1306490 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種致動微流體之裝置與方法，特別關於一 種驅動單元與微流體糸統晶片（或稱微流體晶片）分離製作之 致動微流體之裝置與其致動方法。 【先前技術】 近年來由於微機電系統技術的開發與成熟，利用微流體技 術進行生物醫學方面研究已成為潮流。無論是於單一微系統晶 片上完成複雜之生化或化學分析的微全分析系統（Micr〇T〇tal Analysis System，#TAS)概念，或是將傳統實驗室微縮至單 人曰曰片上操作的實驗室晶片概念，皆是奠基於微流體技術的整 。而發展。根據微越特性而開發出來的相關元件包含微流 道微反應益、微閥門、微混合器、微分離器及流體驅動單元。 而其中流體驅動技術，亦名流體致動技術，扮演了關鍵性的角 色：微流體晶片雖具有將實驗程序微縮至微小晶片上之能力， 但若無合適的流體致動方法搭配，微流體將無法被傳輸，依晶 片不同的需要，不同麵的微流體將無法互相反應或作用，無 法達成晶片設計時所欲達成的目的。 、微*體致動方法大致可分為非機械式與含可動結構之機 械式兩大類。非機械式主要概為流體驅動單元整合於微流體 晶片中，以電壓或電流輸入於晶片中内建之電極，產生如電動 力（electrokhetic force)、電磁力（elect_agnetic f〇rce)、或 氣動力（pneumatie fGrce)料進而推虹作越。此類方法 5 1306490 之特點在於晶林杉含可騎構，耻在上具有可靠度 减穩定性佳等優點，此外因直接建構於晶片上，亦無與微晶 片整合或麵合等問題。然而就該類驅動方法而言，所需操作功 率或電塵通常很大，且其所適用的流體有限，需考量流體的電 性、PH值及電解液需求等限制。 相對而5，機械式則通常不受限於流體的性質，其中常需 要包含-可鱗射能運作，例如彈性平面波式是湘指差狀 電極於壓電基材表面產生平面波，藉由平面波的傳遞，帶動流 體往前運動；或者细-機械可動件如可動触，於其上施加 如氣動式、壓電式、靜電式、電磁式、或域合金式等力量加 以帶動，藉由該薄膜之運動以產生氣動力（pneumaticf〇rce)， 進而壓縮氣室達成驅動效果，如美國專利6,227，號，請來 照第-圖，其為該美國專利之一示意圖，其利用一内建於晶片 上之致動器（44)週期性地壓迫覆蓋於氣室（24)之可振動薄 膜（46)，配合流體單向元件（fludic di〇de)以使流體往單方 向運動。由於致動器直接建構於微流體晶片上，使得微流體晶 片的製作成本相對提冑，製程也因相容性問題更為複雜，甚至 降低其作為拋棄式晶片的可行性。 因此採用將動力源分離化之分式亦被提出，主要的特徵則 為，流體驅動單域微流體晶片採分離式設計，操作時透過驅 動單元與微流晶>;之間的$合，使驅動單摘生狀物理量變 化傳遞到微流體晶片上’如此可避免積體化方式所產生如晶片 製作成本、製程相容性及流體限制等問題，如美國專利 2004/0063217公開專利，請參照第二圖，其為該美國專利之一 6 1306490 ^忍圖’其利用—外加式線性致動器（2G)壓迫-彈性中間層 23)，達成壓迫氣室並驅動流體之目的。惟此種方法雖 晶片與致動機構分離化之優‘點，但線性致動器之成本、體積與 ，制仍頗繁雜，此外，晶片本身内建薄膜常伴隨有製作成本 南與良率下降等問題。 職疋之故，發明人鑑於習知技術之設計缺失，乃經悉心試1306490 IX. DESCRIPTION OF THE INVENTION: FIELD OF THE INVENTION The present invention relates to an apparatus and method for actuating a microfluid, and more particularly to an actuation of a drive unit and a microfluidic wafer (or microfluidic wafer). Microfluidic device and its actuation method. [Prior Art] In recent years, due to the development and maturity of MEMS technology, research on biomedical aspects using microfluidic technology has become a trend. Whether it's the Micr〇T〇tal Analysis System (#TAS) concept for complex biochemical or chemical analysis on a single microsystem wafer, or the experiment of miniaturizing a traditional laboratory to a single cymbal The concept of the chamber wafer is based on the microfluidic technology. And development. Related components developed based on micro-features include microchannel microreactions, microvalves, micromixers, microseparators, and fluid drive units. Among them, fluid-driven technology, also known as fluid-actuated technology, plays a key role: microfluidic wafers have the ability to shrink experimental procedures onto tiny wafers, but without proper fluid-actuating methods, microfluidics will Can not be transmitted, depending on the needs of the different wafers, microfluids of different faces will not be able to react or interact with each other, and the desired purpose of the wafer design cannot be achieved. The micro-body actuation method can be roughly divided into two categories: non-mechanical and mechanical with movable structure. The non-mechanical type is mainly a fluid drive unit integrated in a microfluidic wafer, which is input to a built-in electrode in a voltage or current, such as electrokhetic force, electromagnetic force (elect_agnetic f〇rce), or aerodynamic force. (pneumatie fGrce) material and then push the rainbow more. Such a method 5 1306490 is characterized by the fact that the crystal cedar has a rideable structure, and the shame has the advantages of reliability and stability, and is also directly constructed on the wafer, and has no problem of integration or face-to-face with the microchip. However, in the case of such a driving method, the required operating power or electric dust is usually large, and the fluid to which it is applied is limited, and the limitations of the electrical properties, pH, and electrolyte requirements of the fluid are considered. In contrast, mechanical means are generally not restricted to the nature of fluids, and it is often necessary to include - scalar energy. For example, the elastic plane wave type is a differential electrode that produces a plane wave on the surface of a piezoelectric substrate by plane wave. Passing, driving the fluid forward; or a fine-mechanical movable member, such as a movable contact, exerting a force such as a pneumatic, piezoelectric, electrostatic, electromagnetic, or domain alloy on it, by the film The movement produces a pneumatic force (pneumaticf〇rce), which in turn compresses the air chamber to achieve a driving effect, as described in U.S. Patent No. 6,227, the disclosure of which is incorporated herein by reference in its entirety in The actuator (44) periodically compresses the vibrating membrane (46) covering the plenum (24), engaging the fluid unidirectional element to move the fluid in a single direction. Since the actuator is directly constructed on the microfluidic wafer, the fabrication cost of the microfluidic wafer is relatively high, and the process is more complicated due to the compatibility problem, and even reduces its feasibility as a disposable wafer. Therefore, a fraction that separates the power source is also proposed. The main feature is that the fluid-driven single-domain microfluidic wafer is separated and designed to pass through the drive unit and the microfluidizer. The problem of transferring the physical properties of the single-picked material onto the microfluidic wafer can be avoided. Thus, problems such as wafer fabrication cost, process compatibility, and fluid limitation can be avoided, such as the patent of US Patent No. 2004/0063217, please refer to The second figure, which is one of the U.S. Patents 6, 1 306, 490, which utilizes an external linear actuator (2G) compression-elastic intermediate layer 23, achieves the purpose of compressing the air chamber and driving the fluid. However, although this method is superior to the separation mechanism of the actuator and the actuator, the cost, volume and system of the linear actuator are still quite complicated. In addition, the built-in film of the wafer itself is often accompanied by a decrease in manufacturing cost and a decrease in yield. And other issues. The inventor’s work, due to the lack of design of the prior art, was carefully tested.
研究’並—本鐵柯捨之精神，終發明A本案「致動微流 體之農置與方法」，以下為本案之簡要說明。 動“ 【發明内容】 “本案欲提出—種致_流體之裝置與方法，目的在改善現 ^微，體致動_之諸多限制：如微流體晶片的製作成本與製 :二相容性’以及使用時卫條體的限㈣問題。其特徵採驅動 早讀微流體系統晶片分開製作之設計，以避免建構 於微流體系統晶片上所衍生之問題；在此同時將具4 =動件’如可動薄膜等元件，設計於驅動單元内： =體糸U在不含任何可鱗構下，達聊低縣與提升良 之要求。，轉單元與微流齡統晶y之轉合係彻該驅動單 70内之彈性薄賴，其具有柔軟、可㈣« — =rage^雖，操料可㈣相作快錢骑時_合， 二大幅簡化叙合問題，並保持良好氣密效果的優點，讓驅動 成之氣壓能有效地傳遞到微流體纽晶片。再藉由局 膜區的設計，能根據不同需要多工式地操作，以壓迫 或拉伸暫雜合時所產生之封職室，進喊生㈣以致動工 7 1306490 乍L體，、t’Μ流體系統晶片不含任何可動件虚 此致動微流體之裝狀紋具有傾本、賴封 夕^本裝置更有_、、設計簡單、操作簡易、可程式化等優In the study of the spirit of the company, I finally invented the case "Activating the micro-fluid farming and methods". The following is a brief description of the case. "Inventive content" "This case is intended to propose - the device and method of the _ fluid, the purpose of improving the current micro-body, body actuation _ many restrictions: such as the production cost and system of microfluidic wafer: two compatibility' And the limitation of the use of the guard strip (four). The feature is designed to drive the design of the microfluidic system wafers separately to avoid the problems arising from the microfluidic system wafers; at the same time, the components such as movable parts such as movable films are designed in the driving unit. : = Body 糸 U does not contain any squama, and meets the requirements of lower counties and upgrades. The rotation of the unit and the micro-flowing system y is the elastic thinness of the driving unit 70, which is soft and can be (4) « — =rage^, although the material can be used as a quick money ride. 2, greatly simplifying the problem of reconciliation, and maintaining the advantages of good airtightness, so that the driving pressure can be effectively transmitted to the microfluidic new chip. Through the design of the membrane area, it can be operated according to different needs, to press or stretch the closed room generated by the temporary hybridization, and to enter the life (4) to start the work 7 1306490 乍L body, t' ΜFluid system wafer does not contain any movable parts. The actuating microfluids have a tilting pattern, and the device is more _, simple in design, easy to operate, and programmable.
本發明之一種態樣係有關一種微流體致動裝置，其包括. -驅動單元及-微越晶片。_單元包括—_體及—基 板’基板與薄膜體相結合；微流體晶片與驅動單元相搞合。其 中耦σ可藉任何習用的一般|禺合裝置將驅動單元及微流體晶 片相麵5驅動單元與微流體晶片_合後’薄膜體與微流體晶 片產生暫時性地氣密接合。 驅動單元更包括-個以上之穿孔於基板中，薄膜體與穿孔 結合處_賴具雜，且基板已為穿孔穿透而使薄膜體暴露 而成為可_舰，_體麟板之非穿孔部分所結合處為不 叮動薄膜d纟巾，可動薄膜區搭配有—薄膜致動裝置以致動 薄膜體’致動裝置採用電控方式，可執行單―衝程式、往復式 及程式化之㈣以造朗難形變，壓触合後祕體與微流 體晶片藉II密接合所形成之氣室，產生一氣壓變化以驅動微流 體’所產生之壓力變化可準確控繼流體之位置，同時能根據 需要進行多工操作。 微流體晶片更包括一基材，該基材上有一個以上與可動薄 膜區相對應之開放式凹槽結構，微流體晶片與驅動單元耦合 後’改變4膜體與微流體晶片藉氣密接合所形成氣室之體積便 可產生致動微流體之壓力源。此外，微流體晶片更可包括一個 以上之止流閥’止流閥與驅動單元搭配後產生更多樣的流體控 8 1306490 制效果。其中，止流閥係選自形狀止流閥、材質止流閥其中之 —及其組合。One aspect of the invention relates to a microfluidic actuator comprising: - a drive unit and - a micro-wafer. The _ unit includes a - _ body and - substrate 'substrate combined with the film body; the microfluidic wafer is coupled to the drive unit. The coupling σ can be temporarily and hermetically joined by the driving unit and the microfluidic wafer face 5 driving unit and the microfluidic wafer-after film body and the microfluidic wafer by any conventional general-purpose device. The driving unit further includes more than one perforation in the substrate, and the film body and the perforation joint are separated, and the substrate has penetrated through the perforation to expose the film body to become a non-perforated part of the _ lin The joint is a non-floating film d wipe, and the movable film zone is equipped with a film actuating device to actuate the film body. The actuating device is electronically controlled, and can be operated by single stroke, reciprocating and stylized (4). It is difficult to deform, and the gas chamber formed by the tight contact between the secret body and the microfluidic wafer can generate a pressure change to drive the microfluidic pressure to accurately control the position of the fluid. Multiple operations are required. The microfluidic wafer further comprises a substrate having more than one open groove structure corresponding to the movable film region, and the microfluidic chip is coupled with the driving unit to change the 4 film body and the microfluidic wafer by airtight bonding The volume of the formed plenum creates a source of pressure that actuates the microfluid. In addition, the microfluidic wafer can include more than one stop valve. The stop valve is combined with the drive unit to produce a wider variety of fluid control effects. Wherein, the stop valve is selected from the group consisting of a shape stop valve and a material stop valve - and combinations thereof.
本發明之另一種態樣係有關一種微流體致動裝置，其包括 —微流體晶片及―驅動單元，微流體晶片包含複數個開放結 構開放、'Ό構係作為流體注入槽、壓力槽以及開口槽，之間以 、复婁文個*道相連Ί道可為開放式或封閉式，所謂開放式流道 係指流道在微流體單元與鶴單元未齡前絲露於空氣 :’而封閉式流道係指流道位於職體晶#崎，未暴露於空 礼中，驅動單70包含-基板及—薄膜體，轉單元與微流體晶 二互相麵合。其中’轉合可藉任何習用的一般搞合裝置將驅動 早凡及微流體晶片相輕合’輕合裝置係包括於驅動單元中，麵 合裝置包含-可雜勒之平台及_機構，以提供該驅動單 讀該微流體晶片進給、維馳合定位及_之魏。驅動單 ^與微流體晶“合後，薄與微流體“產生料性地氣 Η驅動早㈣薄膜體貼附於基板上。基板可藉由微影餘刻或 ^加工技*穿孔後再將薄賴黏著於其上；亦可先將薄膜體 ”未經穿孔之基板互減附後，再以微影 技= 使薄膜體暴露。薄膜體與穿孔二 應，而薄膜體與基板之非穿孔部分所結合處為不=對 置採用電控方式，可執行L衝^置’致動農 丁早衝私式、在復式及程式化之操作 9 1306490 以造成薄膜體形變’壓迫或舒張耦合後氣密接合之氣室，產生 氣壓變化以驅動微流體，所產生之壓差可據以控制微流體之 位置，同時能根據需要進行多工操作。Another aspect of the invention relates to a microfluidic actuator comprising: a microfluidic wafer and a "drive unit", the microfluidic wafer comprising a plurality of open structure open, 'Όstructures as fluid injection slots, pressure slots and openings The troughs, between the reciprocating and the rectifying channels can be open or closed. The so-called open flow channel means that the flow channel is exposed to the air in the microfluidic unit and the crane unit before the age: 'and closed The flow channel means that the flow channel is located in the body of the body crystal, not exposed to the air ceremony, the drive unit 70 comprises a substrate and a film body, and the rotating unit and the microfluidic crystal face each other. Among them, 'transfer can be driven by any conventional general device, which will drive the light and micro-fluid wafers to be lighted. The light-weight device is included in the drive unit, and the face-to-face device includes the platform and the mechanism. The driver is provided to read the microfluidic wafer feed, the Weichi joint positioning, and the Wei. After the driving unit ^ is combined with the microfluidic crystal, the thin and microfluidic "generate gas" drives the early (four) film body to be attached to the substrate. The substrate can be adhered to the substrate by perforation or ^machining technique*; the film body can be firstly subtracted from the substrate without perforation, and then the film body can be made by micro-image technology. Exposed. The film body and the perforation should be combined, and the non-perforated part of the film body and the substrate are not combined. The electronic control method can be used, and the L-clamping can be performed to activate the Ding Ding early private, in the duplex and Stylized operation 9 1306490 to cause the film body to deform into a gas chamber that is airtightly bonded after compression or relaxation coupling, generating a change in air pressure to drive the microfluid, and the resulting pressure difference can be used to control the position of the microfluid, and at the same time, as needed Perform multiplex operations.
微流體晶片之材質係為可微加工之材質，其係選自 PMMA、PC、SU-8、TEFLON、PDMS、玻璃、矽晶片及金屬 其中之一或其組合。而驅動單元中的基板材質係使用較高硬度 之材料如玻璃、矽晶片及金屬其中之一或其組合；驅動單元 中的薄膜體係使用較低硬度之彈性材料，如pDMS。 本發明之再一種態樣係與一種致動微流體的方法有關，其 括下歹】步驟.（a)提供—微流體晶>{，包含流體注入槽、壓 θ槽及開口槽之開放結構，之間藉由複數個流道相連接；（b) 提1 共一驅動單元，包含一薄膜體、一穿孔基板、一個以上設置 =膜’ _致練置及—進給機構，其中，薄膜體與穿孔 土反之牙孔部結合處為可動薄膜區，薄膜體與穿孔基板之非穿 孔t分結合處為不可動薄麵；⑷將—種以上之工作流體滴 室，不可動壓力槽形成封閉氣 ^㈦利用致動裝置致動可動薄膜區之薄 籌 變，以改變封閉氣室之勤 a u生心 流動。 土刀_卫作流體由高壓區往低壓區 槽亦可作綱m用，可將工作流體注入勤 槽，可增加氣室壓縮比，而增加踅動、、^ 驅 麼力槽亦可料卿動·體之魏驅動力 了猎由祕其中之封閉氣室體積以產生負塵 1306490 動工作流體由開口槽之高壓區往壓力槽之低壓區流動。The material of the microfluidic wafer is a micromachinable material selected from one or a combination of PMMA, PC, SU-8, TEFLON, PDMS, glass, tantalum wafer and metal. The substrate material in the driving unit is one of a higher hardness material such as glass, germanium wafer and metal or a combination thereof; the film system in the driving unit uses a lower hardness elastic material such as pDMS. A further aspect of the invention relates to a method of actuating a microfluid, which comprises the steps of: (a) providing a microfluidic crystal>{, comprising a fluid injection tank, a pressure θ groove, and an open groove opening. The structure is connected by a plurality of flow channels; (b) a total of one driving unit, comprising a film body, a perforated substrate, and more than one setting = film ' _ 练 练 and feeding mechanism, wherein The joint between the film body and the perforated soil and the tooth hole portion is a movable film region, and the non-perforated t-portion of the film body and the perforated substrate is an immovable thin surface; (4) more than one type of working fluid drip chamber, non-movable pressure groove is formed The enclosed gas (7) utilizes an actuating device to actuate the thin filming of the movable film zone to change the flow of the closed chamber. The soil knife _ Wei Zuo fluid from the high pressure zone to the low pressure zone slot can also be used as the m, can inject the working fluid into the trough, can increase the compression ratio of the gas chamber, and increase the turbulence, and ^ drive the force trough can also be expected The movement of the body and the body of the body drives the volume of the enclosed chamber to create a negative dust. 1306490 The working fluid flows from the high pressure zone of the open channel to the low pressure zone of the pressure cell.
本發明中驅動單元與微流體系統晶片為分離式設計，藉由 —般習用之耦合裝置互相_合，所有工作流體與驅動單元不合 直接接觸，料會與^產生交互污染，因而轉單元可重^ 使用，另一方面，微流體系統晶片因不含任何可動件與動力 源，故具有低成本、可拋棄式之優勢。其中，驅動單元尺寸與 级仙·體系統日日片匹配，能提升驅動效率，並減少所佔體積、元 件製作及操作成本。另—方面，本發鴨作簡單，使用者僅需 將工作流體注人晶片的注人區’無須再針對晶片做任何處理^ 可與驅動單访合進行功，玉作完成後亦驗絲除晶片。 【實施方式】 ^為了更進一步說明本發明為達成預定目的所採取之技 術、手段及功效，請參閱以下有關本發明之詳細說明，相信本 么月之目的、特彳讀特點，當可由此得__深人且具體之了解， 列·僅提供參考與說日關，並非用來對本發明加以限 架構示意圖4包括=说、弟三圖，其為本案之系統 其中。驅動單二;^ ⑴及一微流體晶片⑵， 貼附的基板⑴)，L 賴體⑺及被薄賴⑺所 姑瞧t# 土板（12)有部分被去除直到薄膜體（7) 紗 乂可動薄膜區⑴，而除可動薄膜區（3)外，薄 1'豆個5其餘部分為不可動薄膜區。微流體晶片（2)包括至 少-個與可動薄膜區⑶位置相對應之壓力槽(4):= * 1306490 動薄膜區（3)位置相對應之流體注入槽⑸，以及開口槽（6)， . 壓力槽⑷、流體注入槽⑴、開口槽⑹彼此間以流道⑻ 相連。致動微錢時需練合裝置將驅鮮元⑴及微流體 晶片（2)互相輕合。 致動微流體之卫作原理請參照第四圖，其為本案致動微 流體的工制理之舰圖，請先參照第四⑷圖，驅動單元 ⑴包括薄膜體（7)、可動薄膜區（3)以及裝設於可動薄膜 11上之致動器（8);卫作體（9)藉由流體注人槽（5)注入 微系統晶片⑵中，微系統晶片⑵包括壓力槽⑷、流體 注入槽（5)、工作流體（9)及形狀止流閥（1〇)。 再請參照第四（b)圖’藉—般任何慣用触合裝置將驅 動單元（1)及微流體晶片（2)相耦合，因薄膜體（7)具有 • 1性’因此耗合後會使可動薄膜區（3)與壓力槽⑷氣密接 合而密封壓力槽（4)，而不可動薄膜區會密封流體注入槽（5)， 使部分微流體通道被密封。 _ 於第四（c)圖中，驅動致動器（8)以使可動薄膜區（3) 的薄膜體⑺產生形變，由於壓力槽⑷已形成封閉空間， ，此薄膜體⑺的形變會改變壓力槽（4)中的空氣體積，而 ^«成壓力槽（4)内的壓力增加，進而撥壓工作流體（9)，使 $往低壓區移動，如此，便可達成致動微流體之目標。而於微 /;IL體通道中可依需要設置形狀止流閥（10 )以控制工作流體（9) 的机動，使工作流體（9)能停在適當的位置以符合反應或測 里所需要的時間、反應量及濃度等反應條件。 本案之另一較佳實施例請參照第五圖，其為本案致動微 12 Ι3Ό6490 流體的工作原理之另一側視圖，本案中之壓力槽（4)亦可作 為注入工作流體（9)之用，如此可增加氣室壓縮比，而增加 驅動流體之氣壓驅動力。請先參照第五（a)圖，驅動單元（1) 包括薄膜體（7)、被薄膜體（7)所貼附的基板（12)、可動薄 膜區（3)以及裝設於可動薄膜區上之致動器（8);工作流體 (9)藉由壓力槽（4)注入微系統晶片（2)中，微系統晶片 (2)包括壓力槽（4)、工作流體（9)及形狀止流閥（1〇)。In the present invention, the driving unit and the microfluidic system chip are separated and designed to be mutually coupled by a commonly used coupling device, and all working fluids are not in direct contact with the driving unit, and the material may be contaminated with each other, so that the rotating unit can be heavy. ^ Use, on the other hand, the microfluidic system chip has the advantages of low cost and disposable because it does not contain any movable parts and power source. Among them, the size of the drive unit is matched with the day and piece of the system, which can improve the driving efficiency and reduce the volume, component manufacturing and operating costs. On the other hand, the hair duck is simple, the user only needs to inject the working fluid into the injection area of the wafer. No need to do any processing on the wafer. ^ It can be combined with the driving single visit, and the silk is removed after the completion of the jade. Wafer. [Embodiment] In order to further explain the techniques, means and effects of the present invention for achieving the intended purpose, please refer to the following detailed description of the present invention, and believe that the purpose of the month and the characteristics of the special reading can be obtained therefrom. __Deep people and specific understanding, column · only provide reference and say that the day is not used to limit the structure of the structure of the schematic diagram 4 including = say, brother three map, which is the system of the case. Drive single two; ^ (1) and a microfluidic wafer (2), attached substrate (1)), L lyon (7) and quilt (7) aunt t# soil plate (12) partially removed until the film body (7) yarn The movable film region (1) is removed, and the remaining portion of the thin 1' bean 5 is a non-movable film region except for the movable film region (3). The microfluidic wafer (2) includes at least one pressure groove (4) corresponding to the position of the movable film region (3): = * 1306490 the fluid injection groove (5) corresponding to the position of the movable film region (3), and the open groove (6), The pressure tank (4), the fluid injection tank (1), and the open tank (6) are connected to each other by a flow passage (8). When the micro-money is actuated, the device is required to combine the fresh-keeping element (1) and the microfluidic chip (2) with each other. Please refer to the fourth figure for the principle of actuating microfluids. For the case of the microfluidic system, please refer to the fourth (4) diagram. The drive unit (1) includes the film body (7) and the movable film area. (3) and an actuator (8) mounted on the movable film 11; the guard body (9) is injected into the microsystem wafer (2) by a fluid injection tank (5), and the microsystem wafer (2) includes a pressure tank (4), Fluid injection tank (5), working fluid (9) and shape stop valve (1〇). Referring to Figure 4(b), the drive unit (1) and the microfluidic chip (2) are coupled by any conventional contact device. Since the film body (7) has a '1', it will be consumed. The movable film zone (3) is hermetically joined to the pressure groove (4) to seal the pressure groove (4), and the non-movable film zone seals the fluid injection groove (5), so that part of the microfluidic channel is sealed. _ In the fourth (c) diagram, the actuator (8) is driven to deform the film body (7) of the movable film region (3), and the deformation of the film body (7) is changed because the pressure groove (4) has formed a closed space. The volume of air in the pressure tank (4), and the pressure in the pressure tank (4) increases, thereby pressing the working fluid (9) to move the pressure to the low pressure zone, thus achieving actuation of the microfluidic aims. In the micro/; IL body channel, a shape stop valve (10) can be provided as needed to control the maneuvering of the working fluid (9) so that the working fluid (9) can be parked in an appropriate position to meet the needs of the reaction or the measurement. Reaction conditions such as time, reaction amount and concentration. For another preferred embodiment of the present invention, please refer to the fifth figure, which is another side view of the working principle of actuating the micro 12 Ι 3 Ό 6490 fluid, and the pressure groove (4) in the present case can also be used as the injection working fluid (9). In this way, the gas chamber compression ratio can be increased, and the pneumatic driving force of the driving fluid can be increased. Referring to FIG. 5(a), the driving unit (1) includes a film body (7), a substrate (12) attached by the film body (7), a movable film region (3), and a movable film region. The upper actuator (8); the working fluid (9) is injected into the microsystem wafer (2) by a pressure tank (4) comprising a pressure tank (4), a working fluid (9) and a shape Stop valve (1〇).
再請參照第五（b)圖，藉一般任何慣用的耦合裝置將驅 動單元（1)及微流體晶片（2)相_合，因薄膜體（？）具有 彈性，因此耦合後會使可動薄膜區（3)與壓力槽（4)氣密接 合而密封壓力槽（4) ’至此，微流體晶片（2)中之部分微流 體通道被密封。 於弟五（c)圖中’驅動致動器（8)以使可動薄膜區（3) 的薄膜體（7)產生形變，由於壓力槽（4)已形成封閉空間’ 因此薄膜體（7)的形變會改變壓力槽（4)中的空氣體積，而 造成壓力槽（4)内的壓力增加，進而擠壓工作流體（9)，使 其往低壓區移動，如此，便可達成致動微流體之目標。而於微 流體通道中可依需要設置形狀止流閥（10)以控制工作流體（㈧ ，流動，使工作流體（9)能停在適當的位置以符合反應或 量所需要的時間、反應量及濃度等反應條件。 u 然其並非用 雖然本發明已以數個較佳實施例揭露如上， 以限定本發明，任何熟習此技藝者，在不脫離本發明之精神 乾圍内’當可作些許之更動與潤飾，因此本發明之保護範: 視後附之申請專利範圍所界定者為準。 田 13 1306490 【圖式簡單說明】 第一圖：美國專利6,227,809號的一結構示意圖； 第二圖：美國專利2004/0063217號的一結構圖； 第三圖：本案之系統架構示意圖； 第四圖：本案之致動微流體的工作原理之側視圖；及 第五圖：本案之致動微流體的工作原理之另一侧視圖 2微流體晶片 4壓力槽 6開口槽 8致動器 10形狀止流閥 12基板 23彈性中間層 44内建於晶片上之致動器 【主要元件符號說明】 ® 1驅動單元 3可動薄膜區 5流體注入槽 7薄膜體 9工作流體 11流道 20線性致動器 24氣室 φ 46可振動薄膜 14Referring to FIG. 5(b), the driving unit (1) and the microfluidic wafer (2) are coupled by any conventional coupling device. Since the film body (?) has elasticity, the movable film is coupled after coupling. Zone (3) is hermetically joined to pressure vessel (4) to seal pressure vessel (4) 'to this point, a portion of the microfluidic channel in the microfluidic wafer (2) is sealed. In the fifth (c) diagram, 'the actuator (8) is driven to deform the film body (7) of the movable film region (3), since the pressure groove (4) has formed a closed space', the film body (7) The deformation changes the volume of air in the pressure tank (4), causing the pressure in the pressure tank (4) to increase, thereby squeezing the working fluid (9) to move it to the low pressure zone, thus achieving actuation micro The target of the fluid. In the microfluidic channel, a shape stop valve (10) can be provided as needed to control the working fluid ((8), flow, so that the working fluid (9) can be stopped at an appropriate position to meet the reaction or amount of time, the amount of reaction And the reaction conditions such as the concentration, etc. u are not used. Although the invention has been disclosed in several preferred embodiments as above, to limit the invention, any person skilled in the art can do it without departing from the spirit of the invention. A few modifications and retouchings, therefore, the protection of the present invention is as defined in the appended claims. Field 13 1306490 [Simple description of the drawings] First: a schematic diagram of a structure of US Patent 6,227,809; Figure: A structural diagram of US Patent No. 2004/0063217; Third: Schematic diagram of the system architecture of this case; Fourth: Side view of the working principle of the actuated microfluid in this case; and Fifth: The actuation of this case Another side view of the working principle of the fluid 2 microfluidic wafer 4 pressure tank 6 open slot 8 actuator 10 shape stop valve 12 substrate 23 elastic intermediate layer 44 actuator built into the wafer [main components DESCRIPTION OF SYMBOLS ® 1 Drive unit 3 Movable film area 5 Fluid injection tank 7 Film body 9 Working fluid 11 Flow path 20 Linear actuator 24 Air chamber φ 46 Vibrating film 14