TW200644053A - Tape applier - Google Patents

Tape applier

Info

Publication number
TW200644053A
TW200644053A TW095113975A TW95113975A TW200644053A TW 200644053 A TW200644053 A TW 200644053A TW 095113975 A TW095113975 A TW 095113975A TW 95113975 A TW95113975 A TW 95113975A TW 200644053 A TW200644053 A TW 200644053A
Authority
TW
Taiwan
Prior art keywords
wafer
tape
chuck table
holding
applier
Prior art date
Application number
TW095113975A
Other languages
Chinese (zh)
Other versions
TWI371058B (en
Inventor
Yukiyasu Masuda
Hitoshi Hoshino
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of TW200644053A publication Critical patent/TW200644053A/en
Application granted granted Critical
Publication of TWI371058B publication Critical patent/TWI371058B/zh

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Dicing (AREA)

Abstract

To provide a tape applier capable of applying a plurality of wafers on an adhesive tape fitted on an annular frame without generating the individual difference of operators. The tape applier applies a plurality of the wafers on the adhesive tape fitted to the annular frame. The tape applier has a housing in which a top face is opened, and a chuck table being disposed in the housing and having a plurality of wafer holding sections having holding surfaces holding the wafers. The tape applier further has a wafer-positioning frame body having a frame holder being disposed on the upper side of the chuck table and holding the annular frame on its top face while having a plurality of inserting holes, to which a plurality of the wafer holders are movably fitted, respectively, on the inside of the frame holder. The tape applier further has a pushing means having a pushing member pushing the chuck table towards the top face of the wafer-positioning frame body and an advancing-retracting means for advancing and retracting the chuck table to and from the wafer-positioning frame body.
TW095113975A 2005-05-19 2006-04-19 Tape applier TW200644053A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005146814A JP4676247B2 (en) 2005-05-19 2005-05-19 Tape applicator

Publications (2)

Publication Number Publication Date
TW200644053A true TW200644053A (en) 2006-12-16
TWI371058B TWI371058B (en) 2012-08-21

Family

ID=37543954

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095113975A TW200644053A (en) 2005-05-19 2006-04-19 Tape applier

Country Status (2)

Country Link
JP (1) JP4676247B2 (en)
TW (1) TW200644053A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100941984B1 (en) * 2007-09-28 2010-02-11 삼성전기주식회사 Packaging method of wafer
JP5558300B2 (en) * 2010-09-30 2014-07-23 株式会社ディスコ Auxiliary jig for pasting adhesive sheets

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0829861B2 (en) * 1986-08-20 1996-03-27 株式会社デイスコ Magnet type tape frame positioning device
JPH10233430A (en) * 1997-02-19 1998-09-02 Nitto Denko Corp Adhesive tape pasting device
JPH10305420A (en) * 1997-03-04 1998-11-17 Ngk Insulators Ltd Method for fabricating matrix made up of oxide single crystal and method for manufacturing functional device
JP2003045943A (en) * 2001-07-31 2003-02-14 Sony Corp Semiconductor device handling apparatus
JP2004063644A (en) * 2002-07-26 2004-02-26 Renesas Technology Corp Method and apparatus for attaching and detaching protection sheet of semiconductor wafer

Also Published As

Publication number Publication date
TWI371058B (en) 2012-08-21
JP2006324502A (en) 2006-11-30
JP4676247B2 (en) 2011-04-27

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