TW200536117A - Package method for photo sensor and sticking tape therefor - Google Patents

Package method for photo sensor and sticking tape therefor Download PDF

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Publication number
TW200536117A
TW200536117A TW94109066A TW94109066A TW200536117A TW 200536117 A TW200536117 A TW 200536117A TW 94109066 A TW94109066 A TW 94109066A TW 94109066 A TW94109066 A TW 94109066A TW 200536117 A TW200536117 A TW 200536117A
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Taiwan
Prior art keywords
image sensor
tape
item
belt
adhesive tape
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TW94109066A
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Chinese (zh)
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TWI407560B (en
Inventor
Hiroyuki Kondou
Hitoshi Takano
Tadashi Terashima
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Nitto Denko Corp
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Priority claimed from JP2004223516A external-priority patent/JP2005341520A/en
Priority claimed from JP2004316103A external-priority patent/JP4116606B2/en
Priority claimed from JP2004329598A external-priority patent/JP4116612B2/en
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Publication of TW200536117A publication Critical patent/TW200536117A/en
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Publication of TWI407560B publication Critical patent/TWI407560B/en

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  • Solid State Image Pick-Up Elements (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Facsimile Heads (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)

Abstract

A package method for protecting a surface of a photo sensor is provided, wherein the package method has high process ability, safety and productivity. In addition, a sticking tape used when packaging the photo sensor, having high thermal expansion, suitable adhesion force, and good visible property is provided. The package method is characterized in that: during the packaging process of a photo sensor using a solid picture-taking device, the sticking tape that has a base substrate made of polyethylene naphthalate and has an adhesion layer on at least a surface is attached on the light receiving portion of the photo sensor.

Description

200536117 16451pif.doc 九、發明說明: 【發明所屬之技術領域】 的封是關於—種利用固體攝像7"件之影像感測器 【先前技術】 現在,在固體攝像元件的製造工程中 裝及製造工程中的影像感測器表面上附著灰了防2: 感測器的受光部側-咐議: 爐中而進行一次連接封裝之方入桿接反射 ,下的工程’所以要求保護薄膜及枯i層 溫 的耐熱性,朗要在齡㈣持數不具有與上述工程相當 -次剝離,並在構件封裝工程時將表面保護枯著層 著帶。 、王後再-人另行粘貼表面保護粘 帶的用,下這樣的表卿^ 的薄# ♦m胺為主成分的、具有高耐埶性 i色:表面保護用枯著帶,但因為聚醯亞胺薄膜具有t 時的全光 行光學檢查。目此難以在枯貼有帶的形態下進 酯 另外’也採用一種使用聚對苯二甲酸乙200536117 16451pif.doc IX. Description of the invention: [Technical field to which the invention belongs] is about an image sensor using 7 " pieces of solid-state imaging [prior art] Now, it is installed and manufactured in the manufacturing process of solid-state imaging elements The surface of the image sensor in the project is ash-proof. 2: The light-receiving part of the sensor-Command: The connection is made in the furnace and the package is connected to the pole to reflect. The heat resistance of the i-layer temperature does not have the same number of peelings as the above-mentioned process in the number of ages, and the surface protection layer is taped during the component packaging project. The Queen's re-use a separate surface protection tape, the following thin ## ♦ m amine as the main component, has a high resistance to I color: surface protection with a dry tape, but because of poly The fluorene imine film has all the light at t. At this time, it is difficult to enter the ester in the form of a dry tape. In addition, a method using polyethylene terephthalate is also used.

200536117 16451pif.doc (polyethyleneterephthalate,以下稱作[pet]。)這種透明 '生優良的相的方法,但在這樣的高溫條件下,因 4膜的熱收縮會使粘著帶產生剝離,需要提高粘著帶所具 有的枯著力。但是,這财法因為加紐被冷卻的枯著帶 對作為被著體的影像感測體受光器的玻璃表面之枯著力上 升’所以使料帶_著層產生破壞,在被著體表面上殘 留粘著層而形成問題。 ,而且,利用粘著帶作為表面保護用的施工方法,具有 =和剝離的工程簡便之優點,但另―方面,因钻貼枯著 π時所產生之電荷的移動,較歸帶以及被著體帶電, 且在剝離時伴有放電。最近,伴隨電子Tt件的小型化、高 木成化’開始謀求f路的精密化,另—方面出現電子元件 對放電的耐性下降,且因帶卿時的放f,鼓電子元 的破壞之現象。 【發明内容】 因此’本發明的目的是提供一種在固體攝像元件的製 =工程中,保護影像感難表面免受異物造成的污染、損 t且即餘焊麟加祕件下的齡封k程及構件安 =的内部檢查工程中,也可不進行帶的制離而作業之作 業性、安全性、生產性高的影像感測器的封裝方法。 ^且明的^是提供—種在將_帶從影像感 —進订_的工程中,具有防止伴_離而產 it其利起喊電㈣元件造成破壞之效果的表面保 200536117 16451pif.doc 另外 戌測哭的受光狀狀自^可11由在❹著帶祕在影像 “下,經·於焊缺射的加埶工 :;作r需要在焊接反射工程前後進㈣著帶的重新枯 F b4:用=:目的是提供一種在該影像感測器的封 ^可使用的、,熱收縮性高,具有適當_著力,且帶^ 體具有優良的視忍性之保護用粘著帶。 本發明者們為瞭解決前述課題而反復歸# ΐ成=藉Γ下所示的封裝方法或枯著帶的;用可 違成刖述目的,進而完成本發明。 即’本發明為—種影像感測器的 於:在利用了固體攝像元件之影像感·的:=在 的受光部上,以聚苯二甲酸乙丄 材且至V在-面上具有枯著層之枯著帶。 如利用上述方法,具有作為習知的機能即在構 :保護不受異物造成的污染和損傷之性能,且因聚 ^-曱^^旨具有的耐熱性,可不需要進行習知 在 =安裝前的帶剝離。而且,因為基材的收縮率小,所以 =ϊ防止因!丨者帶的熱收縮所造成_離,錢在較習知 行Γ:ϊ:者:::帶設計成為可能’當在構件封裝後進 率二=,錢枯著劑殘存於被著體表面上,使作業效 另外,因為帶的透過率高,所以在構件 部檢查時,可不伴隨帶關離而進行檢查。㈣,在^體 7 200536117 16451pif.d〇c 件=構件封裝後的檢查卫程中,因夕 行枯著帶的重新㈣等=可不需要在檢查後進 等工程中,因在心:;帶娜 也可確保安全性。 版4下的出貨成為可能, 貫工程成為可能,:夕卜二在钻貼有姑著帶之狀態下的— 本發明為—種;生產性的提高。 在利用了 S]體攝傻的龍方法,其特徵在於: 像感測器的受光部:,器的封裝工程中’於影 著帶。-有枯者層亚在另-面上塗敷有防靜電劑之枯 異物ΐ::二T二在構件搬運時保護玻璃面不受 種在構件安裝前“=了=不需要進行習知的那 造成的剝離,並使在較習 方止因枯者帶的熱收縮所 為可能,當在構件封果後之點著力下的帶設計成 於被著體表面上,而使作業效丁=:時而:使枯著劑殘存 :=:查時,也可二 二搬運 1==重新祕等工程。即使:檢杳 為可能,也可::安:帶之狀態下的出以 態下的-貫工裎成為可能”枯貼有枯著帶之狀 而且,因防靜電^而可η現生產性的提高。 Π1的餘,除了使生產性提高的機能 200536117 16451pif.doc 止電子抑制因帶電而造成的帶剝離時的靜電產生,防 可= 別是藉由在基材背面上進行塗敷, 的提高。#^對被著體的附著、污染,能夠謀求成品率 =明為_種上述影像感測器的封裝方法’其特徵在 於.刚逑防#電劑以4級錄鹽作為主劑。 產生影像感測器的封裝工程中,防止靜電的 發明者是要求高溫通過後的防靜電效果。本 程中“ = 般性防靜電效果以外’根據在封裝工 4級銨耐熱性和作紐等各種各樣的條件,以 的之防義防靜㈣為―轉常適合本發明的目 止電子元此,可抑制在帶_時產生靜電,並防 冤子兀件的破壞。另外,所謂[4級銨鹽正 級錢^物鹽],但在本發明中作___統1記述。 本兔明為一種上述影像感測器的 :的:r帶上’於其外跑少-部分上具= 枯著帶的㈣及剝離在影像感測器的料中形成重 實且在其後不產生附著物等。在本發明 的至少—部分上具有_用的突起部, 將造卫程結束後或在即將使用前,非常容易地 此時,在影像感測器的封裝狀態中,枯著 π對郇接之構件的封裝或焊接等不形成障礙為佳。 本發明為一種上述影像感測器的封裝方法,其特徵在 9 200536117 16451pif.doc 於.則述枯著帶以被覆影像 :部的至少-部分從影像感測器]二=㈣,且其外 的距離之形態,被賴在前述受光部上。彳中心側具有設定 為了保護影像感測器,需要一 。 的形狀,另一方 ^種全面覆蓋受光部之帶 較大的情況下,粘著帶:鄰β部超出影像感測器的端面 障礙。即,枯著封裝或焊接等形成 此,上述突起部以外之扯基册,尤祁,且愈小愈佳。因 較佳為其較多的部分從影像以至少其—部分, 定在前述有設 於:前述枯著帶與影農方法,其特徵在 突起部的末底連接的邊 σ _平行’並具有與前述 的側部,呈斜線狀、折線狀頂端與末底連接 形狀。 線狀或它們的組合的某個 如上所述,粘著帶在檢查制 用前能夠容易剝離為佳。但了寻衣作工程結束後或即將使 要設定的粘著力,另—方面疋’ ^粘著帶的固定中因為需 時有可能殘留粘著劑,所=如,著力過強則在剝離粘著帶 範圍内。特別是在設置了 ^粘f力的條件被限定在特定的 拉起突起部,屆時容易產^起,^粘著帶的剝離中,會夾 中,藉由使從突起部的頂#^ 的龜裂,所以在本發明 折線狀、曲線狀或它們的結末底之側部,呈斜線狀、 感測器將帶順利地進行剝=合的某個形狀,發現可從影像 200536117 i6451pif.doc 且 作% 1豕鈥判态的端面和受光 常形成非常短的距離,所以在影㈣㈣的=間’ ^ 要進行細立置的確認。因:在下’也需 具有與前述突起部 的枯者▼ ’可使帶的減位置明確 =接之遺π 有效的影像㈣H賴裝。 %細保正確且 本發明為-種上述影像感測器的封 於:在前述枯著帶上,不在枯貼於特徵在 部之部分上設置粘著層。 〜像感測為的党光 在本發明中,關於影像感測器的保 · 3 著:r'辦法而衛貼有:二: 所對應的部二=置=現藉,該枯著帶的受光; 時不在被著在構件縣後的帶制離 Γί==裝工程中,藉由在影像感測=受“ =工熱工程:可口 產H冋的衫像感測器的封裝方法。 生 率在κο%以下者顿制之基材在⑽C下的熱收缩 斤迟為了防止因粘著帶的熱收縮所造成的 200536117 I6451pif.doc 剝離,μ巫刊《vima干Λ)、局住,且在影像感測器的 發現,使基材的收縮率為上述的範圍較為適當,藉此衣: 在較習知的帶低之粘著力下的帶設計成為可能, 二 封裝後進行帶_離時,不會在被著體表面上 劑,使作業效率上升。 $存枯者 另外,本發明為—種上述影像感測器的封農方 特徵在於:實施1小時的18〇〇c的加熱後之前述枯著^ 熱收縮率在1.0%以下。 者T的 即,如上所述,在影像感測器的封裝中以美 率小為佳,特別是因為包含焊料在高溫職:;的^縮 ::發:ί:溫條件下的基材的收縮率為上述的範圍。 適虽太 =㈣確這-附㈣條件,射使作紐率H為 明為一種上述影像感測器的封裝方法,其特 為貝也1㈣的180〇c的加熱後之前述 的、著 為〇.1〜8.0N/19mm。 百㈣枯者力, 了防止枯著帶的剝離’需要 形止㈣著體將帶進行齡後=^ 領域下的封裝=以下的钻者力。特別是在包含高溫 _著力= 2,發現使加熱條件下_著帶 的機能,且在==為適當,藉此’可不損害枯著帶 特徵丄=ί 裝料’其 12 200536117 16451pif.doc 乃一"丨A , Μ执Μ珂装甲,當對構件 的内部進行光學檢查時,也不伴隨枯著帶的制離而進f = 查為佳。即,藉由確保粘著帶的光透過率在設定值以仃檢 可在進行光學檢查時,也保持這種機能。結果,可, 在檢查後進行枯著帶的重新枯貼等工程, = 運等工程中也可在枯貼有枯著帶的狀態下進後, 影像感測器的封裝方法。 用於上述某一個 面不==二τ種可保護影像感測器表 ;=,程及“二:=:熱: 了不進仃帶的剝離而作業 =查工鞋中,也 供—種以聚笨n㈣本發明中,藉由提 _ _生、視認性之表面 ^有優良的熱收縮性、 同時,能夠在帶剝離時抑:的4;//可滿足這一要求。 破壞。 电的產生,防止電子元件的 像上面所說明的, 件的構件等的安裝工本發明’藉由在固體攝像元 之狀態下的一貫工程為7二工程等中,使粘貼有粘著帶 器表面,且作業性、安全I迠,可提供—種保護影像感測 裝方法。而且,藉由塗:防二2性高之影像感測器的封 防呀電劑,除了使生產性提高的 200536117 16451pif.doc :=電:可:!:因帶電所造成之帶剝離時的靜電的產 f則器的封褒時可使用的,熱收縮性高並具有 ί實體具有優良的視認性之保軸著帶:、" 下面對本發明的實施形態進行說明。 所机㈣基本上由帶基材及錢材的一面上 薄膜至;:= 著帶的基材上㈣脫模 膜’通過枯著層枯貼在刪的】材°工脱===1 謀求對影像感測器表面的減。 Hi枯者層亚 以外而塗敷防靜電劑’除了使生產性提高的機能 U可抑制因帶電所造成之帶剝離時的靜電的產生, 防止電子元件的破壞。 ,於本發明所使用的防靜電劑,只要具有能夠抑制帶 2日守的靜電的產生之效果即可,並無特別的限定。例如 可為以4級㈣作為主劑,和將無機鹽和金屬化合物(例 7化亞料)水等分散劑或任意的有機溶劑等在基 如士進仃塗敷之方法等。特別是以4級銨鹽作為主劑的防 諍電劑,因對溶劑的溶解性、溶劑塗敷性等操作的簡便性, 在本發明中進行使用較佳。 —而且,在本發明的用途上,考慮到添加成分向作為被 ^體之固體攝像元件的轉印、污染,在基材的f面側施加 处理為佳。而且,在設置於粘著層的表面上之情況下,有 14 200536117 16451pif.doc 可此對枯著層和防靜電劑之相互的特性帶來影響,並不佳。 趣著帶外周的至少—部分上具有_用的突 、、 具體地說,在如圖1所例示的,於影像; 3 ^ 3 ; 能部分形,突起部3a超出影像感測器i的端面^之形 广、,"亥$怨下,影像感測器1被安裝在印刷電路板上, L過问/皿的焊接反射並進行封裝處理,然後對影像感測器 1的動作或封料刷電路板的機能進行檢查。在^工 :面!:先二2的幅面大’且較影像感測器1的幅面小為 ^ 二二= 哭1 ^ Ϊ /者贡的王邛外周部,位於影像感測 二:2=:::::佳。_著帶3可全面 可對周邊構件的覆蓋。但是 而且有不卩㈣路板周圍沒有其他的封裝部分 於影:1;ί?Γ 間時’使其外周部的-部分位 的端面和受光部2的中間就足夠了,未必 而且’使粘著帶3的形狀如 一 那樣在大致正方形的!邊上―古/斤不。可為如圖2(a) 的遺上4有突起部3a的情況,和如 15 200536117 16451pif.doc ::1:樣的大致長方形’或與影像感測器1的形狀對 是自的形狀雖'然並未特別地限^,但採用不管 都可挾持的形狀為佳。而且,以加工容易的 也:ίΪη例如’可為圖2 (a) *⑴那樣的方形,但 例不那樣的挪和梯形的組合等频// ^⑷所 减測=2,的附近具有與圖1所示那樣的影像 ,面1a,更正確地說是與構成端面la的邊部 b +仃地,與突起部3a的末錢n 保明確的祕㈣,纟綱_ 3=^ :=1不為圖1所例示的那種; 邊部平行之她形狀的邊部為佳。〃有減成.而面的 3c,^卜钭m\3a上’從其頂端3d連接末底的側部 :有斜線狀、折線狀、曲線狀或它們的έ且合 狀為佳。在將枯著帶3進行剝離時,”二 心線有最強的力進行動作,所以圖^^ ° ^、 光部2上_著;= 其相伴之t受 離時的力的分散之形狀較為適當。^種能夠謀求剝 的分勒趟g可、/7 士 / A 、豆的形狀只要具有力 2 (a h 特別地進行限定,例如可為圖 (a)〜(d)所示的那種側部3 部3c的形狀為斜線狀(圖2(c))、^大。即,藉由使側 ^折線狀(圖2(d))、 200536117 16451pif.doc 可,狀^ 2 (Ο及(b))或它們的組合(未圖示), :在,著帶3的剝離時將側部3c順利地進行剝離。因此, 突起部%全體以大致均等的力進行剝離,然後可 首I设又光邛2的帶的主要部分,沿剝離方向X的面内垂 斜^向以大致均等的力進行剝離。另外,斜線和折線的傾 1 1入曲線的曲率等,可利用圖像感測ϋ 1的形狀、枯著 ▼王體和突起部3a的形狀等而任意地進行設定。 部八而且<粘著f 3在粘貼於影像感測器1的受光部2之 離二^设置枯著層為佳。這是為了在構件封裝後的帶剝 1使㈣劑殘存於被著體表面上,使作業效率上升。 Λ材^體地巩,可採用如圖3所例示的,當將粘著層5在 二為^形^時,為了在钻著帶中央的米占貼於影像感測器 形二ΐ之^分上’形成寬a的未塗敷部分,而在兩端上 著層5的::製作枯著帶之方法等。但是,枯 的部八μ γ /、要可基本上在影像感測器的受光部所粘貼 靡用L ^成未塗敷部分即可’並不特別地進行限定,可 著層5之方⑻挖部之方法(e)在基材4的四角形成枯 之方半室々法(d)形成一定幅面的傾斜狀的未塗敷部分 的部分i種各樣的方法。圖2的斜線絲示塗敷枯著劑 面益Ϊ:利用以上的方法’使粘著層5以對影像感測器表 影像感:jrt被著面積之形態而形成’可充分確保在 " _貼強度,並防止對受光部的影響。 200536117 16451pif.doc 才ΰ貼田以j吋具有180°C的、、w危7ic μ f g, - ^ ^ ί : 佳。 句王要成分的基材構成為 枯著帶的厚度為了防止折斷和裂纹 為佳,另外考慮到恰當__ 以上 而且,關於枯著劑,只要為具有耐熱性的即二佳: 特別地進行限定。具體地說,可 、卩可,亚不 著劑等。特別是矽系枯著劑不只耐孰性優良著劑或石夕系枯 的調整也容易,所以藉由在最終完成封裝粘著力 枯著力任意地崎婦,峻齡性優良=轉時的 成為可能,可以說是—種特別適合_著材料者帶的設計 例如,作為丙烯系枯著劑,為由。 丙烯酸S旨的單體的共聚合所得狀丙稀系共=基(甲基) 枯著劑。作為這裏所說的料(甲基)二體構成的 可為(甲基)丙烯酸乙,、(甲基)丙浠酸甲;:的例子, 丙烯酸丁醋、(甲基)丙烯酸異戊醋、卜 γ (甲基) 己醋、η-(曱基)丙稀酸甲基己基醋、(^兩烯酸 辛酉旨、(甲基)丙稀酸異壬_、(甲基)_^,酸異 基)丙稀酸十二垸醋等。而且,這些丙烯:〜、(甲 適當的交聯劑。例如,作為_個例子,可為異考劑可含有 劑、環氧交聯劑、氮雜環丙烷系化合物、螯合;,交聯 另外’依據需要,其他的添加劑可添加例、^剡等。 防老化劑、顏料、染料、矽烷耦合劑等各 、充劑、 秦加劑。丙烯 200536117 16451pif.doc =著劑相比較而言耐熱性也高,技適合本發明触著 枯著帶_著層的厚度在_卩上 ί^^3〇μ:Γ …μ/…、土材表面稍终產生層差即有效,但在y ί分=二兄下’有可能因表爾^ 中的薄膜==並使_性也下降。而且,有可能因加熱 運送時對帶的墨力及縣時的加熱所 = 變形,有可能使枯著舰在受光部分上。 而且考慮到透過性,為薄層較佳。 裝上:強:===為枯著帶要求設定之封 態,而且還ιΓίΓ 測器進行調和的枯貼狀 發現,上因此,本發明的點著帶經過檢測 之枯著帶,_具有這_著層的厚度 感測器的封裝方法。λ/±、女全性、生產性高的影像 軌30本的粘著帶之基材的熱收縮率,當在150Τ下加 革^依據取2318而進行測定的值作為基準伯 之枯著帶的t:::好t 了1小時的18〇°C的加熱後 、、收、%辜取好在㈣以下,更佳為0.5%以下, 19 200536117 16451pif.doc ,佳為G.3%以下。$是因為關於高溫條件下的基材的 率,藉由明確附加的條件,還可提高作業效率。這裏所說 賴收縮率,是以在枯著帶形態下枯貼在BA板上並在 180 C的’1度條件下放置丨小時後的值作為基準。具 熱收縮率的測定,是將料帶切割為2Gmm的角,枯貼在 也义板上並在⑽c的溫度條件下進行力口熱,且將該加 …别後之帶的尺寸,利用投影機(ΜΙτυτ〇γ200536117 16451pif.doc (polyethyleneterephthalate, hereinafter referred to as [pet].) This method of transparent and excellent phase, but under such high temperature conditions, the thermal shrinkage of the 4 film will cause the adhesive tape to peel off, which needs to be improved. The dryness of the adhesive tape. However, in this method, because the dead force of the cooled slack band on the glass surface of the image receiver as the object is increased, the tape_implantation layer is destroyed, and the surface of the object is damaged. Residual adhesion layers cause problems. Moreover, the use of an adhesive tape as a surface protection construction method has the advantages of simple and easy engineering. However, on the other hand, due to the movement of the electric charge generated when the drill sticks with π, it is easier to return to the tape and the surface. The body is charged and is accompanied by a discharge when peeled. Recently, along with the miniaturization of electronic Tt parts, Takagi's has begun to refine the f-way, and on the other hand, the resistance of electronic components to discharge has decreased, and due to the release of f, the destruction of drum electrons has occurred. . [Summary of the Invention] Therefore, the object of the present invention is to provide an age seal k that protects the image-sensitive surface from contamination and damage caused by foreign objects in the manufacturing of solid-state imaging elements. In the internal inspection process of process and component safety, an image sensor packaging method with high workability, safety, and productivity can be performed without removing the tape. ^ And the clear ^ is to provide-a kind of surface protection in the project to bring _ from the sense of the image-to order _, with the effect of preventing the __ from leaving and making it profit from the damage caused by electrical elements 200536117 16451pif.doc In addition, the light-like appearance of the crying light can be determined by the processing of the welding belt under the image ", due to the lack of welding :; the operation requires the welding belt to be re-dried before and after the welding reflection project. F b4: Use =: The purpose is to provide a protective adhesive tape that can be used in the seal of the image sensor, has high heat shrinkability, has appropriate strength, and has excellent visual tolerance. In order to solve the aforementioned problems, the present inventors repeatedly return to # ΐ 成 = borrowing the packaging method shown below Γ or the slack band; using this may defeat the stated purpose and complete the present invention. That is, the present invention is- This type of image sensor is based on the use of a solid-state image sensor. The light-receiving part is made of polyethylene terephthalate and has a dead layer on the-side of V. If the above-mentioned method is used, it has a known function, namely in-situ construction: protection from pollution and damage caused by foreign objects. And because of the heat resistance of the poly ^-曱 ^^ purpose, it is not necessary to perform the conventional stripping before installation. Also, because the shrinkage of the substrate is small, it is necessary to prevent the thermal contraction of the tape! Causes _ separation, money is more familiar. Γ: ϊ: 者 ::: Belt design becomes possible. 'When the component is packaged, the advance rate is 2 =, the money bleaching agent remains on the surface of the substrate, which makes the work more efficient. The transmission rate is high, so when inspecting the component part, it can be inspected without being accompanied by belt separation. ㈣, in the inspection process after the component 7 200536117 16451pif.d〇c = the component is packaged, there is a dead band Re-evaluation, etc. = You don't need to check in the post-inspection and other projects, because in mind :; with Na also can ensure safety. Shipment under the version 4 is possible, continuous engineering is possible ,: Xi Bu Er in the diamond stickers In the state of the belt, the present invention is a kind of; the productivity is improved. In the dragon method using S] body photography, it is characterized by: The light receiving part of the sensor: In the packaging process of the device, '于 影'着 带.-With a dry layer on the other-a dry foreign body coated with an antistatic agent ΐ :: 二 T 二 在 建Protect the glass surface from being peeled off before the component is installed when the parts are being transported. == It is not necessary to perform the conventional peeling, and it is possible to stop the heat shrinkage due to the dry belt in the conventional method. When the component is sealed, The belt under the focus is designed to be on the surface of the subject, so that the work is effective: sometimes: the residue of the desiccant is left: =: when checking, you can also carry 1 == re-secret and other projects. Even if: detection is possible, it is also possible to :: Ann: It is possible to use the state-of-the-art work in the state of "belt". "Without a strip of dry tape, and it is antistatic, it can be productive." In addition to Π1, in addition to the function of improving productivity 200536117 16451pif.doc electron suppression to suppress the generation of static electricity at the time of peeling of the tape due to charging, to prevent the = = not only by coating on the back of the substrate, Improve. # ^ Attachment and contamination of adherends, yield can be achieved = it is clear that the above-mentioned image sensor packaging method 'characterized in that. 逑 逑 防 # 电 剂 uses 4 levels of salt as the main agent. In the packaging process that generates image sensors, the inventor of preventing static electricity requires the anti-static effect after high-temperature passage. In this process, "= the general anti-static effect is not in accordance with the level 4 ammonium heat resistance and workmanship of the packager." A variety of conditions, such as anti-seismic and anti-static, are often suitable for the purpose of the present invention. This can suppress the generation of static electricity when the belt is in charge, and prevent the damage of unjust elements. In addition, the so-called [fourth-grade ammonium salt is a common salt], but in the present invention, it will be described as ___ System 1. The rabbit is a kind of the above-mentioned image sensor: of the "r belt", which runs less on its outside-partly with the cricket and peeling of the band, and the peeling is formed in the material of the image sensor. No attachments, etc. are generated. The at least part of the present invention is provided with a protruding portion, which is very easy to be connected to the image sensor in the packaged state after the end of the sanitation process or immediately before use. It is preferable that no obstacles are formed in the packaging or welding of the components. The present invention is a packaging method for the above-mentioned image sensor, which is characterized in 9 200536117 16451pif.doc. The dry band is used to cover the image: at least-part of the part from the image sensor] two = ㈣, and outside The form of the distance depends on the aforementioned light receiving unit.具有 Setting on the center side To protect the image sensor, one is required. The shape of the other side ^ a kind of belt that completely covers the light-receiving part. In the case of large, adhesive tape: the adjacent β part exceeds the end face of the image sensor. That is, dry packaging, soldering, or the like is used to form this. The base books other than the above-mentioned protrusions are particularly small, and the smaller the better. Because it is preferable that there are more parts from the image, at least one part of it is set in the aforementioned. It is provided in: The aforementioned dead band and the shadow farming method are characterized in that the side σ_parallel 'connected by the end of the protrusion and has It is connected to the aforementioned side portion in a shape of a diagonal line, a polygonal line and a bottom. As described above, it is preferable that the adhesive tape can be easily peeled off before inspection. However, the adhesive force to be set is about to be set after the garment-finding project is finished, and the other aspect 疋 '^ It may take time to fix the adhesive tape because it may take time to fix the adhesive. Therefore, if the adhesive force is too strong, the adhesive will be peeled off. Within the band. In particular, the conditions under which the adhesive force is set are limited to a specific raised protrusion, which is easy to produce at that time. During the peeling of the adhesive tape, it will be pinched. It is cracked, so the sides of the polygonal line, the curved line, or the end of the end of the present invention are oblique, and the sensor will smoothly peel off a certain shape. It was found that the image 200536117 i6451pif.doc and As a result, the end face and the receiving light often form a very short distance, so it is necessary to confirm the fine standing position in the shadow. Because: In the bottom, it is also necessary to have the same as the above-mentioned protrusions ▼ ′ to make the position of the subtraction of the belt clear = the next effective image ㈣H is installed. The accuracy is assured and the present invention is a seal of the above-mentioned image sensor: on the aforementioned dead band, an adhesive layer is not provided on a part attached to the feature portion. ~ Dang Guang as the image sensor In the present invention, the security of the image sensor is as follows: r 'method and Wei posted: two: Corresponding department two = set = current borrowed, the withered belt When receiving light, it is not in the belt installation behind the component county. In the installation process, by the image sensing = = "Industrial thermal engineering: a packaging method for deliciously produced shirt sensors. Health In order to prevent the 200536117 I6451pif.doc from peeling due to the thermal shrinkage of the adhesive tape, the substrate of the system made at a rate of κο% or lower is suffocated, and It was found in the image sensor that the shrinkage ratio of the base material is more appropriate in the above range, so that the clothing can be designed with a lower adhesive force than the conventional tape. It will not apply the agent on the surface of the substrate, which will increase the work efficiency. $ Stored person In addition, the present invention is a kind of the above-mentioned image sensor, which is characterized by: after heating for 1 hour at 180 ° C. The aforementioned shrinkage ^ thermal shrinkage rate is less than 1.0%. In other words, as described above, in the package of the image sensor, the beauty rate is It is better, especially because the shrinkage ratio of the substrate containing solder under high temperature conditions :; 发 :: 发: ί: The shrinkage rate of the substrate under the conditions of temperature is in the above range. The working ratio H is a package method for the above-mentioned image sensor, which is specially heated by 180 ° c of Beyer 1㈣, and the aforementioned writing is 0.1 ~ 8.0N / 19mm. In order to prevent the peeling of the dead band, it is necessary to shape the anchor body to carry out the tape after the age = ^ The encapsulation under the field = the following drill force. Especially in the case of including high temperature _ force = 2 and found that under heating conditions _ The function of the belt is appropriate, so that 'the characteristics of the dry belt can not be damaged' = 12's. 2005 2005 117 16451pif.doc is one of the "A, Μ 执 ΜΜ armor, when the inside of the component When performing optical inspection, it is better not to perform f = inspection with the detachment of the dry tape. That is, by ensuring that the light transmittance of the adhesive tape is at a set value and inspecting, it can be maintained during optical inspection. As a result, yes, it is possible to carry out works such as reattaching the dead band after the inspection, and it is also possible to leave the dead band in the works such as transportation. After entering the state, the packaging method of the image sensor is used for one of the above surfaces == two τ kinds of image sensor table that can be protected; =, Cheng and "two: =: heat: not into the belt The work of peeling = check the shoes, but also for a kind of-in the present invention, by improving the surface of the visible and visible ^ has excellent heat shrinkage, at the same time, can be suppressed when the belt is peeled: 4; // Can meet this requirement. damage. The generation of electricity prevents the installation of electronic components such as those described above, the components of the components, etc. The present invention 'uses a consistent process in the state of the solid-state imaging unit to be the 72nd process, etc., so that the surface of the adhesive tape is attached , And workability, safety I 迠, can provide a way to protect the image sensor installation. In addition, by coating the anti-electric agent of the image sensor with high anti-secondary properties, in addition to 200536117 16451pif.doc which improves productivity: = electricity: possible:!: It can be used during the sealing of the static electricity generating device, and it has a high heat shrinkability and has a good physical visibility. The following describes the embodiment of the present invention. The machine is basically from the film on one side of the base material and the money material :: = on the base material of the belt, the release film is 'applied to the deleted material through the dry layer' and the material is removed === 1 Subtraction to the surface of the image sensor. In addition to the function of applying an antistatic agent other than the dry layer, in addition to the function of improving productivity, U can suppress the generation of static electricity when the tape is peeled off due to charging, and prevent the destruction of electronic components. The antistatic agent used in the present invention is not particularly limited as long as it has the effect of suppressing the generation of static electricity with a 2 day guard. For example, it is possible to use a grade 4 hafnium as a main agent, and apply a dispersant such as an inorganic salt and a metal compound (e.g., a raw material of water) or any organic solvent to a base material. In particular, the anti-electropyretic agent using a fourth-order ammonium salt as a main agent is preferably used in the present invention because of the simplicity of operations such as solubility in solvents and solvent coating properties. -In addition, in the application of the present invention, it is preferable to apply a treatment to the f-plane side of the base material in consideration of the transfer and contamination of the added component to the solid-state imaging element as the substrate. In addition, when it is provided on the surface of the adhesive layer, 14 200536117 16451pif.doc may affect the mutual characteristics of the dry layer and the antistatic agent, which is not good. Interestingly, at least-part of the outer periphery of the belt has a protrusion, specifically, in the image as illustrated in Fig. 1; 3 ^ 3; can be partially shaped, the protrusion 3a exceeds the end face of the image sensor i As a result, the image sensor 1 is mounted on a printed circuit board, and the soldering and reflection of the L / I and the packaging process are performed, and then the action or sealing of the image sensor 1 is performed. Check the function of the brush circuit board. In ^ work: face !: The size of the first 2 is larger 'and smaller than the size of the image sensor 1 ^ 22 = Cry 1 ^ Ϊ / Zong Gong's outer periphery, located at the image sensor 2: 2 = :::::good. _Landing belt 3 can fully cover surrounding components. However, there are no other encapsulation parts around the board: 1; ί? Γ time is enough to make the -partial end face of the outer peripheral part and the middle of the light receiving part 2 is not enough, and it may not The shape of the band 3 is almost square like one! On the side-ancient / jin not. It can be the case where there are protrusions 3a on the left as shown in FIG. 2 (a), and the shape is roughly rectangular, such as 15 200536117 16451pif.doc :: 1: or the shape that matches the shape of the image sensor 1 although 'Of course, it is not particularly limited, but it is preferable to adopt a shape that can be held regardless of the shape. Moreover, it is easy to process: For example, 'Ϊ' can be a square as shown in Fig. 2 (a) * ,, but the combination of a trapezoid and a trapezoid is not the same frequency. In the image shown in FIG. 1, the surface 1a is more accurately related to the edge portion b + which constitutes the end surface la, and the end n of the protrusion portion 3a. A clear secret is provided, 纟 纟 3 = ^: = 1 is not the kind illustrated in FIG. 1; the side of her shape whose side is parallel is preferable. There is a reduction. On the surface 3c, ^ 钭 \ m \ 3a ’is connected to the side of the bottom from the top 3d: diagonal, polygonal, curved, or a combination of these is preferred. When the dead band 3 is peeled off, "the two-hearted line has the strongest force to operate, so the figure ^^ ° ^, the light part 2 _ 着; = the shape of its accompanying t when the force is dispersed Appropriate. ^ Kinds of decals that can be peeled off, / 7 士 / A, and the shape of the bean as long as it has a force 2 (ah is specifically limited, for example, it can be the type shown in Figures (a) to (d) The shape of the side portion 3c is oblique (Fig. 2 (c)) and large. That is, by making the side polygonal line (Fig. 2 (d)), 200536117 16451pif.doc, the shape ^ 2 (0 and (B)) or a combination thereof (not shown): the side portion 3c is peeled off smoothly when the tape 3 is peeled off. Therefore, the entire protruding portion% is peeled off with a substantially uniform force, and then the first It is assumed that the main part of the tape of the optical fiber 2 is peeled off with a substantially uniform force perpendicularly to the in-plane direction of the peeling direction X. In addition, the inclination of the diagonal line and the polygonal line into the curvature of the curve, etc. You can arbitrarily set the shape of the sensor 1, the shape of the descent ▼ royal body and the shape of the protrusion 3a, etc. The part 8 < adhesive f 3 is attached to the light receiving part 2 of the image sensor 1 It is better to set a dead layer. This is to peel off the tape 1 after the component is packaged so that the tincture remains on the surface of the adhered body, so that the work efficiency is improved. When the adhesive layer 5 is in the shape of ^, in order to form an uncoated part of the width a in the middle of the drilling belt and attached to the image sensor-shaped two points, the Layers 5 are placed on both ends :: method for making a dead band, etc. However, the dead part is 8 μ γ /, so that the light receiving part of the image sensor can be basically pasted to form an uncoated part. That is, the method is not particularly limited, and the method of landing the square digging part of the layer 5 (e) forming a dry square half-chamber method at the four corners of the substrate 4 (d) forming a sloped uncoated of a certain width There are a variety of methods for applying the part. The diagonal line in Fig. 2 shows that the coating agent is applied. It is beneficial to use the above method to make the adhesive layer 5 to image the surface of the image sensor: the area covered by jrt The formation of the shape can fully ensure the intensity of the ”sticker” and prevent the influence on the light receiving part. 200536117 16451pif.doc Only the paste field has a temperature of 180 ° C, and the danger of w 7ic μ fg,-^ ^ ί: 佳. The base material of the main component of the sentence is the thickness of the dead band. In order to prevent breakage and cracking, it is better to take into consideration the above. As for the deadening agent, The second best of heat resistance: It is limited in particular. Specifically, can be, can be, can be used, etc. In particular, the silicon-based desiccant is not only excellent in calyx, but also easy to adjust. Therefore, by arbitrarily scorching the adhesive force and the slackness at the final completion of the package, excellent agility = the possibility of turning, it can be said that it is a kind of design that is particularly suitable for the material holder. For example, as a propylene-based desiccant, For reasons. Acrylic co-based (methyl) scumming agent obtained by copolymerization of acrylic acid monomers. Examples of the (meth) dimeric composition mentioned herein may be ethyl (meth) acrylate, methyl (meth) propionate; examples of butyl vinegar, isoamyl methacrylate, Γ (methyl) hexanoic acid, η- (fluorenyl) acrylic acid methylhexyl vinegar, (^ dienoic acid octyl acetate, (methyl) acrylic acid isononyl_, (methyl) _ ^, acid Isopropyl) dodecyl vinegar, etc. In addition, these propylene: ~, (a suitable cross-linking agent. For example, as an example, it may be a test agent may contain an agent, an epoxy cross-linking agent, an aziridine-based compound, chelation; In addition, according to need, other additives can be added, such as examples, ^ 剡, etc. Anti-aging agents, pigments, dyes, silane coupling agents, etc., fillers, Qin admixtures. Propylene 200536117 16451pif.doc = heat-resistant compared to the agent The performance is also high, and the technology is suitable for the present invention. The thickness of the landing layer is on the ί ί ^^ 3〇μ: Γ… μ /…, it is effective to produce a layer difference on the surface of the earth material, but it is effective at y ί Points = 2nd Brother's may be caused by the thin film in Table ^ = and also reduce the _. Also, it may be deformed due to the ink power on the belt during heating and the heating during the prefecture = may cause deformation. The landing is on the light-receiving part. In addition, considering the permeability, it is better to be a thin layer. Mounting: Strong: === The sealed state required for the dry band, and also the dry patch-like shape that the detector is reconciled, Therefore, the dead belt of the present invention has been tested for the dead belt, and the seal of the thickness sensor having the landing layer Method. The thermal shrinkage of the base material of λ / ±, female-wide, high-productivity image track of 30 adhesive tapes, when added at 150T ^ The value measured according to 2318 is used as the benchmark After t ::: ok, after heating at 18 ° C for 1 hour, the yield, yield, and yield are below ㈣, more preferably below 0.5%, 19 200536117 16451pif.doc, preferably G.3 % Is less than $. The reason is that the rate of the substrate under high temperature conditions can improve the work efficiency by clarifying the additional conditions. Here, the shrinkage rate refers to the dry sticking on the BA board in the form of a dry belt. And the value after standing for 1 hour under the condition of 180 C is used as a reference. For the measurement of thermal shrinkage, the tape is cut to an angle of 2 Gmm, and it is affixed to the embossing board and under the temperature condition of ⑽c Perform hot mouth heating, and add the size of the other bands using a projector (ΜΙτυτ〇γ

腹)JECT0R PJ-咖_)對_方向方向中的£ 7-個方向進行測定。另夕卜,所說的BA板,是指依據JIS 4加工,以BA5號進行表面精加工之SUS304板 (曰本金屬(株)製BA5號精加工SUS304)。 而且’在本發明中,實施了 i小時180〇c的加熱 枯著帶的枯著力,在0」〜8.〇N/19mm為佳,而且,在〇2N 〜5.0N/19mm為更佳’在0.3N〜4 〇N/19mm為特佳。這曰 因為超過8.0N/19mm的枯著力,使從被著體進行帶剝離= 工程上困難’且有可能在被著體表面上殘存枯著層,而因 低於0.1N/I9mm之加熱中的薄膜的熱收縮,有可^產生點 著帶的剝離。這裏所說的粘著力,是以依據JIs z〇237 進行測定的值作為基準。 本發明之粘著帶的光透過率,在5〇%以上為佳,更俨 在70%以上。這是為了在對構件封閉後的内部進^光學^ 查4,也可藉由確保枯著帶的光透過率在設定值以上, 不伴隨钻著帶的剝離並進行檢查。這裏所說的光透過率而 表示在可視光區域的光透過性,而作為波長區域意味著在 20 200536117 16451pif.doc 400 "υϋηπι的透過率。在本發明中 -個透過率都在50%以±域下的任 過率的情況下’通·著帶對具有】:::低於—之透 程等進行確認變得困難 “件的接線工 下的測定方法所生成的值作^準兄的先透過率是以利用以 <光透過率的測定方法> 裝範置圍分;^鱗(島津製作所製 '、靶圍.波長區40〇nm〜700nm的範圍 ⑶樣品尺寸:對測定震置切割為適當的大小 (4)钻著㈣敎糾著咖_測定 的測定,是從塗敷或存在有枯著劑的-側進行測ΐ 而且’當在枯著帶上使用脫模薄膜時,脫模薄膜也可 某—種脫模薄膜。具體地說,可使用在脫 ί 材人枯者層的接合面上,形成脫模塗層例如石夕 二之脱核㈣:作為脫模薄膜的基材,可為例如玻璃紙這 紙材和水乙烯三聚内稀、聚酯等所構成的樹脂薄膜。 而且,本枯著帶也可依據其用途,例如形成物件之固 體攝像it件的尺寸而進行加玉。關於加工方法,只要為保 持均勻的形狀’且在加卫斷面部不殘存钻著劑之方法即 可’亚不作特別地限定,但考慮到生產性,以沖裁加工為 佳。 〔實施例〕 、下面’對具體表示本發明的構成和效果之實施例等進 行說明。而且’實施例等的評價方法像下面所說明的那樣 21 200536117 16451pif.doc 進行。另外,當然並不限定於本發明所提到的實施例平 價方法。 <評價方法> 對利用上述條件所製作的帶,關於下述的專案進^亍平 價。 (1) 加熱後的帶的形狀 在玻璃面上粘貼上述實施例·比較例的樣品後,於 im:的溫度條件τ放置η、時後之帶的形狀。 (2) 假定封裝形成後的内部光學檢查之視認性 在丙烯板上形成高度5mm的盒,並在其内部置入進 ίΐ接線工程的半導體元件。而且,在丙烯板上部粘貼粘 著帶,並穿過帶對丙烯板内部所存在之半導體元件的接線 的有無進行確認。效果的確認利用5人的目視而進行。另 外,關於評價基準,由以下3個階段進行區別。 〇··能夠明確地對接線工程的有無進行確認的。 △ ··可勉勉強強地對接線工程進行確認的。 _ X:不能對接線工程進行確認的。 (3) 放電量 在使π的粘著面粘貼在玻璃面上後,對放置3〇分後 將枯著帶進行剝離時的放電量進行測定。放電量的測定像 下面這樣進行。 (3-1)進行設置,以對在高速剝離測試機的頂端剝離面 的上部使同軸電·接之制離面,在同速度下進行動作。 (3-2)然後藉由使同轴電纟覽連接在示波器上,而對剝離 22 2005361Π 時所產生的電磁波的值進行測定。 (3 — 3)將各粘著片切割為2〇mm,粘貼在玻璃面上,並 在前述裝置上進行設置。 (3 —4)然後’將以剝離角度18〇0、剝離速度5mm/min 進行測定時所觀測之電磁波的值作為放電值。 0 — 5)將該所測定的、電磁波峰值的最大值定義為放電 值。而且,放電的好壞的判斷,以放電量1〇〇mV作為基準, 在lOOmV以下為良,超過1〇〇mV的情況為不良。 _ (4)剝離性 在玻璃面上粘貼下述實施例·比較例的樣品後,於 18〇°C的溫度條件下放置丨小時後之剝離的容易性。 <實施例1> 在厚25μηι的聚苯二曱酸乙酯(基材的熱收縮率 〇·4% · 150° —30C分)所構成的基材上,將丙烯系粘著劑 的溶液進行塗敷並乾燥,製作形成了厚ΙΟμιη的粘著層之 枯著f。當對該/钻著帶實施1小時左右的丨的加熱後, φ 依據JIS Z0237測定粘著力時,為2.0N/19mm,熱收縮率 為0.15%,粘著帶在400〜700nm下的光透過率都在5〇% 以上(平均88.0%)。 <實施例2 > 在厚25μιη的聚苯二曱酸乙酯所構成的基材上,將4 級銨鹽(COLCOAT (株)製:NR〜121X)在粘著帶芙 的背面倒進行塗敷。然後,在其相反面上將丙缔系枯^ 的溶液進行塗敷並乾燥’製作形成了厚ΙΟμιη的粘著劑層 23 2005觀 之枯著帶。當對該枯著帶實施J小時 画測定枯著力時,為2._ = =25叫的聚笨二曱酸乙g旨所構成的基材上 ,糸枯者劑的溶液交互呈帶狀塗敷寬⑴酿的塗和 l〇mm的未塗敷部並進行乾燥,而 洋見(Abdomen) JECTOR PJ-coffee) Measurements were made in the 7-direction of the 7-direction. In addition, the BA plate refers to a SUS304 plate processed in accordance with JIS 4 and having a surface finish No. BA5 (say, No. 5 finish SUS304 manufactured by Ben Metal Co., Ltd.). Furthermore, in the present invention, the slackness of the heating slack belt which has been heated at 180 ° C for 1 hour is preferably from 0 "to 8.0N / 19mm, and more preferably from 〇2N to 5.0N / 19mm." It is particularly preferable that it is 0.3N ~ 4 0N / 19mm. This means that stripping from the adherend due to a dry force exceeding 8.0N / 19mm = engineering difficulty 'and it is possible to leave a dead layer on the surface of the adherend, while heating under 0.1N / I9mm The thermal shrinkage of the film can cause peeling of the ignition tape. Here, the adhesive force is based on a value measured in accordance with JIs z〇237. The light transmittance of the adhesive tape of the present invention is preferably 50% or more, and more preferably 70% or more. This is to perform optical inspection 4 after the component is closed. It is also possible to check the light transmittance of the slack band above the set value without peeling the drilled band. The light transmittance here refers to the light transmittance in the visible light region, and the wavelength region means the transmittance in 20 200536117 16451pif.doc 400 " υϋηπι. In the present invention, in the case where the transmittance is 50% in the range of ± any pass rate, the “passing · belt pairing has] ::: lower than-it is difficult to confirm the penetration distance, etc." The value generated by the measurement method under test is used as the pre-transmittance of the prospective brother. The measurement method using the "light transmittance measurement method" is as follows: ^ scale (made by Shimadzu Corporation), target range. The range is from 40nm to 700nm. (3) Sample size: Cut to a proper size for the measurement. (4) Drilling and scoring. The measurement is measured from the side where the coating agent is applied or present. ΐ Also, when a release film is used on a dead belt, the release film may be a release film. Specifically, it can be used on the joint surface of the release layer to form a release coating. The layer is, for example, the core of a stone wicker: As the base material of the release film, a resin film composed of a paper material such as cellophane, water and ethylene trimer, polyester, etc. may be used. According to its application, for example, the size of the solid-state imaging device that forms the object is added, and the processing method is as long as "Uniform shape" and a method of not leaving a drilling agent on the face of the Kawei section can be used. "Yabu" is not particularly limited, but in view of productivity, blanking is preferred. [Example] The following is a detailed description of this Examples and the like of the constitution and effects of the invention will be described. In addition, the methods of evaluating the examples and the like will be described below 21 200536117 16451 pif.doc. It is needless to say that the method is not limited to the example parity method of the present invention. ≪ Evaluation method > The following items are par for the tapes produced under the above conditions. (1) After heating the shape of the tape, the samples of the above examples and comparative examples were pasted on the glass surface. Place the shape of η and the time band at the temperature condition τ at im: (2) Assuming the visibility of the internal optical inspection after the package is formed, a box with a height of 5 mm is formed on the acrylic board, and the wiring is placed inside it. Engineering semiconductor components. In addition, an adhesive tape is affixed to the upper part of the acrylic board, and the presence or absence of wiring of the semiconductor elements existing inside the acrylic board is checked through the tape. It was performed visually by five people. In addition, the evaluation criteria are distinguished in the following three stages. ○ ·· The presence or absence of wiring works can be clearly confirmed. △ ·· The wiring works can be barely confirmed _ X: It is not possible to confirm the wiring process. (3) Discharge amount After the adhesive surface of π is pasted on the glass surface, the discharge amount when the dead tape is peeled off after 30 minutes of standing is measured. The measurement of the discharge amount is performed as follows. (3-1) Setting is performed so that the coaxial electrical connection surface is made on the upper part of the top end peeling surface of the high-speed peeling tester and operates at the same speed. (3- 2) Then connect the coaxial cable to the oscilloscope to measure the value of the electromagnetic wave generated when peeling off 22 2005361Π. (3-3) Each adhesive sheet was cut to 20 mm, adhered to a glass surface, and set on the aforementioned device. (3-4) Then, the value of the electromagnetic wave observed when the measurement was performed at a peeling angle of 1800 and a peeling speed of 5 mm / min was taken as the discharge value. 0 to 5) The measured maximum value of the peak value of the electromagnetic wave is defined as the discharge value. In addition, the discharge quality is judged based on the discharge amount of 100 mV as a reference, and it is good if it is 100 mV or less, and it is bad if it exceeds 100 mV. _ (4) Peelability The ease of peeling after the samples of the following examples and comparative examples were pasted on a glass surface and left to stand for one hour at a temperature of 18 ° C. < Example 1 > A solution of a propylene-based adhesive was prepared on a substrate made of 25 μm thick poly (phenylene diacetate) (the thermal shrinkage of the substrate was 0.4% and 150 ° to 30C). Coating and drying were carried out to produce a bulky f which formed an adhesive layer having a thickness of 10 μm. After heating the / drilling tape for about 1 hour, when φ measured the adhesion according to JIS Z0237, it was 2.0N / 19mm, the thermal shrinkage was 0.15%, and the light transmission of the adhesive tape at 400 ~ 700nm The rates are all above 50% (average 88.0%). < Example 2 > On a substrate made of 25 μm thick polyphenylene diacetate, a 4th-grade ammonium salt (COLCOAT Co., Ltd .: NR to 121X) was inverted on the back surface of the adhesive tape. Coated. Then, a solution of acrylic system was applied on the opposite surface and dried 'to form a dead band with a thickness of 10 μm. When J-hour drawing was performed on the dead band to determine the dead force, the solution of the duvet agent was applied on a substrate composed of 2. g = 2.25 g of polybenzyl diacetate and the solution was applied alternately in a band shape. Apply a wide coating and a 10 mm uncoated portion and dry it.

;r:著帶。職著帶以未塗敷部 二二割成。的 180〇c ^ mi JIS Z02s!^^^0Jr^ l.〇N/19mm,熱收縮率為〇15%。 彳疋枯者力日才,為 <實施例4> 除了形成厚30μηι的粘著層以外 2相同的方法所製作_著帶。 用財施例 左右的跳的加熱後,依據者帶實施1小時 為3.0N/19mm,熱收縮率為〇15%。 7測疋枯著力時’ <實施例5> ° 如上述圖2 (a)所示,除 册… 角的被覆部分,經r = 2 (mm) 、^耆贡從llmmxl2mm 具有突出長度為4mm的突起*的f弧形狀的側部,形成 施例1同樣的粘著帶。 °卩之帶形狀以外,製作與實 <實施例6> 如上述圖2(c)所示 除了使粘著帶從 6mmx7mm 角 24 200536117 16451pifd〇c 的被覆部分,經具有向兩端外側分別打開lmm (圖2 (c) 的3b及3f形成imm)的八字型的傾斜之側部,形成具有 突出長度為2.5mm的突起部之帶形狀以外,製作與實施例 1同樣的枯者帶。 <比較例1> 除了由厚25μηι的ΡΕτ薄膜(基材的熱收縮率15〇/〇 ·· 150。-30分)構成以外,得到利用與實施例丨相同的方法 所製作的枯著帶。當對該點著帶實施1小時左右的180T 癱的加熱後,依據JIS观37測定魅著力時,為 2篇19醒’熱收縮率為1.3%,該枯著帶在400〜700nm 下的光透過率都在50%以上(平均為91〇%)。 <比較例2 > η胃除厚25陣的聚醯亞胺薄膜(基材的熱收縮率 分)構成以外,利用與實施例1相同的方 =,者,_的光透過率在波長5ι〇·以下的 :二二ί 5〇%的光透過率。當對該粘著帶實施1小時 • 的加熱後,依據JIS则7測定枯著力時, 為.0N/19mm,熱收縮率為〇1%。 <比較例3> 除了,粘著帶的粘著層背面不塗敷4級銨鹽以外,得 貝知例2相同的方法所製作的枯著帶。當對該枯 :二、貝,1 t日守左右的18〇〇C的加熱後,依據JIS Ζ0237 亡2钻著力時’為2.0N/19mm,熱收縮率為〇15%,該枯 者帶在500nm下的光透過率為88 〇%。 25 2005雖 <比較例4> 除了作為枯著帶所使用的基材而使用I$ _ ^ 酯(TORAY制·· RUMIRA S-10#38 )以外=本—甲酉夂乙 W ’侍到利用盥實 施例2相同的方法所製作的粘著帶。當對兮^^ y 粘者帶實施1; r: belt. The work belt is cut into two pieces with uncoated parts. 180 ° c ^ mi JIS Z02s! ^^^ 0Jr ^ l.on / 19mm, the heat shrinkage rate is 0.15%. The duller was able to produce the tape in the same manner as in Example 4 except that an adhesive layer having a thickness of 30 μm was formed. According to the example, the left and right jumps were heated for 3.0 hours at a rate of 3.0 N / 19 mm, and the thermal shrinkage was 0.15%. 7 When measuring the dead weight '< Example 5 > ° As shown in Fig. 2 (a) above, the cover part of the corner is removed, and the protruding length is 4mm from llmmxl2mm through r = 2 (mm) and 耆 tribute. The f-arc-shaped side portion of the protrusion * forms the same adhesive tape as in Example 1. Except for the belt shape of ° 卩, as shown in Figure 2 (c) above, except that the adhesive tape is covered from a 6mmx7mm angle 24 200536117 16451pifd〇c, it is opened to the outside of both ends. Except for the sloping side portion of l-shaped figure (i.e., 3b and 3f in FIG. 2 (c) form an imm), a belt shape having a protruding portion having a protruding length of 2.5 mm was formed. < Comparative Example 1 > A scoring tape produced by the same method as in Example 丨 was obtained except that it was composed of a 25 µm thick PET film (the thermal shrinkage of the substrate was 15/0 ·· 150.-30 minutes). . After the 180T paralysis heating was performed for about 1 hour on this point of the belt, the charm was measured according to JIS concept 37, and the heat shrinkage rate was 1.3% for two articles. The light at 400 ~ 700nm of the dead band The transmittances are all above 50% (average 91%). < Comparative Example 2 > The η stomach was prepared using the same formula as in Example 1 except that the polyimide film (the thermal shrinkage factor of the substrate) was 25 thick. 50m or less: 22% 50% light transmittance. When this adhesive tape was heated for 1 hour, the dry weight was measured in accordance with JIS Rule 7 and was .0 N / 19 mm, and the heat shrinkage ratio was 0%. < Comparative Example 3 > A dead tape produced in the same manner as in Example 2 was obtained except that the fourth-order ammonium salt was not applied to the back surface of the adhesive layer of the adhesive tape. After heating at 180 ° C at about 1 t day and 2 days at sea, the drilling force according to JIS ZZ0237 2 was 2.0N / 19mm, and the heat shrinkage rate was 0.15%. The light transmittance at 500 nm was 88%. 25 2005 < Comparative Example 4 > Except for using I $ _ ^ ester (made by TORAY ·· RUMIRA S-10 # 38) as the base material for the dead tape = 本 — 甲 酉 夂 乙 W 'Serve The adhesive tape produced by the method similar to Example 2 was used. When the ^^ y sticky tape implementation 1

小時左右的180°C的加熱後,依據JIS 測定點荖力 時,為1.5N/19mm,熱收縮率為1.3%,百 A枯者帶在5〇〇 下的光透過率為90.0%。 <比較例5 >After heating at about 180 ° C for about 1 hour, when measured at the point force according to JIS, it was 1.5N / 19mm, the thermal shrinkage was 1.3%, and the light transmittance of the 100-A dry belt at 5000 was 90.0%. < Comparative example 5 >

C Ο 除了作為粘著帶所使用的基材而# % rfq使用聚醯亞胺 (DuPont-Toray 制:captonlOOH)以外,^ — 例2相同的方法所製作的枯著帶。當對該枯著 時左右的180〇C的加熱後,依據Jis 7〇〇^ ^ 時,為2.5N/19mm,熱收縮率為〇.1%,兮册^祁有刀 ^ _ 口茨枯者帶在500nm 下的光透過率為24.5%。 &lt;比較例6&gt; 除了不將丙烯系粘著劑的溶液呈册&amp; # ,L i f狀進行塗數以 與實_ 3同樣的方法所製作之枯著帶。當 貫…日,左右的·c的加熱後,依據瓜 Z〇237測u著力時,為2._19mm,熱收縮率為〇 i5%。 &lt;比較例7&gt; 除了突起部的側部具有直角狀的末底形狀(圖2⑷ 的虛線所不的那種形狀3e)卩外,製作與實施 粘著帶。 」依 〈結果&gt; 26 200536117 16451pif.doc (1) 加熱後之帶的形狀 關於在基材中使用了聚苯二曱酸乙酯之實施例 6、比較例3、6及7,和使用了聚醯亞胺基材之比較例2 及5,未確認帶從玻璃面上的浮起·剝離,與此相對,關於 使用了 PET之比車父例1,確認帶端面因熱收縮而發生剝 離。而且,在比較例4中可確認粘著帶之端面的浮起。 (2) 視認性C 0 A scum tape produced in the same manner as in Example 2 except that #% rfq used polyimide (manufactured by DuPont-Toray: capton 10OH) as the base material for the adhesive tape. After heating at about 180 ° C at the time of dryness, it was 2.5N / 19mm according to Jis 70〇 ^^, and the heat shrinkage rate was 0.1%. The light transmittance of this band at 500nm is 24.5%. &lt; Comparative Example 6 &gt; A dead band produced in the same manner as in Example 3 except that the solution of the propylene-based adhesive was not applied in the form of &#; L i f. After the heating of the left and right sides of c for 2. days, when the force is measured according to the melon Z0237, it is 2._19mm, and the heat shrinkage rate is 05%. &lt; Comparative Example 7 &gt; An adhesive tape was produced and implemented except that the side portions of the protrusions had a rectangular bottom shape (a shape 3e not shown by a dotted line in Fig. 2⑷). According to <Results> 26 200536117 16451pif.doc (1) Shape of tape after heating Regarding Example 6, Comparative Examples 3, 6 and 7 using polyphenylene diacetate in the substrate, and using In Comparative Examples 2 and 5 of the polyimide base material, floating and peeling of the tape from the glass surface were not confirmed. On the other hand, with respect to Car Example 1 using PET, peeling of the tape end surface due to heat shrinkage was confirmed. Further, in Comparative Example 4, it was confirmed that the end surface of the adhesive tape was floating. (2) Visibility

在表1中記述關於封裝形成後的内部視認性進行研討 的結果。 〔表1〕 (3)放電量 在比較例3的構成中確認有400mV的放電,與此相 對,在將4級銨鹽塗敷在基材的背面侧之實施例2、比較 例4及5的構成中,放電量最大為5〇mV。 (4)剝離性 當在實施了 ! ^、時左右的180〇c的加熱後對從玻璃面 白^離性進行確認時,關於實施例3的料帶,在帶剝離 ,、玻离表面上無法確适來自枯著劑的異物,但關於比較 2 6在帶剝離後的玻璃表面上確認有來自粘著劑的異 。/ 2且,關於實施例5及6,可使帶不切斷而從突起部 = ,但關於比較例7,從突起部末底的角的Table 1 describes the results of a study on the internal visibility after the package is formed. [Table 1] (3) Discharge amount In the configuration of Comparative Example 3, a discharge of 400 mV was confirmed. On the other hand, in Example 2, Comparative Examples 4 and 5 in which a level 4 ammonium salt was applied to the back side of the substrate In the configuration, the maximum discharge amount is 50 mV. (4) Peelability When implemented! After confirming the whiteness from the glass surface after heating at about 180 ° C, the tape of Example 3 was peeled off, and the foreign matter from the rusting agent could not be properly applied on the glass surface, but Regarding Comparative Example 2, it was confirmed that there was a difference from the adhesive on the glass surface after peeling. / 2 In addition, in Examples 5 and 6, the tape can be removed from the protruding portion without cutting, but in Comparative Example 7, the

Hi龜裂,使帶切斷’而無法從突起部將帶全體輕鬆 地進订剝離。 (5)總結 27 200536117 16451pif.doc 利用以上的結果’可誕供一種抑制剝離時的放電,且 财熱性、視認性及剝離性優良之CCD封裝成型時所使用 的表面保護粘著帶。 [表1] 實施例1 實施例2 實施例3 實施例4 測試者A 〇 〇 〇 〇 測試者B 〇 〇 〇 〇 測試者C —〇 —〇_ 〇__ 測試者D 〇 〇 〇 〇 測試者E 〇 〇 〇 〇Hi cracking, cutting the tape ', and the entire tape cannot be easily stripped from the protrusion. (5) Summary 27 200536117 16451pif.doc Using the above results, a surface protective adhesive tape used for molding a CCD package that suppresses discharge at the time of peeling and has excellent financial properties, visibility, and peelability can be provided. [Table 1] Example 1 Example 2 Example 3 Example 4 Tester A ○ 〇 〇 〇 Tester B 〇 〇 〇 Tester C — 〇—〇_ 〇__ Tester D 〇 〇〇〇 Tester E 〇〇〇〇

圖式簡單說明】 貼之:二:二叫發明的枯著帶向影像感測器進行枯 說明〜圖2(d)所示為關於本發明的料帶之形狀的 ==,的具有不塗敷_部分. 的基本構成說明圖 之粘著帶 28 200536117 16451pif.doc 圖4(a)〜圖4(d)所示為本發明的具有不塗敷粘著劑部 分之粘著帶的另一構成的說明圖。 【主要元件符號說明】 1 :影像感測器 1 a :端面 lb :邊部 2 :受光部 3 :粘著帶 3a :突起部 3b、3f :邊部 3c :側部 3d :頂端 4 :基材 5 :粘著層 X :中心線 29Brief description of the drawings] Posting: Two: The invention of the dead band to the image sensor to explain ~ Figure 2 (d) shows the shape of the tape of the present invention ==, has no coating Description of the basic structure of the application part. Adhesive tape 28 200536117 16451pif.doc Figures 4 (a) to 4 (d) show another adhesive tape of the present invention with an adhesive-free part Explanatory diagram of the structure. [Description of Symbols of Main Components] 1: Image sensor 1 a: End surface lb: Edge portion 2: Light receiving portion 3: Adhesive tape 3a: Protrusion portion 3b, 3f: Edge portion 3c: Side portion 3d: Tip 4: Base material 5: Adhesive layer X: Centerline 29

Claims (1)

200536117 16451pif.doc 十、申請專利範圍: L一種影像感測器的 件之影像感測器的封裝工上方法’在利用了固體攝像元 上二,聚苯二尹酸 於影像感測器的受光部 粘者層之粘著帶。 為基材,且至少在—面上具^ 2.—種影像感測器的封裝 件之影像感測器的封裝工^f/ ’在利用了固體攝像元 i声苯二甲酸乙s旨作為基;器的受光部 者曰並在另一面上&amp; 在面上具有+ 法,其中前弟Γ員所述之影像感測器的封夺方 ⑴现防靜電劑以4級銨鹽 u了衣方 4.如申請專利範圍第^3;=劑: 感測,封裝方法’其中在前_4,卜之影像 上具有剝離用的突起部。 °勺至/—部分 法,2二請專利範圍第1項所述之影像感測器的封事方 ΐ外二Γ枯著帶以被覆影像感測器的受光部全艘1 ,、外周邛的至少—部分從影像感測器的端面到中心 設定的距離之形態,被粘貼在前述受光部上。I、有 6·如申凊專利範圍第1項所述之影像感測器的封裝方 法,其中前述粘著帶與影像感測器的端面平行,並具^鱼 前述突起部的末底連接的邊部,且由突起部的頂端與末$ 連接的側部,呈斜線狀、折線狀、曲線狀或它們的組八-某個形狀。 、口的 7·如申請專利範圍第1項所述之影像感測器的封裝方 200536117 16451pif.doc 法 共甲在Μ述钻著帶上,不在钻貼於前述影像感测 受光部之部分上設置粘著層。 、 8·如申請專利範圍第!項所述之影像感測器的封 粘著帶所使用之基材在15。。。下的熱收縮车:在 、9.如中請專利範圍第1項所述之影像感測器的封裳方 方法1=巾2專rmr1項㈣之縣❹彳器的封裝 貝也1小牯的180 C的加熱後之前述粘著帶 枯者力’為0.1〜8.0N/19mm。 11=請專利範圍第1項所述之影像感測器 方法’其中前述粘著帶的光透過率在50%以上。 12,種粘著帶,為一種以聚苯二曱酸乙酯為美妊 =在-面上具有料狀歸帶,其魏_^基用材^ 31200536117 16451pif.doc X. Application scope of patent: L A method of packaging an image sensor for an image sensor, using a solid-state imaging element, and polyphthalic acid in the light receiving of the image sensor Adhesive tape on the part of the adhesive layer. As the base material, and at least on the surface with ^ 2. — package of image sensor packager of the image sensor ^ f / 'The use of solid-state imaging elements The light-receiving part of the device has the + method on the other side, and the sealing method of the image sensor described by the former member Γ is now an antistatic agent with a level 4 ammonium salt. Yi Fang 4. If the scope of the patent application is No. ^ 3; = Agent: Sensing, packaging method 'wherein the front _4, Bu's image has a protrusion for peeling. ° Scoop to /-part of the method, the application of the image sensor described in item 1 of the patent scope ΐ outer Γ with a sparse belt to cover the light receiving part of the image sensor 1, the outer periphery 邛At least part of the form of the distance from the end surface to the center of the image sensor is pasted on the light receiving part. I. There is a method for packaging an image sensor as described in item 1 of the patent claim, wherein the adhesive tape is parallel to the end surface of the image sensor and is connected to the end of the protrusion. The side part, and the side part connected by the top end of the protruding part and the last part, are oblique, polygonal, curvilinear or a combination of these-a certain shape.口 7 · The package of the image sensor as described in item 1 of the scope of patent application 200536117 16451pif.doc method A on the drilling belt, not on the part attached to the light receiving part of the image sensor Set the adhesive layer. 8, 8th if the scope of patent application! The base material for the sealing tape of the image sensor described in item 15 is 15. . . The following heat-shrinkable car: In, 9. The method of sealing the image sensor as described in the first item of the patent scope 1 = Towel 2 Special rmr 1 Item Encapsulation shell of the county's ware The 180 ° C heating force of the aforementioned adhesive tape is 0.1 to 8.0 N / 19 mm. 11 = Please use the image sensor method described in item 1 of the patent scope ', wherein the light transmittance of the aforementioned adhesive tape is above 50%. Twelve kinds of adhesive tapes, which are based on polyethyldibenzoate. They have a tape-like tape on the-side. Its Wei_ ^ base materials ^ 31
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