TW200607574A - Spin-cup coating apparatus - Google Patents
Spin-cup coating apparatusInfo
- Publication number
- TW200607574A TW200607574A TW094121009A TW94121009A TW200607574A TW 200607574 A TW200607574 A TW 200607574A TW 094121009 A TW094121009 A TW 094121009A TW 94121009 A TW94121009 A TW 94121009A TW 200607574 A TW200607574 A TW 200607574A
- Authority
- TW
- Taiwan
- Prior art keywords
- tips
- tray
- drain
- inner cup
- cup
- Prior art date
Links
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Materials For Photolithography (AREA)
- Nozzles (AREA)
Abstract
To provide a rotary cup type coater that can effectively prevent the scattering of an applied liquid. In the rotary cup type coater, a tray 7 is fixed on an inner cup 3 and drain introducing pipes 10 are led out from each corner of the tray 7. The tips 11 of the drain introducing pipes 10 are obliquely inclined downwardly toward the outside so that the tips 11 may be directed toward the bottoms of drain recovering passages 3a. In addition, the lower ends 11a of the tips 11 are made lower than the bottom face 3b of the inner cup 3. Consequently, the applied liquid supplied to the surface of a plate-like object W to be treated does not collide directly with the inner peripheral wall of the inner cup 3 when the liquid is discharged through the holes formed in an eave-like wall 9, flow passages in the drain introducing pipes 10, and the tips 11 of the pipes 10 with a centrifugal force by integrally rotating the inner cup 3 and tray 7.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004190202A JP4476042B2 (en) | 2004-06-28 | 2004-06-28 | Rotary cup applicator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200607574A true TW200607574A (en) | 2006-03-01 |
| TWI388377B TWI388377B (en) | 2013-03-11 |
Family
ID=35780102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094121009A TWI388377B (en) | 2004-06-28 | 2005-06-23 | Spin-cup coating apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4476042B2 (en) |
| KR (1) | KR101204065B1 (en) |
| CN (1) | CN1714944A (en) |
| TW (1) | TWI388377B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100450640C (en) * | 2006-07-17 | 2009-01-14 | 友达光电股份有限公司 | Rotary spraying system and its liquid recovering method |
| JP4750724B2 (en) * | 2007-01-25 | 2011-08-17 | 東京応化工業株式会社 | Overlay unit and bonding apparatus |
| CN114472090B (en) * | 2022-02-10 | 2023-06-02 | 华能新能源股份有限公司 | Film growth equipment and film growth method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3388628B2 (en) | 1994-03-24 | 2003-03-24 | 東京応化工業株式会社 | Rotary chemical processing equipment |
-
2004
- 2004-06-28 JP JP2004190202A patent/JP4476042B2/en not_active Expired - Lifetime
-
2005
- 2005-06-23 TW TW094121009A patent/TWI388377B/en active
- 2005-06-27 KR KR1020050055582A patent/KR101204065B1/en active IP Right Grant
- 2005-06-28 CN CNA2005100810419A patent/CN1714944A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006013243A (en) | 2006-01-12 |
| JP4476042B2 (en) | 2010-06-09 |
| CN1714944A (en) | 2006-01-04 |
| KR101204065B1 (en) | 2012-11-22 |
| KR20060048544A (en) | 2006-05-18 |
| TWI388377B (en) | 2013-03-11 |
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