200911455 九、發明說明： 【發明所屬之技術領域】 本發明係關於切割裝置，尤其是關於在半導體 零件材料等之工件上進行溝加工或切斷加工的切割 【先前技術】 在半導體或電子零件材料等之工件上進行溝加 斷加工（以下稱爲加工）的切割裝置中，用被稱爲高 刃的薄型砂輪一面键上硏磨液—面加工工件。 第5圖所示之先前技術的切割裝置i〇0，係用 在日本特開2003-197560號公報（專利文獻1)中先 而揭不者。如同一圖所示’從硏磨液噴嘴1〇1向薄 (刃）102供給硏磨液’於工作w之加工點施與加工 磨液其後流入配置在圍住工件台1 〇 3的溝狀之油獲 流入油盤1 0 4之硏磨液，係從形成於油盤！ 〇 4之四 內的一角之排水口 1 0 5經由排水通道1 〇 6而排到工 之排水溝。 第6圖係切割裝置1〇〇之工件台丨〇3周邊的剖 如第5圖 '第6圖所示，此切割裝置1 〇 〇具有設於 部107上之X軸導軌1〇8，108、卡合於此等X軸導 108之滑件109 ,.109'滾珠螺桿11〇、藉由球螺帽丄 方向硏磨運送的X台112。在此X台112載置有<9 ，在0台113上安裝有吸附保持著工件W之工件Ί 又’油盤104係經由其腳板1〇4Α，104Α螺鎖到機器達 之托架114，114，而作成圍住工件台1〇3。在此油盤 或電子 裝置。 工或切 速旋轉 於說明 前技術 型砂輪 後之硏 Η04 ° 個角之 廠管線 面圖。 機器基 軌 108, 11朝X 台1 13 台 1 0 3 ° 6 部 1 〇 7 :104 上 200911455 設置波紋管支撐板115，U5，在波紋管支撐板U5，n5上 承載一對波紋管116，116而作成覆蓋X軸導軌1〇8，等 之引導機構或滾珠螺桿110等之驅動機構。 第7圖是顯示油盤104及一對波紋管116，116之形狀 的組合立體圖。在此油盤104上形成底板117、圍住底板 1 1 7之中央部的開口部1 1 8之內側柵欄1 1 9、及外側柵欄1 20 。又’在底板Π7之一個角落形成排水口 1〇5，排水通道 1 2 1係焊接到排水口 1 05。在油盤1 04之開口部1 1 8的上方 及挾持台蓋1 22，波紋管1 1 6, 1 1 6設置於兩側。在加工時 供給到工件W的硏磨液或洗淨水被傳遞到波紋管1 1 6, 1 1 6 而流下到油盤1 04，並從排水口 1 05排到排水通道1 2 1。 專利文獻1 :日本特開2003- 1 97560號公報 【發明内容】 【發明欲解決之課題】 由於先前技術之切割裝置100，係X台112之引導機 構及驅動機構配置於X台112的下方，且在X台112上載 置有0台113之構造，因此在油盤104之底板117需要有 開口部1 1 8。是以，構造上將開口部1 1 8以台蓋1 22及波紋 管1 1 6，1 1 6加以覆蓋，以使硏磨液或洗淨水不從此開口部 1 1 8流入。 因此，先前技術之切割裝置之油盤104係實質上圍住 底板117之中央部的開口部118之溝狀者’由於其體積小 故排水效果差，故有在工件加工之時所產生的端材堆積之 問題。 200911455 又，先前技術之切割裝置100，波紋管116，116係配 置爲水平，故上述之端材易堆積於波紋管116，116之溝， 而有由於堆積的端材及波紋管之伸縮動作使波紋管破損之 缺點。 本發明是鑒於上述問題點而開發者，係以提供：提高 排水效果且可防止由端材引起的波紋管破損之切割裝置作 爲目的。 【課題解決手段】 爲了達成上述目的，本發明之第1形態相關的切割裝 置，係具備有：X台，使承載工件的工件台朝X方向硏磨 運送；0旋轉軸，使上述工件台朝Q 方向旋轉；芯軸， 旋轉刃安裝於前端，以進行朝正交於X方向的Y方向之分 度運送；而以上述旋轉刃進行工件的溝加工或切斷加工之 切割裝置，在上述X台的下方配置有收容硏磨液或洗淨液 之廢水的油盤，在上述油盤的側面配置有沿著該側面使上 述X台朝X方向隨意移動地引導之引導機構、及使上述X 台朝X方向移動的驅動機構，上述0旋轉軸在上述油盤的 側面配置一對波紋管構件，係使上述工件台在水平面上朝 Θ方向旋轉的方式而固定在上述X台，其一端部固定在上 述油盤側且其另一端部固定在上述X台側，伴隨X台之移 動而伸縮動作而覆蓋上述引導機構及驅動機構。 在第1形態相關的切割裝置，藉由在X台之下方（正下 方）配置油盤，而充分地確保油盤的容積，以提高排水性。 又，在第1形態相關的切割裝置，藉由使X台朝X方向隨 200911455 意移動地引導之引導機構、及使X台朝X方向移動的驅動 機構沿著油盤之側面配置，藉由引導機構及驅動機構而單 側抓住支撐X台，且覆蓋引導機構及驅動機構的一對波紋 管構件’也同樣地沿著油盤之側面而配置於筆直方向。因 此，附著於波紋管構件的端材由於本身重量而沿著波紋管 構件流下’落下到具有充分容積的油盤而排出。因而，端 材不致堆積在波紋管構件，故可防止由於端材堆積引起的 波紋管構件之破損。又，在第1形態相關的切割裝置，係 作成使波紋管構件配置於筆直方向（縱型），使波紋管構件 之上下緣部相對於油盤朝上下方向接觸而搖動的構造。因 此，可防止在此搖動部由灰塵堆積可引起積水的灰塵侵入 到紋管構件之內側。進而，可防止灰塵侵入引起的引導機 構及驅動機構之不順。 又，本發明之第2形態相關的切割裝置，係具備有： 第IX台，使承載工件的第1工件台朝X方向進行硏磨運 送；第2X台，使承載工件的第2工件台朝X方向進行硏 磨運送；第1Θ旋轉軸，使上述第1工件台朝0方向旋轉 :第20旋轉軸，使上述第2工件台朝Θ方向旋轉；第1 芯軸；及第2芯軸，旋轉刃安裝於各前端’以進行朝正交 於X方向的Y方向之分度運送；而以上述各旋轉刃進行工 件的溝加工或切斷加工之切割裝置’在上述第1X台、及第 2X台的下方配置有收容硏磨液或洗淨液之廢水的油盤’在 上述油盤的一方之側面配置有沿著該一方之側面使上述第 IX台朝X方向隨意移動地引導之第1引導機構、及使上述 200911455 第IX台朝X方向移動的第1驅動機構，上述第10旋轉軸 在上述油盤的一方之側面配置第1之一對波紋管構件，係 使上述第1工件台在水平面上朝0方向旋轉的方式而固定 在上述第IX台，其一端部固定在上述油盤側且其另一端部 固定在上述第IX台側，伴隨第IX台之移動而伸縮動作以 覆蓋上述第1引導機構及第1驅動機構；在上述油盤的另 一方之側面配置有沿著該另一方之側面使上述第2X台朝X 方向隨意移動地引導之第2引導機構、及使上述第2X台朝 X方向移動的第2驅動機構，上述第20旋轉軸在上述油 盤的另一方之側面配置第2之一對波紋管構件，係使上述 第2工件台在水平面上朝0方向旋轉的方式而固定在上述 第2X台，其一端部固定在上述油盤側且其另一端部固定在 上述第2X台側，伴隨第2X台之移動而伸縮動作以覆蓋上 述第2引導機構及第2驅動機構。 在第2形態相關的切割裝置，係以具備2台之X台的 雙台規格之切割裝置作爲對象，其基本的油盤構造、及引 導機構、驅動機構、波紋管構件之構造均與第1形態的切 割裝置相同。因而，藉由此雙台規格之切割裝置亦可提高 排水效率且可防止由於端材堆積引起的波紋管構件之破損 ，更可防止灰塵侵入引起的引導機構及驅動機構之不順。 發明之效果 依照本發明之形態相關的切割裝置的話，由於將油盤 配置在X台之下方，而充分地確保油盤的容積，故可提高 排水性。又，沿著油盤的側面配置引導機構及驅動機構， 200911455 且覆蓋引導機構及驅動機構的一對波紋管構件，也同樣地 沿著油盤之側面而配置於筆直方向，故可防止由於端材堆 積引起的波紋管構件之破損。 【實施方式】 以下，將依照所附圖式詳細說明本發明相關之切割裝 置的較佳實施形態。 第1圖所示之實施形態的切割裝置1，具備有：將收 容多數個工件的卡匣在與外部裝置之間移交的承載口 2、 具有吸附部3而將工件搬送到裝置各部的搬送裝置4、觀 察工件之上面的一對顯微鏡5, 5、加工部6、洗淨加工後之 工件且加以乾燥的旋轉器7、及控制裝置各部之動作的控 制器8等。加工部6具備有2個對向配置且安裝有旋轉刃9 的高頻馬達內建型之空氣軸承式芯軸（或機械芯軸）1〇，10 。此等芯軸10, 10係以30,000rpm~60,000rpm而高速旋轉且 互相獨立地進行圖之Y方向的分度運送及Z方向的微量運 送。旋轉刃9係由正前側及下方開口之未圖示的凸緣蓋而 圍住，硏磨液從設於凸緣蓋的硏磨噴嘴向加工點供給。又 ，凸緣蓋具有未圖示之洗淨噴嘴，洗淨液由此洗淨噴嘴向 加工點供給。旋轉刃9係薄之圓盤狀的砂輪，可使用將鑽 石砂粒或C B N砂粒以鎳進行電著的電著刃、或以樹脂結合 的樹脂刃。又，加工部6具備吸附承載工件的2台同形狀 的工件台12，14，此等係藉由後述之第2圖的X台16，18 之移動而朝第1圖之X方向進行硏磨運送。 第2圖爲顯示切割裝置1的加工部6之主要部的立體 -10- 200911455 圖。 如同一圖所示，箱狀的油盤20水平地配置在加工部6 之工件台12，14的下方而充分地圍住2台工件台12, 14。 以2支成一對的導軌（引導機構）22, 22沿著圖之箭號X方向 配置在此油盤20之左側面，構成驅動機構的滾珠螺桿24 係與導軌22, 22平行且沿著油盤20之左側面配置在此等導 軌22, 22之間。 旋轉驅動此滾珠螺桿24的伺服馬達26係配置在滾珠 螺桿24的端部側。又，在導軌22, 22被引導且由伺服馬達 26使滾珠螺桿24旋轉而朝X方向驅動的X台16，被配置 在縱方向。在X台16設置有如第3圖所示與滾珠螺桿24 螺合的滾珠螺帽28、及搖動自如地卡合在導軌22, 22的滑 件30, 3 0,同時搭載有以Z方向（參照第1圖）作爲軸而旋轉 0之0台（Θ旋轉軸）32，在此0台32安裝有工件台12 。e台3 2之旋轉軸係固定在X台16以使工件台12在水 平面上朝0方向旋轉。 又，伴隨X台16之X方向的移動而伸縮動作且覆蓋 導軌22, 22、及滾珠螺桿24的一對波紋管（波紋管構件）34, 34 ’配置在油盤20之左側面。一方之波紋管34其一端係 固定在油盤20之深度方向正前側，另一端係固定在X台 16之深度方向正前側緣部。又，另一方之波紋管34其一端 係固定在油盤20之深度方向正後側，另一端係固定在X台 1 6之深度方向後側緣部。此外，在第2圖中，另一方之波 紋管34被省略。又，一對波紋管34，34相對於X台16的 -11 - 200911455 配置關係、安裝構造係與第5圖所示的先前技術者基本上 相同。 另一方面，如第2圖，在此油盤20之右側面亦同樣地 ’以2支成一對的導軌（引導機構）36, 36沿著第1圖之箭號 X方向配置，構成驅動機構的滾珠螺桿38係與導軌36, 36 平行且沿著油盤20之右側面配置在此等導軌36, 36之間。 又，旋轉驅動此滾珠螺桿38的伺服馬達40係配置在 滾珠螺桿3 8的端部側。又，配置在導軌3 6, 3 6被引導且由 伺服馬達40使滾珠螺桿3 8旋轉而朝X方向驅動的X台1 8 。在X台18設置有與滾珠螺桿38螺合的滾珠螺帽（未圖示 )、及搖動自如地卡合在導軌3 6, 3 6的滑件（不圖示），同時 搭載有以Z方向（參照第1圖）作爲軸而旋轉0之0台（0 旋轉軸）44，在此Θ台44安裝有工件台14。0台44之旋 轉軸係固定在X台1 8以使工件台1 4在水平面上朝0方向 旋轉。 又’伴隨X台18之X方向的移動而伸縮動作且覆蓋 導軌36, 36、及滾珠螺桿38的一對波紋管（波紋管構件）46, 46，配置在油盤20之右側面。一方之波紋管46其一端係 固定在油盤20之深度方向正前側，另一端係固定在X台 1 8之深度方向正前側緣部。又，另一方之波紋管46其一端 係固定在油盤20之深度方向正後側，另一端係固定在X台 1 8之深度方向後側緣部。此外，在第2圖中，另一方之波 紋管46被省略。又，一對波紋管46，46相對於X台ι8的 配置關係、安裝構造係與第5圖所示的先前技術者基本上 -12- 200911455 相同。 又’如第4圖所示，在加工部6直立地設置有門型形 狀的引導基部48。在引導基部48之第4圖中左側面，朝向 圖之θυ號Y方向水平地安裝有芯軸Y導部50，又，設置有 2台藉由被引導於此芯軸Υ導部50的未圖示之驅動機構而 朝Υ方向作分度運送的芯軸γ台52，5 2。在各芯軸γ台52, 52’設置有藉由未圖示之導軌及驅動機構朝第1圖之箭號Ζ 方向作微量運送之芯軸Ζ台54。在各芯軸Ζ台54經由夾 件56安裝有芯軸1〇。2支芯軸10，配置成互相對向，在 各芯軸10上之前端安裝旋轉刃9。藉此機構，2片旋轉刃 9，9各自獨立而進行Ζ方向之微量運送及Υ方向之分度運 送。又’芯軸Υ台52, 52及芯軸Ζ台54之驅動機構，可 使用線性馬達，亦可使用伺服馬達及導螺桿。 在引導基部48之第4圖中右側面’設有2台之顯微鏡 驅動裝置5 8, 60。此等之顯微鏡驅動裝置58，6〇具備有： 安裝在引導基部48之右側面，朝向圖之箭號γ方向水平地 C 配置之顯微鏡Υ導部62、被引導在顯微鏡γ導部62藉由 未圖示之驅動機構朝Υ方向移動之顯微鏡¥台64、及藉由 設於顯微鏡Υ台64上之未圖示之導軌與驅動機構而朝圖之 箭號Ζ方向運送之顯微鏡Ζ台66。觀察工件W之上面的顯 微鏡5被安裝於顯微鏡Ζ台66。 藉由如此構成的顯微鏡驅動裝置58，60’顯微鏡5，5 朝圖之Υ方向及2方向運送。此外’顯微鏡Υ導部62、及 顯微鏡Ζ台66之驅動機構也使用線性馬達或伺服馬達及導 -13- 200911455 螺桿等之已知的驅動裝置。在顯微鏡5組裝有未圖示之CCD 照相機，以此CCD照相機拍照的工件w之影像係使用設置 在第1圖之控制器8內之影像處理裝置進行圖案修補’以 進行工件W之對準。此等各部之驅動裝置的控制' 對準動 作之控制、加工部6之控制、搬送裝置4之控制等均由控 制器8進行。 其次，將針對如此構成之切割裝置1的作用進行說明 〇 首先，收容工件之卡匣藉由外部搬送裝置被移交到切 割裝置1的承載口 2。此卡匣中收容有多數片經由切割帶 貼附於框上的工件W。其次，工件W藉由切割裝置1之搬 送裝置4逐片地從卡匣拉出，而吸附於工件台1 2。其後， 工件台12移動到顯微鏡Y導部62之下方，同時顯微鏡5, 5 藉由顯微鏡Y台64搬送到工件之正上方。藉由顯微鏡Z 台66 .對準顯微鏡5, 5的焦點。其次，形成於工件W之上 面的圖案部分係以組裝在顯微鏡5，5的CCD照相機拍照， 以已知的圖案匹配手法實施對準。此外，在此工件對準之 時，下一個工件W被承載到工件台1 4。 已被對準之工件W藉由工件台12而搬送至加工部6 :在此，2片之旋轉刃9，9分別進行必要的微量運送，藉 由工件台12之X方向硏磨運送，使2個加入區域（硏磨道） 同時進行加工。接著’旋轉刃9，9朝Y方向進行必要節距 分量的分度運送而定位於下一個硏磨道，藉由工件台12之 X方向硏磨運送，使2條線也被加工。重複此動作使工件w -14- 200911455 之1方向的所有硏磨道被加工。當1方向的所有線被加工 時，藉由Θ台32之轉動使工件旋轉90度，使與剛才之硏 磨道平行的硏磨道被加工。在最初之工件W於加工部6進 行加工之期間’下一個工件W被移動到顯微鏡γ導部6 2 之下，顯微鏡5, 5藉由顯微鏡Y台64被搬送至工件W之 正上方。在此也同樣地’藉由顯微鏡Z台66將顯微鏡5, 5 之焦點聚焦，形成於下一個工件W之上面的圖案部分以組 裝在顯微鏡5，5的CCD照相機拍照，並進行對準。最初之 工件W的加工完成時，完成對準之下一個工件W被搬入加 工部6並同樣地被加工。 完成所有加工的最初之工件W，視需要而進行評估在 顯微鏡5，5之下測量加工溝之形狀或崩刃的狀況。當完成 加工溝之評估時’工件W藉由搬送裝置4被搬送到旋轉器 7，在此進行旋轉洗淨及旋轉乾燥。完成洗淨及乾燥後的工 件W，再度藉由搬送裝置4被收容到原來的卡匣。下一個 工件W也同樣地進行加工、洗淨、及乾燥，且被收容到原 來的卡匣。如以上的動作一個接一個反覆地進行，使卡匣 內之所有的工件W被加工。以上係藉由本發明相關的切割 裝置加工工件w時的流程。 但是，實施形態相關的切割裝置1，在X台16, 18的 下方配置有承受硏磨液或洗淨液之廢水之具有充分容積的 油盤20。其後，在此油盤20的側面配置有使X台16，18 朝X方向隨意移動而引導的各一對之導軌22, 36及使X台 16，18朝X方向移動之滾珠螺桿24, 38。又，一對之波紋 -15- 200911455 管34，46被配置於油盤20之兩側面。一對之波紋管34，46 分別其一端部固定於油盤20側’其另一端固定於X台1 6， 1 8側，伴隨X台1 6，1 8之移動而伸縮動作以覆蓋導軌2 2，3 6 及滾珠螺桿24, 3 8。 即，依照實施形態相關的切割裝置1時’藉由將油盤 20配置於X台16，18之正下方’而充分確保油盤20之容 積且提高排水性。 又，由於使X台16，18朝X方向隨意移動而引導的導 軌22, 36、滾珠螺桿24，38沿著油盤20之側面配置，藉由 導軌22, 36及滾珠螺桿24，38而單側抓住支撐X台16，18 ，且覆蓋導軌22, 36及滾珠螺桿24, 38的一對波紋管34, 46 ，也同樣地沿著油盤20之側面而配置於筆直方向。附著於 波紋管34，46的端材由於本身重量而沿著波紋管34, 46流 下，落下到具有充分容積的油盤20而排出。藉此，端材不 致堆積在波紋管34，46，故可防止由於端材堆積引起的波 紋管34, 46之破損。 又，藉由作成使波紋管34, 46配置於筆直方向（縱型） ，使波紋管3 4, 46之上下緣部相對於油盤20朝上下方向接 觸而搖動的構造，可防止在此搖動部由灰塵堆積可引起積 水的灰塵侵入到紋管34, 46之內側，因而可防止灰塵侵入 引起的導軌22，36及滾珠螺桿24，38之不順。 此外，雖然在本實施形態中係設置2台工件台12，14 ’但並未限定於此，亦可爲1台。在此情況，在油盤20之 一方側的側面設置引導機構、驅動機構、波紋管構件即可 -16- 200911455 雖然已針對本發明之實施形態而說明，但是當然在不 脫離本發明之精神及範圍下可從事各種變更。 【圖式簡單說明】 第1圖爲顯示本發明之實施形態的切割裝置之外觀的 立體圖。 胃2圖爲顯示第丨圖所示之切割裝置的加工部之構造 的立體圖。 胃3圖爲顯示第2圖所示之加工部的主要部構造之剖 面圖。 ® 4圖爲第2圖所示之加工部的平面圖。 胃5圖爲先前技術之切割裝置的加工部之側剖面圖。 胃6圖係第5圖所示之加工部的正面剖面圖。 $ 7_係第5圖所示之加工部的油盤之組合立體圖。 【主要元件符號說明】 1 切割裝置 2 ^ 承載口 3 吸附部 4 搬送裝置 5 _ 顯微鏡 6 加工部 7 ^ 旋轉器 8 _ 控制器 9 _ 旋轉刃 -17- 200911455 10 -M-* 心 軸 12, 14 工 件 台 16, 18 X 台 20 油 rirrv. 盤 22 導 軌 24 滾 珠 螺 桿 26 伺 服 馬 達 28 滾 珠 螺 帽 30 滑 件 32 Θ 台 34 波 紋 管 36 導 軌 38 滾 珠 螺 桿 40 伺 服 馬 達 44 Θ 台 46 波 紋 管 48 引 導 基 部 50 -++- 心 軸 Y 導 部 52 -++- 心 軸 Y 台 54 -I-+- 心 軸 Z 台 56 夾 件 58’ 60 顯 微 鏡 驅 動 裝置 62 顯 微 Is Y 導 部 64 顯 微 鏡 Y 台 66 顯 微 鏡 Z 台 -18200911455 IX. Description of the Invention: [Technical Field] The present invention relates to a cutting device, and more particularly to a cutting process for cutting or cutting a workpiece on a semiconductor component material or the like [Prior Art] In a semiconductor or electronic component material In a cutting device that performs a groove breaking process (hereinafter referred to as machining) on a workpiece, a workpiece is machined by a honing liquid-side surface using a thin grinding wheel called a high blade. The prior art cutting device i 〇 0 shown in Fig. 5 is first disclosed in Japanese Laid-Open Patent Publication No. 2003-197560 (Patent Document 1). As shown in the same figure, 'the honing liquid is supplied from the honing liquid nozzle 1〇1 to the thin (blade) 102'. At the processing point of the work w, the machining grinding liquid is applied to the groove which is disposed around the workpiece table 1 〇3. The oil of the shape is obtained from the oil pan of the oil pan 1 0 4, which is formed from the oil pan!排水 4 of 4 The drain of the corner 1 0 5 is discharged to the work drain through the drain channel 1 〇 6 . Fig. 6 is a cross-sectional view of the periphery of the workpiece table 3 of the cutting device 1 as shown in Fig. 5'. Fig. 6 shows the X-axis guide rails 1 and 8, 108 provided on the portion 107. The X-axis 112 of the X-axis guide 108 is engaged with the slider 109, the .109' ball screw 11 〇, and the X-stage 112 honed by the ball nut 丄. Here, the X stage 112 is placed with <9, and the workpiece holding and holding the workpiece W is attached to the 0 stage 113. The 'oil tray 104 is screwed to the machine tray 114 via its foot plate 1〇4Α, 104Α. , 114, and made to surround the workpiece table 1〇3. In this oil pan or electronic device. Rotate the workpiece line at a speed of °04 ° at the end of the previous technology wheel. Machine base rails 108, 11 towards X stations 1 13 sets 1 0 3 ° 6 parts 1 〇 7 : 104 upper 200911455 Set bellows support plates 115, U5, carrying a pair of bellows 116 on the bellows support plates U5, n5, 116 is formed as a driving mechanism that covers the X-axis guide rails 1, 8 and the like, and the guide mechanism or the ball screw 110. Fig. 7 is a perspective view showing the combination of the shape of the oil pan 104 and the pair of bellows 116, 116. A bottom plate 117 is formed on the oil pan 104, and an inner fence 1 1 9 and an outer fence 1 20 surrounding the opening portion 1 1 of the bottom portion of the bottom plate 1 17 are formed. Further, a drain port 1〇5 is formed in one corner of the bottom plate Π7, and the drain channel 1 2 1 is welded to the drain port 1 05. Above the opening 1 1 8 of the oil pan 104 and the holding table cover 1 22, the bellows 1 1 6 , 1 16 are disposed on both sides. The honing liquid or the washing water supplied to the workpiece W during processing is transferred to the bellows 1 1 6, 1 1 6 and flows down to the oil pan 104, and is discharged from the drain port 105 to the drain passage 1 2 1. [Problem to be Solved by the Invention] In the prior art cutting apparatus 100, the guiding mechanism and the driving mechanism of the X stage 112 are disposed below the X stage 112. Further, since the structure of the zero stage 113 is placed on the X stage 112, the opening portion 1 1 8 is required in the bottom plate 117 of the oil pan 104. Therefore, the opening portion 1 18 is structurally covered with the cover 1 22 and the bellows 1 1 6 , 1 16 so that the honing liquid or the washing water does not flow from the opening portion 1 18 . Therefore, the oil pan 104 of the prior art cutting device is a groove that substantially encloses the opening portion 118 at the central portion of the bottom plate 117. Because of its small volume, the drainage effect is poor, so there is an end generated at the time of workpiece processing. The problem of material accumulation. 200911455 Moreover, in the cutting device 100 of the prior art, the bellows 116, 116 are arranged horizontally, so that the above-mentioned end materials are easily accumulated in the grooves of the bellows 116, 116, and the telescopic action of the stacked end plates and the bellows is The disadvantage of broken bellows. The present invention has been made in view of the above problems, and aims to provide a cutting device which can improve the drainage effect and prevent the bellows from being damaged by the end material. [Means for Solving the Problem] In the cutting device according to the first aspect of the present invention, the cutting device according to the first aspect of the present invention includes: an X stage, wherein the workpiece table carrying the workpiece is honed and conveyed in the X direction; and the rotating shaft is rotated so that the workpiece table is facing Rotation in the Q direction; a mandrel, a rotary blade attached to the front end for carrying the indexing in the Y direction orthogonal to the X direction; and a cutting device for performing the groove processing or cutting of the workpiece by the rotating blade, in the above X An oil pan for accommodating the honing liquid or the washing liquid is disposed under the table, and a guide mechanism for guiding the X table to move in the X direction along the side surface is disposed on a side surface of the oil pan, and the X is arranged In the drive mechanism that moves in the X direction, the zero-rotation shaft is provided with a pair of bellows members on the side surface of the oil pan, and the workpiece table is fixed to the X-stage in a horizontal direction on the horizontal surface, and one end portion thereof is fixed to the X-stage. It is fixed to the oil pan side and has the other end portion fixed to the X stage side, and expands and contracts with the movement of the X stage to cover the guide mechanism and the drive mechanism. In the cutting device according to the first aspect, by arranging the oil pan below (below) the X stage, the volume of the oil pan is sufficiently ensured to improve the drainage performance. Further, in the cutting device according to the first aspect, the guide mechanism that guides the X stage toward the X direction in accordance with 200911455 and the drive mechanism that moves the X stage in the X direction are disposed along the side surface of the oil pan. The guide mechanism and the drive mechanism grip the support X stand on one side, and the pair of bellows members ' covering the guide mechanism and the drive mechanism are similarly disposed in the straight direction along the side surface of the oil pan. Therefore, the end material attached to the bellows member is discharged down the bellows member due to its own weight, and is discharged to the oil pan having a sufficient volume to be discharged. Therefore, the end material is not deposited on the bellows member, so that the breakage of the bellows member due to the accumulation of the end material can be prevented. Further, in the cutting device according to the first aspect, the bellows member is disposed in the straight direction (vertical type), and the upper edge portion of the bellows member is brought into contact with the oil pan in the vertical direction and is rocked. Therefore, it is possible to prevent the dust from accumulating in the rocking portion from being intruded into the inside of the tubular member. Further, it is possible to prevent the guiding mechanism and the driving mechanism from being inadvertent due to the intrusion of dust. Further, the cutting device according to the second aspect of the present invention includes: the IXth stage, the honing conveyance of the first workpiece stage carrying the workpiece in the X direction; and the 2nd X stage, the second workpiece stage carrying the workpiece The honing transport is performed in the X direction; the first rotating shaft rotates the first workpiece stage in the 0 direction: the 20th rotating shaft rotates the second workpiece stage in the Θ direction; the first core shaft; and the second core shaft The rotary blade is attached to each of the front ends to perform the indexing in the Y direction orthogonal to the X direction, and the cutting device for performing the groove processing or cutting processing of the workpiece by the respective rotary blades is in the first X stage and the An oil pan for accommodating the waste water of the honing liquid or the cleaning liquid is disposed below the 2X stage. The first side of the oil pan is disposed on the side surface of the oil pan, and the first IX table is guided to move in the X direction. a guiding mechanism and a first driving mechanism that moves the 200911455 IX to the X direction, wherein the first rotating shaft is disposed on one side surface of the oil pan, and the first workpiece is placed The table is fixed in a horizontal direction on the horizontal plane In the above-mentioned IXth stage, one end portion is fixed to the oil pan side and the other end portion thereof is fixed to the first IX table side, and expands and contracts with the movement of the IX stage to cover the first guiding mechanism and the first driving mechanism. a second guiding mechanism that guides the second X stage to move in the X direction along the other side surface and a second guiding unit that moves the second X stage in the X direction is disposed on the other side of the oil pan In the drive mechanism, the second rotating shaft member is disposed on the other side surface of the oil pan, and the second workpiece stage is fixed to the second X stage so as to rotate the second workpiece stage in the horizontal direction in the horizontal direction. One end portion is fixed to the oil pan side and the other end portion thereof is fixed to the second X stage side, and expands and contracts to move the second guide mechanism and the second drive mechanism in accordance with the movement of the second X stage. The cutting device according to the second aspect is directed to a cutting device having two sets of X stages, and the basic oil pan structure and the structure of the guiding mechanism, the driving mechanism, and the bellows member are the same as those of the first embodiment. The shape of the cutting device is the same. Therefore, the cutting device of the double-stage specification can also improve the drainage efficiency and prevent the damage of the bellows member due to the accumulation of the end material, and can prevent the failure of the guiding mechanism and the driving mechanism caused by the intrusion of dust. Advantageous Effects of Invention According to the cutting device according to the aspect of the present invention, since the oil pan is disposed below the X stage, the volume of the oil pan is sufficiently ensured, so that the drainage performance can be improved. Further, the guide mechanism and the drive mechanism are disposed along the side surface of the oil pan, and the pair of bellows members covering the guide mechanism and the drive mechanism in 200911455 are similarly arranged in the straight direction along the side surface of the oil pan, so that the end can be prevented. Damage to the bellows member caused by material accumulation. [Embodiment] Hereinafter, preferred embodiments of the cutting device according to the present invention will be described in detail in accordance with the accompanying drawings. The cutting device 1 of the embodiment shown in Fig. 1 includes a carrier port 2 for transferring a cassette for accommodating a plurality of workpieces, and a conveying device for conveying the workpiece to each unit of the device. 4. A pair of microscopes 5 and 5 on the upper surface of the workpiece, a processing unit 6, a rotator 7 for cleaning the processed workpiece, and a controller 8 for controlling the operation of each part of the apparatus. The processing unit 6 is provided with an air bearing type mandrel (or mechanical mandrel) 1〇, 10 having two high-frequency motor built-in types in which the rotating blades 9 are arranged to face each other. These mandrels 10, 10 are rotated at a high speed at 30,000 rpm to 60,000 rpm, and are independently indexed in the Y direction and micro-transported in the Z direction. The rotary blade 9 is surrounded by a flange cover (not shown) which is open on the front side and the lower side, and the honing liquid is supplied from the honing nozzle provided in the flange cover to the machining point. Further, the flange cover has a washing nozzle (not shown), and the washing liquid is supplied to the machining point by the washing nozzle. The rotary blade 9 is a thin disk-shaped grinding wheel, and an electric blade that electrically elects diamond or C B N sand with nickel or a resin blade that is bonded with a resin can be used. Further, the processing unit 6 includes two workpiece stages 12 and 14 of the same shape that adsorb the workpiece, and these are honed in the X direction of the first drawing by the movement of the X stages 16 and 18 of Fig. 2 which will be described later. transport. Fig. 2 is a perspective view showing the main portion of the processing portion 6 of the cutting device 1 in the form of a stereo-10-10. As shown in the same figure, the box-shaped oil pan 20 is horizontally disposed below the workpiece stages 12, 14 of the processing portion 6, and sufficiently encloses the two workpiece stages 12, 14. Two pairs of guide rails (guide mechanisms) 22, 22 are disposed on the left side of the oil pan 20 along the arrow X direction of the figure, and the ball screw 24 constituting the drive mechanism is parallel to the guide rails 22, 22 and along the oil. The left side of the disk 20 is disposed between the rails 22, 22. The servo motor 26 that rotationally drives the ball screw 24 is disposed on the end side of the ball screw 24. Further, the X stages 16 which are guided by the guide rails 22, 22 and which are rotated by the servo motor 26 to be driven in the X direction are disposed in the longitudinal direction. The X-stage 16 is provided with a ball nut 28 that is screwed to the ball screw 24 as shown in Fig. 3, and a slider 30, 30 that is slidably engaged with the guide rails 22, 22, and is mounted in the Z direction (refer to Fig. 1 shows a 0 (turning axis) 32 which is rotated by 0 as an axis, and a workpiece stage 12 is attached to the 0 table 32. The rotary shaft of the stage 3 2 is fixed to the X stage 16 to rotate the workpiece stage 12 in the 0 direction on the horizontal plane. Further, a pair of bellows (corrugated pipe members) 34, 34' which are expanded and contracted in accordance with the movement of the X stage 16 in the X direction and which cover the guide rails 22, 22 and the ball screw 24 are disposed on the left side surface of the oil pan 20. One of the bellows 34 has one end fixed to the front side in the depth direction of the oil pan 20, and the other end fixed to the front side edge portion in the depth direction of the X table 16. Further, the other bellows 34 has one end fixed to the front side in the depth direction of the oil pan 20, and the other end fixed to the rear side edge portion in the depth direction of the X stage 16. Further, in Fig. 2, the other bellows 34 is omitted. Further, the arrangement relationship of the pair of bellows 34, 34 with respect to the X stage 16 and the mounting structure are substantially the same as those of the prior art shown in Fig. 5. On the other hand, as shown in Fig. 2, the right side surface of the oil pan 20 is similarly arranged in a pair of two guide rails (guide mechanisms) 36, 36 along the arrow X direction of the first figure to constitute a drive mechanism. The ball screw 38 is disposed parallel to the guide rails 36, 36 and disposed along the right side of the oil pan 20 between the guide rails 36, 36. Further, the servo motor 40 that rotationally drives the ball screw 38 is disposed on the end side of the ball screw 38. Further, the X stage 18 which is guided by the guide rails 3 6, 36 and rotated by the servo motor 40 to the X direction is rotated by the ball screw 38. The X stage 18 is provided with a ball nut (not shown) that is screwed to the ball screw 38, and a slider (not shown) that is slidably engaged with the guide rails 3, 36, and is mounted in the Z direction. (Refer to Fig. 1) 0 (0 rotation axis) 44 rotated by 0 as an axis, and a workpiece stage 14 is attached to the stage 44. The rotation axis of the 0 stage 44 is fixed to the X stage 1 8 to make the workpiece stage 1 4 Rotate in the 0 direction on the horizontal plane. Further, a pair of bellows (corrugated pipe members) 46, 46 which are expanded and contracted in accordance with the movement of the X stage 18 in the X direction and which cover the guide rails 36, 36 and the ball screw 38 are disposed on the right side surface of the oil pan 20. One of the bellows 46 has one end fixed to the front side in the depth direction of the oil pan 20, and the other end fixed to the front side edge portion in the depth direction of the X stage 18. Further, the other bellows 46 has one end fixed to the front side in the depth direction of the oil pan 20, and the other end fixed to the rear side edge portion in the depth direction of the X stage 18. Further, in Fig. 2, the other bellows 46 is omitted. Further, the arrangement relationship and the mounting structure of the pair of bellows 46, 46 with respect to the X-piece 184 are the same as those of the prior art shown in Fig. 5, substantially -12-200911455. Further, as shown in Fig. 4, a gate-shaped guide base portion 48 is provided upright in the processed portion 6. On the left side surface of Fig. 4 of the guide base portion 48, the mandrel Y guide portion 50 is horizontally attached in the direction of the θ Y Y direction of the drawing, and two sets of the guide shaft 50 guided by the mandrel Υ guide portion 50 are provided. The mandrel γ stages 52, 52 which are indexed in the direction of the cymbal are shown by the drive mechanism shown. Each of the mandrel γ stages 52, 52' is provided with a mandrel cymbal 54 that is transported in a small amount in the direction of the arrow 第 of the first figure by a guide rail and a drive mechanism (not shown). A mandrel 1 is attached to each of the mandrel cymbals 54 via a clamp 56. The two mandrels 10 are disposed to face each other, and a rotary blade 9 is attached to the front end of each of the mandrels 10. With this mechanism, the two rotating blades 9, 9 are independently carried out for the micro transport in the x direction and the index transport in the x direction. Further, the drive mechanism of the mandrel heads 52, 52 and the mandrel head 54 can be a linear motor or a servo motor or a lead screw. Two microscope driving devices 580, 60 are provided on the right side surface in the fourth drawing of the guiding base 48. The microscope driving devices 58, 6 are provided with a microscope guide 62 that is attached to the right side surface of the guide base 48 and disposed horizontally C toward the arrow γ direction of the figure, and guided to the microscope γ guide 62 by A microscope unit 64 that moves in a direction in which the driving mechanism (not shown) moves in the direction of the arrow, and a microscope stage 66 that is transported in the direction of the arrow Ζ in the figure by a guide rail and a drive mechanism (not shown) provided on the microscope stage 64. The microscope 5 on the upper side of the workpiece W is attached to the microscope stage 66. With the microscope driving device 58 thus constructed, the 60' microscopes 5, 5 are transported in the direction of the figure and in the two directions. Further, the drive mechanism of the microscope guide 62 and the microscope stage 66 also uses a known drive device such as a linear motor or a servo motor and a guide screw. A CCD camera (not shown) is incorporated in the microscope 5, and the image of the workpiece w photographed by the CCD camera is subjected to pattern repair using the image processing apparatus provided in the controller 8 of Fig. 1 to align the workpiece W. The control of the driving devices of the respective units, the control of the alignment operation, the control of the processing unit 6, the control of the transport device 4, and the like are all performed by the controller 8. Next, the action of the cutting device 1 thus constructed will be described. First, the cassette for accommodating the workpiece is transferred to the carrying port 2 of the cutting device 1 by the external transfer device. The cassette contains a plurality of workpieces W attached to the frame via a dicing tape. Next, the workpiece W is pulled out from the cassette piece by piece by the conveying device 4 of the cutting device 1, and is attracted to the workpiece stage 12. Thereafter, the workpiece stage 12 is moved below the microscope Y guide 62, and the microscopes 5, 5 are transported directly above the workpiece by the microscope Y stage 64. By focusing on the microscope Z stage 66. Align the focus of the microscope 5, 5. Next, the pattern portion formed on the upper surface of the workpiece W is photographed by a CCD camera assembled in the microscopes 5, 5, and alignment is performed by a known pattern matching technique. Further, when the workpiece is aligned, the next workpiece W is carried to the workpiece stage 14. The aligned workpiece W is transported to the processing unit 6 by the workpiece stage 12: here, the two rotating blades 9, 9 are transported in a necessary amount, and are transported by the workpiece table 12 in the X direction. Two joining zones (honing roads) are processed simultaneously. Then, the rotary blades 9, 9 perform the indexing transport of the necessary pitch components in the Y direction, and are positioned in the next honing track, and are transported by the X-direction honing of the workpiece stage 12, so that the two lines are also processed. Repeat this action to process all the honing tracks in the 1 direction of the workpiece w -14- 200911455. When all the wires in one direction are processed, the workpiece is rotated by 90 degrees by the rotation of the boring table 32, so that the honing path parallel to the honing track is processed. While the first workpiece W is being processed in the processing portion 6, the next workpiece W is moved below the microscope γ guide portion 6 2 , and the microscopes 5, 5 are transported directly above the workpiece W by the microscope Y stage 64. Here too, the focus of the microscopes 5, 5 is focused by the microscope Z stage 66, and the pattern portions formed on the upper surface of the next workpiece W are photographed by the CCD cameras assembled in the microscopes 5, 5, and aligned. When the processing of the first workpiece W is completed, the workpiece W that has been aligned is carried into the processing unit 6 and processed in the same manner. The initial workpiece W of all the machining is completed, and evaluation is performed as needed. Under the microscopes 5, 5, the shape of the processing groove or the state of the chipping is measured. When the evaluation of the processing groove is completed, the workpiece W is transferred to the rotator 7 by the conveying device 4, where it is subjected to spin cleaning and spin drying. The workpiece W after the washing and drying is completed, and is again stored in the original cassette by the conveying device 4. The next workpiece W is also processed, washed, and dried in the same manner, and is accommodated in the original cassette. The above operations are repeated one after another, so that all the workpieces W in the cassette are processed. The above is the flow when the workpiece w is processed by the cutting device according to the present invention. However, in the cutting device 1 according to the embodiment, an oil pan 20 having a sufficient volume for receiving the waste water of the honing liquid or the washing liquid is disposed below the X stages 16 and 18. Thereafter, on the side surface of the oil pan 20, a pair of guide rails 22 and 36 for guiding the X stages 16 and 18 to move in the X direction and a ball screw 24 for moving the X stages 16 and 18 in the X direction are disposed. 38. Further, a pair of corrugations -15 - 200911455 tubes 34, 46 are disposed on both sides of the oil pan 20. One pair of bellows 34, 46 has one end fixed to the oil pan 20 side, and the other end of which is fixed to the X stage 66, 1 8 side, and telescopically moves to cover the guide rail 2 with the movement of the X stage 16.1, 18. 2,3 6 and ball screw 24, 3 8. In other words, according to the cutting device 1 according to the embodiment, the oil pan 20 is disposed immediately below the X stages 16, 18, and the capacity of the oil pan 20 is sufficiently ensured and the drainage performance is improved. Further, the guide rails 22, 36 and the ball screws 24, 38 which are guided by the X stages 16, 18 are freely moved in the X direction are disposed along the side faces of the oil pan 20, and are guided by the guide rails 22, 36 and the ball screws 24, 38. The pair of bellows 34, 46 that support the X stages 16, 18 and cover the guide rails 22, 36 and the ball screws 24, 38 are also disposed in the straight direction along the side faces of the oil pan 20. The end materials attached to the bellows 34, 46 flow down the bellows 34, 46 due to their own weight, and are discharged to the oil pan 20 having a sufficient volume to be discharged. Thereby, the end materials are not deposited on the bellows 34, 46, so that the damage of the corrugated tubes 34, 46 due to the accumulation of the end materials can be prevented. Further, by forming the bellows 34, 46 in the straight direction (longitudinal direction), the lower edge portion of the bellows 34, 46 is brought into contact with the oil pan 20 in the vertical direction, and the structure is shaken. The dust accumulated in the dust can cause the accumulated water to intrude into the inside of the bells 34, 46, thereby preventing the rails 22, 36 and the ball screws 24, 38 from being invaded by the intrusion of dust. Further, in the present embodiment, two workpiece stages 12, 14' are provided, but the present invention is not limited thereto, and may be one. In this case, the guide mechanism, the drive mechanism, and the bellows member are provided on the side of one side of the oil pan 20 - 16-200911455, although it has been described with respect to the embodiment of the present invention, of course, without departing from the spirit of the present invention. Various changes can be made within the scope. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the appearance of a cutting device according to an embodiment of the present invention. The stomach 2 is a perspective view showing the structure of the processing portion of the cutting device shown in the second drawing. The stomach 3 is a cross-sectional view showing the structure of the main part of the processed portion shown in Fig. 2 . The Fig. 4 is a plan view of the processed portion shown in Fig. 2. The stomach 5 is a side cross-sectional view of the processed portion of the prior art cutting device. The stomach 6 is a front cross-sectional view of the processed portion shown in Fig. 5. $7_ is a combined perspective view of the oil pan of the processing section shown in Fig. 5. [Description of main component symbols] 1 Cutting device 2 ^ Bearing port 3 Adsorption section 4 Conveying device 5 _ Microscope 6 Machining section 7 ^ Rotator 8 _ Controller 9 _ Rotary blade -17- 200911455 10 -M-* Mandrel 12, 14 Workpiece table 16, 18 X table 20 oil rirrv. Disk 22 Guide rail 24 Ball screw 26 Servo motor 28 Ball nut 30 Slide 32 Θ Table 34 Bellows 36 Guide 38 Ball screw 40 Servo motor 44 Θ Table 46 Bellows 48 Guide Base 50 -++- Mandrel Y Guide 52 -++- Mandrel Y Stage 54 -I-+- Mandrel Z Table 56 Clamp 58' 60 Microscope Drive 62 Microscopy Is Y Guide 64 Microscope Y 66 microscope Z station-18