CN106556367A - A kind of turn error measurement apparatus of the Aerostatic Spindle - Google Patents
A kind of turn error measurement apparatus of the Aerostatic Spindle Download PDFInfo
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- CN106556367A CN106556367A CN201710012177.7A CN201710012177A CN106556367A CN 106556367 A CN106556367 A CN 106556367A CN 201710012177 A CN201710012177 A CN 201710012177A CN 106556367 A CN106556367 A CN 106556367A
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- thread mechanism
- standard ball
- difference thread
- aerostatic spindle
- displacement transducer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
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- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention provides a kind of turn error measurement apparatus of the Aerostatic Spindle, the left and right difference thread mechanism of described device, in front and back difference thread mechanism, upper and lower difference thread mechanism are used for the distance for guaranteeing standard ball equatorial line and non-contact displacement transducer at 70 μm ~ 80 μm；Standard ball mounting seat is used for the eccentric adjustment for realizing standard ball and the Aerostatic Spindle axis of rotation submicron order；Mounting frame for sensor is used to realizing before reverse measuremenet 180 ° of rotational positionings with non-contact displacement transducer after reverse measuremenet；Index dial is used to realizing before reverse measuremenet 180 ° of rotational positionings with standard ball after reverse measuremenet；Circular gratings and read head are strictly reciprocity for the angle before realizing reversely and in reverse rear measurement data corresponding to each sampled point.The turn error measurement apparatus of the Aerostatic Spindle of the present invention can be precisely separating the Aerostatic Spindle turn error and standard ball deviation from circular from, improve the certainty of measurement of the Aerostatic Spindle turn error.
Description
Technical field
The invention belongs to Technology of Precision Measurement field, and in particular to a kind of turn error measurement dress of the Aerostatic Spindle
Put.
Background technology
With the continuous development of science and technology, the national basic industries level of Ultraprecision Machining direct reaction one.Air
Hydrostatic spindle is the critical function part for realizing Ultra-precision machining, and its turn error can map directly to the table of processing part
On the pattern of face, so as to restrict the lifting of ultra precision cutting machine finish.Therefore carry out the Aerostatic Spindle turn error to survey
Amount work is to promoting Ultraprecision Machining fast development significant.
In tens nanometer magnitude, its measurement difficult point is the separation of measure error to the turn error of the Aerostatic Spindle.By
The measurement signal that sensor is collected mainly including the turn error of the Aerostatic Spindle, standard ball setting-up eccentricity error with
And the deviation from circular from of standard ball.The core concept of the Aerostatic Spindle turn error measurement is the standard using nanoscale circularity
Ball, by error separating technology by the standard ball setting-up eccentricity error included in measurement result and its roundness error separation out,
Obtain the nanometer scale turn error of the Aerostatic Spindle.For the turn error of accurately measurement high accuracy the Aerostatic Spindle, state
It is inside and outside to have developed the various tests such as single-point method, multipoint method, multistep processes, reverse method.Wherein single-point method can not efficiently separate Asia
The standard ball deviation from circular from of micron-sized eccentric error and tens nanometer magnitude, may be only available for returning for more than hundred nanometer scales
Turn error measure；Multipoint method needs multiple sensors to install according to fixed angle in actual mechanical process, in measure error point
It is difficult to eliminate sensor mounting location deviation and the inconsistent impact for bringing of each sensor characteristics during；Multistep processes is operated
Complex steps, and the turn error solved using multistep processes can cause harmonics restraint to lose；Comparatively speaking, reverse method operation letter
It is single, standard ball deviation from circular from and the Aerostatic Spindle turn error can be kept completely separate in theory, and the method only needs to use
One sensor is measured, it is to avoid introduce sensor mounting location deviation and the inconsistent measure error for causing of characteristic.
Test signal Plays ball setting-up eccentricity institute can be substantially eliminated using removal first harmonic method in reverse method
The impact of generation.Measurement standard ball and sensor are needed in the measuring principle of reverse method while 180 ° of rotation, and reversely before
Must be strict reciprocity with the angle corresponding to each sampled point in reverse rear measurement data, spindle rotation error and standard could be realized
Ball deviation from circular from is precisely separating.
Currently, it is strictly right with the angle corresponding to each sampled point in reverse rear measurement data before being realized reversely using reverse method
Deng the turn error measurement apparatus of the Aerostatic Spindle there is not been reported.
The content of the invention
The technical problem to be solved is to provide a kind of turn error measurement apparatus of the Aerostatic Spindle.
The turn error measurement apparatus of the Aerostatic Spindle of the present invention, are characterized in, described measurement apparatus include gas
Floating vibration-isolating platform, main shaft mounting bracket, the Aerostatic Spindle, sense measuring device, moving guide rail, motor；
Its annexation is：Air flotation vibration isolation is placed on vibrating isolation foundation；Main shaft mounting bracket is fixedly connected on air supporting vibration isolation
On platform；The Aerostatic Spindle is fixedly connected in main shaft mounting bracket；Moving guide rail is fixedly connected in air flotation vibration isolation；
Sense measuring device is fixedly connected on moving guide rail, and moving guide rail drives sense measuring device to move up and down；Drive electricity
Machine is fixedly connected on air flotation vibration isolation, and motor drives the Aerostatic Spindle to carry out gyration.
Described sense measuring device includes read head, Circular gratings, index dial, standard ball mounting seat, standard ball, left and right difference
Divide thread mechanism, in front and back difference thread mechanism, upper and lower difference thread mechanism, mounting frame for sensor, contactless displacement sensing
Device；
Its annexation is：Described Circular gratings are arranged on index dial, and index dial is arranged on the rotor top of the Aerostatic Spindle
End, Circular gratings, index dial and the Aerostatic Spindle are coaxial；The bottom of read head is fixed on the reading of the Aerostatic Spindle housing tip
The angle-data of Circular gratings；Described standard ball mounting seat is arranged on index dial, and standard ball is arranged on standard ball mounting seat；
Described left and right difference thread mechanism is arranged on moving guide rail, and difference thread mechanism is arranged on left and right difference thread mechanism in front and back
On, upper and lower difference thread mechanism is arranged on difference thread mechanism in front and back；It is poor up and down that described mounting frame for sensor is arranged on
Divide on thread mechanism, non-contact displacement transducer is fixed on mounting frame for sensor, non-contact displacement transducer reads
The displacement data of standard ball, left and right difference thread mechanism drive non-contact displacement transducer to move left and right, in front and back difference screw thread
Mechanism drives non-contact displacement transducer to move forward and backward, and upper and lower difference thread mechanism drives non-contact displacement transducer upper and lower
It is mobile.
The positioning precision of described Circular gratings is 0.5 rad.
Described standard ball is submicron order with the eccentric Adjustment precision of the Aerostatic Spindle axis of rotation.
The deviation from circular from of described standard ball is less than or equal to 40nm.
Described left and right difference thread mechanism, the in front and back resolving accuracy of difference thread mechanism and upper and lower difference thread mechanism are
1μm。
Described non-contact displacement transducer certainty of measurement is 12nm, non-contact displacement transducer and measurement standard ball
Equatorial line distance range be 70 μm -80 μm.
Left and right difference thread mechanism, difference spiral shell in front and back in the turn error measurement apparatus of the Aerostatic Spindle of the present invention
Line mechanism, upper and lower difference thread mechanism be used to guaranteeing the distance of standard ball equatorial line and non-contact displacement transducer 70 μm-
80μm；Standard ball mounting seat is used for the eccentric adjustment for realizing standard ball and the Aerostatic Spindle axis of rotation submicron order；Sensing
Device mounting bracket is used to realizing before reverse measuremenet 180 ° of rotational positionings with non-contact displacement transducer after reverse measuremenet；Indexing
Disk is used to realizing before reverse measuremenet 180 ° of rotational positionings with standard ball after reverse measuremenet；Circular gratings and read head are used to realize instead
Angle forward and in reverse rear measurement data corresponding to each sampled point is strictly reciprocity.The revolution of the Aerostatic Spindle of the present invention
Error measuring means can be precisely separating the Aerostatic Spindle turn error and standard ball deviation from circular from, improve the Aerostatic Spindle
The certainty of measurement of turn error.
Description of the drawings
Fig. 1 is the workflow diagram of the turn error measurement apparatus of the Aerostatic Spindle of the present invention；
Fig. 2 is the structural representation of the turn error measurement apparatus of the Aerostatic Spindle of the present invention；
Fig. 3 is the sense measuring device structural representation of the turn error measurement apparatus of the Aerostatic Spindle of the present invention.
In figure, 1. 2. main shaft mounting bracket of air flotation vibration isolation, 3. the Aerostatic Spindle, 4. sense measuring device
5. 6. motor of moving guide rail；
41. read head, 42. Circular gratings, 43. index dial, 44. standard ball mounting seat, 45. standard ball, 46. or so difference
Before and after thread mechanism 47. difference thread mechanism about 48. 49. mounting frame for sensor 410. of difference thread mechanism it is non-
Tangent displacement sensor.
Specific embodiment
The present invention will be further described in detail for formula with reference to the accompanying drawings and examples.
As shown in figure 1, the turn error measurement apparatus of the Aerostatic Spindle of the present invention include air flotation vibration isolation 1, master
Axle mounting bracket 2, the Aerostatic Spindle 3, sense measuring device 4, moving guide rail 5, motor 6；
Its annexation is：Air flotation vibration isolation 1 is placed on vibrating isolation foundation；Main shaft mounting bracket 2 be fixedly connected on air supporting every
Shake on platform 1；The Aerostatic Spindle 3 is fixedly connected in main shaft mounting bracket 2；Moving guide rail 5 is fixedly connected on air supporting vibration isolation
On platform 1；Sense measuring device 4 is fixedly connected on moving guide rail 5, and moving guide rail 5 drives sense measuring device 4 to carry out up and down
It is mobile；Motor 6 is fixedly connected on air flotation vibration isolation 1, and motor 6 drives the Aerostatic Spindle 3 to carry out gyration.
As shown in Fig. 2 described sense measuring device 4 includes read head 41, Circular gratings 42, index dial 43, standard ball peace
Dress seat 44, standard ball 45, left and right difference thread mechanism 46, in front and back difference thread mechanism 47, upper and lower difference thread mechanism 48, sensing
Device mounting bracket 49, non-contact displacement transducer 410；
Its annexation is：Described Circular gratings 42 are arranged on index dial 43, and index dial 43 is arranged on the Aerostatic Spindle 3
Apex rotor, Circular gratings 42, index dial 43 and the Aerostatic Spindle 3 are coaxial；The bottom of read head 41 is fixed on static air pressure master
3 housing tip of axle reads the angle-data of Circular gratings 42；Described standard ball mounting seat 44 is arranged on index dial 43, standard ball
45 are arranged on standard ball mounting seat 44；Described left and right difference thread mechanism 46 is arranged on moving guide rail 5, in front and back difference spiral shell
Line mechanism 47 is arranged on left and right difference thread mechanism 46, and upper and lower difference thread mechanism 48 is arranged on difference thread mechanism 47 in front and back
On；Described mounting frame for sensor 49 is arranged on upper and lower difference thread mechanism 48, and non-contact displacement transducer 410 is fixed
On mounting frame for sensor 49, non-contact displacement transducer 410 reads the displacement data of standard ball 45, left and right difference screw thread
Mechanism 46 drives non-contact displacement transducer 410 to move left and right, and difference thread mechanism 47 drives contactless displacement to pass in front and back
Sensor 410 is moved forward and backward, and upper and lower difference thread mechanism 48 drives non-contact displacement transducer 410 to move up and down.
The positioning precision of described Circular gratings 42 is 0.5 rad.
Described standard ball 45 is submicron order with the eccentric Adjustment precision of 3 axis of rotation of the Aerostatic Spindle.
The deviation from circular from of described standard ball 45 is less than or equal to 40nm.
Described left and right difference thread mechanism 46, difference thread mechanism 47 and the resolution of difference thread mechanism 48 up and down in front and back
Precision is 1 μm.
Described 410 certainty of measurement of non-contact displacement transducer is 12nm, non-contact displacement transducer 410 and measurement
The distance range of the equatorial line of standard ball 45 is 70 μm -80 μm.
The turn error measurement apparatus course of work of the Aerostatic Spindle of the present invention is as shown in figure 3, idiographic flow is as follows：
The Aerostatic Spindle to be measured 3 is placed in main shaft mounting bracket 2 so that standard ball 45 and 3 axis of rotation of the Aerostatic Spindle
Bias be less than 0.5 μm, and the distance of 45 equatorial line of standard ball and non-contact displacement transducer 410 is adjusted to into 70 μm of -80 μ
m；Opening motor 6 drives the Aerostatic Spindle 3 to realize gyration, starts positive measurement, and gathers contactless displacement
The 42 corresponding angle-data of displacement data and Circular gratings of sensor 410；Measurement terminate after by standard ball 45 and contactless
180 ° of the rotation simultaneously of displacement transducer 410, starts reverse measuremenet, and gathers the displacement data of non-contact displacement transducer 410
And 42 corresponding angle-data of Circular gratings；Using measurement data of the method elimination of removal first harmonic after reverse front and reverse
In eccentric error；The circularity of the deviation from circular from and the Aerostatic Spindle 3 of standard ball 45 is obtained using reverse error separating method
Error.Wherein reversely error separating method principle is as follows：
The data for measuring include two parts, standard ball deviation from circular from after eccentric error is removedAnd spindle rotation error, the relation with displacement data and angle-data is：
(1)
(2)
Standard ball deviation from circular from can be solved by formula (1) and formula (2) and the Aerostatic Spindle turn error is：
(3)
(4)。
Claims (7)
1. turn error measurement apparatus of a kind of the Aerostatic Spindle, it is characterised in that described measurement apparatus include air supporting every
Shake platform（1）, main shaft mounting bracket（2）, the Aerostatic Spindle（3）, sense measuring device（4）, moving guide rail（5）, drive electricity
Machine（6）；
Its annexation is：Air flotation vibration isolation（1）It is placed on vibrating isolation foundation；Main shaft mounting bracket（2）It is fixedly connected on gas
Floating vibration-isolating platform（1）On；The Aerostatic Spindle（3）It is fixedly connected on main shaft mounting bracket（2）On；Moving guide rail（5）It is fixed to connect
It is connected to air flotation vibration isolation（1）On；Sense measuring device（4）It is fixedly connected on moving guide rail（5）On, moving guide rail（5）Drive
Sense measuring device（4）Move up and down；Motor（6）It is fixedly connected on air flotation vibration isolation（1）, motor（6）
Drive the Aerostatic Spindle（3）Carry out gyration.
2. turn error measurement apparatus of a kind of the Aerostatic Spindle according to claim 1, it is characterised in that：Described
Sense measuring device（4）Including read head（41）, Circular gratings（42）, index dial（43）, standard ball mounting seat（44）, standard ball
（45）, left and right difference thread mechanism（46）, difference thread mechanism in front and back（47）, upper and lower difference thread mechanism（48）, sensor peace
Dress support（49）, non-contact displacement transducer（410）；
Its annexation is：Described Circular gratings（42）Installed in index dial（43）On, index dial（43）Installed in static air pressure
Main shaft（3）Apex rotor, Circular gratings（42）, index dial（43）And the Aerostatic Spindle（3）Coaxially；Read head（41）Bottom
It is fixed on the Aerostatic Spindle（3）Housing tip reads Circular gratings（42）Angle-data；Described standard ball mounting seat（44）
Installed in index dial（43）On, standard ball（45）Installed in standard ball mounting seat（44）On；Described left and right difference thread mechanism
（46）Installed in moving guide rail（5）On, difference thread mechanism in front and back（47）Installed in left and right difference thread mechanism（46）On, up and down
Difference thread mechanism（48）Installed in front and back's difference thread mechanism（47）On；Described mounting frame for sensor（49）Installed in upper
Lower difference thread mechanism（48）On, non-contact displacement transducer（410）It is fixed on mounting frame for sensor（49）On, noncontact
Formula displacement transducer（410）Read standard ball（45）Displacement data, left and right difference thread mechanism（46）Drive contactless position
Displacement sensor（410）Move left and right, in front and back difference thread mechanism（47）Drive non-contact displacement transducer（410）Move in front and back
It is dynamic, upper and lower difference thread mechanism（48）Drive non-contact displacement transducer（410）Move up and down.
3. sense measuring device according to claim 2, it is characterised in that：Described Circular gratings（42）Positioning precision be
0.5 rad.
4. sense measuring device according to claim 2, it is characterised in that：Described standard ball（45）With static air pressure master
Axle（3）The eccentric Adjustment precision of axis of rotation is submicron order.
5. sense measuring device according to claim 2, it is characterised in that：Described standard ball（45）Deviation from circular from it is little
In equal to 40nm.
6. sense measuring device according to claim 2, it is characterised in that：Described left and right difference thread mechanism（46）、
Difference thread mechanism in front and back（47）With upper and lower difference thread mechanism（48）Resolving accuracy be 1 μm.
7. sense measuring device according to claim 2, it is characterised in that：Described non-contact displacement transducer
（410）Certainty of measurement is 12nm, non-contact displacement transducer（410）With measurement standard ball（45）Equatorial line distance range
For 70 μm -80 μm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710012177.7A CN106556367B (en) | 2017-01-09 | 2017-01-09 | Rotation error measuring device of aerostatic main shaft |
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|---|---|---|---|
| CN201710012177.7A CN106556367B (en) | 2017-01-09 | 2017-01-09 | Rotation error measuring device of aerostatic main shaft |
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| CN106556367B CN106556367B (en) | 2023-06-27 |
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Cited By (12)
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|---|---|---|---|---|
| CN107515112A (en) * | 2017-09-06 | 2017-12-26 | 天津大学 | A kind of spindle rotation error experiment porch |
| CN107607041A (en) * | 2017-09-21 | 2018-01-19 | 北京工业大学 | One kind is used for six efficient measurement apparatus of geometric error of turntable |
| CN108036751A (en) * | 2017-12-17 | 2018-05-15 | 胡长悦 | Based on the formula roundness error separation device and method that is synchronized with the movement |
| CN108061532A (en) * | 2017-12-17 | 2018-05-22 | 胡长悦 | One kind is based on the formula roundness error separation device and method that is synchronized with the movement |
| CN108458679A (en) * | 2018-06-22 | 2018-08-28 | 中国工程物理研究院机械制造工艺研究所 | A kind of gas-static spindle rotation accuracy test platform |
| CN111879270A (en) * | 2020-09-01 | 2020-11-03 | 中国工程物理研究院机械制造工艺研究所 | Rotating platform and spherical coordinate measuring machine based on same |
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| CN107515112A (en) * | 2017-09-06 | 2017-12-26 | 天津大学 | A kind of spindle rotation error experiment porch |
| CN107607041A (en) * | 2017-09-21 | 2018-01-19 | 北京工业大学 | One kind is used for six efficient measurement apparatus of geometric error of turntable |
| CN107607041B (en) * | 2017-09-21 | 2019-06-28 | 北京工业大学 | One kind being used for six geometric error measuring devices of turntable |
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| CN108036751A (en) * | 2017-12-17 | 2018-05-15 | 胡长悦 | Based on the formula roundness error separation device and method that is synchronized with the movement |
| CN108061532A (en) * | 2017-12-17 | 2018-05-22 | 胡长悦 | One kind is based on the formula roundness error separation device and method that is synchronized with the movement |
| CN110514164A (en) * | 2017-12-17 | 2019-11-29 | 胡长悦 | One kind is based on moving synchronously formula roundness error separation device |
| CN108458679A (en) * | 2018-06-22 | 2018-08-28 | 中国工程物理研究院机械制造工艺研究所 | A kind of gas-static spindle rotation accuracy test platform |
| CN111879270A (en) * | 2020-09-01 | 2020-11-03 | 中国工程物理研究院机械制造工艺研究所 | Rotating platform and spherical coordinate measuring machine based on same |
| CN112923885A (en) * | 2021-01-20 | 2021-06-08 | 桂林理工大学 | Differential error compensation-based magnetic bearing rotor displacement measurement method |
| CN112923885B (en) * | 2021-01-20 | 2023-03-31 | 桂林理工大学 | Differential error compensation-based magnetic bearing rotor displacement measurement method |
| CN112797924A (en) * | 2021-02-09 | 2021-05-14 | 中国工程物理研究院机械制造工艺研究所 | Orthogonal rotating shaft measuring device of laser tracking measuring system and measuring method thereof |
| CN113927369A (en) * | 2021-09-14 | 2022-01-14 | 华中科技大学 | Comprehensive on-machine measuring device and method for rotary error motion of machine tool spindle |
| CN114034247A (en) * | 2021-11-18 | 2022-02-11 | 哈尔滨工业大学 | High-precision sphericity instrument based on spherical coordinate measuring principle |
| CN115570339A (en) * | 2022-11-15 | 2023-01-06 | 浙江巨源动力装备有限公司 | Mechanical manufacturing method and system for disc-type rotating shaft with high precision of circumferential indexing space |
| CN115570339B (en) * | 2022-11-15 | 2024-02-20 | 浙江巨源动力装备有限公司 | Disc rotating shaft mechanical manufacturing method and system with high circumferential indexing spacing precision |
| CN117537695A (en) * | 2024-01-09 | 2024-02-09 | 华粹智能装备有限公司 | Nanometer spindle rotation error detection method based on three-point displacement method |
| CN117537695B (en) * | 2024-01-09 | 2024-04-05 | 华粹智能装备有限公司 | Nanometer spindle rotation error detection method based on three-point displacement method |
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