200912248 九、發明說明： 【發明所屬之技術領域】 現代機械製造與加工工業正萬向更精密、快速、自動 =高效率的方向發展，而三次元座標測量機是為因應此 =求而3又3十誔生的-種大型精密智慧型量測儀器，其已被 廣泛應用於機械製造、科學儀器製造、電子工業气車工業 =及航，和國以業等各部門，具有廣闊的發展與應用前 二一 s疋現有#界所使用的低效率、檢驗繁複*代價高昂 70座標測量機及精密機床等校正方法卻在-定程卢 上限制了它的推廣庳用，中甘3， 没 、‘" 尤/、疋-貝金短缺為數眾多的中小 止業的運用更受到影響。 【先前技術】 =1㈣對三次元座標測量機等之精度校正工^ 程中的式種是運用高精度的儀器量測校正夫 :丄XI =成校正工作。使用的儀器通常包括， 零級平尺#。3動光電準直儀、電感測微儀、直角尺、 I ^ ° k種方法的優點是校正結果精度高，可靠，卜 也咼，而缺點是對量曰 罪 正工作費時# —、1測人諸術要求較高，相 a J ，寸大部分的座標測量機用戶而言，儀$ 測量機量測標準器1量，的校正工作，它是通過用座稽 或球錐等來完成校正工η:、步距規、球端棒、球相 於-般用戶之使用〜快捷、較料 疋杈正工作不符合國際標準 6 200912248 IS0010360-2之規範；而且標 校正結果之可靠，棹準写1* 、製造要求，高且為確保 種校正方犬各右装I 頁經常實施鑑定檢驗。以上兩 樘杈正方式各有其優點，但 不方便，且_ —匕們的缺點是校正工作繁複而 +万便，且杈正儀态設備昂貴 過高，因而限制了三次㈣旦/正成本4且校正費用 對目前座標測量機校正 究新的校正方法和校正襄置，狀況’正㈣需要研 .,. 置實現座標測量機可靠、方便 、快捷、低成本的校正工作。 【發明内容】 在的：:：前Γ欠元座標測量機等之精度校正檢定方法存 f的檢驗繁稷與使用儀器設備代價昂貴等缺點，本發明提 了種技正二次7C座標測量機精度的全新方法——空間 一維球⑽稱聯繫組合自動檢測標定法，設計了-種手提 式自動空間座標精密測量校正儀。 本創作具有下列之優點： 1 ·由量測原理可知，只f準確測得球列上任意一對 球心距的條件下，用本量測裝置進行對稱組合比較量測， 並按最】一乘原理處理測得值，便可得被測三次元座標測 量機空間點的誤差。 、2 “參閱第—圖和第三圖〕，本發明使用高精度 的滾珠螺桿（3 2 )和飼服馬達（3 1 )來驅動球列板（ 2)運用電腦控制飼服馬達（31)，通過預先按〔請參 閱第四圖〕設置的程式其中〔（〇〜2〇)為標定圖列、 I〜XVI為球列〕，使滑塊按照一定標準間距移動，實現 200912248 動^量測。藉由測頭與各標準球觸測，得到量測結果。 水平迴_(12)和垂直迴轉定位板U 曰3 )在：間不同位置，按上述程式〔請參閱第四圖〕 置測可侍到在座標測量機量測空間範圍 :::=料分解方法’即可得到座標測量機;何、: =本發明只需要使用標準塊規等通用高精度量測儀 :、，在使用前一定時間週期内對任意一對球心距進 票Ϊ ’若條件具備也可利用雷射干涉儀〔請參閱第五 2〕，透過儀器雷射頭（5)進入參考鏡（6)再進入靶 、兄、7 )及標準球（2 1 )與電感測微儀（8 )，即可得 i球：的‘準罝。因此本裝置不要求檢測裝置的長期穩定 '’也不需要標準測試單輯裝置進行定期檢測校正。 5 .本量測裝置造價低、檢測校正範圍大，而且輕巧 ’便於攜帶，並可使用於廣泛的CNC等精密機床之檢測血 校正之用。 /、 【實施方式】 f先’請參閱第i所示，本創作主要係包括支撐座 1 )、球列板（2 )、自動裝置（3 ),其中； 支撐座（1 )，包括底座（工丄）、水平迴轉柏（工 2) ’垂直迴轉定位板（工3 )。底座（工工）根據需要 可在測量機平臺上任意位置用螺栓固定；水平迴轉軸（工 2 )由螺釘緊固於底座（丄1 )軸套上，或軸套内作删 度迴轉，以滿足在任意位置，量機精度校正需要；垂直迴 200912248 轉疋4板（1 3)由螺釘緊固于水平迴轉轴（1 2)上端 ’或根據需要在垂直平面内作9{)度範圍轉動。 球列板（2) ’由6個直徑相同的標準球（2 1)定 位於球板等間距的6個錐形球窩内。求間距為2〇腿，其中 1個球間距經過高精度標定料標準量。 自動驅動裝置（3)，包括伺服馬達（3 1)、精密 滾珠螺桿組（3 2 )、高精度線性滑軌（3 3 );伺服馬 達（3 1 )和精衛滾珠螺桿機構等組成微米級精度驅動系 統，通過連結桿帶動球列板（2)在線性滑軌上（3 3 ) ’按照對稱聯繫全組合校正原理編制的程式實現自動移動 0 本發明手提式自動空間座標精密測量校正儀，校正實 施時’先將本創作固定於測量機工作臺上（8)，〔請參 閱第-圖〕，球列板（2)上有六個標準球（21)構成 五個間距，需要一個標準間距作為標準量，即可得到其他 面精度量測結果，準間距由任意兩個球心用〔請參閱第三 所示的方法檢測標定得到高精度標準間距，也可利用 標準塊規和高精度電感測微儀等組成的組合量測裝置進行 =正標定。標準球兩端球心距為⑽_，球列板（1 )在 3 3 )上按照第二圖量測原理移動，直至球列板（ )移動400 _，可測得空間5〇〇咖範圍内量測誤差。球 =二!), t伺服馬達（31) *滾珠螺桿組（3 2 )驅 /口⑺（3 3 )自動移轉，微驅動定位精度為1辦· 結構原理可實現-維球列，稱聯繫組合精度檢^。本量 200912248 測裝置固定在三次元座標測量機工任臺上，由3水平迴轉 轴（1 2)可以實現·度迴轉，由迴轉主軸在軸套内上 下移動，以及垂直迴轉定位板（13)可使球列板（2) 垂直平面内任正負9〇度旋轉。本I置整個量測㈣是由電 腦按預先設置的程序控制伺服民、去^ 程的自動化。札仙^相動，實現整個量測過 上所述，當知本發明具有新賴性，且本發明未見之於 任何刊物，#符合專利法第2 1、22條线定。' 唯以上所述者，僅為本發明之一較佳實施例而已，去 不能以之限定本發明之範圍。即纽 二 ::作之均等變化與修飾，皆應仍屬本發明專::蓋 200912248 【圖式簡單說明】 第一圖：本發明之外觀示意圖 第二圖：本發明之原理圖 第三圖：本發明之標準球心距標定原理示意圖 第四圖：本發明之實體校正照相示意圖 【主要元件符號說明】 1 支撐座 11 底座 1 2 水平迴轉轴 2 球列板 3 自驅動裝置 3 2 滾珠螺桿組 4 雷射頭 13 垂直迴轉定位板 2 1 標準球 31 伺服馬達 3 3 滑執 5 參考鏡 ϋ 靶鏡 7 電感測微儀 8 工作台 11200912248 Nine, invention description: [Technical field of invention] Modern machinery manufacturing and processing industry is developing in a more precise, fast, automatic = high efficiency direction, and the three-dimensional coordinate measuring machine is in response to this 3 誔 的 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - The application of the previous two s 疋 existing in the field of low efficiency, inspection complex * costly 70 coordinate measuring machine and precision machine tools and other correction methods have limited its promotion in the fixed range, Zhong Gan 3, no The use of '" You/, 疋-Beckin is a small number of small and medium-sized businesses that are more affected. [Prior Art] =1 (4) For the accuracy correction of the three-dimensional coordinate measuring machine, etc., the type of the instrument is measured by a high-precision instrument: 丄 XI = calibration work. The instruments used usually include a zero-level flat ruler#. 3 The advantages of the photoelectric collimator, the inductance micrometer, the square ruler and the I ^ ° k method are that the calibration result is high in accuracy and reliable, and the disc is also flawed, and the disadvantage is that the amount of sin is working on the time #-, 1 The requirements of the people are higher, the phase is a J, the majority of the coordinate measuring machine users, the instrument $ measuring machine standard 1 amount, the calibration work, it is done by using the seat or the cone to complete the correction Work η:, step gauge, ball end rod, ball phase in the use of the general user ~ fast, more than the material is working in line with the international standard 6 200912248 IS0010360-2 specifications; and the calibration results are reliable, accurate Write 1*, manufacturing requirements, high and to ensure that the correction of the square dog each right page I often carry out identification tests. The above two positive methods have their own advantages, but they are inconvenient, and _ - our shortcomings are that the calibration work is complicated and tens of thousands of things, and the equipment is too expensive, thus limiting the three (four) denier / positive cost 4 And the correction cost is a new calibration method and correction device for the current coordinate measuring machine calibration. The condition '正(四) needs to be researched.,. Realize the coordinate, reliable, convenient, fast and low-cost calibration work of the coordinate measuring machine. [Summary of the Invention] In the ::: front Γ 元 座 座 测量 测量 之 之 精度 精度 精度 精度 精度 精度 精度 精度 精度 精度 精度 精度 精度 精度 精度 精度 精度 精度 精度 精度 精度 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 The new method - space one-dimensional ball (10) called the contact combination automatic detection calibration method, designed a portable automatic space coordinate precision measurement calibration instrument. This creation has the following advantages: 1 · According to the measurement principle, only f can accurately measure the spherical distance of any pair of balls on the ball column, use the measuring device to carry out the symmetrical combination comparison measurement, and press the most By multiplying the measured value, the error of the spatial point of the measured three-dimensional coordinate measuring machine can be obtained. 2, referring to the first and third figures, the present invention uses a high-precision ball screw (3 2 ) and a feeding motor (3 1 ) to drive the ball and column board (2) using a computer controlled feeding motor (31) By pre-pressing the program set in [Please refer to the fourth figure], [(〇~2〇) is the calibration chart, I~XVI is the ball column], so that the slider moves according to a certain standard pitch to realize the 200912248 motion measurement The measurement results are obtained by the touch test of the probe and each standard ball. Horizontal back _ (12) and vertical rotary positioning plate U 曰 3 ) at different positions, according to the above program (please refer to the fourth figure) It can be used in the measuring range of the coordinate measuring machine:::=material decomposition method' to get the coordinate measuring machine; why:: The invention only needs to use the general high-precision measuring instrument such as standard block gauge: In the previous certain period of time, the ticket is inscribed for any pair of spheres. 'If the conditions are met, you can also use the laser interferometer (see 5-2), enter the reference mirror (6) through the instrument laser head (5) and enter. Target, brother, 7) and standard ball (2 1) and inductance micrometer (8), you can get the i ball: Therefore, the device does not require long-term stability of the detection device and does not require a standard test device for periodic detection and correction. 5. The measurement device has low cost, large detection and correction range, and is lightweight and easy to carry and can be used for A wide range of precision machine tools such as CNC for blood calibration. /, [Embodiment] f first 'Please refer to the i, this creation mainly includes support base 1), ball plate (2), automatic device (3 ), where; support base (1), including base (worker), horizontal rotary cypress (work 2) 'vertical rotary positioning plate (work 3). The base (worker) can be used anywhere on the measuring machine platform as needed The bolt is fixed; the horizontal rotary shaft (Work 2) is fastened to the base (丄1) bushing by screws, or the cutting sleeve is rotated in the sleeve to meet the needs of the accuracy adjustment of the measuring machine at any position; vertical back to 200912248 The 4th plate (1 3) is fastened by screws to the upper end of the horizontal rotary shaft (12) or rotated in the vertical plane as required in the range of 9{). The ball plate (2) 'by 6 standard balls of the same diameter (2 1) 6 positions positioned at equal intervals on the ball In the shape of the ball socket, the distance is 2 legs, one of which is passed through the high-precision calibration standard. Automatic drive (3), including servo motor (3 1), precision ball screw set (3 2 ), high Precision linear slide (3 3 ); servo motor (3 1 ) and Jingwei ball screw mechanism, etc. constitute a micro-level precision drive system, which drives the ball-slab (2) on the linear slide (3 3 ) by connecting rods. The program of the symmetrical contact full combination correction principle realizes automatic movement. The portable automatic space coordinate precision measuring and correcting instrument of the present invention fixes the creation on the measuring machine table (8), [see the figure - 〕, there are six standard balls (21) on the ball column (2) to form five pitches. A standard spacing is required as the standard quantity, and other surface precision measurement results can be obtained. The quasi-pitch is used by any two spheres. Please refer to the method shown in the third method for calibration to obtain high-precision standard spacing. It can also be combined with a standard gauge and a high-precision inductive micrometer to perform positive calibration. The center of the ball at the center of the standard ball is (10)_, and the ball plate (1) moves on the 3 3) according to the measurement principle of the second figure until the ball plate ( ) moves 400 _, and the space can be measured within 5 〇〇 Measurement error. Ball = two!), t servo motor (31) * Ball screw set (3 2) drive / port (7) (3 3) automatic transfer, micro-drive positioning accuracy of 1 do · Structural principle can be achieved - dimensional ball column, said Contact the combination accuracy check ^. The quantity 200912248 measuring device is fixed on the three-dimensional coordinate measuring machine. It can be realized by the 3-level rotary axis (1 2), the vertical rotation of the rotary spindle in the sleeve, and the vertical rotary positioning plate (13). Rotate the ball plate (2) in any vertical plane by 9 degrees. This I set the entire measurement (4) is the automation of the computer to control the servos and the process according to the preset program. Zaxian ^ phase, to achieve the entire measurement of the above, when the invention has new reliance, and the invention is not seen in any publication, # conforms to the patent law, Article 2, 22 line. The above description is only a preferred embodiment of the present invention, and the scope of the present invention is not limited thereto. That is, New Zealand:: Equal change and modification, should still belong to the invention: Cover 200912248 [Simple description of the diagram] First: The schematic diagram of the present invention Second diagram: The third diagram of the schematic diagram of the present invention The schematic diagram of the standard spherical centering calibration principle of the present invention is as follows: the physical correction photography diagram of the present invention [main component symbol description] 1 support base 11 base 1 2 horizontal rotary shaft 2 ball row plate 3 self-driving device 3 2 ball screw Group 4 Laser head 13 Vertical rotary positioning plate 2 1 Standard ball 31 Servo motor 3 3 Slipper 5 Reference mirror 靶 Target mirror 7 Inductance micrometer 8 Workbench 11