200827750 九、發明說明： 【柑關申請案】 —本申請案主張2006年10月26曰申請之韓國專利申請案 第10-〇l_4G號之優先權，其揭示包含在此供參考之 用0 【發明所屬之技術領域】 本發_’面滅不器之物測試器，具體而言，侧 於利用電絲置之·ϋ決定面板電極巾是否存在或沒有任 • 何缺陷的面板顯示器之陣列測試器。 【先前技術】 平面顯示Φ板⑽Ρ)係-觀光裝置，—般在上及下基板 間包含電極。舉例而言，薄膜電晶體液晶顯示器（TFTLCD)基 板包含下基板形成有薄膜電晶體(Τρτ)之TFT面板、面對TFT 面板且形成彩色濾光器及共用電極形成於其上之彩色濾光器 ( ©板、S TFT面板與濾、光裔面板間注入的液晶、以及背光單元。 在TFT LCD基板中，陣列测試器負責決定TFT岐否存有 或沒有任何缺陷。具體而言，陣列測試器係將安裝於陣列測試 器中的調變器靠近建構電光裝置的TFT面板，同時向調變器及 TFT面板施加預設的電壓，因而在調變器及TFT面板間產生電 場，並且測試此電場的強度，進而決定TFT内是否存有或沒有 缺陷◦由於當TFT面板内所形成的任何電極中具有缺陷時，會 200827750 得以決定TFT面板内是否存 減弱電場強度，因而使陣列測試器 有或沒有缺陷。 ^ ^習知陣列測試器1G。參照圖丨，f知陣列測試器 10包含負载早元u、測試單元12、卸載單元13、支撐塊15、200827750 IX. INSTRUCTIONS: [Citrus Application] - This application claims priority to Korean Patent Application No. 10-Il_4G, filed on Oct. 26, 2006, the disclosure of which is incorporated herein by reference. FIELD OF THE INVENTION The present invention relates to an array test of a panel display, in particular, a panel display that utilizes a wire to determine whether a panel electrode is present or not defective. Device. [Prior Art] A flat display Φ plate (10) Ρ) is a Sightseeing device that generally includes electrodes between the upper and lower substrates. For example, a thin film transistor liquid crystal display (TFTLCD) substrate includes a TFT panel in which a lower substrate is formed with a thin film transistor (Τρτ), a color filter that faces the TFT panel and forms a color filter and a common electrode is formed thereon ( © board, S TFT panel and filter, liquid crystal injected between the panel, and backlight unit. In the TFT LCD substrate, the array tester is responsible for determining whether the TFT has or does not have any defects. Specifically, the array test The device is installed near the TFT panel of the electro-optic device, and applies a preset voltage to the modulator and the TFT panel, thereby generating an electric field between the modulator and the TFT panel, and testing the The strength of the electric field, in turn, determines whether there is or is no defect in the TFT. When there is a defect in any of the electrodes formed in the TFT panel, 200827750 can determine whether there is a weak electric field strength in the TFT panel, thus making the array tester have or There is no defect. ^ ^The conventional array tester 1G. Referring to the figure, the array tester 10 includes the load early element u, the test unit 12, the unloading unit 13, and the support 15,
^ ==模組4G。支魏15切―個預備作陣刺試的面板 H置於負鮮元11上，並且將面板2移動酬試單元 。接者’測試模、组40對面板2運作陣列測試。當支撐塊15 =動面板2的同時’職模組4G對面板的整個表面運作陣列 =试。在陣列測試後’’面板2會被移轉到卸載單元丨3並作卸 核組40包含光源41、調變器43、以及攝影機44。調 =43包含反射層43a、電光材質層伽、以及透明基板層 由於測試模組4〇與美國專利第6,151，153號所揭露之架 構相同或類似，因此不再贅述其細節。 ，、、'、而’如圖1所示’由於光源41與攝影機44係位於面板 之-表面上’從光源41射出的光線會透過鏡子而射入調變 益43，而被調變器43之反射層伽反射，並以相反於入射方 向之方向自調變器43離開。從光源41到調變器43的光路径， 與從调㈣43賴韻44的触徑有部份重疊。目此， 避免光源41與攝影機44間發生干擾。為避免絲41 ^ 機44間發生干擾，陣酬試㈣包含如鏡子之光線方向調整 8 200827750 單元42。 又，由於通過調變器43的電光材質層 而反射回，因此增加光的損失。藉此“ 的滅，需要增加從光源41所射出之光線的強度。^ == Module 4G. The Wei 15 cut--a panel for preparing the stab test is placed on the negative fresh element 11, and the panel 2 is moved to the test unit. The receiver's test module, group 40, and panel 2 operate in an array test. When the support block 15 = the movable panel 2, the "operational module 4G" operates on the entire surface of the panel array = test. After the array test, the panel 2 is moved to the unloading unit 丨3 and the undocking group 40 includes a light source 41, a modulator 43, and a camera 44. The adjustment 43 includes the reflective layer 43a, the electro-optic material layer, and the transparent substrate layer. Since the test module 4 is the same as or similar to the structure disclosed in U.S. Patent No. 6,151,153, the details thereof will not be described again. , , , , and ' as shown in FIG. 1 'Because the light source 41 and the camera 44 are on the surface of the panel', the light emitted from the light source 41 is transmitted through the mirror into the modulation gain 43 and the modulator 43 is turned on. The reflective layer is gamma reflected and exits from the modulator 43 in a direction opposite to the direction of incidence. The light path from the light source 41 to the modulator 43 partially overlaps with the contact path from the tone (43) 43. Therefore, interference between the light source 41 and the camera 44 is avoided. In order to avoid interference between the wires 41, the compensation test (4) includes the direction adjustment of the light such as the mirror 8 200827750 unit 42. Further, since it is reflected back by the electro-optic material layer of the modulating device 43, the loss of light is increased. By this, it is necessary to increase the intensity of the light emitted from the light source 41.
反射層43a接觸面板2的電極5時可能會受到破壞。 為解決此問題，光源41會設置於面板2後表面之下，而 调’k:器43與攝影機44會設置於面板2前表面之上，且調變器 43不包含反射層43a。 反射層43a係用以反射if過調變$ 43之電光材質層伽 的光線。反射層43a會接觸面板2的電極5，以減少反射層伽 與面板2電極5間之驅動電壓。然而，由於反射層4如的厚度， 面板2之電極5與調變器43電極間的驅動電壓非必要地增 加。由於反射層43a係以如反射薄膜的易碎材質製造，因此當 在此情況下，測試單元12中所包含的面板設置盤會以透 明玻璃材質製造而成。然而，由於面板設置盤以及面板2具有 相同的分子，因此在面板設置盤與面板2間會產生靜電。若面 板設置盤與面板2間產生靜電，則面板2的電極5可能會受到 破壞，或者陣列測試器10會受到電性破壞。 【發明内容】 9 200827750 w ίί Γΐ供—轉湘愼器，其無需如鏡子或光線分散器 光源損if ΐ方向調整單元，且其藉由最小化光源所射出之 先源抽失而㈣增加統所射出之光線強度。 不會提供一種陣列測試器’其中在預備測試的面板上 3明之—面向’赌供—顧定職職的面板前表面 4人Γ i之面板電極中是否存有或沒有缺陷的陣列測試器，並 =ΐ載單元L係包含負載盤，當面板放置於其上、或以職 _ W面板#浮於其表面上時，以負載並移轉面板；測試單 係包含與負載盤之邊緣相連的測試盤，將負載盤移轉而來 的面板放置於其上、或·定關隔使面，板漂浮_試盤表面 2以及決定面板電極中是飾錢沒有雜_，其中測試 ，係以透明材質製造而成；卸載單元，係包含與測試盤之邊緣 =連接的卸健，將蚊其巾是否存有或沒有條缺陷之面板 置於其上、或以預定的間隔使面板漂浮於钟載盤表面上，並 將面板從測試盤移轉到外部；測試模組，包含—光源，係面對 放置於Κ單元之上之面板前表面或後表面；以及依序排列於 光源之相對處_變||與缺_測單元，且面㈣位於光源座 调變器與缺陷_單元之間’其中測試模組雜據穿過調變器 ，出口面的光線強度，決定面板電極中是否存有或沒有電性缺 心’以及H肖除單7C ’係在測試触面板間供應正或負離 子，以避㈣試盤與面板生靜電、或.;肖除測試盤與面板間 200827750 所產生之靜電。 需知道的是，以上描述及以下詳述僅供範例之用，僅提供 本發明之進一步描述。 【實施方式】 本發明在此參照伴隨圖式作進一步之描述，圖式繪示本發 明之示範實施例。然而，本發明可以不同型態實施，且不應受 限於在此所示之實施例的解釋。反之，此等示範實施例僅為完 整提供本揭露’且將本發明之範疇完整揭露給熟此技藝者。在 ，式中^各層與區域的尺寸與其相對尺寸可能會因為要作清楚 W明而&。圖式中相同參考數代表相同元件。 、刺ί ^系本發明之實施例中陣列測試器100之示意圖。陣列 二二系用以決定面板電極5中是否存有或沒有電性缺 曰-板電極5係形成於面板2前表面上。 茶照圖2，随石丨卜日丨 ⑽、卸载單元tr試器100包含負載單元110、測試單元 川、測試模組140、以及靜電消除單元150。 售 -負载般?^負载欲作測試的面*2。負載單元110包含 負載盤Tl2上時H2放置於其上、或以敢的間隔漂浮於 、、栽盤112將面板2移轉到測試單元120。 200827750 測試單元120包含測試盤122。測試盤122係以透明材質 製造而成，而從負載單元11〇移轉而來的面板2係放置並固定 於測試盤122。測試盤122可以玻璃材質製造而成。測試單元 120更可包含面板保護單元124，係位於測試盤122的外部。 面板保護單元124係用以將面板2放置於測試單元120上，且 不造成任何損壞。面板保護單元丨24係以夠軟的材質製造而 成，以避免面板夾鉗160將面板2放置於負载盤⑽時，面板 2碰撞到負載盤120，進而得以將面板2放置於負載盤12〇上， 而不造成任何損壞。 卻載單元130接收來自測試單元120 e完成陣列測試的面 板2，並釋放面板2。卸載單元13〇包含卸载盤132。放置面 板2於卸載盤132上、或以預定的間隔使面板2漂浮於卸載盤 132表面時，卸載盤132移轉面板2。The reflective layer 43a may be damaged when it contacts the electrode 5 of the panel 2. In order to solve this problem, the light source 41 is disposed under the rear surface of the panel 2, and the camera 43 and the camera 44 are disposed on the front surface of the panel 2, and the modulator 43 does not include the reflective layer 43a. The reflective layer 43a is used to reflect the light of an electro-optic material layer of if 43. The reflective layer 43a contacts the electrode 5 of the panel 2 to reduce the driving voltage between the reflective layer and the electrode 5 of the panel 2. However, due to the thickness of the reflective layer 4, the driving voltage between the electrode 5 of the panel 2 and the electrode of the modulator 43 is unnecessarily increased. Since the reflective layer 43a is made of a fragile material such as a reflective film, in this case, the panel setting disk included in the test unit 12 is made of a transparent glass material. However, since the panel setting tray and the panel 2 have the same molecules, static electricity is generated between the panel setting tray and the panel 2. If static electricity is generated between the panel setting disk and the panel 2, the electrode 5 of the panel 2 may be damaged, or the array tester 10 may be electrically damaged. SUMMARY OF THE INVENTION 9 200827750 w ίί — —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— The intensity of the light emitted. An array tester will not be provided, which is on the front panel of the test--for the 'gambling supply', the array tester with or without defects in the panel electrode of the front panel of the panel. = Load unit L contains the load plate, when the panel is placed on it, or when the job _ W panel # floats on its surface, load and transfer the panel; the test system contains the test connected to the edge of the load disk The disk, the panel on which the load disk is transferred is placed on it, or the surface is separated, the plate floats _ test surface 2 and the panel electrode is determined to be decorated with no _, which is tested with a transparent material Manufactured; the unloading unit includes a disassembly that is connected to the edge of the test disc, a panel on which the mosquito wiper has or does not have a defect, or a panel that floats on the clock carrier at predetermined intervals Surface, and moving the panel from the test disc to the outside; the test module, including the light source, facing the front or rear surface of the panel placed on the unit; and sequentially arranged at the opposite side of the light source || and the lack of _ unit, and (4) Between the light source block modulator and the defect_unit', wherein the test module impurities pass through the modulator, the light intensity at the exit surface determines whether there is or is not electrical fault in the panel electrode' and H is removed The single 7C' system supplies positive or negative ions between the test panels to avoid (4) static electricity generated by the test panel and the panel, or by removing static electricity generated between the test panel and the panel 200827750. It is to be understood that the above description and the following detailed description are intended for illustrative purposes only [Embodiment] The invention is further described herein with reference to the accompanying drawings, which illustrate the exemplary embodiments of the invention. However, the invention may be embodied in different forms and should not be construed as being limited to the embodiments shown herein. Rather, these exemplary embodiments are provided solely to the extent of the disclosure and the disclosure of the invention. In the formula, the size and relative size of each layer and area may be clear and clear. The same reference numbers in the drawings represent the same elements. And a schematic diagram of the array tester 100 in the embodiment of the present invention. The array 22 is used to determine whether or not there is an electrical defect in the panel electrode 5 - the plate electrode 5 is formed on the front surface of the panel 2. As shown in Fig. 2, with the 丨石丨日丨 (10), the unloading unit tr tester 100 includes a load unit 110, a test unit, a test module 140, and a static elimination unit 150. Sale - load like? ^ Load the surface to be tested *2. When the load unit 110 includes the load disk T12, H2 is placed thereon, or floats at a dare interval, and the tray 112 moves the panel 2 to the test unit 120. 200827750 Test unit 120 includes test disk 122. The test disc 122 is made of a transparent material, and the panel 2 transferred from the load unit 11 is placed and fixed to the test disc 122. The test disc 122 can be made of a glass material. The test unit 120 may further include a panel protection unit 124 that is external to the test tray 122. The panel protection unit 124 is used to place the panel 2 on the test unit 120 without causing any damage. The panel protection unit 丨 24 is made of a soft material to prevent the panel clamp 2 from colliding with the load tray 120 when the panel clamp 2 is placed on the load tray (10), thereby allowing the panel 2 to be placed on the load tray 12 Up, without causing any damage. The load unit 130 receives the panel 2 from the test unit 120e to complete the array test, and releases the panel 2. The unloading unit 13A includes an unloading disk 132. The unloading tray 132 shifts the panel 2 when the panel 2 is placed on the unloading tray 132 or the panel 2 is floated on the surface of the unloading tray 132 at predetermined intervals.
㈣^測試11⑽更包含面板夾钳160。面板夾钳160在支 =面板2 _時’並將面板2從負載單元⑽移到卸載單元 130。禝數個1氣孔114與134係形成於負 別 Ξ ==單元m之卸載盤132，以向上喷_體，使面 板2传以預設的間隔漂浮在負載盤112與卸载盤132之上。 =^140包含光源⑷、調變器142、以及缺陷侦測 對面板2的絲㈣後表面，而調變器 心、缺_與軸41 _，且秘2係設置 12 200827750 於其間。 光源141 L㈣機面板2之絲社所形成之 電極5。 f 調變器142包含調變器電極層145以及電光材質層144。 ，預定的電壓施加於調變器電極層145與面板2的電極5,以 巧間產生電場。若在電光材質層144中產生電場，則製造電 =質層144的材質會以固定方向作排列 ，以使光線穿透電光 偵=電光材^ Η4可由光傳輸基板146支撐。缺陷 二早=47由直線穿過調變器142的光量來決定面板電極5 中疋否存有或沒有缺陷。 缺1¾細單το 147與調變器142可面對面板2的前表面， 而光源141可面對面板2的後表面。 下 測試模組140將詳述如 日日放置Γ光源141與調變器142之間的測試盤122係為透 以允弄光線牙過其中，如上述。測試盤係以玻璃或透 明聚合物材f製造而成。又，麟戰的面板2雜玻璃或透 明聚合物材質製造而成。 田測.式面板2時，面板2係放置於測試盤ία上，且因此， 200827750 會有靜電產生於面板2朗試盤122之間。靜電與靜電所聚隹 的塵粒可能導致損壞、品f下降、或火災。再者，面板2的= 極5可能會受到低電壓之靜電的破壞。 包 ^ “基於此因素，陣列測試器1〇0更包含靜電消除單元15〇。 静電消除單元150避免靜電產生测試盤122與面板2 或消除測試盤122與面板2間所產生之靜電。、 曰'(d) ^ Test 11 (10) further includes panel clamps 160. The panel clamp 160 moves the panel 2 from the load unit (10) to the unloading unit 130 while supporting the panel 2 _. A plurality of 1-holes 114 and 134 are formed in the unloading tray 132 of the negative Ξ == unit m to spray the body upward, so that the panel 2 floats above the load tray 112 and the unloading tray 132 at predetermined intervals. =^140 includes the light source (4), the modulator 142, and the defect detection pair of the wire (4) rear surface of the panel 2, and the modulator heart, the missing _ and the axis 41 _, and the secret 2 system set 12 200827750 therebetween. Light source 141 L (4) Electrode 5 formed by the wire of the machine panel 2. The modulator 142 includes a modulator electrode layer 145 and an electro-optic material layer 144. A predetermined voltage is applied to the modulator electrode layer 145 and the electrode 5 of the panel 2 to generate an electric field. If an electric field is generated in the electro-optic material layer 144, the material of the electro-depositive layer 144 is arranged in a fixed direction so that the light penetrates the electro-optic layer. The electro-optical material 4 can be supported by the optical transmission substrate 146. Defect 2 early = 47 determines whether there is or is no defect in the panel electrode 5 by the amount of light passing through the modulator 142 in a straight line. The missing sheet το 147 and the modulator 142 may face the front surface of the panel 2, and the light source 141 may face the rear surface of the panel 2. The lower test module 140 will detail the test disk 122 between the xenon light source 141 and the modulator 142 as it is placed to allow light to pass therethrough, as described above. The test disc is manufactured from glass or a transparent polymer material f. In addition, it is made of the panel 2 miscellaneous glass or transparent polymer material. When the panel 2 is tested, the panel 2 is placed on the test disc ία, and therefore, 200827750 there is static electricity generated between the panel 2 test discs 122. Dust particles that are concentrated by static electricity and static electricity may cause damage, drop in product, or fire. Furthermore, the electrode 5 of the panel 2 may be damaged by static electricity of a low voltage. Package ^ "Based on this factor, the array tester 1 更 0 further includes a static elimination unit 15 〇. The static elimination unit 150 prevents static electricity from generating the test disk 122 and the panel 2 or eliminating static electricity generated between the test disk 122 and the panel 2.曰'
靜電消除單元150包含離子化器，係傳送正負離子到蜊 盤122的上表面。離子化器傳送藉由高壓放電所取得之正負= 子於測試盤122與面板2之間，以靜電的相對極性中和靜電。 由於離子化器並不接觸面板2，因此面板2不會受到破壞二The static elimination unit 150 includes an ionizer that delivers positive and negative ions to the upper surface of the disk 122. The ionizer transmits the positive and negative voltages obtained by the high voltage discharge between the test disk 122 and the panel 2, and neutralizes the static electricity with the relative polarity of the static electricity. Since the ionizer does not touch the panel 2, the panel 2 will not be damaged.
如圖2所示，靜電消除單元150包含離子化器孔151與# 風機型離子化器153。離子化器孔丨51係形成於負載盤丨丨2、= 端部的鄰近處，鄰近測試盤122，而吹風機型離子化^ 153 = ***離子化器孔151，以向測試盤122釋放正負離子。正負= 子調和面板2與測試盤122間所分布之少量不均勻的、每 消除靜電。 以 同時，靜電消除單元150可置放於卸載盤132之端部的 近處，鄰近測試盤122。類似地，離子化器孔係形成於卸載盤 132之端部鄰近處，鄰近測試盤122，而吹風機型離子化器、来 過離子化器孔朝測試盤122釋放正負離子。 為处 14 200827750 向上3化^151與吹風機型離子化器153係朝測試盤122 … 侍正負離子得以朝測試盤122釋放。 除靜明之另—實施例中陣列測試器2GG的剖面圖。 除评电4除早元15〇替 的靜態消除單元25η 3 了射出X先之光離子化益253 列測試哭〗⑽ ，陣列測試器200與圖1中所示之陣 元⑸，；突出於/目.同般的架構，態消除單元250包含钳夾單 而光離子化$抑卩载现132畴轉近處，耗測試盤122， Γ^!Γ〇 " 2!3 251 ^ 122 盤 乱體刀子離子化，進而消除靜電及塵粒。 140 參照圖4’將詳述陣列測試器1〇〇中所包含之測試模組 光源141係泛又置於面板2後表面之下方 出之光線可錢光、納光、石英_、f射=等原141射 調變器142係設置於面板2之前表而夕^ 他、電光材歸144、輕陶 ^包含入射面 入射面陶過面板2後表面面 自光源⑷的光線。 ^表面2a#2b，而接收來 15 200827750 調變器電極層145係以平行於面板電極 <、 與面板電極5產生電場。呈體而士，哨m的兩、式投置，以 ^ , ；；2 ，係設置於與面板電極5相隔預設距離内 === 於面板電極5與調變器電極層145時 ==祕施加 極層145間會產生電場。 ㈤販电極5與調變器電 電光材質層144係設置於調變器電極 並根據調變器電極層145與面板電極5間所產^= 5 強度，改變穿過人射面142a之光線量為了根據 ϊί過入射面142a之光量’電光材質層144係以可根iii 強度將光線極化之材質製造而成。 祀據電％ 出口面142b射出穿過電光材質層144的光線到達外部。 缺陷制單元U7絲據？過機^ 142出σ面 ，量來決定面板電極5.中是否存有或沒有電性缺陷。缺陷 早兀147包含視覺單幻48以及與視覺單元148相連的監^哭 149 ’以利用肉眼檢測面板電極5之缺陷。監控器⑽ 腦監控器。 局迅 面板2係用於電光裝置中，而面板電極5係排列於面板2 之上表面δ板2可為平面面板顯示器之面板。舉例而言，面 板2係上刖表面形成有TFT的薄膜電晶體(TFT)面板。 16 200827750 依照本發明，從光源141射 面2a，且係從形成有面板電^的先本線入射到面板2的後表 線射入調變請，光著，光 極5上之缺陷作調整，接著 142根據面板電 之__出到外部。透;：=== 由缺陷偵測單元147作测量。 灿所射出之先置係As shown in FIG. 2, the static electricity eliminating unit 150 includes an ionizer hole 151 and a #fan type ionizer 153. The ionizer aperture 51 is formed adjacent to the end of the load pad 2, = adjacent to the test disk 122, and the blower type ionization 153 = is inserted into the ionizer hole 151 to release positive and negative ions to the test disk 122. . Positive and negative = sub-harmonic and a small amount of unevenness distributed between panel 2 and test disc 122, each static elimination. At the same time, the static elimination unit 150 can be placed in the vicinity of the end of the unloading tray 132 adjacent to the test tray 122. Similarly, an ionizer aperture is formed adjacent the end of the unloading disk 132 adjacent the test disk 122, and the blower-type ionizer, the ionizer aperture, releases positive and negative ions toward the test disk 122. For the 14 200827750, the up-and-down 151 and the blower-type ionizer 153 are directed toward the test disk 122 ... the positive and negative ions are released toward the test disk 122. A cross-sectional view of the array tester 2GG in the alternative embodiment. In addition to the evaluation of the power 4 in addition to the early 15 〇 replacement of the static elimination unit 25η 3, the injection of X first photoionization benefits 253 column test cry (10), the array tester 200 and the array element shown in Figure 1 (5); The same structure, the state elimination unit 250 includes a clamp single and photoionization $ 卩 卩 132 132 132 domain turn close, consumption test disk 122, Γ ^! Γ〇 " 2! 3 251 ^ 122 The chaotic knife is ionized to eliminate static electricity and dust particles. 140 Referring to FIG. 4', the test module light source 141 included in the array tester 1A is generally placed under the rear surface of the panel 2, and the light can be light, nano, quartz, and f = The original 141 modulator 142 is disposed on the front surface of the panel 2, and the illuminating material 144, the light ceramics ^ includes the incident surface incident surface of the panel 2 and the surface surface of the panel 2 from the light source (4). ^ Surface 2a #2b, and received 15 200827750 The modulator electrode layer 145 is electrically parallel to the panel electrode <, and the panel electrode 5 generates an electric field. In the form of a body, the two of the whistle m are placed, and ^, ;; 2 is disposed within a predetermined distance from the panel electrode 5 === when the panel electrode 5 and the modulator electrode layer 145 == An electric field is generated between the application layer 145. (5) The electrode 5 and the modulator electro-optic material layer 144 are disposed on the modulator electrode and change the light passing through the human face 142a according to the intensity of the ^= 5 generated between the modulator electrode layer 145 and the panel electrode 5. The amount is based on the amount of light passing through the incident surface 142a. The electro-optic material layer 144 is made of a material that polarizes light with a strength of iii. According to the electricity %, the exit surface 142b emits light that has passed through the electro-optic material layer 144 to the outside. Defective unit U7 according to? Pass the machine ^ 142 out of the σ plane, the amount to determine whether there are or no electrical defects in the panel electrode 5. The defect early 147 includes a visual phantom 48 and a whipping 149 attached to the visual unit 148 to detect defects of the panel electrode 5 by the naked eye. Monitor (10) Brain monitor. The panel 2 is used in an electro-optical device, and the panel electrodes 5 are arranged on the upper surface of the panel 2. The δ panel 2 can be a panel of a flat panel display. For example, the panel 2 is a thin film transistor (TFT) panel in which a surface of the crucible is formed with a TFT. 16 200827750 According to the present invention, the light source 141 is incident on the surface 2a, and is incident on the rear surface line of the panel 2 from the first line on which the panel electrode is formed, and the defect on the photopole 5 is adjusted. Then 142 is discharged to the outside according to the panel power. Transparency;:=== is measured by the defect detecting unit 147. Can't shoot the first system
，LCD的應财，位於TFT錢縣面 線會穿過TFT _與液晶，並且係麵接TFT.面 =形成有共用電極的上表面射出，使得射出的光線忒Z 之, LCD's financial, located in the TFT Qianxian line will pass through the TFT _ and liquid crystal, and the surface is connected to the TFT. Surface = the upper surface formed with the common electrode is emitted, so that the emitted light 忒Z
又，陣列測試器議不包含任何分離構件，例 早元147與調變器142間之光線路徑上的面板電極。、、J 若缺陷伯測單元147係設置於面板2後表面的下方， 源141的光線穿過調變器142與面板2，且接著移轉到缺 測單元147 ’則缺陷偵測單元147會偵測到調變器142的極化 程度，以及面板2的光線扭曲現象。換句話說，:於穿過調= 器142的光線再次由面板2分散及反射，因此難以直接偵^ 200827750 ==:::==,:，缺_單元⑷ ，’並接著射到外二調 ===嘯142外’峨崎的程序，其 根據本發明’由於缺_測單元147直接收到穿過調變器 Γ 142的光線’耻分散等时不是由其他構件所造成的，進而 可以快速且正確地僧測到面板中所存有或缺少的缺陷。 、統ΐ4卜預備測試之面板2的面板電極5、調變器142、 丄及視Α單元148係排列成直線，因此，無須改變光線路 役的元件’例如鏡子。 以下詳述調變器142的結構。調變器142包含光傳輸基板 146、調變器電極層145、以及電光材質層144，自缺鋪測 單元147依序排列。電光材質層144可為高分子分散型液晶 (PDLC)。 光傳輸基板146係以可透光並支撐調變器電極層145與電 光材質層144的材質製成。藉此，光傳輸基板146係以具有適 當硬度的透明材質製造而成，其可為玻璃基板。金層係形成於 光傳輸基板146的兩面，圖4中並未繪示圖4中並未繪示。 18 200827750 调^:為電極層145係設置於光傳輸基板146之下。調變哭 笔極層145係以好比氧化姻錫（IT0)或碳奈米管（cnt)的材質 製造而成’並形成於光傳輸基板146之後表面上。調變器電極 層145可接觸金層。 電光材質層144係以高分子分散型液晶（PDLC)製造而 成’且以預疋的厚度設置於調變器電極層145之下。pdlc可 具有低於30V的驅動電壓，40:1的對比，l.7ms的上升時間， 3ms的下降時間，以及3〇ms的最短滯留時間。電光材質層⑷ 係將液晶混合液體（包含聚合物與液晶）塗在調變器電極層 145上，並使液晶混合液體固化。 同時，如圖5所示，複數個密封壁149(每個皆為149)會 包圍電光材質層144。每個密封壁149係以預定的厚度，沿著 調變器電極層145的邊緣形成，以避免電光材質層144流到外 部。因此，當電光材質層144流到金層及調變器電極單元145 時’得以避免接觸失效與信號失真。 又’由於無需在調變器電極層145中心集中製造電光材質 層144的材質，因此得以使電光材質層144的厚度均勻。、 人密封壁149係以密封劑製造而成，以黏附基板，且係利用 '至佈為在對應位置塗佈密封劑而形成。密封壁149可以固體玻 璃材質製造喊。在此叙下，密封壁的高度H1係由控制固 19 200827750 體玻璃材質的高度所控制。密封壁149的高度HI可在15與 25/^m之間。若密封壁149的高度耵低於15#m，則液晶的極 化私度低’因此形成電場時的傳輸性與對比值間的差異與有形 成，場時的傳輸性與對比值間的差異並不大。若密封壁14^ 的同度H1高於25//m，則調變器電極與預備測試之面板電極 間的差異會大量增加，且驅動調變器電極與面板電極之驅動電 壓亦會不必要的增加。Again, the array tester does not include any discrete components, such as the panel electrodes on the ray path between the early element 147 and the modulator 142. If the defect detection unit 147 is disposed below the rear surface of the panel 2, the light of the source 141 passes through the modulator 142 and the panel 2, and then moves to the missing unit 147', and the defect detecting unit 147 The degree of polarization of the modulator 142 and the distortion of the light of the panel 2 are detected. In other words, the light passing through the 142 is again dispersed and reflected by the panel 2, so it is difficult to directly detect 200827750 ==:::==,:, _unit (4), 'and then shoot outside 2 Adjusting === whispering 142 outside '峨崎's program, according to the present invention 'because the lack of measuring unit 147 directly receives the light passing through the modulator 142 ‘shame dispersion, etc. is not caused by other components, and thus Defects that are present or missing in the panel can be quickly and accurately detected. The panel electrode 5, the modulator 142, and the pupil unit 148 of the panel 2 of the pre-test 4 are arranged in a straight line, so that it is not necessary to change the optically-connected component such as a mirror. The structure of the modulator 142 will be described in detail below. The modulator 142 includes a light transmitting substrate 146, a modulator electrode layer 145, and an electro-optic material layer 144, which are sequentially arranged from the defect detecting unit 147. The electro-optic material layer 144 may be a polymer dispersed liquid crystal (PDLC). The light transmission substrate 146 is made of a material that can transmit light and support the modulator electrode layer 145 and the electro-optic material layer 144. Thereby, the light transmission substrate 146 is made of a transparent material having an appropriate hardness, and it may be a glass substrate. The gold layer is formed on both sides of the light transmission substrate 146, and is not shown in FIG. 18 200827750 Adjustment: The electrode layer 145 is disposed under the light transmission substrate 146. The crying pen layer 145 is made of a material similar to oxidized agaric (IT0) or carbon nanotube (cnt) and formed on the rear surface of the light transmitting substrate 146. The modulator electrode layer 145 can contact the gold layer. The electro-optic material layer 144 is made of polymer dispersed liquid crystal (PDLC) and is disposed under the modulator electrode layer 145 with a predetermined thickness. Pdlc can have a drive voltage of less than 30V, a 40:1 contrast, a rise time of l7 ms, a fall time of 3 ms, and a minimum dwell time of 3 〇ms. The electro-optic material layer (4) coats the liquid crystal mixed liquid (including the polymer and the liquid crystal) on the modulator electrode layer 145, and cures the liquid crystal mixed liquid. At the same time, as shown in Figure 5, a plurality of sealing walls 149 (each of which is 149) surround the electro-optic material layer 144. Each sealing wall 149 is formed with a predetermined thickness along the edge of the modulator electrode layer 145 to prevent the electro-optic material layer 144 from flowing to the outside. Therefore, when the electro-optic material layer 144 flows to the gold layer and the modulator electrode unit 145, contact failure and signal distortion are avoided. Further, since it is not necessary to concentrate the material of the electro-optic material layer 144 at the center of the transducer electrode layer 145, the thickness of the electro-optic material layer 144 can be made uniform. The human sealing wall 149 is made of a sealant to adhere the substrate, and is formed by applying a sealant to the corresponding position by using the cloth. The sealing wall 149 can be made of a solid glass material. Here, the height H1 of the sealing wall is controlled by the height of the material of the glass. The height HI of the sealing wall 149 can be between 15 and 25/m. If the height 耵 of the sealing wall 149 is lower than 15#m, the polarization of the liquid crystal is low. Therefore, the difference between the transmission property and the contrast value when the electric field is formed is formed, and the difference between the transmission property and the contrast value in the field is formed. Not big. If the same degree H1 of the sealing wall 14^ is higher than 25//m, the difference between the modulator electrode and the panel electrode of the preliminary test is greatly increased, and the driving voltage for driving the modulator electrode and the panel electrode is unnecessary. Increase.
、同，，透明保護層143可形成於電光材質層144之下，使 透明保護層143接觸面板電極、或鄰近面板電極。透明保護層 143避免面板電極5或外部材質破壞pdlc。 透明保護層143係以具有高抗侵钮、抗水、及抗化學侵飼 的材質製造而成。透明保護層143可為聚對二甲苯塗層 (Parylene⑽ting layer)。聚對二甲苯塗層係在真空環境; 室溫下塗佈聚對二甲苯氣體㈣成。形成聚對二f苯塗層 合物在室溫下係多晶與線性，且財極佳的健屬性，並且不 會產生過多化學反應。因為好㈣、驗、或溶綱化學物質 ^並，太大影響，所以此聚對二甲笨塗層具有極佳的密封能 力、。而防水性、極佳的抗舰、及抗化學性，而在_細 150C的溫度細邮會發生機械轉換或屬性改變，因此且 良好的熱穩定性。再者’因為聚對二甲苯塗層具有高渗透性， 因此聚對4苯塗層可均自地形成，且料 亦可被調整。 7子度 20 200827750 〜聚對二甲苯塗層係以化學氣相沉積的方式形成。聚對二甲 苯的原始材料二聚物_的，係以粉狀的方式放置於蒸發器 ^由蒸發ϋ將之昇華為氣體鶴。所形成的二聚物氣體透過 一裂态phermal cracker)，而***成單體。接著，在真空腔 體中單體在預備處理的目標物表面被聚合為聚合物，並接著 在目標物表面形成聚對二甲苯塗層。 Γ ( 2照本㈣，由贿刺試料組態赠過_器透光而 4AA i θ此無&獨立的光線方向調整裝置；而可實施成小尺 二面板上不會發生靜電，或者在面板上所產 來自光⑽猶储序地穿過秘與調變器， ^=1==爾侧糊眼娜板 再者，調變器與缺陷偵測單元間沒有 ::因此本發明可更正確伽板電極中是否 其精者因當 限於以下料專概_其均特所界定化’亚僅叉 21 200827750 【圖式簡單說明】 、為使热此技藝者得明瞭本發明，說明書中提供伴隨圖式作 為其-部分’用⑽示本發明之實施例，並與其 本發明之各面向。 轉 圖1係習知陣列測試器之示意圖； 圖2係本發明之一實施例中陣列測試器之示意圖； 圖3係本發明之另一實施例中陣列測試器之^意圖； 以及 圖4係圖2中所示之測試單元與戦模組之放^面圖 圖5綠示圖4中所示之調變器的另一實施例之圖式。 【主要元件符號說明】 2面板 2a後表面 2b前表面 5 電極 10陣列測試器 11負载單元 12測試單元 13卸載單元 15支撐塊 40測試模組 41光源 22 200827750 42 光線方向調整單元 43調變器 43a反射層 43b電光材質層 43c透明基板層 44攝影機 100陣列測試器 110負載單元 112負載盤 114喷氣孔· 120測試單元 122測試盤 124調變器電極層 130卸載單元 132卸載盤 134喷氣孔 140測試模組 141光源 142調變器 142a入射面 142b出口面 143透明保護層 144電光材質層 145調變器電極層 23 200827750 146光傳輸基板 147缺陷偵測單元 148視覺單元 149監控器 150靜電消除單元 151離子化器孔 153吹風機型離子化器 160面板夾鉗 250靜態消除單元 251鉗夾單元 · 253光離子化器In the same manner, the transparent protective layer 143 may be formed under the electro-optic material layer 144 such that the transparent protective layer 143 contacts the panel electrode or is adjacent to the panel electrode. The transparent protective layer 143 prevents the panel electrode 5 or the external material from damaging the pdlc. The transparent protective layer 143 is made of a material having high resistance to attack, water, and chemical attack. The transparent protective layer 143 may be a Parylene (10) ting layer. The parylene coating is in a vacuum environment; the parylene gas (tetra) is applied at room temperature. The formation of the poly-p-f-benzene coating is polycrystalline and linear at room temperature, and has excellent health properties and does not produce excessive chemical reactions. Because the good (four), test, or sulphur chemical ^ is too large, this poly-p-stack coating has excellent sealing ability. Water resistance, excellent anti-ship and chemical resistance, and fine transfer at _ fine 150C will result in mechanical conversion or property change, and therefore good thermal stability. Furthermore, since the parylene coating has high permeability, the poly(p-phenylene) coating can be formed entirely from the ground and the material can be adjusted. 7 degree 20 200827750 ~ The parylene coating is formed by chemical vapor deposition. The raw material dimer of poly(p-xylene) is placed in the evaporator in a powder form. It is sublimated into a gas crane by evaporation. The dimer gas formed is passed through a clemal cracker and split into monomers. Next, the monomer is polymerized into a polymer on the surface of the target to be treated in the vacuum chamber, and then a parylene coating is formed on the surface of the target. Γ (2 according to this (four), from the bribery sample configuration to give _ device light transmission and 4AA i θ this no & independent light direction adjustment device; and can be implemented as a small ruler on the second panel will not occur static electricity, or in The light from the panel (10) is passed through the secret and the modulator, ^=1== the side of the paste, and the defect detector and the defect detection unit are not:: Therefore, the present invention can be more Whether the correct gamma plate electrode is limited to the following materials _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The accompanying drawings, as a part thereof, are shown in the <RTIgt; </RTI> <RTIgt; </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; 3 is a schematic view of an array tester according to another embodiment of the present invention; and FIG. 4 is a plan view of the test unit and the 戦 module shown in FIG. A schematic diagram of another embodiment of the modulator. [Main component symbol description] 2 panel 2a rear table Face 2b front surface 5 electrode 10 array tester 11 load unit 12 test unit 13 unloading unit 15 support block 40 test module 41 light source 22 200827750 42 light direction adjustment unit 43 modulator 43a reflective layer 43b electro-optic material layer 43c transparent substrate layer 44 camera 100 array tester 110 load unit 112 load disk 114 gas injection hole 120 test unit 122 test disk 124 modulator electrode layer 130 unloading unit 132 unloading disk 134 gas injection hole 140 test module 141 light source 142 modulator 142a incident surface 142b exit surface 143 transparent protective layer 144 electro-optic material layer 145 modulator electrode layer 23 200827750 146 optical transmission substrate 147 defect detecting unit 148 visual unit 149 monitor 150 static elimination unit 151 ionizer hole 153 hair dryer type ionizer 160 Panel clamp 250 static elimination unit 251 clamping unit · 253 photo ionizer