TW200644053A - Tape applier - Google Patents
Tape applierInfo
- Publication number
- TW200644053A TW200644053A TW095113975A TW95113975A TW200644053A TW 200644053 A TW200644053 A TW 200644053A TW 095113975 A TW095113975 A TW 095113975A TW 95113975 A TW95113975 A TW 95113975A TW 200644053 A TW200644053 A TW 200644053A
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- tape
- chuck table
- holding
- applier
- Prior art date
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Dicing (AREA)
Abstract
To provide a tape applier capable of applying a plurality of wafers on an adhesive tape fitted on an annular frame without generating the individual difference of operators. The tape applier applies a plurality of the wafers on the adhesive tape fitted to the annular frame. The tape applier has a housing in which a top face is opened, and a chuck table being disposed in the housing and having a plurality of wafer holding sections having holding surfaces holding the wafers. The tape applier further has a wafer-positioning frame body having a frame holder being disposed on the upper side of the chuck table and holding the annular frame on its top face while having a plurality of inserting holes, to which a plurality of the wafer holders are movably fitted, respectively, on the inside of the frame holder. The tape applier further has a pushing means having a pushing member pushing the chuck table towards the top face of the wafer-positioning frame body and an advancing-retracting means for advancing and retracting the chuck table to and from the wafer-positioning frame body.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005146814A JP4676247B2 (en) | 2005-05-19 | 2005-05-19 | Tape applicator |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200644053A true TW200644053A (en) | 2006-12-16 |
TWI371058B TWI371058B (en) | 2012-08-21 |
Family
ID=37543954
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095113975A TW200644053A (en) | 2005-05-19 | 2006-04-19 | Tape applier |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4676247B2 (en) |
TW (1) | TW200644053A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100941984B1 (en) * | 2007-09-28 | 2010-02-11 | 삼성전기주식회사 | Packaging method of wafer |
JP5558300B2 (en) * | 2010-09-30 | 2014-07-23 | 株式会社ディスコ | Auxiliary jig for pasting adhesive sheets |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0829861B2 (en) * | 1986-08-20 | 1996-03-27 | 株式会社デイスコ | Magnet type tape frame positioning device |
JPH10233430A (en) * | 1997-02-19 | 1998-09-02 | Nitto Denko Corp | Adhesive tape pasting device |
JPH10305420A (en) * | 1997-03-04 | 1998-11-17 | Ngk Insulators Ltd | Method for fabricating matrix made up of oxide single crystal and method for manufacturing functional device |
JP2003045943A (en) * | 2001-07-31 | 2003-02-14 | Sony Corp | Semiconductor device handling apparatus |
JP2004063644A (en) * | 2002-07-26 | 2004-02-26 | Renesas Technology Corp | Method and apparatus for attaching and detaching protection sheet of semiconductor wafer |
-
2005
- 2005-05-19 JP JP2005146814A patent/JP4676247B2/en active Active
-
2006
- 2006-04-19 TW TW095113975A patent/TW200644053A/en unknown
Also Published As
Publication number | Publication date |
---|---|
TWI371058B (en) | 2012-08-21 |
JP2006324502A (en) | 2006-11-30 |
JP4676247B2 (en) | 2011-04-27 |
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