.200940235 九、發明說明 【發明所屬之技術領域】 本發明特別是有關利用在大型液晶顯示器等之製造的 χγ載台裝置。 【先前技術】 以往這種領域的技術有日本專利特開2007-21 6349號 φ 公報。該公報所記載之XY載台裝置具備：一對之石定盤 ’係朝Y軸（第1軸線）方向延伸；一對之導引件，係在 各石定盤的上面朝Y軸方向延伸；一對之滑動件（第1滑 動件）’係沿著各導引件移動，剖面爲3型；氣墊（第1 氣體軸承），係設在各滑動件的上壁部，對導引件的上面 噴出空氣，支撐滑動件；Y載台（導引構件），係朝X軸 (第2軸線）方向延伸，且兩端連結在各滑動件；X載台 (第2滑動件），係沿著Y載台移動；氣墊（第2氣體軸 Φ 承）’係設在X載台下面的四隅’對各石定盤的上面噴出 空氣’支撐X載台；吸附盤，係配置在X載台上，真空 吸附液晶顯不器用玻璃基板等工件（對象物）。藉由這種 構成，隨著X載台及Y載台之移動，工件在水平面内移 動。 〔專利文献1〕日本專利特開2007-216349號公報 【發明內容】 其中’在上述XY載台裝置，爲了必須確保在石定盤 200940235 的上面裝設滑動件專用的導引件所需用的空間，更因爲近 年來因液晶顯示器等大型化使得工件也有變大的傾向’隨 之使得石定盤必須變大，在石材的確保、石材加工、及石 材的輸送等方面產生問題，並且產生裝置大型化之問題。 本發明之目的在於提供可謀求縮小定盤且裝置小型化 之XY載台裝置。 本發明所相關之XY載台裝置，其特徴爲具備：定盤 ，其上面被當作滑行面；第1滑動件，係沿著滑行面朝第 1軸線的方向移動；導引構件，係連結在第1滑動件，且 在水平面内朝與第1軸線正交的第2軸線之方向延伸；第 2滑動件，係沿著導引構件朝第2軸線的延伸方向移動； 及腳部，具有對滑行面噴出氣體的第2氣體軸承，且支撐 第2滑動件；在第1滑動件形成有貫通部，腳部通過前述 貫通部。 在該XY載台裝置，第1氣體軸承可將定盤上面當作 滑行面來支撐第1滑動件，腳部藉由通過形成在第1滑動 件的貫通部之方式，將定盤上面當作第2氣體軸承的滑行 面來支撐第2滑動件。如此地，藉由使第1氣體軸承和第 2氣體軸承共有滑行面的方式，不須在定盤上面裝設第i 滑動件專用的導引件，藉此可謀求縮小定盤且裝置小型化 〇 又’第1滑動件由三個第1氣體軸承支撐爲佳。藉由 第1滑動件由三個第1氣體軸承所支撐，可提高第1滑動 件的安定性。 -6- 200940235 又，各具備一對之定盤及第1滑動件，在導引構件的 兩端側各自連結著第1滑動件爲佳。在一對之定盤的任一 個，皆不須在上面裝設第1滑動件專用的導引件，藉此可 謀求縮小各定盤且裝置更小型化。 又，較佳爲進而具備：吸附盤，係配置在第2滑動件 上，用於吸附上面所載置的對象物；及第3氣體軸承，藉 由對滑行面噴出氣體的方式支撐吸附盤。藉由使第1氣體 φ 軸承和第2氣體軸承和第3氣體軸承共有滑行面的方式， 不須另外裝設第3氣體軸承用的滑行面，藉此謀求縮小定 盤且裝置小型化。 根據本發明所相關之XY載台裝置，可謀求縮小定盤 且裝置小型化。 【實施方式】 以下，參照附圖説明本發明之XY載台裝置之較佳實 Φ 施形態。 如第1~5圖所示，XY載台裝置1具備：並設在基座 2上且朝Y軸方向延伸的一對之石定盤（定盤）3、4、沿 著石定盤3、4朝Y軸方向移動的Y軸載台6、當作Y軸 載台6的驅動部之功能的一對之Y軸線型馬達7、8、在 Y軸載台6上朝X軸方向移動的X軸載台9、當作X軸載 台9的驅動部之功能的X軸線型馬達10、及配置在X軸 載台9上的吸附盤11。此外，如第1、2圖所示，X軸（ 第2軸線）及Y軸（第1軸線）係於水平面上互相形成 200940235 90度，將垂直方向定爲Z軸方向’以下必要時使用X軸 、Y軸、Z軸。. 一方之石定盤3係由角柱狀的石材構成’在其上面藉 由施行平面加工而形成有空氣軸承滑行用的上面側滑行面 3a。又，在沿著Y軸方向延伸的兩側面也與上面同樣地藉 由施行平面加工而形成有空氣軸承滑行用的側面側滑行面 3b、3c。同様地，另一方之石定盤4的上面及兩側面也藉 由施行平面加工而形成有上面側滑行面4a及側面側滑行 面 4b 、 4c 〇 如第3圖及第4圖所示，Y軸載台6具備：被石定盤 3、4導引而各自朝Y軸方向移動的一對之Y軸滑動件（ 第1滑動件）12、13、用於在石定盤3、4的上面側滑行 面3a、4a將Y軸滑動件12、13各自朝Z軸方向支撐的Y 軸升降空氣軸承（第1氣體軸承）14、16、用於在石定盤 3、4的側面側滑行面3b、3c、4b、4c將Y軸滑動件12、 13各自朝水平方向（X軸方向）支撐的Y軸偏轉空氣軸 承17、18、及以架設在Y軸滑動件12、13的方式朝X軸 方向延伸的導引構件19。 被一方之石定盤3導引件的γ軸滑動件丨2係剖面大 致3形構件’具備：與石定盤3的上面側滑行面3 a相對 向之構成上壁部的滑動部12a、和各自與石定盤3的側面 側滑行面3b、3c相對向的一對之側壁部i2b、i2c，在滑 動部12a上面之Y軸方向的中央位置連結著導引構件19 的一端部。又’在Y軸滑動件12的滑動部12a形成各自 -8- .200940235 挾持着導引構件19的朝X軸方向延伸的長圓狀之貫通孔 (貫通部）21、22。 將Y軸滑動件12朝Z軸方向支撐的Y軸升降空氣軸 承14，係在Y軸滑動件12的滑動部12a下面的Y軸方向 之兩端部各有一個、和在γ軸方向的中央位置有一個，合 計由三個構成，配置成三角點。再者，γ軸升降空氣軸承 1 4係藉由以對上面側滑行面3 a噴出空氣等氣體的方式所 φ 產生的向上力和Y軸滑動件12等本身的重量所產生的向 下力之平衡的方式’而一面在與上面側滑行面3a之間保 持數μιη程度之間隙，一面以非接觸狀態支撐γ軸滑動件 12。此外，Υ軸升降空氣軸承14不僅噴出氣體，也具有 吸引功能。 將Υ軸滑動件12朝水平方向支撐的Υ軸偏轉空氣軸 承17’係在Υ軸滑動件12的兩方之側壁部12b、12c各 自設有二個（參照第5圖），藉由以對側面側滑行面3b、 φ 3c各自噴出空氣等氣體的方式所產生的推斥力彼此互相平 衡的方式’在與側面側滑行面3 b、3 c之間一面保持各數 μιη程度的間隙，一面以非接觸狀態支撐γ軸滑動件1 2。 被另一方之石定盤4導引的Υ軸滑動件13、Υ軸升 降空氣軸承16及Υ軸偏轉空氣軸承18，係與Υ軸滑動件 12、Υ軸升降空氣軸承14及Υ軸偏轉空氣軸承17，從Υ 軸方向看來形成左右對象之構成。即，Υ軸滑動件13具 有形成上壁部的滑動部13a、側壁部13b、13c及貫通孔 23、24且連結導引構件19的另一端部，Y軸升降空氣軸 -9- 200940235 承16對上面側滑行面4a噴出氣體，γ軸偏轉空氣軸承18 對側面側滑行面4b、4c噴出氣體。 導引X軸載台9的導引構件19形成向上開口的剖面 3形，而沿X軸方向延伸的導引構件1 9的外側兩側面被 施以平面加工，該面被利用作爲空氣軸承滑行所用的滑行 面19a、19b (參照第5圖）。 當作Y軸載台6驅動部之功能的Y軸線型馬達7、8 包含：Y軸磁轭26、27，係於Y軸滑動件12、13的X軸 方向之兩外側各自朝Y軸方向延伸；及Y軸線圏單元28 、29，係各自設在Y軸滑動件12、13。 當作Y軸線型馬達7、8固定子之功能的Y軸磁軛26 、27，係各自固定在配置於基座2的X軸方向之兩側的框 部31、32上端，形成剖面=7形。在Y軸磁軛26、27内壁 面固定著連設成沿Y軸方向反覆S極和N極型態的複數 永久磁鐵。 當作Y軸線型馬達7、8可動子之功能的Y軸線圈單 元28、29，係各自固定在從Y軸滑動件12的滑動部12a 朝向上方突出之支撐壁部12d上端部及Y軸滑動件13的 支撐壁部13d上端部’且***Y軸磁軛26、27内。Y軸 線圈單元28、29具有複數線圈，該等複數線圈係朝Y軸 方向被連結且被殼體覆蓋。又’在Y軸線圏單元28、29 的線圈被通電，使其配合Y軸磁轭26、27的永久磁鐵之 S極和N極型態改變磁極，在與Y軸磁軛26、27之間使 各推斥力產生而獲得推力，藉此使Y軸載台6可朝Y軸 -10- .200940235 方向移動。 如第3圖及第5圖所示，X軸載台9具備：X軸滑動 件（第2滑動件）3 3 ’係以環繞導引構件1 9的方式形成 向下開口的剖面3形’且沿著導引構件丨9朝X軸方向移 動；X軸腳部（腳部）34,係用於在石定盤3、4的上面 側滑行面3a、4a將X軸滑動件33朝Z軸方向支撐；X軸 偏轉空氣軸承36，係用於在導引構件19的滑行面19a、 Q i9b將X軸滑動件33朝水平方向（γ軸方向）支撐；及 0載台37，係設在X軸滑動件33上，使吸附盤11在z 軸周圍轉動。此外，X軸滑動件33不限於剖面3形，也 可形成環繞導引構件19之剖面口形。 將X軸滑動件33朝Z軸方向支撐的各X軸腳部34 係固定在X軸滑動件33四隅，在朝向下方延伸的支柱38 之端部設有X軸升降空氣軸承（第2氣體軸承）39，支柱 38分別貫通Y軸滑動件12的貫通孔21、22及Y軸滑動 φ 件13的貫通孔23、24。X軸升降空氣軸承39係藉由以對 上面側滑行面3a、4a噴出空氣等氣體的方式所產生的向 上力和X軸滑動件33等本身重量造成的向下力之平衡的 方式，一面在與上面側滑行面3a、4a之間保持數μιη程度 的間隙，一面以非接觸狀態分別支撐X軸滑動件3 3。X 軸載台9朝X軸方向移動時，X軸升降空氣軸承39可在 長圓狀之貫通孔21~24内移動，且和Υ軸滑動件12、13 的滑動部12a、13a不會互相干渉。此外，X軸升降空氣 軸承39不僅噴出氣體，亦可具有吸引功能。 -11 - 200940235 將X軸滑動件33朝水平方向支撐的X軸偏轉空氣軸 承36，係在X軸滑動件33的兩方側壁部各設有二個（參 照第4圖），藉由對導引構件19的滑行面19a、19b分別 噴出空氣等氣體所產生的推斥力彼此互相平衡的方式，一 面在與滑行面1 9a、1 9b之間各保持數μιη程度之間隙，一 面以非接觸狀態支撐X軸滑動件3 3。 當作X軸載台9驅動部之功能的X軸線型馬達10, 係由在導引構件19上朝X軸方向延伸的X軸磁軛41、和 設在X軸滑動件33上壁部之下方的X軸線圈單元42所 構成。 當作X軸線型馬達10固定子之功能的X軸磁軛41， 係形成横向開口的剖面3形。在X軸磁軛41内壁面固定 著連設成沿著X軸方向反覆S極和Ν極型態的複數永久 磁鐵。 當作X軸線型馬達10可動子之功能的X軸線圏單元 42，係固定在從X軸滑動件33上壁部朝向下方突出的支 撐壁部，且***在X軸磁軛41内。X軸線圈單元42具有 複數線圈，該等複數線圈係朝X軸方向被連結且被殼體覆 蓋。又，X軸線圈單元42的線圈被通電，使其配合X軸 磁鈪41的永久磁鐵之S極和Ν極型態而改變磁極，藉由 在與X軸磁軛41之間產生推斥力而獲g推力的方式使X 軸載台9朝X軸方向移動。 載置有對象物的吸附盤11係Y軸方向寬度比Y軸滑 動件12、13大、X軸方向寬度比X軸滑動件33大的矩形 -12- .200940235 板狀構件’吸附盤11係藉由吸附盤腳部43而被支撐著。 又，在吸附盤11上面例如形成多數吸附孔’用於真空吸 附液晶顯示器用玻璃基板等對象物。 支撐吸附盤1 1的各吸附盤腳部43，係於固定在吸附 盤11四隅而朝向下方延伸的支柱40下端設有吸附盤升降 空氣軸承（第3氣體軸承）44。四個之吸附盤升降空氣軸 承44係於上面側滑行面3a上配置有二個且於上面側滑行 0 面4a上配置有二個，藉由以對上面側滑行面3a、4a噴出 空氣等氣體的方式所產生的向上力和吸附盤11等本身重 量造成的向下力之平衡的方式，一面在與上面側滑行面3a 、4a之間保持數μιη程度之間隙，一面以非接觸狀態各自 支撐吸附盤11。吸附盤11隨著Υ軸載台6及X軸載台9 移動時，吸附盤升降空氣軸承44在上面側滑行面3a、4a 内移動。此外，吸附盤升降空氣軸承44不僅噴出氣體， 亦可具有吸引功能。 〇 根據以上，XY載台裝置1係Y軸升降空氣軸承14將 石定盤3上面當作滑行面且Y軸升降空氣軸承16將石定 盤4上面當作滑行面，而可各自支撐γ軸滑動件12、13 ，X軸腳部34藉由各自通過形成在γ軸滑動件12的滑動 部12a的貫通孔21、22及形成在γ軸滑動件13的滑動部 13a的貫通孔23、24之方式，可將石定盤3、4上面當作 X軸升降空氣軸承39的滑行面來支撐X軸滑動件33。如 此地，藉由使Y軸升降空氣軸承14和X軸升降空氣軸承 39共有滑行面且使Y軸升降空氣軸承16和X軸升降空氣 -13- 200940235 軸承39共有滑行面的方式，而不須在石定盤3、4上面各 自裝設Y軸滑動件〗2、13專用的導引件，藉此可謀求縮 小石定盤3、4且裝置小型化。 又，Y軸滑動件12的滑動部12a係由三個之Y軸升 降空氣軸承14所支撐，Y軸滑動件13的滑動部13a係由 三個之Y軸升降空氣軸承16所支撐，因此可提高Y軸滑 動件1 2、1 3之安定性。 又，由於具備一對之石定盤3、4及Y軸滑動件12、 13，在導引構件19兩端側各自連結著Y軸滑動件12、13 ，因此在一對之石定盤3、4之任一個皆不須在上面裝設 Y軸滑動件12、13專用的導引件，藉此可謀求縮小各石 定盤3、4且裝置更小型化。 又，藉由使Y軸升降空氣軸承14和X軸升降空氣軸 承39和吸附盤升降空氣軸承44共有滑行面且使Y軸升降 空氣軸承16和X軸升降空氣軸承39和吸附盤升降空氣軸 承44共有滑行面的方式，不須另外裝設吸附盤升降空氣 軸承44所需的滑行面，藉此可謀求縮小石定盤且裝置小 型化。 本發明並非受限於上述實施形態者。 例如X軸升降空氣軸承39被配置在貫通孔21 ~24内 ，但取代之，讓支柱38通過貫通孔21 ~24，而在貫通孔 21 ~24下方配置X軸升降空氣軸承39之構成亦可。 又，Y軸滑動件12、13上壁部係形成滑動部12a、 13a，但不設該上壁部，而在Y軸滑動件12、13配置與石 -14- .200940235 定盤3、4的上面側滑行面3a、“相ft向的格子狀構件且 將該格子狀構件當作滑動部亦可。 【圖式簡單說明】 第1圖顯示本發明之實施形態所相關之XY載台裝置 之立體圖。 第2圖係從第1圖所示之XY載台裝置拿掉吸附盤後 Φ 的立體圖。 第3圖係第1圖所示之XY載台裝置之俯視圖。 第4圖係沿第3圖之IV - IV線之剖面圖。 第5圖係沿第3圖之V - V線之剖面圖。 【主要元件符號說明】 I : XY載台裝置 3、4 :石定盤（定盤） Φ 3 a、4 a ··上面側滑行面 II :吸附盤 12、1 3 : γ軸滑動件（第丨滑動件） 12a、13a :滑動部 14、16: Y軸升降空氣軸承（第1氣體軸承） 19 :導引構件 21、22、23、24 :貫通孔（貫通部） 3 3 : X軸滑動件（第2滑動件） 34 : X軸腳部（腳部） -15- 200940235 39: X軸升降空氣軸承（第2氣體軸承） 44:吸附盤升降空氣軸承（第3氣體軸承） -16-BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates in particular to a χγ stage device manufactured using a large liquid crystal display or the like. [Prior Art] Conventionally, the technology in this field is disclosed in Japanese Patent Laid-Open No. 2007-21 6349 φ. The XY stage device described in the publication includes a pair of stone fixing plates extending in the Y-axis (first axis) direction, and a pair of guiding members extending in the Y-axis direction on the upper surface of each stone plate. A pair of sliding members (first sliding members) are moved along the respective guiding members, and have a cross section of type 3; an air cushion (first gas bearing) is provided on the upper wall portion of each sliding member, and the pair of guiding members The upper part of the air ejects air to support the sliding member; the Y stage (guide member) extends in the direction of the X-axis (second axis), and both ends are connected to the respective sliding members; and the X stage (second sliding member) is Moving along the Y stage; the air cushion (the second gas shaft Φ bearing) is placed under the X stage, and the air is sprayed on the top of each stone plate to support the X stage; the suction plate is arranged in the X carrier. On the stage, a workpiece (object) such as a glass substrate for vacuum adsorption liquid crystal display is used. With this configuration, the workpiece moves in the horizontal plane as the X stage and the Y stage move. [Patent Document 1] Japanese Patent Laid-Open Publication No. 2007-216349 [Invention] [In the above-described XY stage device, it is necessary to ensure that a guide for a slider is mounted on the upper surface of the stone plate 200940235. In addition, in recent years, the size of the liquid crystal display has increased, and the workpiece tends to become larger. The stone plate must be enlarged, causing problems in the securing of the stone, the processing of the stone, and the transportation of the stone, and the device is produced. The problem of large-scale. It is an object of the present invention to provide an XY stage apparatus which can reduce the size of a fixed disk and reduce the size of the apparatus. The XY stage device according to the present invention is characterized in that it includes a fixed plate on which a top surface is regarded as a sliding surface, and a first sliding member moves along a sliding surface in a direction of the first axis; the guiding member is coupled The first slider extends in a horizontal plane toward a second axis orthogonal to the first axis; the second slider moves along a direction in which the guiding member extends in the second axis; and the leg has The second gas bearing that ejects gas to the sliding surface supports the second slider; the first slider has a penetration portion through which the leg portion passes. In the XY stage device, the first gas bearing can support the first slider as a sliding surface on the upper surface of the fixed plate, and the foot portion can be regarded as a through surface formed by the first sliding member. The sliding surface of the second gas bearing supports the second slider. In this manner, by arranging the sliding surfaces of the first gas bearing and the second gas bearing, it is not necessary to mount the guide for the i-th slide on the surface of the fixed plate, thereby reducing the size of the fixed plate and miniaturizing the device. Further, the first sliding member is preferably supported by three first gas bearings. By the first slider being supported by the three first gas bearings, the stability of the first slider can be improved. -6- 200940235 Further, it is preferable that each of the fixed plate and the first slider is provided, and the first slider is connected to each of both end sides of the guide member. In any of the pair of fixed plates, it is not necessary to provide a guide for the first slider, and it is possible to reduce the size of each of the fixed plates and to reduce the size of the device. Further, it is preferable that the suction disk is disposed on the second slider for adsorbing the object placed on the second slider, and the third gas bearing supports the suction disk by ejecting gas to the sliding surface. By arranging the sliding surfaces of the first gas φ bearing and the second gas bearing and the third gas bearing, it is not necessary to separately mount the sliding surface for the third gas bearing, thereby reducing the size of the disk and miniaturizing the device. According to the XY stage device according to the present invention, it is possible to reduce the size of the fixed plate and to reduce the size of the device. [Embodiment] Hereinafter, a preferred embodiment of the XY stage device of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 5, the XY stage device 1 includes a pair of stone fixing plates (fixing plates) 3 and 4 which are provided on the susceptor 2 and extend in the Y-axis direction, and along the stone fixing plate 3 a Y-axis stage 6 moving in the Y-axis direction, a pair of Y-axis type motors 7 and 8 functioning as a driving unit of the Y-axis stage 6, and moving in the X-axis direction on the Y-axis stage 6. The X-axis stage 9 and the X-axis type motor 10 functioning as a driving portion of the X-axis stage 9 and the suction disk 11 disposed on the X-axis stage 9 are provided. Further, as shown in Figs. 1 and 2, the X-axis (2nd axis) and the Y-axis (1st axis) form a horizontal surface of 200940235 and 90 degrees, and the vertical direction is set to the Z-axis direction. Axis, Y-axis, Z-axis. The one stone fixing plate 3 is composed of a columnar stone material. The upper side sliding surface 3a for air bearing sliding is formed by performing planar processing thereon. Further, on both side faces extending in the Y-axis direction, the side-side sliding surfaces 3b and 3c for air bearing sliding are formed by performing planar processing in the same manner as the above. Similarly, the upper side and the both side surfaces of the other stone fixing plate 4 are formed by the planar processing to form the upper side sliding surface 4a and the side side sliding surfaces 4b, 4c, as shown in Figs. 3 and 4, Y. The shaft stage 6 includes a pair of Y-axis slides (first slides) 12 and 13 that are guided by the stone fixing plates 3 and 4 and are moved in the Y-axis direction, and are used for the stone fixing plates 3 and 4. The upper side sliding surfaces 3a, 4a support the Y-axis lifting air bearings (first gas bearings) 14, 16 each supporting the Y-axis sliders 12, 13 in the Z-axis direction, for sliding on the side faces of the stone fixing plates 3, 4. The faces 3b, 3c, 4b, and 4c deflect the Y-axis yoke bearings 17 and 18 that support the Y-axis slides 12 and 13 in the horizontal direction (X-axis direction), and the Y-axis slides 12 and 13 are attached to each other. A guiding member 19 extending in the X-axis direction. The γ-axis slider 丨 2 of the one-side stone fixing plate 3 is a substantially three-shaped member ′ having a sliding portion 12a that faces the upper sliding surface 3 a of the stone fixing plate 3 and that constitutes the upper wall portion, The pair of side wall portions i2b and i2c that face each of the side surface sliding surfaces 3b and 3c of the stone fixing plate 3 are connected to one end portion of the guiding member 19 at a central position in the Y-axis direction of the upper surface of the sliding portion 12a. Further, in the sliding portion 12a of the Y-axis slider 12, each of the -8-.200940235 is formed with an elongated circular through-hole (through portion) 21, 22 extending in the X-axis direction of the guiding member 19. The Y-axis lifting air bearing 14 that supports the Y-axis slider 12 in the Z-axis direction has one end at each of the Y-axis directions below the sliding portion 12a of the Y-axis slider 12, and a center in the γ-axis direction. There is one position, and the total consists of three, which are configured as triangle points. In addition, the γ-axis lifting air bearing 14 is a downward force generated by the upward force generated by the gas φ such as air being blown to the upper side sliding surface 3 a and the weight of the Y-axis slider 12 itself. In the balanced manner, the γ-axis slider 12 is supported in a non-contact state while maintaining a gap of several μηη from the upper side sliding surface 3a. Further, the x-axis lifting air bearing 14 not only emits gas but also has a suction function. The x-axis deflecting air bearing 17' that supports the x-axis slider 12 in the horizontal direction is provided on each of the side wall portions 12b, 12c of the x-axis slider 12 (see FIG. 5), by The side-side sliding surfaces 3b and φ3c each have a repulsive force that is balanced with each other by ejecting a gas such as air, and a gap of about several μm is maintained between the side-side sliding surfaces 3b and 3c. The γ-axis slider 1 2 is supported in a non-contact state. The yoke slide 13 , the yaw shaft lifting air bearing 16 and the yaw axis deflecting air bearing 18 guided by the other stone fixing plate 4 are connected to the yoke sliding member 12, the yaw shaft lifting air bearing 14 and the yaw shaft deflecting air. The bearing 17 is formed as a right and left object from the direction of the yaw axis. That is, the yoke slide 13 has the sliding portion 13a forming the upper wall portion, the side wall portions 13b and 13c, and the through holes 23, 24 and the other end portion of the connecting guide member 19, and the Y-axis lifting air shaft -9-200940235 Gas is ejected to the upper side sliding surface 4a, and the γ-axis deflecting air bearing 18 ejects gas to the side-side sliding surfaces 4b, 4c. The guide member 19 guiding the X-axis stage 9 is formed into an upwardly open cross-sectional shape 3, and the outer side surfaces of the guide member 19 extending in the X-axis direction are subjected to planar processing, which is utilized as an air bearing slide The sliding surfaces 19a, 19b used (see Fig. 5). The Y-axis type motors 7 and 8 which function as the drive unit of the Y-axis stage 6 include Y-axis yokes 26 and 27 which are respectively oriented in the Y-axis direction on both outer sides of the Y-axis slides 12 and 13 in the X-axis direction. The extension and the Y-axis unit 28, 29 are each provided on the Y-axis slides 12, 13. The Y-axis yokes 26 and 27 functioning as the stators of the Y-axis type motors 7 and 8 are fixed to the upper ends of the frame portions 31 and 32 disposed on both sides of the susceptor 2 in the X-axis direction to form a section=7. shape. A plurality of permanent magnets connected to the S-pole and N-pole forms in the Y-axis direction are fixed to the inner wall surfaces of the Y-axis yokes 26 and 27. The Y-axis coil units 28 and 29 which function as the movable members of the Y-axis type motors 7 and 8 are fixed to the upper end portion and the Y-axis of the support wall portion 12d which protrude upward from the sliding portion 12a of the Y-axis slide member 12, respectively. The upper end portion ' of the support wall portion 13d of the piece 13 is inserted into the Y-axis yokes 26, 27. The Y-axis coil units 28, 29 have a plurality of coils that are coupled in the Y-axis direction and covered by the casing. Further, the coils of the Y-axis unit 28, 29 are energized to match the S-pole and N-pole type magnetic poles of the permanent magnets of the Y-axis yokes 26, 27, between the Y-axis yokes 26, 27 The thrust force is generated to obtain the thrust, whereby the Y-axis stage 6 can be moved in the Y-axis-10-.200940235 direction. As shown in FIGS. 3 and 5, the X-axis stage 9 is provided with an X-axis slide (second slide) 3 3 ', which is formed to have a downwardly open cross-section 3 shape so as to surround the guide member 19. And moving along the guiding member 丨9 in the X-axis direction; the X-axis leg portion (foot portion) 34 is for aligning the X-axis slider 33 toward the upper side sliding surfaces 3a, 4a of the stone fixing plates 3, 4. The axial direction support; the X-axis deflection air bearing 36 is for supporting the X-axis slide 33 in the horizontal direction (γ-axis direction) on the sliding surfaces 19a, Q i9b of the guide member 19; and the 0-stage 37 On the X-axis slide 33, the suction disk 11 is rotated around the z-axis. Further, the X-axis slide 33 is not limited to the cross-sectional shape 3, and may be formed in a cross-sectional shape surrounding the guide member 19. Each of the X-axis leg portions 34 that supports the X-axis slide member 33 in the Z-axis direction is fixed to the X-axis slide member 33, and an X-axis lift air bearing (second gas bearing) is provided at the end portion of the stay 38 that extends downward. 39, the pillars 38 penetrate the through holes 21 and 22 of the Y-axis slide 12 and the through holes 23 and 24 of the Y-axis slide φ piece 13, respectively. The X-axis lifting air bearing 39 is in a manner of balancing the upward force generated by ejecting a gas such as air to the upper side sliding surfaces 3a, 4a and the downward force caused by the weight of the X-axis slider 33 or the like itself. The X-axis slider 3 3 is supported in a non-contact state while maintaining a gap of several μm between the upper side sliding surfaces 3a and 4a. When the X-axis stage 9 is moved in the X-axis direction, the X-axis lifting air bearing 39 can move in the oblong through holes 21 to 24, and the sliding portions 12a, 13a of the x-axis sliders 12, 13 do not dry each other. . Further, the X-axis lift air bearing 39 not only emits gas but also has a suction function. -11 - 200940235 The X-axis deflecting air bearing 36 that supports the X-axis slide 33 in the horizontal direction is provided in each of the two side wall portions of the X-axis slide 33 (refer to Fig. 4). In the sliding surfaces 19a and 19b of the lead member 19, the repulsive force generated by the gas such as air is balanced with each other, and the gap between the slide surfaces 19a and 19b is maintained at a level of several μm, and the non-contact state is maintained. The X-axis slide 3 3 is supported. The X-axis type motor 10 functioning as a driving portion of the X-axis stage 9 is an X-axis yoke 41 extending in the X-axis direction on the guiding member 19, and a wall portion provided on the X-axis slider 33. The lower X-axis coil unit 42 is constructed. The X-axis yoke 41 functioning as a stator of the X-axis type motor 10 is formed in a cross-sectional shape of a lateral opening. On the inner wall surface of the X-axis yoke 41, a plurality of permanent magnets which are connected to overlap the S pole and the drain type in the X-axis direction are fixed. The X-axis 圏 unit 42, which functions as a movable member of the X-axis type motor 10, is fixed to a support wall portion that protrudes downward from the upper wall portion of the X-axis slide 33, and is inserted into the X-axis yoke 41. The X-axis coil unit 42 has a plurality of coils that are coupled in the X-axis direction and covered by the casing. Further, the coil of the X-axis coil unit 42 is energized to change the magnetic pole in accordance with the S pole and the drain type of the permanent magnet of the X-axis magnetic yoke 41, and a repulsive force is generated between the X-axis yoke 41 and the X-axis yoke 41. The X-axis stage 9 is moved in the X-axis direction by the g thrust. The suction disk 11 on which the object is placed is a rectangle having a larger width in the Y-axis direction than the Y-axis sliders 12 and 13 and a larger width in the X-axis direction than the X-axis slider 33. 200940235 Plate-shaped member 'Adsorption disk 11 It is supported by the suction foot portion 43. Further, on the upper surface of the adsorption disk 11, for example, a plurality of adsorption holes ’ are formed for vacuum-absorbing an object such as a glass substrate for a liquid crystal display. Each of the suction leg portions 43 that support the suction disk 1 is provided with a suction disk lifting air bearing (third gas bearing) 44 at a lower end of the column 40 that is fixed to the suction disk 11 and extends downward. The four suction-plate lift air bearings 44 are disposed on the upper side sliding surface 3a and are disposed on the upper side sliding surface 0a, and two are disposed on the upper side sliding surfaces 3a, 4a to eject gas such as air to the upper side sliding surfaces 3a, 4a. The manner in which the upward force generated by the method and the downward force of the weight of the suction disk 11 and the like are balanced, while maintaining a gap of several μm between the upper sliding surfaces 3a and 4a, and supporting each other in a non-contact state Adsorption disk 11. When the suction disk 11 moves with the x-axis stage 6 and the X-axis stage 9, the suction-plate lift air bearing 44 moves in the upper side sliding surfaces 3a, 4a. Further, the suction-plate lift air bearing 44 not only emits gas but also has a suction function. According to the above, the XY stage device 1 is a Y-axis lifting air bearing 14 which uses the upper surface of the stone fixing plate 3 as a sliding surface and the Y-axis lifting air bearing 16 serves as a sliding surface for the upper surface of the stone fixing plate 4, and can respectively support the γ axis. The sliders 12, 13 and the X-axis leg portions 34 pass through the through holes 21, 22 formed in the sliding portion 12a of the γ-axis slider 12 and the through holes 23, 24 formed in the sliding portion 13a of the γ-axis slider 13, respectively. In this manner, the upper surface of the stone fixing plates 3, 4 can be used as the sliding surface of the X-axis lifting air bearing 39 to support the X-axis sliding member 33. Thus, by having the Y-axis lift air bearing 14 and the X-axis lift air bearing 39 share a sliding surface and the Y-axis lift air bearing 16 and the X-axis lift air-13-200940235 bearing 39 have a sliding surface, it is not necessary The guides dedicated to the Y-axis sliders 2 and 13 are attached to the stone plates 3 and 4, whereby the stone plates 3 and 4 can be reduced and the device can be miniaturized. Further, the sliding portion 12a of the Y-axis slider 12 is supported by three Y-axis lifting air bearings 14, and the sliding portion 13a of the Y-axis slider 13 is supported by three Y-axis lifting air bearings 16, so Improve the stability of the Y-axis slides 1, 2, and 13. Further, since the pair of stone fixing plates 3, 4 and the Y-axis slide members 12, 13 are connected to the Y-axis slide members 12, 13 on both end sides of the guide member 19, the pair of stone fixing plates 3 are provided. In any of the four, it is not necessary to provide a guide for the Y-axis slides 12 and 13 on the top, whereby the stone fixing plates 3 and 4 can be reduced and the apparatus can be further miniaturized. Further, the Y-axis lift air bearing 14 and the X-axis lift air bearing 39 and the suction-plate lift air bearing 44 share a sliding surface and the Y-axis lift air bearing 16 and the X-axis lift air bearing 39 and the suction-plate lift air bearing 44 are provided. In the manner of sharing the sliding surface, it is not necessary to separately mount the sliding surface required for the suction disk lifting air bearing 44, thereby reducing the size of the stone fixing plate and miniaturizing the device. The present invention is not limited to the above embodiments. For example, the X-axis lifting air bearing 39 is disposed in the through holes 21 to 24, but instead of allowing the column 38 to pass through the through holes 21 to 24, the X-axis lifting air bearing 39 may be disposed below the through holes 21 to 24. . Further, the upper wall portions of the Y-axis slides 12, 13 are formed with the sliding portions 12a, 13a, but the upper wall portions are not provided, and the Y-axis slide members 12, 13 are disposed with the stone-14-.200940235 fixed plates 3, 4 The upper side sliding surface 3a and the lattice-shaped member in the ft direction may be used as the sliding portion. [Brief Description] FIG. 1 shows an XY stage device according to an embodiment of the present invention. Fig. 2 is a perspective view of Φ after removing the suction disk from the XY stage device shown in Fig. 1. Fig. 3 is a plan view of the XY stage device shown in Fig. 1. Fig. 5 is a sectional view taken along line V-V of Fig. 3. [Description of main components] I: XY stage device 3, 4: stone plate (fixing plate) Φ 3 a, 4 a ·· Upper side sliding surface II: suction plate 12, 1 3 : γ-axis slide (third slide) 12a, 13a: sliding part 14, 16: Y-axis lifting air bearing (1st Gas bearing) 19 : Guide member 21, 22, 23, 24: through hole (through portion) 3 3 : X-axis slide (second slide) 34 : X-axis (foot) -15- 200940235 39 : X Lifting air bearings (the second gas bearing) 44: suction pad lifter air bearing (gas bearing 3) -16-