TWI582378B - Sensing touch probe of probe tip - Google Patents
Sensing touch probe of probe tip Download PDFInfo
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- TWI582378B TWI582378B TW105115250A TW105115250A TWI582378B TW I582378 B TWI582378 B TW I582378B TW 105115250 A TW105115250 A TW 105115250A TW 105115250 A TW105115250 A TW 105115250A TW I582378 B TWI582378 B TW I582378B
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- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
本發明係有關於一種探棒前端感測式探頭，尤其係指一種具大範圍量測與高精度特色之三維感測式探頭，其不受工件之材質所影響，能進行工件的曲面量測，結構係藉由十字連接環以及圓環墊片穩固每一層的空心圓管組以避免產生大幅度的變形，以抑制探棒結構有Z軸方向的位移，僅能有X軸與Y軸的角度變化；由於探棒結構係以十字連接環以及圓環墊片作連接固定，因此能依照機台需求，自由更換探棒長度。 The invention relates to a probe front end sensing probe, in particular to a three-dimensional sensing probe with a wide range of measurement and high precision features, which is not affected by the material of the workpiece and can perform surface measurement of the workpiece. The structure is to stabilize the hollow circular tube group of each layer by the cross connecting ring and the annular gasket to avoid large deformation, so as to suppress the displacement of the probe structure in the Z-axis direction, and only the X-axis and the Y-axis Angle change; since the probe structure is connected by a cross-connecting ring and a ring gasket, the length of the probe can be freely changed according to the requirements of the machine.
按，傳統的三次元量測儀係採用觸發式探頭，無論在任何方位及方向，只要探針偏離原來的中心位置，就會產生一檢測訊號，而觸發式探頭之構造，通常內部之中心係裝設有一彈簧，主要係為了調整與固定探針的鬆緊與靈敏度，並有三組圓銷與圓球所組成的檢測串聯電路，當探針碰觸到工件的表面時，任何一組圓銷與圓球間會在有空隙時形成斷電，並產生一觸發訊號，紀錄當時的座標位置。 According to the traditional three-dimensional measuring instrument, the triggering probe is used. In any orientation and direction, as long as the probe deviates from the original center position, a detection signal is generated, and the structure of the triggering probe is usually the inner center. It is equipped with a spring, mainly for adjusting the tightness and sensitivity of the fixed probe, and has a series of detection circuits consisting of three sets of round pins and balls. When the probe touches the surface of the workpiece, any set of round pins and The ball will be cut off when there is a gap, and a trigger signal will be generated to record the coordinates of the time.
除了使用斷電時產生觸發訊號的觸發式探頭外，有研發人員係以光學搭配感測器的方式製作出具高精度與低接觸力的掃描式探頭。目前市面上使用的量測探頭大部分皆為觸發式，因此，在量測具有曲面的工件時，不但無法準確量出工件的完整形貌，觸發式探頭量測的單點量測也必須耗費大量的時間。此外，由於加工技術 係越來越提升，工件的種類及外型係越來越豐富，量測大小不一或外型特殊的工件時，或係受到量測機台的大小限制時，不管係使用觸發式探頭或掃描式探頭皆需要更換整組探頭，甚至移至其他大小合適的機台再進行量測，於設備的成本上係相當高昂。 In addition to using a trigger probe that generates a trigger signal when power is off, a developer uses an optical sensor to create a scanning probe with high precision and low contact force. At present, most of the measuring probes used on the market are triggered. Therefore, when measuring a workpiece with a curved surface, not only can the accurate measurement of the complete shape of the workpiece be accurately measured, but also the single point measurement of the triggering probe measurement must be consumed. plenty of time. In addition, due to processing technology The system is getting more and more improved, the type and shape of the workpiece are more and more abundant, when measuring different sizes or special workpieces, or when the size of the measuring machine is limited, whether using a trigger probe or Scanning probes need to be replaced with the entire set of probes, and even moved to other suitable size machines for measurement, which is quite expensive in terms of equipment cost.
中華民國專利公告號TW I302191「奈米級三次元接觸式量測探頭」揭示了一種能夠測量工件之長、寬、高或直徑等尺寸的觸發式探頭；雖此探頭能夠量測工件之三維尺寸，但對於工件之曲面即無法進行精確的量測，且此探頭結構較為複雜，於量測時需耗時較久的時間，再者，由於其量測裝置之位移量的限制，因此遇到較大型之工件時，不能得到整體之尺寸數值，係無法進行大範圍之量測，可量測的工件係相當有限。 The Republic of China Patent Publication No. TW I302191 "Nano-class three-dimensional contact measuring probe" discloses a triggering probe capable of measuring the length, width, height or diameter of a workpiece; although the probe is capable of measuring the three-dimensional dimensions of the workpiece However, the surface of the workpiece cannot be accurately measured, and the structure of the probe is relatively complicated, which takes a long time to measure, and further, due to the limitation of the displacement of the measuring device, In the case of larger workpieces, the overall dimensional values are not available, and large-scale measurements are not possible, and the number of workpieces that can be measured is quite limited.
另，中華民國專利公告號TW I495839「具五軸量測功能之掃描探頭」揭示一種具有AC旋轉軸(A軸及C軸)的五軸掃描式探頭，其藉由光路的設計以及AC旋轉軸裝置，能夠精確且以較低的成本量測工件的曲面或其他尺寸；專利之探頭雖能夠針對工件之曲面進行量測，但其探針機構係直接設於固定架，因此，量測大小不一或外型特殊的工件時，係會超出探針機構原本的量測限制，於使用上仍然具有需要改進的地方。 In addition, the Republic of China Patent Publication No. TW I495839 "Scanning Probe with Five-Axis Measurement Function" discloses a five-axis scanning probe with an AC rotating shaft (A-axis and C-axis), which is designed by an optical path and an AC rotating shaft. The device can accurately measure the curved surface or other dimensions of the workpiece at a low cost; the patented probe can measure the curved surface of the workpiece, but the probe mechanism is directly disposed on the fixed frame, so the measurement size is not When a special workpiece is used, it will exceed the original measurement limit of the probe mechanism, and there is still room for improvement in use.
今，發明人即是鑑於上述現有之三維感測式探頭於實際實施使用時仍具有多處缺失，於是乃一本孜孜不倦之精神，並藉由其豐富專業知識及多年之實務經驗所輔佐，而加以改善，並據此研創出本發明。 Nowadays, the inventor is still in the spirit of tirelessness in view of the above-mentioned existing three-dimensional sensing probes, and is supported by its rich professional knowledge and years of practical experience. Improvements have been made and the present invention has been developed based on this.
本發明主要目的為提供一種探棒前端感測式探頭，其係為具有大範圍量測與高精度特色之三維感測式探頭，不受工件材質所影響，能進行工件的曲面量測，結構係藉由十字連接環以及圓環墊片 穩固每一層的空心圓管組以避免產生彎曲變形，以抑制探棒結構有Z軸軸向位移，使其僅能有X軸與Y軸的角度變化；由於探棒係以十字連接環以及圓環墊片作連接固定，因此能依照機台需求，自由更換探棒長度。 The main object of the present invention is to provide a probe front-end sensing probe, which is a three-dimensional sensing probe with a wide range of measurement and high-precision characteristics, which is not affected by the material of the workpiece, and can perform surface measurement of the workpiece, and the structure By means of a cross connecting ring and a ring gasket Stabilize the hollow circular tube set of each layer to avoid bending deformation, so as to inhibit the Z-axis axial displacement of the probe structure so that it can only have the angle change of the X-axis and the Y-axis; since the probe is connected by a cross and a circle The ring gasket is fixed for connection, so the length of the probe can be freely changed according to the requirements of the machine.
為了達到上述實施目的，本發明一種探棒前端感測式探頭，包括有：一上基座及一下基座，分別垂直設有第一固定面及第二固定面，且係由四個Z軸彈片相互連接，上基座、第一固定面及第二固定面係各設有一穿槽，該上基座之穿槽設有一雷射二極體，第一固定面之穿槽外側設有一二維位置感測器，第二固定面之穿槽外側設有一一維位置感測器，又於第一固定面與第二固定面之間設有一分光鏡，且分光鏡與第二固定面之穿槽間設有一球透鏡，下基座係鎖固設有一軸承座，並設有一線性軸承於軸承座內，線性軸承之軸心延伸處係設有一探棒連接座；一探棒結構，係具有一十字連接環鎖固連接至探棒連接座以及一組以上之空心圓管組垂直卡設於十字連接環，其中一組以上之空心圓管組彼此係以一圓環墊片插銷接合；以及一探針結構，係具有一探針座垂直卡設於相對於十字連接環之空心圓管組的另一端、一內嵌於探針座之反射鏡，以及一鎖固於探針座之探針。 In order to achieve the above-mentioned implementation, the probe front-end sensing probe comprises: an upper base and a lower base, respectively, respectively having a first fixed surface and a second fixed surface, and is composed of four Z-axis The elastic pieces are connected to each other, and the upper base, the first fixing surface and the second fixing surface are respectively provided with a through slot, the slot of the upper base is provided with a laser diode, and the outer side of the first fixing surface is provided with a slot a two-dimensional position sensor, a one-dimensional position sensor is disposed outside the through slot of the second fixing surface, and a beam splitter is disposed between the first fixed surface and the second fixed surface, and the beam splitter and the second fixed a ball lens is arranged between the groove, the lower base is fixed with a bearing seat, and a linear bearing is arranged in the bearing seat, and a probe connecting seat is arranged at the axial extension of the linear bearing; a probe structure The utility model has a cross connecting ring fixedly connected to the probe connecting seat and a plurality of hollow circular tube sets vertically arranged on the cross connecting ring, wherein one or more hollow circular tube sets are connected with each other by a circular ring latch Bonding; and a probe structure having a probe holder vertical The card is disposed at the other end of the hollow tubular tube set relative to the cross connecting ring, a mirror embedded in the probe base, and a probe fixed to the probe base.
於本發明之一實施例中，一組以上之空心圓管組彼此之長度係為等長或不等長。 In one embodiment of the invention, more than one set of hollow tubular tubes are of equal length or unequal length to each other.
於本發明之一實施例中，每一空心圓管組係具有複數支空心圓管，且相鄰之空心圓管組彼此係以一圓環墊片插銷接合。 In an embodiment of the invention, each of the hollow circular tube sets has a plurality of hollow circular tubes, and the adjacent hollow circular tube sets are joined to each other by a circular gasket.
於本發明之一實施例中，圓環墊片係具有複數個插銷孔。 In one embodiment of the invention, the annular gasket has a plurality of pin holes.
於本發明之一實施例中，圓環墊片係設有三個插銷孔，每一插銷孔之間隔角度係為120°。 In one embodiment of the invention, the annular gasket is provided with three pin holes, each of which is spaced at an angle of 120°.
於本發明之一實施例中，空心圓管組係具有三支空心圓管， 係分別對應固定於插銷孔內。 In an embodiment of the invention, the hollow circular tube set has three hollow round tubes, They are respectively fixed in the pin holes.
於本發明之一實施例中，探棒連接座係包含有複數個強力磁鐵以及磁力固定的複數個定位銷。 In an embodiment of the invention, the probe connection base includes a plurality of powerful magnets and a plurality of magnetically fixed plurality of positioning pins.
於本發明之一實施例中，探針之頂端係設有一圓球。 In one embodiment of the invention, a tip of the probe is provided with a ball.
於本發明之一實施例中，十字連接環以及探針座之內緣係設置有卡榫。 In an embodiment of the invention, the cross-connecting ring and the inner edge of the probe holder are provided with a cassette.
(1)‧‧‧上基座 (1) ‧‧‧Upper pedestal
(11)‧‧‧第一固定面 (11)‧‧‧First fixed surface
(111)‧‧‧穿槽 (111)‧‧‧through slots
(12)‧‧‧上基座之穿槽 (12) ‧‧‧The grooving of the upper base
(13)‧‧‧雷射二極體 (13)‧‧‧Laser diode
(14)‧‧‧二維位置感測器 (14)‧‧‧Two-dimensional position sensor
(2)‧‧‧下基座 (2) ‧ ‧ pedestal
(21)‧‧‧第二固定面 (21) ‧‧‧Second fixed surface
(211)‧‧‧穿槽 (211)‧‧‧ 槽槽
(22)‧‧‧一維位置感測器 (22)‧‧‧One-dimensional position sensor
(23)‧‧‧軸承座 (23) ‧ ‧ bearing housing
(231)‧‧‧線性軸承 (231)‧‧‧Linear bearings
(24)‧‧‧探棒連接座 (24)‧‧‧ Probe connector
(241)‧‧‧強力磁鐵 (241)‧‧‧Powerful magnet
(242)‧‧‧定位銷 (242)‧‧‧Locating pins
(3)‧‧‧Z軸彈片 (3)‧‧‧Z-axis shrapnel
(4)‧‧‧分光鏡 (4) ‧‧‧beam splitter
(5)‧‧‧球透鏡 (5) ‧ ‧ ball lens
(6)‧‧‧探棒結構 (6) ‧‧‧ probe structure
(61)‧‧‧十字連接環 (61)‧‧‧cross connecting ring
(611)‧‧‧卡榫 (611)‧‧‧Carmen
(62)‧‧‧空心圓管組 (62)‧‧‧Hollow round tube set
(621)‧‧‧空心圓管 (621)‧‧‧ hollow round tube
(63)‧‧‧圓環墊片 (63) ‧‧‧ring gasket
(631)‧‧‧插銷孔 (631)‧‧‧ Pin hole
(7)‧‧‧探針結構 (7) ‧‧‧ probe structure
(71)‧‧‧探針座 (71)‧‧‧ probe holder
(72)‧‧‧反射鏡 (72)‧‧‧Mirror
(73)‧‧‧探針 (73) ‧ ‧ probe
(74)‧‧‧圓球 (74) ‧ ‧ sphere
第一圖：本發明較佳實施例之整體結構示意圖。 First Figure: Schematic diagram of the overall structure of a preferred embodiment of the present invention.
第二圖：本發明較佳實施例之Z軸系統示意圖。 Second Figure: Schematic diagram of a Z-axis system in accordance with a preferred embodiment of the present invention.
第三圖：本發明較佳實施例之Z軸系統剖視圖。 Third Figure: A cross-sectional view of a Z-axis system in accordance with a preferred embodiment of the present invention.
第四圖：本發明較佳實施例之XY軸系統示意圖。 Fourth Figure: Schematic diagram of an XY-axis system in accordance with a preferred embodiment of the present invention.
第五圖：本發明較佳實施例之XY軸系統組合示意圖。 Figure 5 is a schematic view showing the combination of the XY axis system of the preferred embodiment of the present invention.
第六圖：本發明較佳實施例之Z軸位移示意圖。 Figure 6 is a schematic view of the Z-axis displacement of a preferred embodiment of the present invention.
第七圖：本發明較佳實施例之XY軸系統位移示意圖。 Figure 7 is a schematic view showing the displacement of the XY axis system of the preferred embodiment of the present invention.
第八圖：本發明較佳實施例之XY軸系統更換示意圖。 Figure 8 is a schematic view showing the replacement of the XY axis system of the preferred embodiment of the present invention.
第九圖：本發明較佳實施例之光路設計配置圖。 Figure 9 is a diagram showing the arrangement of the optical path design of the preferred embodiment of the present invention.
第十圖：本發明較佳實施例之Z軸系統光路示意圖。 Figure 10 is a schematic view showing the optical path of the Z-axis system of the preferred embodiment of the present invention.
第十一圖：本發明較佳實施例之XY軸系統光路示意圖。 Figure 11 is a schematic view showing the optical path of the XY axis system of the preferred embodiment of the present invention.
本發明之目的及其結構功能上的優點，將依據以下圖面所示之結構，配合具體實施例予以說明，俾使審查委員能對本發明有更深入且具體之瞭解。 The object of the present invention and its structural and functional advantages will be explained in conjunction with the specific embodiments according to the structure shown in the following drawings, so that the reviewing committee can have a more in-depth and specific understanding of the present invention.
請參閱第一圖~第五圖，為本發明一種探棒前端感測式探頭較佳實施例之整體結構示意圖，其整體結構係由Z軸系統、XY軸系統以及探針結構組合而成，並結合光路設計，感測式探頭能夠有Z軸、X軸及Y軸方向的位移，係為一組三維感測式探頭； 係包括有：一上基座(1)及一下基座(2)，分別垂直設有一第一固定面(11)及一第二固定面(21)，且係由四個Z軸彈片(3)相互連接，上基座(1)、第一固定面(11)及第二固定面(21)係各設有一穿槽，上基座之穿槽(12)設有一雷射二極體(13)，第一固定面(11)之穿槽(111)外側設有一二維位置感測器(14)，第二固定面(21)之穿槽(211)外側設有一一維位置感測器(22)，又於第一固定面(11)與第二固定面(21)之間設有一分光鏡(4)，且分光鏡(4)與第二固定面(21)之穿槽(211)間設有一球透鏡(5)，下基座(2)係鎖固設有一軸承座(23)，並設有一線性軸承(231)於軸承座(23)內，線性軸承(231)之軸心延伸處係設有一探棒連接座(24)，其中探棒連接座(24)係包含有複數個強力磁鐵(241)以及磁力固定的複數個定位銷(242)；以及一探棒結構(6)，係具有一十字連接環(61)鎖固連接至探棒連接座(24)以及一組以上之空心圓管組(62)垂直卡設於十字連接環(61)，其中一組以上之空心圓管組(62)彼此係以一圓環墊片(63)插銷接合，空心圓管組(62)彼此之長度係可為等長或不等長，而一組空心圓管組(62)係包含有三支空心圓管(621)，以圓環墊片(63)接合時，係以插銷接合的形式連接，其中圓環墊片(63)係需要設有三個插銷孔(631)，每個插銷孔(631)之間隔角度係為120°，因此，圓環墊片(63)兩端之空心圓管組(62)的空心圓管(621)係分別對應固定於插銷孔(631)內；以及一探針結構(7)，係具有一探針座(71)垂直卡設於相對於十字連接環(61)之空心圓管組(62)的另一端、一內嵌於探針座(71)之反射鏡(72)，以及一鎖固於探針座(71)之探針(73)，探針(73)之頂端係有一圓球(74)，其中十字連接環(61)以及探針座(71)之內緣係設置有卡榫(611)，提供卡設空心圓管組(62)與反射鏡(72)。 Please refer to FIG. 1 to FIG. 5 , which are schematic diagrams showing the overall structure of a probe front end sensing probe according to a preferred embodiment of the present invention. The overall structure is composed of a Z-axis system, an XY-axis system and a probe structure. Combined with the optical path design, the sensing probe can have displacements in the Z-axis, X-axis and Y-axis directions, and is a set of three-dimensional sensing probes; The system includes: an upper base (1) and a lower base (2), respectively vertically provided with a first fixing surface (11) and a second fixing surface (21), and is composed of four Z-axis elastic pieces (3) The upper base (1), the first fixing surface (11) and the second fixing surface (21) are each provided with a through slot, and the slot (12) of the upper base is provided with a laser diode ( 13) a two-dimensional position sensor (14) is disposed outside the through slot (111) of the first fixing surface (11), and a one-dimensional position is disposed outside the through slot (211) of the second fixing surface (21). The sensor (22) is further provided with a beam splitter (4) between the first fixing surface (11) and the second fixing surface (21), and the beam splitter (4) and the second fixing surface (21) are worn. A ball lens (5) is arranged between the groove (211), the lower base (2) is fixed with a bearing seat (23), and a linear bearing (231) is arranged in the bearing seat (23), and the linear bearing (231) The axis extension is provided with a probe connection seat (24), wherein the probe connection seat (24) comprises a plurality of powerful magnets (241) and magnetically fixed plurality of positioning pins (242); The rod structure (6) has a cross connecting ring (61) fixedly connected to the probe connecting seat (24) and more than one set of hollow circles The tube set (62) is vertically clamped to the cross connecting ring (61), wherein one or more sets of hollow circular tube sets (62) are interlocked with each other by a ring gasket (63), and the hollow circular tube sets (62) are mutually connected. The lengths may be of equal length or unequal length, and a set of hollow circular tube sets (62) comprise three hollow circular tubes (621), which are joined by a pin joint when the annular gasket (63) is joined. Connection, wherein the ring gasket (63) is required to have three bolt holes (631), and the angle of each of the bolt holes (631) is 120°, so that the hollow circles at both ends of the ring gasket (63) The hollow circular tube (621) of the tube set (62) is respectively fixed in the pin hole (631); and a probe structure (7) has a probe base (71) vertically connected to the cross connection The other end of the hollow circular tube set (62) of the ring (61), a mirror (72) embedded in the probe holder (71), and a probe (73) fixed to the probe holder (71) The tip of the probe (73) is provided with a ball (74), wherein the inner edge of the cross connecting ring (61) and the probe base (71) is provided with a latch (611), and the hollow circular tube set is provided. 62) with a mirror (72).
此外，藉由下述具體實施例，可進一步證明本發明可實際應 用之範圍，但不意欲以任何形式限制本發明之範圍。 In addition, the following specific embodiments can further prove that the present invention can be practically The scope of use of the invention is not intended to limit the scope of the invention in any way.
由上述結構可知，本發明探棒前端感測式探頭之機構係由Z軸系統、XY軸系統以及探針結構(7)組合而成，而其中除了機構提供位移之外，還有光路上的結構設計。Z軸系統係利用Z軸彈片(3)來使感測式探頭做Z軸方向的位移；XY軸系統則係藉由空心圓管(621)自然且均勻的彎曲，並以十字連接環(61)以及圓環墊片(63)穩固每一層的空心圓管組(62)，抑制探棒結構(6)有Z軸軸向位移，僅能有X軸與Y軸的角度變化，以達到三自由度的感測式探頭設計。 It can be seen from the above structure that the mechanism of the probe front end sensing probe of the present invention is composed of a Z-axis system, an XY-axis system and a probe structure (7), wherein in addition to the mechanism providing displacement, there is also an optical path. Structural design. The Z-axis system uses the Z-axis shrapnel (3) to make the sensing probe move in the Z-axis direction; the XY-axis system is naturally and uniformly bent by the hollow circular tube (621), and the cross-connecting ring (61) And the annular gasket (63) stabilizes the hollow circular tube set (62) of each layer, suppresses the axial displacement of the probe rod structure (6), and can only have the angle change of the X-axis and the Y-axis to reach three Sensing probe design with degrees of freedom.
請參閱第六圖，係能更了解Z軸系統作動時位移之情形，Z軸系統主要係分為上基座(1)及下基座(2)兩個部分，並藉由四片微細樑構造之薄彈片的Z軸彈片(3)相互連接，並且於下基座(2)連接設有線性軸承(231)及探棒連接座(24)。當探針(73)頂端之圓球(74)垂直接觸到物品之表面時，會有來自垂直方向的力量，由於XY軸系統之探棒結構(6)係被十字連接環(61)以及圓環墊片(63)固定住，而無法產生Z軸方向之位移，其垂直方向之力量即會直接傳達至Z軸系統以轉換成位移量，此時上基座(1)係維持固定位置，保持不動，僅下基座(2)會利用Z軸彈片(3)之彈性，產生位移變化，且因為線性軸承(231)之限制，使Z軸系統僅能作垂直的線性運動，確保不會有X軸及Y軸方向的偏移，此設計不但能有效拘束自由度，使整體結構產生單一方向的上下位移，接觸力也能夠控制在設計之範圍內。 Please refer to the sixth figure for a better understanding of the displacement of the Z-axis system. The Z-axis system is mainly divided into two parts: the upper base (1) and the lower base (2), and four micro-beams. The Z-axis elastic pieces (3) of the thin shrapnel are connected to each other, and a linear bearing (231) and a probe connecting seat (24) are connected to the lower base (2). When the ball (74) at the top of the probe (73) is in vertical contact with the surface of the article, there is a force from the vertical direction, since the probe structure (6) of the XY axis system is connected by the cross connecting ring (61) and the circle. The ring spacer (63) is fixed and cannot generate displacement in the Z-axis direction, and the vertical direction force is directly transmitted to the Z-axis system to be converted into a displacement amount, and the upper base (1) maintains a fixed position. Keeping it still, only the lower base (2) will use the elasticity of the Z-axis shrapnel (3) to produce displacement changes, and because of the limitation of the linear bearing (231), the Z-axis system can only make vertical linear motion, ensuring that it will not With offsets in the X-axis and Y-axis directions, this design not only effectively limits the degree of freedom, but also allows the overall structure to be displaced up and down in a single direction, and the contact force can be controlled within the design range.
請參閱第七圖，係能更了解XY軸系統作動時位移之情形，XY軸系統主要係由三組空心圓管組(62)與圓環墊片連接而成，每一組空心圓管組(62)皆有三根空心圓管(621)，組與組之間係藉由圓環墊片(63)以插銷接合，將自由度限制為兩個(X軸及Y軸)，以 避免Z軸軸向位移，而影響到Z軸系統量測上的誤差。當探針(73)頂端的圓球(74)水平接觸到物品之表面時，水平方向之力量會傳達到探針座(71)上方之探棒結構(6)，使得探棒結構(6)的空心圓管組(62)自然且均勻的彎曲，產生X軸與Y軸方向的旋轉角度變化，為了達到XY軸系統在旋轉位移時能為均勻彎曲，圓環墊片(63)設計為具有三個插銷孔(631)，並互相間隔角度120°，以提供兩側之空心圓管組(62)的每支空心圓管(621)能對應固定於插銷孔(631)內，而使用兩個圓環墊片(63)係能夠限制住Z軸方向的位移，亦不影響X軸與Y軸方向的位移變化，此設計係能避免量測上之誤差。 Please refer to the seventh figure for better understanding of the displacement of the XY-axis system. The XY-axis system is mainly composed of three sets of hollow circular tube sets (62) and ring gaskets. Each group of hollow circular tube sets (62) There are three hollow circular tubes (621), and the group is connected by a ring gasket (63) with a pin to limit the degree of freedom to two (X-axis and Y-axis). Avoid the axial displacement of the Z axis, which affects the error in the measurement of the Z axis system. When the ball (74) at the top of the probe (73) is in horizontal contact with the surface of the article, the horizontal force is transmitted to the probe structure (6) above the probe holder (71), so that the probe structure (6) The hollow circular tube set (62) is naturally and uniformly curved to produce a change in the rotation angle of the X-axis and the Y-axis. In order to achieve uniform bending of the XY-axis system during rotational displacement, the annular gasket (63) is designed to have Three pin holes (631) are spaced apart from each other by an angle of 120°, so that each hollow tube (621) of the hollow tube group (62) provided on both sides can be correspondingly fixed in the pin hole (631), and two The ring gasket (63) can limit the displacement in the Z-axis direction and does not affect the displacement changes in the X-axis and Y-axis directions. This design can avoid measurement errors.
請參閱第五圖及第八圖，使用三次元量測儀對工件進行尺寸與形貌量測時，會因工件外型尺寸、機台大小的不同，而須使用合適長度的探棒結構(6)，為了達到量測時能夠加長或縮短探棒結構(6)之長度，以及達到快速拆卸組裝的便利性，XY軸系統探棒結構(6)上端的十字連接環(61)內緣係設有卡榫(611)，能夠快速拆卸探棒結構(6)之空心圓管組(62)，更換不同長度空心圓管組(62)，使探棒結構(6)能夠任意變換總長度以進行量測，由於空心圓管(621)以插銷接合的方式與圓環墊片(63)接合，因此XY軸系統之探棒結構(6)於拆卸及組裝時係相當簡便，具有快速拆卸組裝之優勢。 Please refer to the fifth and eighth figures. When using the three-dimensional measuring instrument to measure the size and shape of the workpiece, the probe structure of the appropriate length must be used depending on the size of the workpiece and the size of the machine. 6), in order to achieve lengthening or shortening the length of the probe structure (6), and to facilitate the quick disassembly assembly, the inner edge of the cross-connecting ring (61) at the upper end of the XY-axis system probe structure (6) It is equipped with a cassette (611), which can quickly disassemble the hollow tube set (62) of the probe structure (6), and replace the hollow tube set (62) of different lengths, so that the probe structure (6) can arbitrarily change the total length. For the measurement, since the hollow circular tube (621) is engaged with the annular gasket (63) by means of pin engagement, the probe structure (6) of the XY-axis system is quite simple in disassembly and assembly, and has a quick disassembly assembly. The advantage.
請參閱第九圖~第十一圖，係為本發明之光路設計，所使用之元件為雷射二極體(13)(Laser Diode)、分光鏡(4)(Beamsplitter)、一維位置感測器(22)(1D-PSD)、二維位置感測器(14)(2D-PSD)、反射鏡(72)(Mirror)與球透鏡(5)(Ball Lens)。整體光路流程為雷射二極體(13)發射雷射光束，經由分光鏡(4)時，係將光束分為兩道，一道光束會經過球透鏡(5)，將光束聚焦投射至一維位置感測器(22)上，當探針(73)作垂直上下位移時，使一維位置感測器(22)能夠感測到Z軸位移變化量；另一道光束則投射至位 於探棒結構(6)末端之反射鏡(72)上，光束係會反射至分光鏡(4)，再將光投射至二維位置感測器(14)上，探棒結構(6)如產生角度變化，便可使光點產生位移，藉此二維位置感測器(14)係能感測到探針(73)頂端圓球(74)的XY軸位移變化量。當Z軸系統與XY軸系統各自作動後係有位移產生，位置感測器上光點的位置亦會隨之變動，因此一維位置感測器(22)與二維位置感測器(14)便會產生電流訊號，經過訊號處理器處理後，將電壓之變化與位移距離經過比對後，便能得知原始座標與位移後座標兩者間的關係，藉此得知探針(73)頂端圓球(74)之位移數據。 Please refer to the ninth to eleventh drawings, which are the optical path design of the present invention, and the components used are a laser diode (13) (Laser Diode), a beam splitter (4) (Beamsplitter), and a one-dimensional position sense. Detector (22) (1D-PSD), two-dimensional position sensor (14) (2D-PSD), mirror (72) (Mirror) and ball lens (5) (Ball Lens). The overall optical path is a laser diode (13) that emits a laser beam. When passing through the beam splitter (4), the beam is split into two paths, and a beam passes through the ball lens (5) to focus the beam onto the one-dimensional beam. On the position sensor (22), when the probe (73) is vertically displaced up and down, the one-dimensional position sensor (22) can sense the Z-axis displacement variation; the other beam is projected into position. On the mirror (72) at the end of the probe structure (6), the beam system is reflected to the beam splitter (4), and then the light is projected onto the two-dimensional position sensor (14), and the probe structure (6) is as By generating an angular change, the spot is displaced, whereby the two-dimensional position sensor (14) senses the amount of change in the XY-axis displacement of the tip ball (74) of the probe (73). When the Z-axis system and the XY-axis system are each activated, the position of the spot on the position sensor changes accordingly, so the one-dimensional position sensor (22) and the two-dimensional position sensor (14) The current signal is generated. After the signal processor processes the voltage and the displacement distance, the relationship between the original coordinate and the post-displacement coordinate is known, and the probe is known (73). The displacement data of the top sphere (74).
藉著此Z軸系統、XY軸系統以及光路上的設計，本發明係具有三個自由度，能進行三維尺寸的量測，且量測時不受工件之材質所影響，能進行工件的曲面量測，係具有大範圍量測與高精度之特色。 Through the design of the Z-axis system, the XY-axis system and the optical path, the present invention has three degrees of freedom, can measure the three-dimensional size, and is not affected by the material of the workpiece during the measurement, and can perform the surface of the workpiece. Measurements are characterized by a wide range of measurements and high precision.
由上述之實施說明可知，本發明與現有技術相較之下，本發明具有以下優點： It can be seen from the above description that the present invention has the following advantages compared with the prior art:
1.本發明之探棒結構係由三組空心圓管組以及兩個圓環墊片插銷接合而組成，能將自由度限制為兩個(X軸及Y軸)，係避免Z軸軸向位移，導致影響到Z軸系統量測上的誤差，藉此，本發明不受工件之材質所影響，能進行工件的曲面量測。 1. The probe structure of the present invention is composed of three sets of hollow circular tube sets and two annular gasket pins, which can limit the degree of freedom to two (X-axis and Y-axis), avoiding the Z-axis axial direction. The displacement causes an error in the measurement of the Z-axis system, whereby the present invention is not affected by the material of the workpiece, and can perform surface measurement of the workpiece.
2.本發明Z軸系統之上下基座係具有四個Z軸彈片相互連接，並且於下基座連接設有線性軸承及探棒連接座，此結構設計使Z軸系統僅能作垂直的線性運動，避免有X軸及Y軸方向的偏移。此Z軸之上下基座的結構結合上述探棒結構係能確保XY軸探棒結構與Z軸系統為各自獨立運作。 2. The upper and lower bases of the Z-axis system of the present invention have four Z-axis spring pieces connected to each other, and a linear bearing and a probe connecting seat are connected to the lower base. The structure design allows the Z-axis system to be only vertically linear. Movement, avoiding offsets in the X-axis and Y-axis directions. The structure of the lower base above the Z-axis combined with the above-described probe structure ensures that the XY-axis probe structure and the Z-axis system operate independently of each other.
3.本發明之探棒結構由於空心圓管係以插銷接合的方式與圓環墊片接合，與十字連接環係以卡榫之方式連接，因此探棒結構 於拆卸及組裝時係相當簡便，提供使用者藉由快速拆卸探棒結構之空心圓管組，並更換合適長度的空心圓管組，以配合各種工件或機台之尺寸，具有快速拆卸組裝之優勢。 3. The probe structure of the present invention is connected to the annular gasket by means of a pin joint in a hollow circular tube, and is connected to the cross connecting ring by a snap, so the probe structure It is quite easy to disassemble and assemble. It provides users with a hollow tube set that quickly disassembles the probe structure and replaces the hollow tube set of suitable length to match the size of various workpieces or machines. It has quick disassembly and assembly. Advantage.
綜上所述，本發明之探棒前端感測式探頭，的確能藉由上述所揭露之實施例，達到所預期之使用功效，且本發明亦未曾公開於申請前，誠已完全符合專利法之規定與要求。爰依法提出發明專利之申請，懇請惠予審查，並賜准專利，則實感德便。 In summary, the probe front end sensing probe of the present invention can achieve the intended use efficiency by the above disclosed embodiments, and the present invention has not been disclosed before the application, and has completely complied with the patent law. Regulations and requirements.爰Issuing an application for a patent for invention in accordance with the law, and asking for a review, and granting a patent, is truly sensible.
惟，上述所揭之圖示及說明，僅為本發明之較佳實施例，非為限定本發明之保護範圍；大凡熟悉該項技藝之人士，其所依本發明之特徵範疇，所作之其它等效變化或修飾，皆應視為不脫離本發明之設計範疇。 The illustrations and descriptions of the present invention are merely preferred embodiments of the present invention, and are not intended to limit the scope of the present invention; those skilled in the art, which are characterized by the scope of the present invention, Equivalent variations or modifications are considered to be within the scope of the design of the invention.
(1)‧‧‧上基座 (1) ‧‧‧Upper pedestal
(11)‧‧‧第一固定面 (11)‧‧‧First fixed surface
(13)‧‧‧雷射二極體 (13)‧‧‧Laser diode
(14)‧‧‧二維位置感測器 (14)‧‧‧Two-dimensional position sensor
(2)‧‧‧下基座 (2) ‧ ‧ pedestal
(21)‧‧‧第二固定面 (21) ‧‧‧Second fixed surface
(211)‧‧‧穿槽 (211)‧‧‧ 槽槽
(22)‧‧‧一維位置感測器 (22)‧‧‧One-dimensional position sensor
(23)‧‧‧軸承座 (23) ‧ ‧ bearing housing
(24)‧‧‧探棒連接座 (24)‧‧‧ Probe connector
(4)‧‧‧分光鏡 (4) ‧‧‧beam splitter
(6)‧‧‧探棒結構 (6) ‧‧‧ probe structure
(61)‧‧‧十字連接環 (61)‧‧‧cross connecting ring
(62)‧‧‧空心圓管組 (62)‧‧‧Hollow round tube set
(621)‧‧‧空心圓管 (621)‧‧‧ hollow round tube
(63)‧‧‧圓環墊片 (63) ‧‧‧ring gasket
(7)‧‧‧探針結構 (7) ‧‧‧ probe structure
(71)‧‧‧探針座 (71)‧‧‧ probe holder
(73)‧‧‧探針 (73) ‧ ‧ probe
(74)‧‧‧圓球 (74) ‧ ‧ sphere
Claims (9)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW105115250A TWI582378B (en) | 2016-05-18 | 2016-05-18 | Sensing touch probe of probe tip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW105115250A TWI582378B (en) | 2016-05-18 | 2016-05-18 | Sensing touch probe of probe tip |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TWI582378B true TWI582378B (en) | 2017-05-11 |
| TW201741619A TW201741619A (en) | 2017-12-01 |
Family
ID=59367318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW105115250A TWI582378B (en) | 2016-05-18 | 2016-05-18 | Sensing touch probe of probe tip |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWI582378B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114200279A (en) * | 2021-11-29 | 2022-03-18 | 强一半导体（苏州）有限公司 | Film probe card and probe head thereof |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI761126B (en) * | 2021-03-12 | 2022-04-11 | 國立虎尾科技大學 | On-line workpiece size and geometric accuracy detection device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI302191B (en) * | 2006-11-24 | 2008-10-21 | Chih Liang Chu | Three-dimensional nano touch trigger probe |
| CN101943612A (en) * | 2009-07-03 | 2011-01-12 | 深圳迈瑞生物医疗电子股份有限公司 | Electronic temperature measurement instrument and probe thereof |
| CN102274006A (en) * | 2011-06-24 | 2011-12-14 | 山东省科学院激光研究所 | Fiber grating temperature sensor and probe thereof |
| CN203310367U (en) * | 2013-06-18 | 2013-11-27 | 成都理工大学 | Variable-resistance type measuring probe |
| CN103983309A (en) * | 2014-06-06 | 2014-08-13 | 中国工程物理研究院流体物理研究所 | Three-in-one photoelectric probe for impact and detonation experiment |
-
2016
- 2016-05-18 TW TW105115250A patent/TWI582378B/en not_active IP Right Cessation
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI302191B (en) * | 2006-11-24 | 2008-10-21 | Chih Liang Chu | Three-dimensional nano touch trigger probe |
| CN101943612A (en) * | 2009-07-03 | 2011-01-12 | 深圳迈瑞生物医疗电子股份有限公司 | Electronic temperature measurement instrument and probe thereof |
| CN102274006A (en) * | 2011-06-24 | 2011-12-14 | 山东省科学院激光研究所 | Fiber grating temperature sensor and probe thereof |
| CN203310367U (en) * | 2013-06-18 | 2013-11-27 | 成都理工大学 | Variable-resistance type measuring probe |
| CN103983309A (en) * | 2014-06-06 | 2014-08-13 | 中国工程物理研究院流体物理研究所 | Three-in-one photoelectric probe for impact and detonation experiment |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114200279A (en) * | 2021-11-29 | 2022-03-18 | 强一半导体（苏州）有限公司 | Film probe card and probe head thereof |
| CN114200279B (en) * | 2021-11-29 | 2023-03-14 | 强一半导体（苏州）有限公司 | Film probe card and probe head thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201741619A (en) | 2017-12-01 |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |