driving section 61 and abutting against the top abutting portion 42 of the top surface of the substrate 3, an elastic film-like first valve portion 43 between the feeding section 63 and the first valve plenum 72, and a sampling section The second valve portion 44 of the elastic film shape between the communication portion 622 of the 62 and the second valve chamber 73. The driving portion 41 can be elastically pushed and deformed by the high-pressure gas poured into the air chamber portion 711 to protrude into the driving portion 61. The first valve portion 43 can be poured into the first valve air chamber 72. The high pressure gas is elastically pushed and deformed downwardly and elastically protrudes downward and hermetically seals the feed section 63. The second valve portion 44 can be elastically depressed by the high pressure gas poured into the second valve chamber 73. The deformation is pushed, and the communication portion 622 of the sampling section 62 is elastically protruded downward and hermetically sealed. As shown in FIG. 3 to FIG. 5, when the microfluidic chip 2 is used, the first air hole 203 and the second air hole 204 are respectively connected to a pneumatic pressure source (not shown), and the air pressure source is programmed to control the air pressure source. The microfluidic wafer 2 is primed and released at a timing of 'high pressure gas' and the opening of the cleaning tank 205 is first hermetically sealed. When the microfluidic wafer 2 is to be used for the micro liquid, it is first 201020544 through the pores 203, 204, the squatting station 2, 4 knives, the valve chambers v72, 73 and the first The driving chamber 71 of the valve chamber 72 is filled with high-pressure gas, and the gray portion shown in Fig. 3 is the upper part of the body, and the first valve portion 43 and the driving portion 41 of the money board 4 are respectively elastically extended downward. And respectively closing the feeding section 63 and the plug in the driving section 61 and driving the second door closing part 44 to elastically protrude the connecting portion 622 of the sampling section 62, and then the sample to be sampled The sample solution 9 is placed in the reservoir 2〇1. ',,, then, according to the predetermined sampling amount, the high pressure gas in the first valve plenum 72 and the driving plenum 71 is partially released via the first air hole 2〇3, as shown in FIG. 4, through the first valve is controlled. The time during which the high pressure gas of the air chamber 72 and the driving air chamber 71 is released is adjusted to the extent that the first valve portion 43 and the driving portion 41 are elastically retracted upwardly, respectively, because the communication portion 712 of the driving air chamber 71 is far away. The gas chamber portion 711 and the first valve chamber 72 are smaller than the first valve chamber 711, so that the high pressure gas of the first valve chamber 72 and the chamber portion 711 of the driving chamber 71 are sequentially released, so that the first valve portion 72 is first Partially upwardly elastically retracts the complex, and partially opens the feed section 63, so that the feed section 63 communicates with the liquid storage tank 201 and the sampling section 62', and the high gas in the gas chamber portion 711 is also partially localized. Release, and interlocking causes the driving portion 41 to partially retract the complex shape and generate a negative pressure suction force in the sampling section 02, and the negative pressure suction force will discharge a predetermined volume of the sample liquid in the liquid storage tank 2Ό1. The helium is drawn into the sampling section 62 via the pan feed section 63. Then, the high pressure gas of the second valve plenum 73 is released, and the communication portion 622' of the sampling section 62 is opened to connect the sampling section 62 with the sampling tank 2〇2, as shown in FIG. 5, and simultaneously through the first air hole 203. The first door plenum 72 201020544 and the driving plenum 71 are filled with high pressure gas, and the first valve plenum 72 and the driving plenum 71 are filled with high pressure gas in a time difference, and the first valve door portion 43 can be hermetically sealed. After the feed section 63, the sample liquid 900 that has been sucked into the sampling section 621 of the sampling section 62 is pushed to the sampling tank 202 by the positive pressure thrust generated by the driving portion 41 protruding downward into the driving section 61. in. Finally, the second valve chamber 73 is filled with high-pressure gas, forcing the second valve portion 44 to be hermetically sealed between the sampling section 62 and the sampling tank 2〇2, and sampling and feeding of the trace liquid is completed. After the micro-sampling of the liquid is completed, the cleaning tank 2〇5 can be opened, @ and the cleaning liquid is injected into the cleaning tank 205, and the high-pressure gas is perfused and released through the gas chamber portion 7 to drive the cleaning. The cleaning liquid in the tank 2〇5 flows along the microchannel 62, thereby cleaning the microchannel 62, so that the microfluidic wafer 2 can be reused after cleaning, but in practice, the cleaning tank 2〇5 is not necessary. As shown in FIG. 2 and FIG. 6 , the microfluidic wafer 2 is subjected to a graph of the sampling amount of the small liquid corresponding to the release time of the high pressure gas that drives the gas chamber 71. As can be seen from the drawing, the microfluidic wafer 2 can be electrically operated. The use of the trace amount of liquid 'has been well reproducible, and its sample size can be as small as 0 05 ///. As shown in FIG. 2 and FIG. 7, the sampling amount of the microfluidic chip 2 is compared with the sampling amount and the theoretical sampling value of the commercially available sampler, wherein the sampling amounts are 1, 2, 3, 4, 5, and 6, respectively. #/ 'Sampling of each sampling amount 1 time, as shown in the drawing data, the sampling error value of the microfluidic chip 2 is smaller than that of the commercially available sampler. 201020544 As shown in Figures 2 and 8, the microfluidic wafer 2 was sampled with a solution of 〇h (0.04M 'pH 12,616), and the sampled Ν solution was made to benzoic acid (total 50 〆 ' 0.002 M The acid-base titration experiment was carried out and compared with a commercially available sampler. The sample volume per solution was 3^/, and near the equivalent point, the sampled amount of the titrated Na〇H solution was changed to 0.25 y /. As can be seen from the schema data, the titration curve obtained by the microfluidic wafer 2 is almost the same as that obtained by a commercially available sampler. In this embodiment, the top abutting portion 42 of the flow channel layer 4 is arranged to prevent the entire driving portion 4 from being pushed up by the bottom and completely abutting against the top surface of the substrate 3, thereby affecting the driving portion. 41 retracts the speed of the complex, but in practice, the abutting portions 42 are not necessary. In summary, the microfluidic channel 6 and the plenum mechanism 7 formed by the substrate 3, the flow channel laminate 4 and the plenum laminate 5 are laminated, so that the microfluidic wafer 2 can be applied to a trace amount of liquid. Accurate sampling and sample delivery, and its sampling volume is much smaller than the sampling volume of the commercially available sampler. 'Sampling accuracy is better than the commercially available sampler'. It can be used for accurate sampling and sample delivery of precious samples, and can be combined with stylized By controlling the air pressure source system and achieving the functions of automatic sampling and sample delivery, it is quite convenient and practical, so the object of the present invention can be achieved. The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an exploded perspective view of a preferred embodiment of a microfluidic wafer of the present invention for accurate microsampling and sample delivery; FIG. 2 is a schematic bottom view of the preferred embodiment of the preferred embodiment; Figure 3 is a combined plan view of the preferred embodiment, illustrating the case where the first valve chamber, the second valve chamber, and the drive chamber have been filled with high pressure gas; Figure 4 is a view similar to Figure 3, illustrating the case where the high pressure gas of the first valve chamber and the drive chamber is removed, and the sample liquid is locally drawn into the sampling section; Figure 5 is a view similar to Figure 4, illustrating The high pressure gas of the two valve chambers is removed and the first valve chamber and the driving chamber are filled with high pressure gas; FIG. 6 is the pressure release time of the pump chamber corresponding to the volume of the sample in the preferred embodiment. Figure 7 is a bar graph comparing the sampling error of the preferred embodiment with a commercially available sampler; and Figure 8 is a graph of the acid-base titration of the preferred embodiment and a commercially available sampler. 10 201020544 [ Explanation of the symbol of the element] 2 ...-·microfluidic wafer 6 · · . . . microchannel 201... •... reservoir 61 * • ... • drive section _ 202 ·· ...· Sampling tank 62- •...Sampling section 203... First hole 621 •-.....Sampling section 204 •...·Second air hole 622 ......•Connecting section 205... .. cleaning tank 63·····feed section 3 "..., ...* ·substrate 64... .....* · water injection section* Κ φ X ♦ | ..... runner layer '" ;J « . .......Air chamber mechanism Ϊ t » I "...Perforation 71 ···...Drive air chamber 1 * * * * 1 ...* · Drive unit 711 ...·... Air chamber section. 42 **** ..... abutting portion 712 - ... communicating portion 43, "* ..... first valve portion 72··. ...the first wide_door air chamber K ♦ * ♦ 1 ••...the second valve part 73 ·· .......the second valve air chamber 5 ... ...·· air chamber laminate 900 •......sample liquid 5 0... -...perforation