200821148 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種吸附膜與其製造方法，該吸附膜係 於使用吸附機，吸附陶£胚片搬送至既定位置，分離並積 層時’適用於介於吸附機之吸附板與陶瓷胚片之間的緩衝 材料。又’本發明係關於—種具有離型膜之吸附膜及盆製 【先前技術】200821148 IX. OBJECTS OF THE INVENTION: TECHNICAL FIELD The present invention relates to an adsorption film which is used in an adsorption machine, which is used to transport a ceramic sheet to a predetermined position, and is separated and laminated. A buffer material between the adsorption plate of the adsorption machine and the ceramic green sheet. Further, the present invention relates to an adsorption film having a release film and a potting method. [Prior Art]
用於行動電話等之晶片電容器係將印刷有電極之陶竟 胚片加以積層所製作而成。用於吸附陶究胚片將其從離型 紙剝離’搬送至相同場所’分離並積層之吸附機，為了吸 附陶竞胚片之全面’係裝載有吸附板。為了順利地進行上 边一連串之步驟’對於吸附板係要求表面平滑性，通氣性 以及離型性’進__步係要求適度之緩衝性。吸附板大多使 用具有用以通氣之開口部的金屬模具。然而，金屬模具欠 缺緩衝性。為了彌補金屬模具之緩衝性，可於其表面 緩^才料。由保持通氣性之觀點來看，緩衝材料較佳:多 *專利文獻1揭示一種雖然非以陶瓷胚片為對象而是以 破耦板為對象之用以使被加工體吸附至支持台上之多孔， 片三根據專利文獻1，若預先於多孔質片單面部分地設2 接著劑層，則不僅易於將玻璃板配置至支持台上，= 、:·方止其後之位偏（段落0025)。接著劑層之材料，雖然 以感壓性接著劑較佳，但可使用熱熔接著劑或熱硬化型接 5 200821148 著劑（段落0025)。 專利文獻1:日本專利特開平第8__ 169971號公報 【發明内容】A chip capacitor for a mobile phone or the like is produced by laminating a ceramic chip on which an electrode is printed. An adsorption machine for separating and laminating the ceramic sheets from the release paper to the same place, and for absorbing the ceramics of the ceramics, the adsorption plate is loaded. In order to smoothly carry out a series of steps above, the surface smoothness, air permeability and release property of the adsorption plate system are required to be moderately cushioned. Most of the adsorption plates use a metal mold having an opening for ventilation. However, metal molds lack cushioning properties. In order to compensate for the cushioning properties of the metal mold, it can be smoothed on the surface. From the viewpoint of maintaining air permeability, the cushioning material is preferably: * * Patent Document 1 discloses that although the ceramic green sheet is not used as the object, the decoupling plate is used for adsorbing the object to be supported on the support table. Porous, sheet 3 According to Patent Document 1, if a second layer is provided on one side of the porous sheet in advance, it is easy to arrange the glass sheet on the support table, and the position of the glass sheet is not limited. 0025). The material of the subsequent layer, although a pressure-sensitive adhesive is preferred, a hot-melt adhesive or a thermosetting type can be used (paragraph 0025). Patent Document 1: Japanese Patent Laid-Open No. Hei No. 8__169971
於配置於陶究胚片吸附用金屬模具上之多孔質片的表 面亦預先塗佈接著劑以形成黏著劑層係較便利。此情況 時’當透過金屬模具的開σ部將陶竟胚片吸引時，必須要 於對應於多孔質片孔部之部分除去黏著劑，並形成貫通 孔。若考慮此點，則黏著劑層薄者較佳。Λ了形成薄的黏 者劑層，可塗佈加熱使黏度降低之熱熔接著劑。 另一方面，為了分離吸附於多孔質片之陶瓷胚片，必 須透過金屬模具開口部施加排氣壓力（exhaust pressure)於 :究胚片。因此金屬模具與多孔質片之間係要求不小於排 孔壓力之黏著力。因此，於用於陶£胚片吸附之多孔質片 之表面係期望形成黏著力優異之黏著劑層。 而，如圖6所示，若將加熱過之熱熔接著劑丨2直接 塗佈於多孔質片13上，則熱熔接著劑12會進入多孔質片 13的孔部1 9。因此，若沒有厚厚地塗佈熱熔接著劑12， 則熱溶接著劑12會陷人孔部19，而熱溶接著劑12與金屬 杈具1 6之接觸面積會變小，無法獲得足夠之黏著力。 右為了確保接著力而塗佈充分量之熱熔接著劑】2，則 多孔質片13的通氣性會變得難以確保。亦即，為了使陶 一允胚片17吸附於多孔質片13，即使透過金屬模具16的開 口部16a開始吸引（參照圖6箭頭），熱熔接著劑12亦容易 歹成召於多孔質片13的孔部19，而無法於吸附膜2〇形成足 6 200821148 夠數量的貫祕18。若吸附膜2G的通氣性低，則必須提 高吸附機之減壓的程度來將陶竟胚片17強力地吸引。然 而，若強力地吸引，則陶兗胚片17 ,變得容易發生變形。 若於陶曼胚片17發生變形，則陶究胚片17的積層體中上 層電極層與下層電極層會短路，曰曰日片電容器電容有降低之 虞0 有4α於以上丨月形’本發明之目的係、提供—種吸附膜及 其製造方法，該吸附膜係適用於吸附如陶竟胚片般容易變 形之板狀的被吸附體時，用以裝载於金屬模具等吸附板之 緩衝材料，尤其提供了 -種黏著力以及通氣性優異之吸附 膜與其製造方法，更提供了—種具有離型膜之吸附膜盘1 製造方法。 、α 解決誤題之手殿 本發明係提供-種吸附膜之製造方法，其係將加熱至 既定溫度之熱熔接著劑塗佈於離型膜上，於該離型膜上之It is convenient to apply an adhesive to the surface of the porous sheet disposed on the metal mold for ceramic slab adsorption to form an adhesive layer. In this case, when the ceramic sheet is attracted by the opening σ portion of the metal mold, it is necessary to remove the adhesive from the portion corresponding to the hole portion of the porous sheet and form a through hole. If this point is considered, the adhesive layer is preferably thin. In order to form a thin adhesive layer, a hot-melt adhesive which is heated to lower the viscosity can be applied. On the other hand, in order to separate the ceramic green sheets adsorbed on the porous sheet, an exhaust pressure must be applied through the opening of the metal mold to study the green sheets. Therefore, it is required that the adhesion between the metal mold and the porous sheet is not less than the adhesion of the discharge pressure. Therefore, it is desirable to form an adhesive layer excellent in adhesion to the surface of the porous sheet for the adsorption of the slab. On the other hand, as shown in Fig. 6, when the heated hot-melt adhesive 丨2 is directly applied to the porous sheet 13, the hot-melt adhesive 12 enters the hole portion 19 of the porous sheet 13. Therefore, if the hot-melt adhesive 12 is not applied thickly, the hot-melt adhesive 12 is trapped in the hole portion 19, and the contact area between the hot-melt adhesive 12 and the metal cookware 16 becomes small, and sufficient heat is not obtained. Adhesion. On the right, in order to ensure a sufficient amount of hot-melt adhesive 2 to ensure the adhesion, it is difficult to ensure the air permeability of the porous sheet 13. In other words, in order to cause the ceramic sheet 17 to be adsorbed to the porous sheet 13, even if the opening 16a of the metal mold 16 is sucked (see the arrow in Fig. 6), the hot-melt adhesive 12 is easily caught in the porous sheet. The hole portion 19 of the 13 is unable to form the foot 6 of the adsorbent film 2, 200821148. When the air permeability of the adsorption film 2G is low, it is necessary to increase the degree of pressure reduction of the adsorption machine to strongly attract the ceramic chip 17 . However, if it is strongly attracted, the pottery piece 17 becomes easily deformed. If the Tauman embryo sheet 17 is deformed, the upper electrode layer and the lower electrode layer in the layered body of the ceramic sheet 17 are short-circuited, and the capacitor capacitance of the cathode chip is reduced. 有0 has 4α in the above-mentioned shape. An object of the present invention is to provide an adsorption film which is suitable for being applied to an adsorption plate such as a metal mold, and a method for producing the same, which is suitable for adsorbing a plate-shaped adsorbed body which is easily deformed like a ceramic plate. The cushioning material, in particular, provides an adsorption film excellent in adhesion and air permeability, and a method for producing the same, and a method for producing the adsorption film disk 1 having a release film. The invention provides a method for producing an adsorption film by applying a hot-melt adhesive heated to a predetermined temperature to a release film, and the release film is coated on the release film.
=熱炫接著劑成為低於該既定溫度之溫度的狀態下將多孔 貝片接合於該熱料著劑，形成以該離型 劑所構成之黏著劑層、該多孔質片之順序所積層；；成= 層體’並將該離型膜自該積層體剝離而得到由該黏著劑層 與該多孔質片積層而成之吸附膜。 曰 又，本發明係提供一種吸附膜，其係由熱熔接著劑所 =成之黏著劑層、與多孔質片所積層而成；針對該黏著劑 ^對不鏽鋼接著力試驗所得之接著力| 〇 8N/25mm以上， 通氣度為W/em2·秒以上n輯残鋼接著力試 7 200821148 驗係依據JIS Z0237所規定之180度剝離法來進行，該通 氣度係以JIS Ll〇96所規定之富拉吉魯法（Frazier meth〇d) 測定來決定。When the heat-sensitive adhesive is brought to a temperature lower than the predetermined temperature, the porous shell is bonded to the hot charge agent to form an adhesive layer composed of the release agent, and the porous sheet is laminated in the order of the adhesive; The formation of the layered body and the release film were peeled off from the laminate to obtain an adsorption film formed by laminating the pressure-sensitive adhesive layer and the porous sheet. Further, the present invention provides an adsorption film which is formed by laminating an adhesive layer formed by a hot melt adhesive agent and a porous sheet; and an adhesive force obtained by the adhesion test of the adhesive against the stainless steel| 〇8N/25mm or more, air permeability is W/em2·sec or more n series residual steel and force test 7 200821148 The test is carried out according to the 180 degree peeling method specified in JIS Z0237, which is specified in JIS Ll〇96 It is determined by the Frazier meth〇d measurement.
又，本舍明係提供一種具有離型膜之吸附膜之製造方 法，該具有離型膜之吸附膜係將加熱至既定溫度之熱熔接 著劑塗佈於離型膜上，於該離型膜上之該熱熔接著劑成為 低於該既定溫度之溫度的狀態下將多孔質片接合於該熱熔 接著劑，形成由該離型膜、該熱熔接著劑所構成之黏著劑 g ^及該夕孔貝片順序所積層而成者，並且該離型膜可 自忒黏著劑層與多孔質片所構成之吸附膜剝離。 又，本發明係提供一種吸附膜，其係一種具有離型膜 之吸附膜’其係由離型膜、熱溶接著劑所構成之黏著劑層、 以及多孔質片順序積層而成，且該離型膜可自該黏著劑層 舆：孔質片所構成之吸附膜剝離；其中，將該離型膜剝離 :仔之该吸p賴之黏著劑㈣不鏽鋼接著力試驗所得之接 者力為0.8N/25mm以上，通氣度為5cm3/cm2 .秒以上。其 〜對不鏽鋼接著力試驗以及該通氣度之測定係根據前 述内容來進行。 本發明之吸附膜之製造方法方面，係將加熱使黏度降 居之熱溶接著劑塗佈於離型膜上以形成薄且平坦之黏著劑 2之後將成為低溫且黏度上升之黏著劑層與多孔質片貼 ^因此’與將㈣接著㈣接塗佈於多孔質片上的情況 相比’可抑制熱熔接著劑進人多孔質片的孔部。並且，以 8 200821148 上，方法所形成之黏著劑層之黏著面，亦即使離型膜剝離 ·、員路之表面平坦性*。因此，本發明之吸附膜即使爲了 s保通氣[生而形成為較薄，黏著劑層之黏著力亦難以降 【貫施方式】 以下，參知、圖面説明本發明之較佳實施形態。首先， ;圖1所不之離型冑i上塗佈熱溶接著劑以形成黏著劑層 ^圖2)。離型膜1係提供塗佈熱溶接著劑所需之平坦表面。 離型膜1雖無特別限定，但可使用石夕酮、聚對苯二甲酸乙 二醇_等樹脂膜。離型膜1為了於使用時除去而以非多孔 性較佳。 熱熔接著劑係以經加熱之熔融狀態來塗佈，冷卻後固 化而形成黏著劑4 2。㈣接著劑雖無特別以，但可使 用於常溫呈現足夠黏性（tackiness)(黏著性）者。例如，埶熔 接著劑係以高溫⑽〜200。〇、高麼（2〜5k g/cm2)喷送來塗 佈。若加熱至上述程度來塗佈，則於離型膜丨上易形成P 度均勾的黏著劑層2。又例如，熱熔接著劑亦可於離型^ 1上部分地塗佈成例如網眼狀或散點狀，其後，將其抵壓 ㈣散至全體。此情況時，熱熔接著劑可以料構成網= 夺之線條直徑（或構成散點之點的直徑）成為5〜30μ1η、線條 (或點)之間隔成$ 5〜10,左右之微細圖案的方式來： 佈。 土 熱熔接著劍係以黏著劑層2之厚度成為3〜ι〇μπι的方 式塗怖較佳。黏著劑層若過薄則對於金屬模具之點著力有 9 200821148 ， 時會不足，若過厚則吸引時貫通孔會變得難以形成。 . 接著，如圖3所示，將多孔質片3貼合於黏著劑層2 以獲得具有離型膜之吸附膜4。將多孔質片3貼合於黏著 劑層2之方法雖並無特別限定，但可藉由例如使形成有黏 著劑層2之離型膜丨與多孔質片3通過一對輥之間來貼附。 此時’由於構成黏著劑層2之熱熔接著劑已經冷卻而黏度 增加，且沿著離型膜丨之一主面來固定，故難以進入多孔 質片3之孔部9。 如圖4所示，將離型膜1自圖3之具有離型膜之吸附 膜4剝離則可獲得吸附膜5。因離型膜丨之剝離，黏著劑 層2係自離型膜1轉印至多孔質片3。連接於離型膜丨之 黏著劑層2之面2a係成為平坦性良好之黏著面2a。 多孔質片3以樹脂多孔質片，尤其是超高分子量聚乙 烯树月曰多孔負片較佳。超高分子量聚乙烯樹脂多孔質片與 橡膠片相比摩擦係數低，與紙或不織布相比壽命較長。超 _ 高分子量聚乙烯係具有約100萬以上之分子量（黏度平均分 子量）。 超高分子量聚乙烯樹脂多孔質片雖並無特別限定，但 厚度為0_05〜0.5mm，尤其為100〜3⑽μηι較佳，平均孔徑 為1〜ΙΟΟμπι，尤其為5〜40μιη較佳，算數平均粗糙度（Ra) 為（ΜΟμπι ，壓縮彈性模數（m Κ718ι)為 00 1000kgf/m ’尤其為200〜400kg f/m2較佳，通氣度（富 拉吉魯法（JIS L1096)所得）為5〜2〇em3/cm2 •秒較佳。 圖5係顯7F將吸P#膜5裝載於吸附機之吸附板即金屬 200821148 - 模具6之狀態。吸附膜5係將黏著劑層2接著於金屬模具 6,之表面來固^。吸附膜5之多孔質片3係被推抵於欲搬 送之陶瓷胚片7。此狀態下，一旦從金屬模具6的開口部 6a開始吸引（參照圖5箭頭），則於多孔質片5的孔部9上 方黏著劑層2的一部分會被除去，而於吸附膜5形成了貫 通孔8。接著，陶瓷胚片7透過貫通孔8被吸引。如此 來，陶瓷胚片7係被吸附於金屬模具6而搬送至既定場所， 在δ亥场所藉由從開口部6a所施加的排氣壓力（朝圖5箭頭 攀的反方向施加壓力）而自金屬模具6分離。 吸附膜5方面，黏著劑層2相接於金屬模具6的黏著 面2a平坦性高。故，即使不形成過厚的黏著劑層2，亦可 確保與金屬模具6之間有充分的黏著力。因此，即使施加 用以將陶兗胚片7分離的排氣壓力，吸附膜5亦不會自金 屬模具6剝離。 及附膜5較佳為於對不鏽鋼接著力試驗（jIS z〇237 18〇 φ 度剝離法），顯不0.8N/25mm以上，進一步為2.0N/25mm 以上之接著力。又，吸附膜5較佳為根據富拉吉魯法之測 疋，顯示5cm3/cm2 ·秒以上，進一步為5.5cm3/cm2 ·秒以 上之通氣度。 以下’以實施例具體説明本發明。但本發明並不限定 於以下之實施例。 (比較例） 於多孔質片即超高分子量聚乙烯樹脂多孔質片（日東電 工么司製桑瑪普；厚度〇.22mm，平均孔徑20 μιη，算數平 11 200821148 均粗糙度（Ra)2.2_，壓縮彈性模數3〇〇kgf/m2，通氣产 TcmVcm2·秒）上，將熱溶接著劑似如以^ ch鑛c = 公司製喜羅達因)加熱至19〇。。’以讣§ f/cm2之壓力均勻 :也贺达。贺达之塗佈量定為7g/m2。如此一來所形成之黏 者弹]層的厚度成為7〜8 μπι。 ‘著剎層冷部至常溫，藉由將黏著劑層壓於具有開口 之金屬模具的表面，來將吸附膜固定於金屬模具。進一步，Further, the present invention provides a method for producing an adsorption film having a release film, wherein the adsorption film having a release film coats a hot melt adhesive heated to a predetermined temperature on a release film, and the release film is applied to the release film. The porous sheet is bonded to the hot-melt adhesive in a state where the hot-melt adhesive on the film is at a temperature lower than the predetermined temperature, and an adhesive g consisting of the release film and the hot-melt adhesive is formed. And the laminated film is formed by laminating the film, and the release film can be peeled off from the adhesive film formed by the adhesive layer and the porous sheet. Moreover, the present invention provides an adsorption film which is an adsorption film having a release film which is formed by laminating a pressure-sensitive adhesive layer composed of a release film and a hot-melt adhesive, and a porous sheet. The release film may be peeled off from the adhesive film consisting of the adhesive layer: the release film; wherein the release film is peeled off: the adhesion of the adhesive (4) stainless steel adhesion test is 0.8N/25mm or more, the air permeability is 5cm3/cm2. Second or more. The test for the stainless steel adhesion force and the measurement of the air permeability were carried out in accordance with the above. In the method for producing the adsorption film of the present invention, the adhesive layer which is heated to lower the viscosity is applied to the release film to form a thin and flat adhesive 2, which becomes a low temperature and has an increased viscosity. When the porous sheet is attached, it can suppress the entry of the hot-melt adhesive into the pore portion of the porous sheet as compared with the case where (4) and (4) are applied to the porous sheet. Moreover, the adhesion surface of the adhesive layer formed by the method of 8 200821148 is also peeled off from the release film, and the surface flatness of the employee road is *. Therefore, even if the adsorption film of the present invention is formed to be thin, the adhesion of the adhesive layer is hard to be lowered. [Comparative Embodiment] Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. First, a hot-melt adhesive is applied to the release 胄i of Figure 1 to form an adhesive layer (Fig. 2). Release Film 1 provides the flat surface required to apply a hot melt adhesive. The release film 1 is not particularly limited, and a resin film such as linaloyl or polyethylene terephthalate can be used. The release film 1 is preferably non-porous in order to be removed during use. The hot melt adhesive is applied in a heated molten state, and after cooling, it is cured to form an adhesive 4 2 . (4) Although the adhesive is not particularly used, it can be used for those who exhibit sufficient tackiness (adhesion) at normal temperature. For example, the crucible is followed by a high temperature (10) to 200. 〇, Gao (2~5k g/cm2) is sprayed to coat. When it is heated to the above extent and applied, the adhesive layer 2 having a P degree hook is easily formed on the release film. Further, for example, the hot-melt adhesive may be partially applied to the release mold 1 such as a mesh shape or a scatter shape, and thereafter, it is pressed (four) to the whole. In this case, the hot-melt adhesive can be formed into a net = the diameter of the line (or the diameter of the point constituting the scatter) becomes 5 to 30 μ1 η, and the line (or point) is spaced by a distance of 5 to 10, and the fine pattern of the left and right Way to: cloth. The soil is melted and the sword is preferably coated with a thickness of the adhesive layer 2 of 3 to ι 〇 μπι. If the adhesive layer is too thin, the focus on the metal mold is 9 200821148, which will be insufficient. If it is too thick, the through hole will become difficult to form. Next, as shown in FIG. 3, the porous sheet 3 is attached to the adhesive layer 2 to obtain an adsorption film 4 having a release film. Although the method of bonding the porous sheet 3 to the adhesive layer 2 is not particularly limited, for example, the release film formed with the adhesive layer 2 and the porous sheet 3 are passed between a pair of rolls. Attached. At this time, since the hot-melt adhesive constituting the adhesive layer 2 has been cooled to increase the viscosity and is fixed along one main surface of the release film, it is difficult to enter the hole portion 9 of the porous sheet 3. As shown in Fig. 4, the release film 1 is peeled off from the adsorption film 4 having the release film of Fig. 3 to obtain the adsorption film 5. The adhesive layer 2 is transferred from the release film 1 to the porous sheet 3 due to the peeling of the release film. The surface 2a of the adhesive layer 2 attached to the release film is an adhesive surface 2a having good flatness. The porous sheet 3 is preferably a resin porous sheet, especially an ultrahigh molecular weight polyethylene sapphire porous negative sheet. The ultrahigh molecular weight polyethylene resin porous sheet has a lower friction coefficient than the rubber sheet and has a longer life than paper or non-woven fabric. The ultra-high molecular weight polyethylene has a molecular weight (viscosity average molecular weight) of about 1,000,000 or more. The ultrahigh molecular weight polyethylene resin porous sheet is not particularly limited, but has a thickness of 0_05 to 0.5 mm, particularly preferably 100 to 3 (10) μηι, and an average pore diameter of 1 to ΙΟΟμπι, particularly preferably 5 to 40 μm, and an arithmetic mean roughness. (Ra) is (ΜΟμπι, compression elastic modulus (m Κ 718 ι) is 00 1000 kgf / m ', especially 200 to 400 kg f / m 2 is preferred, air permeability (of the Fulajilu method (JIS L1096)) is 5~2 〇em3/cm2 • sec is better. Fig. 5 shows that 7F is used to load the P# film 5 on the adsorption plate of the adsorption machine, that is, the state of the metal 200821148 - the mold 6. The adsorption film 5 is followed by the adhesive layer 2 in the metal mold 6 The surface of the porous film 3 of the adsorption film 5 is pushed against the ceramic green sheet 7 to be conveyed. In this state, once the suction is started from the opening 6a of the mold 6 (see the arrow in Fig. 5), Then, a part of the adhesive layer 2 is removed from the hole portion 9 of the porous sheet 5, and the through hole 8 is formed in the adsorption film 5. Then, the ceramic green sheet 7 is attracted through the through hole 8. Thus, the ceramic embryo The sheet 7 is adsorbed to the metal mold 6 and transported to a predetermined place. The pressure is applied from the opening portion 6a (pressure is applied in the opposite direction to the arrow of FIG. 5) from the metal mold 6. In terms of the adsorption film 5, the adhesive layer 2 is in contact with the adhesive surface 2a of the metal mold 6 to be flat. Therefore, even if the thick adhesive layer 2 is not formed, it is ensured that there is sufficient adhesion between the metal mold 6. Therefore, even if the exhaust pressure for separating the ceramic sheet 7 is applied, adsorption is performed. The film 5 is also not peeled off from the metal mold 6. The film 5 is preferably subjected to a stainless steel adhesion test (jIS z〇237 18〇φ degree peeling method), which is not more than 0.8 N/25 mm, and further 2.0 N/ Further, the adsorption film 5 preferably has a gas permeability of 5 cm 3 /cm 2 ·sec or more and further 5.5 cm 3 /cm 2 ·sec or more according to the measurement of the Fulajiru method. The present invention is not limited to the following examples. (Comparative Example) A porous sheet of ultrahigh molecular weight polyethylene resin, which is a porous sheet (Sangmapu, manufactured by Nitto Denko; thickness: 2222 mm, Average pore size 20 μιη, arithmetic flat 11 200821148 average roughness (Ra) 2.2_, compressive elastic modulus 3 〇〇 kgf / m 2 , ventilating production TcmV cm 2 · sec), the hot melt adhesive seems to be heated to 19 以 as ^ ch mine c = company Xiroda). . ‘The pressure of 讣§ f/cm2 is even: Heda. The coating amount of Heda was set at 7 g/m2. The thickness of the layer formed by the adhesive layer is 7 to 8 μm. ‘The brake layer is cooled to normal temperature, and the adsorption film is fixed to the metal mold by laminating the adhesive on the surface of the metal mold having the opening. further,
自金屬核具的開π部開始吸引，#黏著劑層的—部分除去 以形成貝通孔。以掃描型電子顯微鏡觀察形成貫通孔後的 吸附膜。結果示於圖7。 (實施例） 於離型膜（日東電工公司製RT_75S)上，與比較例同様 地’將熱溶接著劑（與比較例相均勻地喷送，形成厚度 7〜8μιη之黏著劑層。 黏著劑層成為常溫而顯示黏著性（黏性）之後，將多孔 質片即超高分子量聚乙烯樹脂多孔質片（日東電工公司製桑 瑪普；與比較例相同）疊合於黏著劑層並抵壓之，獲得由離 型膜、黏著劑層、多孔質片順序積層而成之具有離型膜之 吸附膜。 接著，將離型膜自具有離型膜之吸附膜剝離，使黏著 劑層露出。於此狀態下，藉由將黏著劑層壓於具有開口之 金屬模具的表面，來將吸附膜固定於金屬模具。進一步， 從金屬模具的開口部開始吸引，將黏著劑層的一部分除去 以形成貫通孔。所用之金屬模具以及從開口部吸引之條件 12 200821148 係與比較例相同。與比較例一様，以掃描型電子顯微鏡觀 察形成貫通孔後的吸附膜之結果示於圖8。將圖7與圖$ 相比，可瞭解到實施例之吸附膜形成了較多的貫通孔。 分別針對實施例以及習知例，改變熱熔接著劑之塗佈 量來製作吸附膜。然後，針對該等吸附膜測定黏著劑層之 黏著力（對不鏽鋼接著力）與通氣度。對不鏽鋼接著力^依The attraction is initiated from the open π portion of the metal core, and the portion of the #adhesive layer is removed to form a beacon hole. The adsorption film after the through holes were formed was observed with a scanning electron microscope. The results are shown in Figure 7. (Example) On a release film (RT_75S manufactured by Nitto Denko Corporation), a hot-melt adhesive (the same as the comparative example) was uniformly sprayed to form an adhesive layer having a thickness of 7 to 8 μm. After the layer is at room temperature and exhibits adhesiveness (viscosity), a porous sheet, an ultrahigh molecular weight polyethylene resin porous sheet (manufactured by Nitto Denko Corporation; the same as in the comparative example), is laminated on the adhesive layer and pressed against Then, an adsorption film having a release film formed by laminating a release film, an adhesive layer, and a porous sheet in this order is obtained. Next, the release film is peeled off from the adsorption film having the release film to expose the adhesive layer. In this state, the adhesive film is fixed to the metal mold by laminating the adhesive on the surface of the metal mold having the opening. Further, suction is started from the opening of the metal mold, and a part of the adhesive layer is removed to form. The through hole, the metal mold used, and the condition for attracting from the opening 12 200821148 are the same as in the comparative example. As in the comparative example, the adsorption after forming the through hole was observed by a scanning electron microscope. The results are shown in Fig. 8. Comparing Fig. 7 with Fig. $, it can be understood that the adsorption film of the embodiment has formed a large number of through holes. The coating amount of the hot melt adhesive is changed for the examples and the conventional examples, respectively. To make an adsorption film. Then, the adhesion of the adhesive layer (for the stainless steel adhesion force) and the air permeability were measured for the adsorption films.
據Ji s Z0237 180度剝離法來進行。又，通氣度之測定^ 依據富拉吉魯法（jIS L1096)來進行。 、 9。通氣度之測定結果示於 ’熱溶接者劑之比較例（習知 以上之對不鏽鋼接著力與 而於陶瓷胚片之搬送方面， 通氣度。另一方面，將熱熔 ^例方面，則可兼具上述情 了解熱熔接著劑之塗佈量為 接著力之測定結果示於圖 圖1 〇。直接於多孔質片塗佈； 例）係難以兼具0 · 8N/2 5mm 5cm3/cm2 ·秒以上之通氣度。 係期望兼具此程度之接著力與 接著劑塗佈於離型膜上之實名 形。依據圖9以及圖1 〇，可 3〜10g/m2左右較佳。 (產業利用性） 易於使陶瓷胚片吸附，搬送至 ’且易於製作用於行動電話等 藉由本發明之吸附膜， 同一場所之後，分離並積層 之晶片電容器。 本發明電子零件（例如晶片兩 日日月包谷器）之製造方法係包含 以相接於吸附膜的方式使陶咨狀μ方 更陶是胚片吸附於裝載有本發明之 吸附膜或經由本發明之製造方 斤传之吸附膜之吸附板並 搬送、積層之步驟，係於產章 杲上具有極大之利用價值。 13 200821148 【圖示簡單説明】 圖1係離型膜之截面圖。 圖2係顯示塗佈熱熔接著劑於離型膜上形成黏著劑層 之狀態的截面圖。 圖3係貼合黏著劑層進一步貼合多孔質片所得之具有 離型膜之吸附膜的截面圖。 圖4係自具有離型膜之吸附膜將離型膜剝離所得之吸 附膜的截面圖。 圖5將吸附膜裝載於吸附板（金屬模具）並吸引之，使 陶瓷胚片吸附之狀態的截面圖。 圖6將習知之吸附膜裝載於金屬模具並吸引之，使陶 莞胚片吸附之狀態的截面圖。 圖7以掃描型電子顯微鏡觀察比較例所製作之吸附膜 之狀態。 圖8以掃描型電子顯微鏡觀察實施例所製作之吸附膜 之狀態。 圖9熱溶接著劑之塗佈量與對不鏽鋼接著力之關係。 固1 〇係顯示熱溶接著劑之塗佈量與吸附膜之通氣度之 關係。 【主要元件符號說明】 1 離型膜 2 黏著劑層 2a 黏著面 3 多孔質片 14 200821148 4 具有離型膜之吸附膜 5 吸附膜 6 金屬模具 6a 金屬模具的開口部 7 陶瓷胚片 8 貫通孔 9 孔部According to the Ji s Z0237 180 degree peeling method. Further, the measurement of the air permeability was carried out in accordance with the Fulajiru method (jIS L1096). , 9. The results of the measurement of the air permeability are shown in the comparative example of the 'heat-melt agent' (the above-mentioned aspects of the stainless steel adhesion force and the transfer of the ceramic green sheet, the air permeability. On the other hand, the heat fusion method can be used. The above-mentioned situation is understood that the coating amount of the hot-melt adhesive is the measurement result of the adhesion force shown in Fig. 1 〇. It is applied directly to the porous sheet; the example is difficult to have both 0 · 8N/2 5mm 5cm3/cm2 · Ventilation above a second. It is desirable to have both the adhesion of this degree and the real name that the subsequent agent is applied to the release film. According to Fig. 9 and Fig. 1, it is preferably about 3 to 10 g/m2. (Industrial Applicability) It is easy to adsorb and transport the ceramic green sheets to the ', and it is easy to produce a wafer capacitor which is separated and laminated by the adsorption film of the present invention after the same place. The manufacturing method of the electronic component of the present invention (for example, the wafer two-day sun and the moon grainer) comprises the method of contacting the ceramic film with the adsorption film on the adsorption film loaded with the adsorption film of the invention. The step of manufacturing and adsorbing the adsorption plate of the adsorption film of the manufacturer of the invention is of great value in the production of the seal. 13 200821148 [Simple illustration of the diagram] Figure 1 is a cross-sectional view of the release film. Fig. 2 is a cross-sectional view showing a state in which a hot-melt adhesive is applied to form an adhesive layer on a release film. Fig. 3 is a cross-sectional view showing an adsorption film having a release film obtained by further bonding a porous sheet to an adhesive sheet. Fig. 4 is a cross-sectional view showing an adsorption film obtained by peeling off a release film from an adsorption film having a release film. Fig. 5 is a cross-sectional view showing a state in which an adsorption film is loaded on an adsorption plate (metal mold) and attracted to a state in which the ceramic green sheets are adsorbed. Fig. 6 is a cross-sectional view showing a state in which a conventional adsorption film is loaded on a metal mold and attracted to a state in which a ceramic green sheet is adsorbed. Fig. 7 shows the state of the adsorption film produced in the comparative example by a scanning electron microscope. Fig. 8 shows the state of the adsorption film produced in the examples by a scanning electron microscope. Figure 9. Relationship between the amount of hot melt adhesive applied and the adhesion to stainless steel. The solid 1 lanthanide system shows the relationship between the coating amount of the hot melt adhesive and the air permeability of the adsorption film. [Main component symbol description] 1 Release film 2 Adhesive layer 2a Adhesive surface 3 Porous sheet 14 200821148 4 Adsorption film 5 with release film Adsorption film 6 Metal mold 6a Opening of metal mold 7 Ceramic green sheet 8 Through hole 9 holes
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