TW200739124A - Measurement microscope device - Google Patents

Measurement microscope device

Info

Publication number
TW200739124A
TW200739124A TW096101830A TW96101830A TW200739124A TW 200739124 A TW200739124 A TW 200739124A TW 096101830 A TW096101830 A TW 096101830A TW 96101830 A TW96101830 A TW 96101830A TW 200739124 A TW200739124 A TW 200739124A
Authority
TW
Taiwan
Prior art keywords
measurement
stage
objective lens
microscope device
detection system
Prior art date
Application number
TW096101830A
Other languages
Chinese (zh)
Inventor
Takeshi Yamagishi
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200739124A publication Critical patent/TW200739124A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G02B21/04—Objectives involving mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/004—Manual alignment, e.g. micromanipulators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/09—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted for automatic focusing or varying magnification

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Automatic Focus Adjustment (AREA)
  • Microscoopes, Condenser (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

To provide an inexpensive measurement microscope device facilitating alignment work on a point of measurement. This measurement microscope device comprises an XY stage 22 horizontally moving a test body 21, an observation optical system 10 for observing the test body 21, a Z stage 15 vertically moving an objective lens 11 of the optical system 10, a focal point detection system 30 detecting focalization by applying measurement light via the objective lens 11 to the test body 21, a half mirror 17 optically coupling the detection system 30 to the objective lens 11, a signal processing part 41 controlling the Z stage 15 based on a detection result obtained by the detection system 30, and a measurement part 42 measuring the movement amount of the objective lens 11 caused by the Z stage. The microscope device further comprises two wedge prisms 51a and 51b disposed on an optical path between the detection system 30 and the half mirror 17, and rotary mechanisms 52a and 52b holding the wedge prisms 51a and 51b so as to allow them to rotate severally.
TW096101830A 2006-02-15 2007-01-17 Measurement microscope device TW200739124A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006038222A JP4869727B2 (en) 2006-02-15 2006-02-15 Measuring microscope equipment

Publications (1)

Publication Number Publication Date
TW200739124A true TW200739124A (en) 2007-10-16

Family

ID=38496159

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096101830A TW200739124A (en) 2006-02-15 2007-01-17 Measurement microscope device

Country Status (4)

Country Link
JP (1) JP4869727B2 (en)
KR (1) KR101283814B1 (en)
CN (1) CN101021408B (en)
TW (1) TW200739124A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2777388C (en) * 2009-10-16 2018-07-24 Thorlabs, Inc. Autofocus apparatus
KR101931967B1 (en) 2011-09-19 2018-12-27 삼성전자 주식회사 Auto focusing apparatus for optical microscope
CN104391371B (en) * 2014-12-19 2017-04-26 成都理工大学 Digital microscope and use method thereof
CN109799595A (en) * 2017-11-16 2019-05-24 长光华大基因测序设备（长春）有限公司 A kind of the inspection focus adjustment method and device of gene sequencer microcobjective
CN111665259A (en) * 2019-03-08 2020-09-15 深圳中科飞测科技有限公司 Detection device and detection method

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3212691A1 (en) * 1982-04-05 1983-10-06 Zeiss Carl Fa PRISM COMPENSATOR FOR STEREOSCOPIC OBSERVATORS
JPS63235090A (en) * 1987-03-24 1988-09-30 Ngk Insulators Ltd Laser beam machining apparatus
CN87210363U (en) * 1987-07-25 1988-09-28 北京大学 New light beam-deflecting apparatus
JPH04352124A (en) * 1991-05-30 1992-12-07 Toshihiro Tsumura Optical axis deflection device for optical equipment
JP3638639B2 (en) * 1993-09-09 2005-04-13 株式会社トプコン Position detection device
JPH08334317A (en) * 1995-06-09 1996-12-17 Olympus Optical Co Ltd Measuring microscope
JPH10133117A (en) * 1996-10-31 1998-05-22 Nikon Corp Microscope equipped with focus detecting device
JP2001066138A (en) * 1999-06-23 2001-03-16 Mitsubishi Precision Co Ltd Measuring system, and prism-type optical path control used for it
JP3579630B2 (en) * 2000-04-24 2004-10-20 隆樹 笠原 Microscope autofocus device
TW555954B (en) * 2001-02-28 2003-10-01 Olympus Optical Co Confocal microscope, optical height-measurement method, automatic focusing method
JP3944377B2 (en) * 2001-10-22 2007-07-11 オリンパス株式会社 Focus detection device
JP2003207731A (en) * 2002-01-15 2003-07-25 Yoshio Sozu Two-axial optical scanner
JP4179790B2 (en) * 2002-04-17 2008-11-12 オリンパス株式会社 Confocal scanning optical microscope
US7324274B2 (en) * 2003-12-24 2008-01-29 Nikon Corporation Microscope and immersion objective lens
CN1300563C (en) * 2005-03-24 2007-02-14 华中科技大学 Minisize three-dimensional self-scanning confocal microscope

Also Published As

Publication number Publication date
CN101021408A (en) 2007-08-22
KR101283814B1 (en) 2013-07-08
KR20070082531A (en) 2007-08-21
JP2007218678A (en) 2007-08-30
JP4869727B2 (en) 2012-02-08
CN101021408B (en) 2010-08-25

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