TW200718475A - Coating applicator - Google Patents
Coating applicatorInfo
- Publication number
- TW200718475A TW200718475A TW095132456A TW95132456A TW200718475A TW 200718475 A TW200718475 A TW 200718475A TW 095132456 A TW095132456 A TW 095132456A TW 95132456 A TW95132456 A TW 95132456A TW 200718475 A TW200718475 A TW 200718475A
- Authority
- TW
- Taiwan
- Prior art keywords
- pigment
- dispersed resist
- resist solution
- coating
- coating applicator
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/005—Nozzles or other outlets specially adapted for discharging one or more gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
- B05D1/005—Spin coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
Abstract
The invention provides a coating applicator for suppressing an aggregation of pigment components of a pigment-dispersed resist. The coating applicator which coats a pigment-dispersed resist solution on a processing substrate comprises a nozzle for discharging the pigment-dispersed resist solution, a coating solution supply for supplying the pigment-dispersed resist solution, and a piping composed of a conductive tube which introduces the pigment-dispersed resist solution supplied from the coating solution supply to the ozzle. Thus, when the pigment-dispersed resist solution passes through the onductive tube, an aggregation of the pigment components can be uppressed.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005325903A JP2007134487A (en) | 2005-11-10 | 2005-11-10 | Coating applicator |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200718475A true TW200718475A (en) | 2007-05-16 |
TWI310325B TWI310325B (en) | 2009-06-01 |
Family
ID=38082770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095132456A TW200718475A (en) | 2005-11-10 | 2006-09-01 | Coating applicator |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2007134487A (en) |
KR (1) | KR100835161B1 (en) |
CN (1) | CN1963670B (en) |
TW (1) | TW200718475A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103487993A (en) * | 2013-10-17 | 2014-01-01 | 深圳市华星光电技术有限公司 | Alignment liquid nozzle |
CN109212907A (en) * | 2018-11-05 | 2019-01-15 | 江苏博砚电子科技有限公司 | A method of manufacture black matrix" film |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06348023A (en) * | 1993-06-03 | 1994-12-22 | Nippon Kayaku Co Ltd | Coating method with resist for color filter containing pigment |
JP3363666B2 (en) * | 1995-05-25 | 2003-01-08 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
KR100521701B1 (en) * | 1996-11-27 | 2006-01-12 | 동경 엘렉트론 주식회사 | Coating film forming apparatus and coating film forming method |
JPH10328614A (en) * | 1997-05-30 | 1998-12-15 | Mitsubishi Chem Corp | Color resist coating method |
JP2000291848A (en) * | 1999-04-02 | 2000-10-20 | Toho Kasei Kk | Resin tube for spherical semiconductor |
JP2001066784A (en) * | 1999-08-24 | 2001-03-16 | Toppan Printing Co Ltd | Discharge device for photosensitive coloring resin composition |
JP2002177858A (en) * | 2000-12-13 | 2002-06-25 | Dainippon Screen Mfg Co Ltd | Substrate treatment apparatus |
TW569288B (en) * | 2001-06-19 | 2004-01-01 | Tokyo Electron Ltd | Substrate processing apparatus, liquid processing apparatus and liquid processing method |
JP3936556B2 (en) * | 2001-06-22 | 2007-06-27 | 東京エレクトロン株式会社 | Antistatic fluoropolymer tube for flammable fluids |
KR20050006135A (en) * | 2002-03-27 | 2005-01-15 | 사카타 인쿠스 가부시키가이샤 | Pigment-dispersed resist composition for color filters |
JP2005236040A (en) * | 2004-02-19 | 2005-09-02 | Sekisui Chem Co Ltd | Arrangement method for conductive fine particle |
-
2005
- 2005-11-10 JP JP2005325903A patent/JP2007134487A/en active Pending
-
2006
- 2006-09-01 TW TW095132456A patent/TW200718475A/en not_active IP Right Cessation
- 2006-11-10 CN CN2006101435256A patent/CN1963670B/en not_active Expired - Fee Related
- 2006-11-10 KR KR1020060110841A patent/KR100835161B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN1963670B (en) | 2010-08-18 |
JP2007134487A (en) | 2007-05-31 |
KR20070050385A (en) | 2007-05-15 |
CN1963670A (en) | 2007-05-16 |
TWI310325B (en) | 2009-06-01 |
KR100835161B1 (en) | 2008-06-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |