TW200528202A - Sheet material washing equipment - Google Patents
Sheet material washing equipment Download PDFInfo
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- TW200528202A TW200528202A TW93103883A TW93103883A TW200528202A TW 200528202 A TW200528202 A TW 200528202A TW 93103883 A TW93103883 A TW 93103883A TW 93103883 A TW93103883 A TW 93103883A TW 200528202 A TW200528202 A TW 200528202A
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- 238000005406 washing Methods 0.000 title claims abstract description 56
- 239000000463 material Substances 0.000 title claims abstract description 17
- 239000007788 liquid Substances 0.000 claims abstract description 148
- 239000012530 fluid Substances 0.000 claims abstract description 129
- 239000007921 spray Substances 0.000 claims abstract description 102
- 238000005507 spraying Methods 0.000 claims abstract description 13
- 238000004140 cleaning Methods 0.000 claims description 146
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 109
- 239000012459 cleaning agent Substances 0.000 claims description 36
- 238000011144 upstream manufacturing Methods 0.000 claims description 32
- 239000003595 mist Substances 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 2
- 230000009182 swimming Effects 0.000 claims 1
- 239000002699 waste material Substances 0.000 claims 1
- 239000005357 flat glass Substances 0.000 abstract description 91
- 239000003599 detergent Substances 0.000 abstract description 21
- 239000011521 glass Substances 0.000 description 26
- 239000000428 dust Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000004519 grease Substances 0.000 description 5
- 238000009413 insulation Methods 0.000 description 4
- 230000032258 transport Effects 0.000 description 4
- 238000011143 downstream manufacturing Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000007667 floating Methods 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 244000241257 Cucumis melo Species 0.000 description 1
- 235000015510 Cucumis melo subsp melo Nutrition 0.000 description 1
- 240000000233 Melia azedarach Species 0.000 description 1
- 244000018633 Prunus armeniaca Species 0.000 description 1
- 235000009827 Prunus armeniaca Nutrition 0.000 description 1
- 241000209140 Triticum Species 0.000 description 1
- 235000021307 Triticum Nutrition 0.000 description 1
- FJJCIZWZNKZHII-UHFFFAOYSA-N [4,6-bis(cyanoamino)-1,3,5-triazin-2-yl]cyanamide Chemical compound N#CNC1=NC(NC#N)=NC(NC#N)=N1 FJJCIZWZNKZHII-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 230000035876 healing Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 235000015170 shellfish Nutrition 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Description
200528202 玫、發明說明： [發明所屬之技術領域] 本發明係有關板材之洗淨設備。尤其，係有關一種板 材之洗淨δ又備，其以清潔劑洗淨稀有金屬、矽、平面型顯 不器用玻璃等板材之表面’卩高壓液體之噴霧來洗淨板材 之表面’並從洗淨後之板材表面除去水份。 [先前技術] 一過去平板玻璃使用於各種領域。特別是使用於液晶 顯不為或電漿顯示器等之平板玻璃（亦稱玻璃基板）是非常 薄的玻璃。例如，大多生產厚度約〇 7_、大小約550麵 650mm之平板玻璃。此種玻璃基板之修整、分割等加工 ’ -般將平板玻璃以水平狀態(橫向狀態），藉帶式輸送機 搬送，於各裝置以水平狀態來進行。即使是加工後之平板 破璃之洗淨，仍以水平狀態進行（例如參照曰本特開平1 448J7號公報及日本特許第269991 1號公報卜又，以水平 =您洗淨之裝置中，有—種具備用來更提高洗淨效果之超 曰波洗 >尹|置的洗淨裝置（例如參照日本特開平9· ^ 公報）。 观 &、，另有一種裝置，係將平板玻璃以豎靠於滾子列之姿 搬达，於此豎靠狀態下研磨平板玻璃之各端邊（例如表 本特許第2623476號公報）。 …、、、 另一方面，近年來，於玻璃基板等之領域，為了日么 生產性，希望將複數個玻璃基板之原板、即母破螭Z提阿 大型化，以增加良率，對應更大型之顯示器等。^尺寸 右加大母 200528202 玻离之尺寸自一片母玻璃能取出之玻璃基板片數即增多 ’從而提高良率。更且，亦可製造大型顯示器用玻璃基板 。此外’’亦希望進-步薄化玻璃基板，以提高顯示器等之 性能，而有母玻璃更薄型化之趨勢。而且，對玻璃基板品 質之要求逐年趨嚴，亦有低成本化之要求。 [發明内容] 然而，以如前述之水平狀態將平板玻璃搬送並洗淨之 技術以及以旦罪於特定構件之狀態搬送之技術中，於對大 型化、4型化之平板玻璃加工之情形下，有可能因玻璃本 身重置引起之彎曲等而造成破裂，亦有可能因來自支撐平 板玻璃面之構件的反作用力而造成破裂。當然，在洗淨平 板玻璃之情形下，亦發生相同問題。又，在平板玻璃接觸 結構物之狀態下，接觸部分之洗淨有困難。此外，要求比 超音波洗淨所得之潔淨度更高之程度。 發明之福示 本發明疋用來解決上述問題之技術，其目的在於提供 一種板材之洗淨設備，其所進行之洗淨處理能防止包含大 型化、薄型化之平板玻璃之板材受到破裂等損傷，而能進 一步提高板材品質。 本發明之此種板材之清潔劑洗淨裝置，係具備： 支撐裝置，用來支撐豎立狀態下之板材下端； 流體導件，用來對板材側面施加流體壓力，將板材以 豎立狀態、非接觸式來支撐；及 洗淨液供應部，用來對豎立狀態下之板材供應洗淨液 200528202 ;且 該洗淨液供應部包含流體導件之至少一部分，咳至少 -部分之流體導件能將洗淨液之流體供應至板材之側面。 藉此構造，可不受板材本身重量之影響、來自結構物 之大反作用力’以清潔劑洗遍板材之兩面、周緣。因此， 不限於塵埃，甚至於可除去油脂部分。 較佳的清潔劑洗淨裝置是構成該洗淨液供應部之該流 體導件、，係具有沿水平方向延伸之上下複數段帛i流體喷 出。P並於δ亥第1流體噴出部排列有複數個洗淨液噴嘴而 構成。其原因在於可藉重力將清潔劑供應至板材整面。此 種作用可藉簡易構造來達成。 車乂佳的清潔劑洗淨裳置是構成該洗淨液供應部之該流 料件，係進-步具有沿水平方向相互間留有間隔配設成 之化上下方向延伸之第2流體喷出部’並於該帛2流體喷 出部排列有複數個洗淨液噴嘴而構成。其原因在於，於搬 达板材之裝置之情形下，即使搬送速度上昇，仍可供應洗 淨液至整個板材面。 “ 又，較佳的清潔劑洗淨裝置是該支撐裝置，係具有將 板材在丑立狀態下沿水平方向搬送的搬送部，肖流體導件 ’係沿搬送部之搬送路徑配置。其原因在於，藉此搬送部 及流體導件，可在豎立狀態下將板材搬人並搬出。 再者，較佳的清潔劑洗淨裝置是於該洗淨液供應部 板材搬迗方向之上游端側及下游端側，沿豎立狀態下之板 材之上下方向配設有空氣幕部，該空氣幕部具有沿上下方 200528202 向排列之複數個空氣噴嘴。其原因在於，藉上述空氣幕部 可防止水份朝上游及下游之製程移動，或防止水份自上游 及下私之製程流入。藉此，亦可極力抑制例如洗淨液之濃 度變動。 本發明之高壓液體喷霧洗淨裝置，係具備： 支撐裝置，用來支撐豎立狀態下之板材之下端； 流體導件，用來對板材側面施加流體壓力，將板材以 豎立狀態、非接觸式來支撑；及 同壓液體噴霧部’用來對豎立狀態下之板材，分別自 板材之兩面側喷吹霧狀高壓液體。 藉此構造，可不受板材本身重量之影響、來自結構物 之大反作用力，藉霧狀高壓液體來洗淨板材之兩面。因此 ，可鬲品質地洗淨，不致於發生大型化、薄型化板材之破 裂等損傷。又，亦可藉來自流體導件之流體來除去自板材 面剝離而浮遊於水中之塵埃等。 較佳的高壓液體噴霧洗淨裝置是該支撐裝置’係具有 將板材以豎立狀悲沿水平方向搬送的搬送部，該流體導件 沿搬送部之搬送路徑配置。其原因在於，藉此搬送部 及流體導件’可在豎立狀態下將板材搬入並搬出高壓液體 噴霧洗淨裝置。 _立再者，較佳的高壓液體噴霧洗淨裝置是該高壓液體噴 務卩係具有可沿上下方向移動之高壓液體喷霧嘴，配置 於板材兩面側之高壓液體噴霧嘴彼此隔著板材支樓位置而 對向。其原因在於’由於邊藉上述搬送部將板材在登立狀 200528202 態下搬送，邊自兩面噴吹霧狀高壓液體，故只要沿上下彳 ^ 向移動高塵液體噴霧嘴，即可洗淨板材整面，此外，由於 使兩側之高壓液體喷霧嘴彼此對向，故能防止高壓液體所 造成之板材之損傷。 •或者，較佳的高壓液體喷霧洗淨裝置是該高壓液體喷 務部’係具有沿上下方向排列之複數個高壓液體噴霧嘴， 配置於板材兩面側之高壓液體喷霧嘴隔著板材支撐位置而 $向。其原因在於，由於邊藉上述搬送部將板材在豎立狀 〜下搬送邊自兩面噴吹霧狀高壓液體，故只要事先沿上 | 下方向排列複數個尚壓液體喷霧嘴，即可洗淨板材整面。 較佳的高壓液體噴霧洗淨裝置，是該高壓液體喷霧嘴 係月b、vu貝貝上垂直於作為洗淨對象之板材之面的旋轉軸 心旋轉。其原因在於可洗淨更大範圍之板材面。 又，較佳的高壓液體噴霧洗淨裝置是能與高壓液體喷 務嘴一起沿上下方向移動之移動式流體導件，係配設成鄰 接於同壓液體噴霧嘴。其原因在於，水流以較高壓力對板 材噴吹，會在相鄰接之移動式流體導件之作用下，使霧狀 着 阿壓液體所造成之板材振動等衰減。 或者’較佳的高壓液體喷霧洗淨裝置是於板材搬送方 向之上游端側，沿豎立狀態下之板材之上下方向配設有水 洗部’該水洗部具有沿上下方向排列之複數個水噴嘴。其 原因在於’可藉由水洗部將上游製程之附著物，例如洗淨 液寺洗掉。 本發明之板材之除水裝置，係具備： 12 200528202 搬送裝置，用來將豎立狀態下之板材之下端加以支撐 ，並沿水平方向搬送； 流體導件，用來對板材之側面施加流體壓力，將板材 以豎立狀態、非接觸式來支撐；及 ^ ^ 刀別在豎立狀悲下之板材兩面側以對應於板 材上方至下方的方式設置，用來朝板材噴出膜狀氣流。 ^由於藉此構造，可邊藉此搬送部及流體導件將板材於 豎立狀態搬送，邊將膜狀氣流喷吹於板材之外面，故可藉 此人掉水伤，有效地自板材兩面、周緣除去水份，不受板 ^ 材本身重里之影響、來自結構物之大反作用力。可以說， 了成乾無狀態。 〜較佳的除水裝置是於該兩除水部之上游側、且於豎立 =下之板材兩面側’沿上下方向配設有水洗部，該水洗 口p具有沿上下方向排列之複數個水喷嘴。其原因在於可防 止塵埃等之再附著。 …或者’較佳的除水裝置是該水洗部，係配設成往板材 ?适方向之上游方向傾斜。其原因在於，能對沿搬送方肖9 移動之板材表面全部，供應新的水。 或者，較佳的除水裝置是該除水部，係配設成往板材 搬送方向之上游方向傾斜。其原因在於，可向下及上游方 向吹掉板材表面之水份。 本發明之板材之洗淨裝置，係具備·· 搬运4置，用來將登立狀態下之板材之下端支撐並搬 送； 13 200528202 流體導件，用來對板材之側面施加流體聲 "’將板材 以豎立狀態、非接觸式來支撐； 清潔劑洗淨裝置，配設於搬送裝置之搬送路徑的前述 清潔劑洗淨裝置中任一裝置； ~ 高壓液體喷霧洗淨裝置，配設於搬送路 0 h潔劑洗 淨欢置之下游側的前述高壓液體喷霧洗淨裝置中任一 ;及 一哀置 除水裝置，配設於搬送路徑之高壓液體噴霧洗淨裝置 之下游側的前述除水裝置中任一裝置。 、 藉此構造，可將板材高效率地洗淨、除水，不受板材 本身重量之影響、來自結構物之大反作用力，。又 並且，較佳的洗淨設備是於該高壓液體噴霧洗淨裝置 與該除水裝置之間配設有最終洗淨設備，該最終洗淨㈣ ，於搬送裝置兩側具有流體導件。其原因在於，於高^液 體㈣洗淨裝置中自板材遊離而浮遊於水中之塵埃等藉來 自上述流體導件之流體被洗掉。 以下，衫照圖 <，邊說明本發明板材之洗淨設備以 及適用於此洗淨設備之清潔劑洗淨裝 r衣1 同壓液體噴霧洗 矛袁置和除水裝置之實施形態。 [實施方式] 於圖1及11 2所示洗淨設備i配設有帶式輸送機2， ^於矩形平板玻璃G ^之狀態下，將該玻璃之底邊支 =平方向搬送。不限於帶式輸送機，可採用例如輥 周知輸送機。用來沿帶式輸送冑2之搬送方向 200528202 亦即沿平板玻璃之通過線L以清潔劑洗淨平板玻璃g表面 之清潔劑洗淨裝置3、用來以霧狀高壓液體（亦稱水喷柱） ，淨平板玻璃G表面之高壓液體喷霧洗淨裝置4、用來將 錯南壓液體喷霧洗淨裝置4自平板玻璃G脫離而浮游於水 中之塵埃等洗掉之最終洗淨|置5以及用來將水份自H 後之平板玻璃G表面除去之除水裝置6，自上游依此順序 配置。且，本實施形態之除水裝i 6，係在除水動作之前 又進行最終洗淨。不過，不限於此。200528202 Description of the invention: [Technical field to which the invention belongs] The present invention relates to cleaning equipment for sheet materials. In particular, it is related to the cleaning of a plate, and it is prepared by cleaning the surface of a plate of rare metals, silicon, flat display glass, etc. with a detergent, 'the spray of high-pressure liquid to clean the surface of the plate,' and After that, the surface of the board is dehydrated. [Prior Art] In the past, flat glass was used in various fields. In particular, flat glass (also known as glass substrate) used in liquid crystal displays or plasma displays is a very thin glass. For example, most of them produce flat glass with a thickness of about 7 mm and a size of about 550 sides and 650 mm. Such processing of glass substrates, such as trimming and division, is generally performed in a horizontal state (horizontal state) on the flat glass by a belt conveyor and in a horizontal state in each device. Even after processing, the flat glass is washed in a horizontal state (for example, refer to Japanese Patent Publication No. 1 448J7 and Japanese Patent No. 269991 No. 1) In the device where the level = your cleaning, there are —A washing device with a super wave washing device and a washing device for improving the washing effect (for example, refer to Japanese Patent Application Laid-Open Publication No. Hei 9), and another device is a flat glass It is carried in the posture of standing on the roller row, and the end edges of the flat glass are ground in this standing state (for example, Japanese Patent Publication No. 2623476). On the other hand, in recent years, it has been applied to glass substrates. In the field of waiting, for the sake of productivity, it is hoped that the original plate of a plurality of glass substrates, that is, the mother substrate, will be enlarged to increase the yield and correspond to larger displays. The number of glass substrates that can be taken out from a mother glass is increased, thereby increasing the yield. Moreover, glass substrates for large displays can also be manufactured. In addition, `` I also want to further thinner glass substrates to improve displays, etc. Nature However, there is a tendency for the mother glass to be thinner. In addition, the requirements for the quality of glass substrates are becoming stricter every year, and there is also a requirement for lowering costs. [Summary of the Invention] However, the flat glass is transported and washed in the horizontal state as described above In the case of large-sized and type 4 flat glass processing, the technology and the technology for transferring the state of a specific component may be broken or broken due to bending or the like caused by the glass itself resetting. Fracture is caused by the reaction force from the member supporting the flat glass surface. Of course, the same problem occurs when the flat glass is cleaned. Also, when the flat glass is in contact with the structure, it is difficult to clean the contact part. In addition, it requires a higher degree of cleanliness than ultrasonic cleaning. Blessings of the invention The technology of the present invention to solve the above problems is to provide a board cleaning equipment and the cleaning performed by the board. The treatment can prevent damage to the plate including the enlarged and thin flat glass from cracking and the like, and can further improve the quality of the plate. A cleaning device for a plate cleaning agent is provided with: a supporting device for supporting the lower end of the plate in an upright state; a fluid guide for applying fluid pressure to the side of the plate and supporting the plate in an upright state without contact; And a cleaning liquid supply unit for supplying cleaning liquid 200528202 to a plate in an upright state; and the cleaning liquid supply unit includes at least a part of the fluid guide, and at least-part of the fluid guide can supply the cleaning liquid The fluid is supplied to the side of the board. With this structure, it is possible to wash the two sides and the periphery of the board with a detergent without being affected by the weight of the board itself and the large reaction force from the structure. Therefore, it is not limited to dust, and even the grease can be removed The preferred cleaning agent cleaning device is the fluid guide constituting the cleaning liquid supply part, which has a plurality of upper and lower sections of fluid extending in the horizontal direction and spraying fluid. P is constituted by arranging a plurality of cleaning liquid nozzles in the δ 1st fluid discharge portion. The reason is that the detergent can be supplied to the entire surface of the board by gravity. This effect can be achieved by simple construction. The cleaning agent for the washing machine is a flow part constituting the cleaning liquid supply part. It is a step-by-step having a second fluid spray extending in the up-down direction arranged with a space between each other in the horizontal direction. The outlet portion is formed by arranging a plurality of cleaning liquid nozzles in the second fluid ejection portion. The reason for this is that, in the case of a device for conveying a plate, even if the conveying speed is increased, the cleaning liquid can be supplied to the entire plate surface. "Also, the preferred cleaning device is the supporting device, which has a conveying section that conveys the plate in the horizontal direction in an erected state, and the Shao fluid guide is disposed along the conveying path of the conveying section. The reason is that With this, the conveying part and the fluid guide can move the sheet in and out in an upright state. Furthermore, the preferred cleaning device for the cleaning agent is on the upstream end side of the sheet conveying direction of the cleaning liquid supply part and On the downstream end side, an air curtain portion is arranged along the up and down direction of the board in an upright state. The air curtain portion has a plurality of air nozzles aligned in the upper and lower direction 200528202. The reason is that the above-mentioned air curtain portion can prevent moisture Move to the upstream and downstream processes, or prevent water from flowing in from upstream and private processes. This can also greatly suppress, for example, the concentration change of the cleaning solution. The high-pressure liquid spray cleaning device of the present invention is equipped with: A support device for supporting the lower end of the plate in the erect state; a fluid guide for applying fluid pressure to the side of the plate to support the plate in the erect state without contact; and The “pressing liquid spraying part” is used to spray the mist-like high-pressure liquid from the two sides of the sheet in the standing state. With this structure, it is not affected by the weight of the sheet itself and the large reaction force from the structure. High pressure liquid is used to clean both sides of the sheet. Therefore, it can be cleaned with high quality without damage such as rupture of large and thin sheets. Also, the fluid from the fluid guide can be used to remove the peeling from the sheet surface and Dust floating in the water, etc. The preferred high-pressure liquid spray cleaning device is a supporting device that has a conveying section that conveys the plate in an upright and horizontal direction, and the fluid guide is arranged along the conveying path of the conveying section. The reason is that the conveying unit and the fluid guide member can move the sheet in and out of the high-pressure liquid spray cleaning device in an upright state. _ Li again, the preferred high-pressure liquid spray cleaning device is the high-pressure liquid spray service. It has high-pressure liquid spray nozzles that can move up and down, and the high-pressure liquid spray nozzles arranged on the two sides of the board are facing each other across the board support. The reason is' Because the board is transported in the standing state of 200528202 by the above-mentioned conveying section, and sprayed with high-pressure mist liquid from both sides, the board can be cleaned by moving the high-dust liquid spray nozzle in the up and down direction. In addition, since the high-pressure liquid spray nozzles on both sides face each other, it can prevent the damage of the plate caused by the high-pressure liquid. Or, the preferred high-pressure liquid spray cleaning device is the high-pressure liquid spraying department. 'It has a plurality of high-pressure liquid spray nozzles arranged in an up-and-down direction, and the high-pressure liquid spray nozzles arranged on both sides of the plate are oriented across the plate support position. The reason is that the plate is erected by the transfer unit ~ The spraying high-pressure liquid is sprayed from both sides at the lower conveying side, so as long as a plurality of high-pressure liquid spray nozzles are arranged in the up and down direction in advance, the entire surface of the plate can be washed. The preferred high-pressure liquid spray cleaning device The high-pressure liquid spray nozzle rotates on the rotation axis of the surface b, vu babe perpendicular to the surface of the plate as the object to be cleaned. The reason is that a wider range of sheet surfaces can be washed. In addition, the preferred high-pressure liquid spray cleaning device is a mobile fluid guide that can move up and down with the high-pressure liquid spray nozzle, and is arranged adjacent to the same-pressure liquid spray nozzle. The reason is that the water flow blows the plate at a higher pressure, and it will attenuate the plate vibration caused by the mist-like pressure liquid under the action of the adjacent mobile fluid guide. Or 'the preferred high-pressure liquid spray cleaning device is provided with a water washing part on the upstream end side of the board conveying direction in the up and down direction of the board in an upright state' The water washing part has a plurality of water nozzles arranged in an up-down direction . The reason for this is that the adherence of an upstream process, such as a washing liquid temple, can be washed away by a water washing section. The water removing device of the plate of the present invention is provided with: 12 200528202 conveying device for supporting the lower end of the plate in an upright state and carrying it in a horizontal direction; a fluid guide for applying fluid pressure to the side of the plate, Support the board in an upright state and non-contact; and ^ ^ The knifes are set on the two sides of the board under the upright shape to correspond to the top to the bottom of the board to spray a film-like airflow towards the board. ^ Because of this structure, the sheet can be conveyed in the upright state by the conveying part and the fluid guide, and the film-like air flow can be blown on the outer surface of the sheet, so that people can get water damage and effectively from both sides of the sheet, The peripheral edge removes water, and is not affected by the weight of the plate itself, and the large reaction force from the structure. It can be said that there is no state. ~ The preferred water removal device is provided with a water washing part in the up-down direction on the upstream side of the two water removal parts and on the two sides of the erected = lower board. The water washing port p has a plurality of water arranged in the up-down direction. nozzle. The reason is that re-attachment of dust and the like can be prevented. … Or ’the preferred water removal device is the water washing section, which is arranged to be inclined toward the upstream direction of the panel. The reason is that new water can be supplied to the entire surface of the board moving along the conveyance square 9. Alternatively, the preferred water removal device is the water removal unit, which is arranged to be inclined toward the upstream direction of the sheet conveyance direction. The reason is that the water on the surface of the board can be blown off in the downward and upstream directions. The cleaning device of the plate of the present invention is provided with 4 sets of transports, which are used to support and transport the lower end of the plate in the standing state; 13 200528202 fluid guide for applying a fluid sound to the side of the plate " The board is supported in an upright state and non-contact type; the cleaning agent cleaning device is arranged in any one of the aforementioned cleaning agent cleaning devices in the conveying path of the conveying device; ~ the high-pressure liquid spray cleaning device is arranged in the conveying Any of the above-mentioned high-pressure liquid spray washing devices on the downstream side of the 0h detergent cleaning station; and a water-removing device disposed on the downstream side of the high-pressure liquid spray washing device on the transport path Any of the water removal devices. With this structure, the board can be efficiently washed and dewatered without being affected by the weight of the board itself and the large reaction force from the structure. Moreover, a preferred cleaning device is provided with a final cleaning device between the high-pressure liquid spray cleaning device and the water removal device, and the final cleaning device has fluid guides on both sides of the conveying device. The reason for this is that the fluid borrowed from the above-mentioned fluid guide member, such as dust free from the plate and floating in the water in the high-pressure liquid washing device, is washed away. In the following, a shirt photo < illustrates the embodiment of the cleaning device for the board of the present invention and a detergent cleaning device suitable for this cleaning device. [Embodiment] A belt conveyor 2 is provided in the cleaning equipment i shown in Figs. 1 and 112, and ^ in a state of rectangular flat glass G ^, the bottom side of the glass is transported in a flat direction. It is not limited to a belt conveyor, and for example, a roller known conveyor can be used. Cleaner cleaning device used to clean the surface of flat glass g with a detergent along the conveying direction of the belt conveyor 胄 2 200528202, that is, along the passage line L of the flat glass. Column), the high-pressure liquid spray cleaning device 4 on the surface of the clean plate glass G, and the final cleaning for removing the south-pressure liquid spray washing device 4 from the flat glass G and washing away the dust floating in the water | The device 5 and the water removing device 6 for removing water from the surface of the flat glass G after H are arranged in this order from the upstream. In addition, the dewatering device i 6 of this embodiment is subjected to final cleaning before the dewatering operation. However, it is not limited to this.
又，沿帶式輸送機2之搬送方向（通過線L)，於其兩 側立設有用來以非制式支料板玻璃G之面的流體導件 8 。流體導件8沿搬送方向分成上述裝置3、*、$、6各 部分。如後述，除水裝置6與其他裝置3、4、5，流體導 件之構造是不同的，故以㈣27標示除水裝置之 件。In addition, along the conveying direction of the belt conveyor 2 (through the line L), fluid guides 8 for standing the surface of the non-standard support plate glass G are erected on both sides thereof. The fluid guide 8 is divided into the above-mentioned devices 3, *, $, 6 along the conveying direction. As described later, the structure of the fluid guide is different from that of the other devices 3, 4, and 5, so the components of the water removal device are marked with ㈣27.
士併參’、、、^潔劑洗淨裝置3之側視圖即圖4可知， 流體導件8具備框構件9及安裝於此框構件9之導板10。 於構成導板10之平面配設有用來朝平板玻璃G面施加支 推用流體壓力之流體噴出部丨j。 流體噴出部U可調節成全體與平板玻璃G面平行。 在流體喷出部U i，以彼此間留有間隔之方式排列有朝 平板玻璃G面噴出流體之流體喷嘴丨u。 由於流體導件8設置於通過線L之左右兩側，並由於 自平板玻璃之兩面作用之流體壓力獲得平衡，故平板玻璃 15 200528202 可不接觸結構部件，維持大致垂直之狀態。於本實施形態 中使用水作為支撐用流體。由於使用水作為支樓用流體 ，故可有效自平板玻璃除去玻璃屑之粒子、其他塵埃。此 水依需要選擇自來水、純水、清潔劑水溶液等。 又，亦可使用多孔質材料來設置使液體滲出於導面之 夕孔貝/瓜體導件，而不排列多個流體喷出部丨丨。藉此多孔 質流體導件，可利用導引用液體之表面張力，以不接觸結 構部件之方式以豎立狀態支撐平板玻璃。 支撐用流體不限於液體，亦可例如為潔淨氣體。在纟 % 用氣體作為支撐用流體之流體導件僅配設於通過線l之單 側吟，疋使平板玻璃G略微向此流體導件側傾斜，利用平 板玻璃本；之橫向分量及所喷出t體之壓力之力量之 平衡，藉流體導件以非接觸式支撐。不過由於平板玻璃之 洗淨藉液體進行，故較佳的是支撐用流體亦同樣為液體。 邊夢照® 3至目5，邊說明清潔劑洗淨裝置3。於清潔 劑洗裝置3中’對應清潔劑洗淨裝置3之部分的帶式輸 运機之機能是作為清潔劑洗淨裝置3之平板玻璃支撐裝置 # 圖3(b)之如視圖，為求容易理解，表示除去前側之流體 導件8之狀態。 #清潔劑洗淨裝置3中，配設有第i流體噴出部lla及 第2流體噴出部Ub來當作流體噴出部11。第1流體噴出 m沿水平方向延設，並以彼此上下留有間隔之方式配 认有複數段。X，第2流體喷出部llb以沿平板玻璃之搬 送方向留有間隔之方式沿上下方向配設有複數支。於各流 16 200528202 體喷出部1 la，1 lb，以彼此留有間隔之方式排列0 玻璃面噴出流體之流體噴嘴丨丨c。這些流體噴出部1 &反 lib可調節成全體平行於平板玻璃〇面。 清潔劑洗淨裝置3,係自圖略清潔劑供應源將清 壓达至流體導件8，並自流體喷嘴i lc喷出清潔劑水溶^ 洗淨液）。藉此構造，清潔劑洗淨裝置3以洗淨液洗淨平 玻璃之整面’甚至自平板玻璃面除去油脂部分。杏：反 _ 田，酉己 於下游側之其他裝置4、5、6可使用純水等代替洗 作為用於流體導件之流體。又，即使是清潔劑洗淨裝置/ 之流體導件8,亦不須將全部導件作成用以喷射洗淨液之 構成，可自流體導件8之一部分喷射洗淨液。再者，藉由 昇高洗淨液之溫度（例如約啊），進—步提高油脂部^之 除去效果。 如圖3及圖5所示，於此清潔劑洗淨裝置3，與搬送 而來之平板玻璃G上邊對應之位置（沿平板玻璃g上邊之 :二稍往流體導件相反側移位之位置延設有清潔劑供應 胃12。於此清潔劑供應管12排列有多個清潔劑噴嘴η， 用來對平板玻璃G之單面從上邊霖介哈A、主 劑供庫…ώ早面攸上邊霧化喷吹清潔劑。對清潔 12’自圖略清潔劑供應源㈣清潔劑。清潔劑供 ^動按照作為洗淨對象之平板玻璃之上下尺寸而上 藉此多個清潔劑喷嘴13’將所有清潔劑供應至平板玻 之=之上邊。此清潔劑藉由重力’全部供應至平板玻璃 μ早面之整面’將該單面洗淨。本清潔劑洗淨裝置3雖 17 200528202 然具備單一清潔劑供應管12，不過，本發明不限於此構造 。例如，若上下隔開，具備複數支清潔劑供應管，即使 平板玻璃之搬送速度加快，仍可使清潔劑充分遍及平板玻 璃之表面。 雖然如前述，清潔劑洗淨裝置3於通過線L之兩側配 設f出洗淨液之流體導件8,不過，在具備上述清潔劑供 應官1 2之情形下，流體導件8可隔著通過線l，僅設在清 潔劑供應f 12之相反側。由於支撐流體為液體，故即使 流體導件8僅設置在通過Μ之單側，平板玻璃g仍藉充 滿於其表面與流體噴出冑11之間隙的液體之表面張力而 被吸附，故能以不接觸、維持大致垂直狀態予以搬送。不 過由於考慮到流體導件之洗淨效果較上述構造之清潔劑供 應管12還高’故最好具備將洗淨液喷出至通過線 之流體導件8。 藉由清潔劑洗淨裝置3之清潔劑洗淨，可使塵埃、油 脂部分自平板玻璃表面遊離出來。 於此清潔劑洗淨裝置3之上游端及下游端，分別沿上 下方向延設有空氣幕構件14。如圖5所示，此^氣幕構件 14具備.供氣管15，於通過線L之兩側相互對向並沿上 下方向延設’用來供應潔淨空氣；及多個空氣喷嘴（亦稱除 液Π::6?此供氣管15緊密排列，用來朝平板玻璃面 贺空軋。潔淨空氣是經過濾器等去除塵 。對上述供氣管15，自圖欢禮#、 孔 。略i、氣源壓送潔淨空氣。自上游 端及下游端之各空氣1± ’、 冓件14有潔淨空氣對所搬送之平 18 200528202 板玻璃喷出潔淨空氣，形成空氣幕。因此，防止水份等自 上游製程或下游製程進入清潔劑洗淨裝置3。因此防止洗 液之濃度變動。又防止洗淨液移往上游製程或下游製程 〇 於圖3(b)及圖5中，符號17標示之構件是配設於帶式 輸送機2下方之接水管道。又，符號18標示之構件是用 來收集接水管道17所承接之液體並回收於下方洗淨液槽（ 圖不省略）之集水管。清潔劑洗淨完成之平板玻璃接著被搬 送至高壓液體喷霧洗淨裝置4(圖丨）。 p邊翏照圖6至圖9邊說明高壓液體喷霧洗淨裝置4。 同壓液體噴霧洗淨裝置4中，與高壓液體喷霧洗淨裝置4 對應之邛分之帶式輸送機2，係當作高壓液體噴霧洗淨裝 中之平板玻璃支撐裝置來使用。如前述，於高壓液體 喷霧洗淨裝置4中，流體導件8設置於通過線L之兩側。 於搬送方向之流體導件8之中間部配設有高壓液體噴 冓件1 9。圖6為求容易理解高壓液體噴霧構件1 9，將 流體導件8局部做出缺口。 中間夾有通過線L之兩高壓液體噴霧構件1 9分別具 $噴觜支架41。於此喷嘴支架41安裝有上下分開之一對 ，壓液體噴霧嘴20。並且，此上下之分開距離可變更。自 fij /¾ /S# 命 耀噴霧嘴20喷射高壓水流（水喷柱）。中央夾有通過 古β 兩咼壓液體噴霧嘴20彼此對向。這是為了使來自 向壓液辦 4- 隨Τ務嘴20之高壓水所造成之壓力於平板玻璃 側形成達到平衡。 200528202 如圖6及圖7所示，上述喷嘴支 气*夕始、# 、 八 猎/σ上下方向鋪 、V引機構2 1能於高壓液體喷霧構件i 9 > ρ ^ 上下移動。結果，高壓液體噴霧嘴2二構：19之底架42 下運動。X，噴嘴支加4Φ 相對於平板玻璃上 贺為支木41中之喷嘴支撐部4 i a 裝成可相對於噴嘴支¥ 41 > ^ 透匕叙鏈女 、貫角叉木41之基部41b向 部4U之旋動，能使高壓液體喷霧嘴2〇移動至愈: ::體面對向之作用位置以及退避至外側之非作用位置？ 4液體”嘴20在非作g置進行維料。As can be seen in FIG. 4 as a side view of the deparaffin cleaning device 3, the fluid guide 8 includes a frame member 9 and a guide plate 10 mounted on the frame member 9. A fluid ejection portion 丨 j is provided on a plane constituting the guide plate 10 to apply a fluid pressure for pushing to the flat glass G surface. The fluid ejection portion U can be adjusted to be parallel to the entire surface of the flat glass G. In the fluid ejection portion U i, fluid nozzles u which eject fluid toward the flat glass G surface are arranged with a space between them. Because the fluid guides 8 are disposed on the left and right sides of the passing line L, and the fluid pressure acting from both sides of the flat glass is balanced, the flat glass 15 200528202 can maintain a substantially vertical state without touching the structural components. In this embodiment, water is used as the supporting fluid. Because water is used as a branch fluid, it can effectively remove glass particles and other dust from the flat glass. This water can be selected from tap water, pure water, and detergent solution. In addition, a porous material may be used to provide a perforated shell / melon body guide that allows the liquid to permeate through the guide surface without arranging a plurality of fluid ejection sections. This allows the porous fluid guide to use the surface tension of the guide liquid to support the flat glass in an upright state without touching the structural components. The supporting fluid is not limited to a liquid, and may be, for example, a clean gas. At 导%, the fluid guide using gas as the supporting fluid is only provided on one side of the passage line l, and the flat glass G is slightly inclined toward the side of this fluid guide, using the flat glass substrate; The balance of the force and pressure of the t-body is supported non-contactly by the fluid guide. However, since the cleaning of the flat glass is performed by a liquid, it is preferable that the supporting fluid is also a liquid. While Dream Photo® 3 to 5 are described, the cleaning device 3 is described. The function of the belt conveyor in the cleaning agent cleaning device 3 corresponding to the part of the cleaning agent cleaning device 3 is to serve as the flat glass supporting device of the cleaning agent cleaning device 3 # As shown in Figure 3 (b), It is easy to understand, and shows the state where the fluid guide 8 on the front side is removed. In the #cleaner cleaning device 3, an i-th fluid ejection portion 11a and a second fluid ejection portion Ub are disposed as the fluid ejection portion 11. The first fluid ejection m is extended in the horizontal direction, and plural segments are identified so as to leave a space above and below each other. X. The second fluid ejection portion 11b is provided with a plurality of branches in the up-down direction so as to be spaced along the conveyance direction of the flat glass. In each flow 16 200528202 The body ejection sections 1 la, 1 lb are arranged at a distance from each other. 0 Fluid nozzles for ejecting fluid from a glass surface 丨 丨 c. These fluid ejection sections 1 & anti-lib can be adjusted so as to be parallel to the flat glass surface as a whole. The cleaning agent cleaning device 3 is a cleaning solution from a cleaning agent supply source, which brings the cleaning pressure to the fluid guide 8 and sprays the cleaning agent water-soluble cleaning solution from the fluid nozzle i lc). With this structure, the cleaning agent cleaning device 3 cleans the entire surface of the flat glass with a washing liquid, and even removes the grease part from the flat glass surface. Apricot: Reverse field, other equipments 4, 5 and 6 on the downstream side can use pure water instead of washing as the fluid for the fluid guide. In addition, even if it is the fluid guide 8 of the cleaning agent cleaning device, it is not necessary to make all the guides constitute a structure for spraying the cleaning liquid, and a part of the fluid guide 8 can be sprayed with the cleaning liquid. Moreover, by increasing the temperature of the cleaning solution (for example, about ah), the removal effect of the grease part ^ is further improved. As shown in Fig. 3 and Fig. 5, in this cleaning agent cleaning device 3, the position corresponding to the upper side of the plate glass G that was transported (along the upper side of the plate glass g: two slightly shifted to the opposite side of the fluid guide) A detergent supply stomach 12 is extended. Here, a plurality of detergent nozzles η are arranged in the detergent supply pipe 12 for the single side of the flat glass G from above. The upper part is sprayed with a cleaning agent. For cleaning 12 ', the cleaning agent supply source ㈣ cleaning agent. The cleaning agent is moved up and down according to the size of the flat glass that is the object to be cleaned, thereby a plurality of cleaning agent nozzles 13' Supply all cleaning agents to the upper side of the flat glass. This cleaning agent is used to “supply all of the flat glass μ to the entire surface of the early side of the flat glass” by gravity. This cleaning device 3 is 17 200528202. A single detergent supply pipe 12 is provided, but the present invention is not limited to this structure. For example, if there are a plurality of detergent supply pipes spaced up and down, even if the conveyance speed of the flat glass is accelerated, the detergent can be sufficiently spread throughout the flat glass. Surface, although as before The cleaning agent cleaning device 3 is provided with a fluid guide 8 for discharging cleaning liquid on both sides of the passing line L. However, in the case where the above-mentioned detergent supply officer 12 is provided, the fluid guide 8 can pass through Line l is only provided on the opposite side of the detergent supply f 12. Since the supporting fluid is liquid, even if the fluid guide 8 is provided only on one side passing through M, the flat glass g is still filled with its surface and the fluid is ejected. 11 The liquid is absorbed by the surface tension of the gap, so it can be transported without contact and maintained in a substantially vertical state. However, considering that the cleaning effect of the fluid guide is higher than that of the cleaning agent supply pipe 12 having the above structure, it is best Equipped with a fluid guide 8 that sprays the cleaning liquid to the line. The cleaning agent is cleaned by the cleaning agent cleaning device 3, so that the dust and grease can be released from the surface of the flat glass. Here the cleaning agent cleaning device The upstream and downstream ends of 3 are respectively provided with air curtain members 14 in the up-down direction. As shown in FIG. 5, this air curtain member 14 is provided with an air supply pipe 15 facing each other on both sides of the passing line L and along Up and down direction 'is used to supply clean air ; And a plurality of air nozzles (also known as liquid removal Π :: 6? This air supply pipe 15 is closely arranged to condense air rolling toward the flat glass surface. Clean air is removed by a filter and the like. The above air supply pipe 15 is shown in the figure欢 礼 #, holes. Slightly i. The air source pressurizes clean air. Each air 1 ± 'from the upstream end and the downstream end. There is clean air on the piece 14. The cleaned air is sprayed on the flat glass 18 200528202. Air curtain. Therefore, prevent water from entering the detergent cleaning device 3 from the upstream process or downstream process. Therefore, prevent the concentration change of the washing liquid. Also prevent the washing liquid from moving to the upstream process or the downstream process. Figure 3 (b) In Fig. 5, the component indicated by symbol 17 is a water receiving pipe arranged below the belt conveyor 2. The component indicated by symbol 18 is used to collect the liquid received by the water receiving pipe 17 and recover it underneath for washing Water collecting pipe of the liquid tank (not shown). The flat glass that has been cleaned by the detergent is then transferred to the high-pressure liquid spray cleaning device 4 (Figure 丨). The high-pressure liquid spray cleaning device 4 will be described with reference to FIGS. 6 to 9. In the same pressure liquid spray cleaning device 4, the belt conveyor 2 corresponding to the high pressure liquid spray cleaning device 4 is used as a flat glass supporting device in the high pressure liquid spray cleaning device. As described above, in the high-pressure liquid spray cleaning device 4, the fluid guides 8 are provided on both sides of the passing line L. A high-pressure liquid spraying member 19 is arranged at the middle portion of the fluid guide member 8 in the conveying direction. Fig. 6 is a partial cutout of the fluid guide 8 for easy understanding of the high-pressure liquid spray member 19. There are two high-pressure liquid spray members 19 passing through the line L with spray nozzle holders 41 respectively. A pair of upper and lower nozzles 41 is mounted on the nozzle holder 41 to press the liquid spray nozzle 20. In addition, the upper and lower separation distances can be changed. From fij / ¾ / S # Mingyao spray nozzle 20 sprays a high-pressure water stream (water spray column). The center is sandwiched between the two liquid pressure spray nozzles 20 facing each other. This is to make the pressure caused by the high-pressure water from the directional pressure liquid office 4-along with the T nozzle 20 reach equilibrium on the flat glass side. 200528202 As shown in FIG. 6 and FIG. 7, the above-mentioned nozzle branches * Xi, #, 猎, / σ, and the V guide mechanism 21 can move up and down on the high-pressure liquid spray member i 9 > ρ ^. As a result, the high-pressure liquid spray nozzle 2 has two structures: the bottom frame 42 of 19 moves. X, the nozzle support plus 4Φ is relative to the nozzle support part 4 ia in the flat glass on Hewei branch 41, which is installed so that it can be relative to the nozzle support. 41 > The rotation of the part 4U can move the high-pressure liquid spray nozzle 20 to the healing position: :: body facing to the active position and retreating to the outside non-acting position? The "4 liquid" nozzle 20 is used to maintain the material in a non-g position.
讀件是㈣將喷嘴支撐部41a固定於 分離 定具之旋鈕。 上刀離的固 =液體喷㈣2G，能繞與平板玻璃成直角之旋轉轴 上下運動圖7及圖8)叙轉。藉此，各噴嘴2〇能邊旋轉，邊 動’故即便是少數…〇亦能洗淨 ： ^ 符E施所標示之構件是用來穩定高壓液2 霧嘴20之旋轉的平衡配重。 饮體嘴 又配設與此高壓液體噴霧嘴2Q 一The reader is a knob that fixes the nozzle support 41a to the separation fixture. The upper blade is separated from the solid = liquid spray 2G, which can move up and down about a rotation axis that is at a right angle to the flat glass (Figure 7 and Figure 8). With this, each nozzle 20 can be rotated while moving 'so that even a small number of ... can be cleaned: ^ The component marked by E is a balance weight used to stabilize the rotation of the high-pressure liquid 2 mist nozzle 20. The body nozzle is also equipped with this high-pressure liquid spray nozzle 2Q 一
流體導件22。其用途在於防止來自^上下運動之移動式 一 丨万止；自向壓液體噴霧嘴2〇 :流所造成平板玻璃之振動。此移動式流體導件22 亦^者通過線L對向。圖示之移動式流體導件2 配設於高壓液體喷霧嘴2G之上方或下方中任―方…'僅 ，卻不特別限定於此構造。例如，亦可配置於上下兩：過 左右兩方、上下左右四方等。 於此高壓液體喷霧構件19之搬送方向兩側，配設有上 下鄰接排列之複數個上下流體導侔 ^ 干23。由於以如此特別密 20 200528202 合於高壓液體嘴霧構件19㉟側之方式配設上下流體導件 23 ’故可更有效防止高壓液體喷霧嘴所造成之平板玻璃之 振動。流 导 件 22。 Fluid guide 22. Its purpose is to prevent the vibration of the flat glass caused by the up and down movement of the mobile type; self-pressing liquid spray nozzle 20: flow. The mobile fluid guide 22 is also opposed by a line L. The mobile fluid guide 2 shown in the figure is arranged above or below the high-pressure liquid spray nozzle 2G, and is only “square”, but not limited to this structure. For example, it can also be arranged on the upper and lower sides: crossing the left and right sides, the upper and lower left and right sides, and so on. A plurality of upper and lower fluid guides 23 are arranged on both sides of the high-pressure liquid spray member 19 in the conveying direction. Since the upper and lower fluid guides 23 ′ are provided in such a particularly dense manner 20 200528202 that is fitted on the 19㉟ side of the high-pressure liquid nozzle mist member, the vibration of the flat glass caused by the high-pressure liquid spray nozzle can be prevented more effectively.
於此高壓液體噴霧洗淨裝置4之上游端沿上下方向延 設有水洗構件24。如圖9所示，此水洗構件24具備：用 來供應純水之供水f 25，其隔通過線L，於兩側彼此對向 ，並沿上下方向延設；及多個水喷嘴26，其沿此供水管 25配設，來朝平板玻璃G之面喷吹水。水自圖略供水 麈送至上述供水管25。由於上游端之水洗構件24喷吹水 於所搬送之平板玻璃，故水均依序流至平板玻璃之兩面整 面。平板玻璃，藉上游端之水洗構件24沖洗可能於前一 製程附著之洗淨液。並且，II由表面乾燥，防止塵埃等附 著0 於高壓液體喷霧洗淨裝置4之下游端，沿上下方向延 設有與在前述清潔劑洗淨裝置3中所說明相同之空氣幕構A water washing member 24 is provided at the upstream end of the high-pressure liquid spray cleaning device 4 in the vertical direction. As shown in FIG. 9, this water washing member 24 is provided with a water supply f 25 for supplying pure water, which is opposed to each other on both sides through a line L, and is extended in the vertical direction; and a plurality of water nozzles 26, which The water supply pipe 25 is arranged along the water glass to spray water onto the surface of the flat glass G. Water is supplied from the water supply pipe to the water supply pipe 25 mentioned above. Since the water-washing member 24 on the upstream side sprays water on the conveyed flat glass, water flows in sequence to both surfaces of the flat glass. The flat glass is washed by the washing member 24 at the upstream end, which may be attached to the previous process. In addition, II is dried from the surface to prevent dust, etc. from being attached to the downstream end of the high-pressure liquid spray cleaning device 4, and the same air curtain structure as described in the aforementioned cleaning agent cleaning device 3 is extended in the vertical direction.
件14(圖6)。由於此構造之設置目的亦與前述相同，故省 略其說明。 本高壓液體喷霧洗淨裝置4雖然隔通過線L於兩側各 配置一高壓液體喷霧構件19,不過，本發明不限於此構造 。亦可於通過線L兩側分別配置複數個高壓液體喷霧構件 19。藉此，即使平板玻璃之搬送速度上昇，仍可充分洗淨 又’亦可依需要增減配設於各高壓液體噴霧構件1 9之 咼壓液體喷霧嘴20之個數。藉由增加高壓噴霧嘴之個數 ，特別是，無須使高壓喷嘴上下運動，藉由高壓液體喷灑 21 200528202 p可洗平平板玻璃整面。此時，只要特別 密排列高壓喷霧嘴即可。 。上下方向緊 藉由此高壓液體噴霧洗淨，遠 刷洗淨等更提高洗淨效果。完成此高0超音=洗淨、擦 板玻璃接著被搬送至最終洗淨裝置5(圖^體贺務洗〉尹之平 設置圖10所示最終洗淨裝置5， / 置:t ::離二:’二部分、塵埃等。因此，最終洗淨裝 設置特別㈣設流料件8，便無須另外 庫置。其原因在於’平板玻璃藉自流體導件8供 〜'至八表面之水洗淨。看情形，洗淨 此最終洗淨裝置5。最終洗淨完成之平板使用 至除水裝置6(圖6)。 板破璃接者被搬送 邊麥照圖11至圖14邊說明除水裝置“除 中，與除水裝置6對應之部分之帶式輸送機2機能上、 二除：裝“之平板玻璃支撑裝置。如前述，除水裝：6 中，〜體導件8設置於通過線L之兩側。 士圖11圖13及圖14所示，於通過線l 錄搬送方向之流料# 27之中間部，自上游依序分二 留有間隔、平行地配設彳2個水洗構件28、29及除二 件3〇。並且，上述流體導件27與前述流體導件8不 、 之下游側部分2几使用超潔淨空氣作為 抓體。超潔淨空氣是藉網目較前述潔淨空氣更細:過:器 22 200528202 等淨化處理過之空氣。 如圖13所示，兩水洗構件以，同時具有自垂直方 向略微朝上游側傾斜延設之供水管31以及沿此供水管Μ 之長邊方向排列之多個水噴嘴32。純水自圖略供水源麗送 至供水管31’各水喷嘴32朝平板玻璃G面喷射純水。上 述水洗構件28、29是用爽兹1±1^；®^ 一 y疋用；精由反覆進行與最終洗淨裝置5 之洗淨相同之洗淨，進一步仔 ^ ^ 于、、、田自千板玻璃表面沖洗油脂 口P为、塵埃等之構件。此水洗構 τ # + 光偁仵28、29不使用循環純 :::」用純水-次即丟棄(可以說是使用拋棄式純水）， 以提南平板玻璃之潔淨度。 件30由平打於供水f 31、且從垂直方向略微 朝上域傾斜延設之供氣管（亦稱氣刀架）33構成。超潔淨 空氣自圖略供氣源壓送至供氣管33。又，如圖12及圖Μ 匕仏氣& 33形成用來朝平板玻璃面喷吹空氣之狹 窄^縫34。除水構件3〇，係使自通過線l兩側喷出之膜 ^孔抓N贺吹平板玻璃兩面對應之部位。細縫34沿供氣 ▲之長邊方向連績形成，或留有一點點間隔斷續形成 ”、、 何連，之膜狀鬲壓氣流N連續沿上下方向（略 微朝上游側傾斜）對平板玻帛G噴吹。此氣流以接近音速 之速度噴射。稱此氣流為氣刀N。 圖12所不’供氣管3 3，係能繞其長邊方向之中心 軸旋轉。έ士里，* π 、， 瑕i刀Ν之方向能改變。例如，可垂直朝向 =玻璃表面’亦可自此朝向上游側或下游側。又由於供 ^ 自直略微朝上游側傾斜，故旋轉氣刀Ν，使氣刀 23 200528202 N之方向略微朝a 璃表面之水份往二側，氣刀…更可朝上游’將平板玻 上游側下方吹掉，於下人二果，將水份自氣刀架33往 平板玻璃之全部表面：：：不移動。自通過氣刀u 除去水份等，使其成乾燥狀態。 自搬送洗構件28、29自垂直略微朝上游側傾斜，故 目搬运之平板玻璃 水之供應，可進行古σΓ 向之任—部分均獲得新的 亦士円、、進仃阿叩質之洗淨。又，此水洗構件28、29 果^述（、乳官33，能繞其長邊方向之中心軸旋轉。結 果，純水之噴射方向能改變。 如圖12所示’將隔離板”配設成接近通過線“側 于水構件3〇。此隔離板35係用來防止水自除水構件3〇 二動至下游側。各隔離板35自除水構件3G，沿與含有通 ^線L之鉛直面（實質上是平板玻璃面）垂直之方向向外突 、，。又，隔離板35平行於供氣管33及水洗構件28、29， 並自錯直方向朝上游側傾斜延設。結果，無論於此上游側 、之水如何飛濺，均藉此隔離板3 5防止其移往下游側 ^除水構# 3G。此隔離板35除了設在接近上述除水構件 〇之位置外，亦可設置成例如接近下游側之水洗構件29 <下私側。 如前述，上述流體導件27於此隔離板35之上游側使 用純水作為支撐流體，於隔離板35之下游側使用超潔淨 &氣作為支撐流體。因此，自氣刀架33至下游完全不使 用水’平板玻璃成乾燥狀態。 之各裝置3 又，雖然未圖示，不過，可將洗淨設備i 200528202 、心5、6中作為支樓裝置之帶式輸送機2之部分構成能 移動，用來使所支樓平板玻璃掉落至下方。例如，若可沿 與搬送方向成直角之方向移動’帶式輸送機上之平板玻璃 即掉落至下方。或者，亦可藉由傾斜作動皮帶部，使皮帶 退離平板玻璃之通過線L，令平板玻璃掉落。藉此構造， 即使在例如因洗淨時損傷而無法達到製品化之情形下，搬 送作業線、洗淨設備仍不會被玻璃碎片弄髒， 可容易除去損傷之玻璃。 j據此洗淨設備]，由於流體導件8、27設在通過線鲁 、之單側或兩側，i文流體導件貞平板玻璃之間隙藉支撑用 液體之表面張力形成一定厚度之液體層，可在不接觸結構 物之狀態下’支摟平板玻璃並予以搬送。又，藉由使用液 體作為導❹流體，可更有效地自平板玻璃除去玻璃屑、 其他塵埃。 、又，上述實施形態雖然就處理對象例示平板玻璃，不 過’本發明不限於平板玻璃。例如，稀有金屬、矽製之& 材、平面型顯示器用玻璃等各種板材可成為處理對象。 9 ^又於以上所說明之洗淨設備令雖然以一直線配置清 办別洗淨裝置3、高壓液體噴霧洗淨裝置4、最終洗淨裝 置5及除水裝置6，不過，本發明不限於此構造。例如， 搬送作業線可自中途正交配置，又可平行配置。 本發明雖然如此參照特定例加以說明，不過，這些例 子一疋用來說明，而不是用來限定本發明，對本領域有一 般知識者可在不超出本發明之精神及範圍下，對本文所揭 25 200528202 示之實施例進行變更、追加或消除。 [業 依據本發明，π L 、 了對3有大型化、薄型化之平板玻璃之 板材進一步提高复品晳一、 口口貝，可進仃迅速且有效之洗淨處理。 【圖式簡單說明】 (一）圖式部分 圖1係表示本發明洗淨設備之一實施形態之前視圖。 圖2係圖1之洗淨設備之俯視圖。Piece 14 (Figure 6). Since the purpose of setting this structure is also the same as described above, its explanation is omitted. Although the high-pressure liquid spray washing device 4 is provided with a high-pressure liquid spray member 19 on each side through the line L, the present invention is not limited to this structure. A plurality of high-pressure liquid spray members 19 may be arranged on both sides of the passage line L, respectively. Thereby, even if the conveying speed of the flat glass is increased, it can be sufficiently cleaned. It is also possible to increase or decrease the number of pressurized liquid spray nozzles 20 provided in each high-pressure liquid spray member 19 as required. By increasing the number of high-pressure spray nozzles, in particular, there is no need to move the high-pressure nozzle up and down, and spraying high-pressure liquid 21 200528202 p can flatten the entire surface of the flat glass. In this case, it is only necessary to arrange the high-pressure spray nozzles particularly closely. . The vertical direction is tightly cleaned by this high-pressure liquid spray cleaning, remote brush cleaning, etc. to further improve the cleaning effect. Complete this high 0 supersonic = wash, wipe the glass and then be transported to the final cleaning device 5 (Figure ^ Body Conservation Wash> Yin Zhiping set up the final cleaning device 5 shown in Figure 10, / set: t :: 离 二: 'Two parts, dust, etc. Therefore, in the final cleaning installation, the flow material 8 is specially installed, and there is no need to store it separately. The reason is that' the flat glass is borrowed from the fluid guide 8 to ~ ' According to the situation, wash the final cleaning device 5. The final washed plate is used to the dewatering device 6 (Figure 6). The person who broke the glass is transported while the wheat is removed. The belt conveyor 2 of the device "removing, the part corresponding to the water removing device 6 is functional, the second removing: installing" is a flat glass supporting device. As mentioned above, the water removing device: 6 medium, ~ body guide 8 is provided in Pass both sides of the line L. As shown in Figures 11 and 13 and Figure 14, at the middle of the stream # 27 in the conveying direction through the line l, space 2 is arranged in parallel from the upstream and spaced in parallel. Water-washing members 28, 29 and the second two 30. In addition, the above-mentioned fluid guide 27 and the above-mentioned fluid guide 8 are not used on the downstream side 2 The ultra-clean air is used as the gripper. The ultra-clean air is made of finer meshes than the aforementioned clean air: cleaned: device 22 200528202 and other purified air. As shown in Figure 13, the two water-washed components have a slight upward direction from the vertical direction. The water supply pipe 31 slantly extended on the upstream side and a plurality of water nozzles 32 arranged along the longitudinal direction of the water supply pipe M. Pure water is sent from the water supply source to the water supply pipe 31 ', and each water nozzle 32 faces the flat glass G surface. Spray pure water. The above water-washing members 28 and 29 are used 1 ± 1 ^; ® ^ a y; the same washing is repeated with the same washing as the final washing device 5, and further ^ ^ 、、 Tian Zi Qianban glass surface washes the grease port P as a component of dust, etc. This water-washing structure τ # + 光 偁 仵 28, 29 does not use the cycle of pure ::: "Discard with pure water-times (can be said to be The use of disposable pure water) to improve the cleanliness of the flat glass. The piece 30 is composed of an air supply pipe (also known as an air knife holder) 33 that is flat on the water supply f 31 and is inclined and extended from the vertical direction to the upper area. Clean air is sent from the air supply source to the air supply pipe 33. Also, as shown in Fig. 12 and Fig. The dagger gas & 33 forms a narrow slit 34 for blowing air toward the flat glass surface. The water removing member 30 is a film sprayed from both sides of the passing line l. The holes are grasped on both sides of the N glass plate. The thin slit 34 is formed continuously in the long direction of the air supply ▲, or is formed intermittently with a little interval. ", He Lian, the film-shaped squeezing airflow N is continuously in the up-down direction (slightly inclined toward the upstream side) ) Blow flat glass 帛 G. This air jet is sprayed at a speed close to the speed of sound. This air stream is called the air knife N. The air supply pipe 3 3 shown in Figure 12 can rotate around its central axis in the long side direction. Here, the direction of * π and i can be changed. For example, it can be vertically oriented = glass surface ', and it can also be directed to the upstream or downstream side. Because the supply ^ is inclined slightly from the straight to the upstream side, rotate the air knife N to make the direction of the air knife 23 200528202 N slightly toward the water on the glass surface to the two sides. Blow it down from the side, and in the second person, move the water from the air knife holder 33 to the entire surface of the flat glass ::: Do not move. Water and the like are removed from the air knife u to make it dry. The self-conveying washing members 28 and 29 are slightly inclined from the vertical to the upstream side. Therefore, the supply of flat glass water that is carried by the eye can be used for any of the ancient σΓ directions—partially obtained new yishi 円, 仃 仃 quality cleaning net. In addition, the water-washing members 28 and 29 can be described (the milk officer 33 can rotate around the central axis of the long side direction. As a result, the spray direction of pure water can be changed. It is close to the passing line "side of the water member 30. This insulation plate 35 is used to prevent water from moving from the water removal member 30 to the downstream side. Each of the insulation plates 35 is from the water removal member 3G, and along the line containing the communication line L The vertical surface (substantially a flat glass surface) projects outward in a vertical direction. Also, the partition plate 35 is parallel to the air supply pipe 33 and the water washing members 28 and 29, and is inclined and extended toward the upstream side from the wrong direction. Result No matter how the water splashes on the upstream side, the insulation plate 35 is used to prevent it from moving to the downstream side. ^ Water removal structure # 3G. In addition to the insulation plate 35 located near the water removal structure 0, It may be provided, for example, near the downstream side of the water washing member 29 < the lower private side. As mentioned above, the above-mentioned fluid guide 27 uses pure water as the supporting fluid on the upstream side of the partition plate 35 and uses ultra-clean on the downstream side of the partition plate 35. & Gas as the supporting fluid. Therefore, from the air knife holder 33 to the downstream completely Use water 'flat glass to make it dry. Each device 3, although not shown in the figure, can be moved as part of the belt conveyor 2 of the cleaning equipment i 200528202, heart 5, 6 as a branch device. , Used to make the flat glass of the supported building fall to the bottom. For example, if the flat glass on the belt conveyor can be moved in a direction perpendicular to the conveying direction, the flat glass will fall to the bottom. Alternatively, it can also be operated by tilting The belt part retracts the belt from the plate glass passing line L, and the plate glass is dropped. With this structure, even if the product cannot be manufactured due to damage during cleaning, for example, the conveying line and cleaning equipment are still It will be stained by glass fragments, and the damaged glass can be easily removed. J Wash the equipment accordingly], because the fluid guides 8, 27 are provided on one or both sides of the thread guide, the fluid guides are flat glass The gap can be formed into a liquid layer of a certain thickness by the surface tension of the supporting liquid, and can be used to support and transport the flat glass without touching the structure. Moreover, by using liquid as the conductive fluid, it can be more effective. Flat glass removes glass shavings and other dust. In addition, although the above embodiment exemplifies flat glass as the object of processing, the present invention is not limited to flat glass. For example, rare metals, silicon & materials, flat display glass, etc. Various slabs can be treated. 9 ^ The cleaning equipment explained above, although the cleaning equipment 3, high pressure liquid spray cleaning equipment 4, final cleaning equipment 5 and dewatering equipment 6 are arranged in a straight line, However, the present invention is not limited to this structure. For example, the conveying line can be arranged orthogonally or halfway from the middle. Although the present invention is described with reference to specific examples, these examples are used for illustration, not limitation. The present invention, those having ordinary knowledge in the art, can make changes, additions or eliminations to the embodiment shown in 25 200528202 without departing from the spirit and scope of the present invention. [Industry According to the present invention, π L and 3 sheets with large and thin flat glass are further improved in reproducibility. Mouth and shellfish can be washed quickly and effectively. [Brief description of the drawings] (I) Schematic part FIG. 1 is a front view showing an embodiment of a cleaning device of the present invention. FIG. 2 is a top view of the cleaning equipment of FIG. 1. FIG.
圖3(a)係表示圖丨洗淨設備之清潔劑洗淨裝置之一實 施形態之俯視圖。 圖3(b)係圖3⑷之前視圖，為求容易理解，表示除去 前側流體導件之狀態。 圖4係圖3(a)之IV-IV線之剖面圖。 圖5係圖3之清潔劑洗淨裝置之側視圖，且係圖3(b) 之V - V線視圖。Fig. 3 (a) is a plan view showing one embodiment of the cleaning device of the cleaning device of the cleaning equipment. Fig. 3 (b) is a front view of Fig. 3 (a). For easy understanding, the front fluid guide is removed. Fig. 4 is a sectional view taken along the line IV-IV in Fig. 3 (a). Fig. 5 is a side view of the cleaning agent cleaning device of Fig. 3 and a view taken along the line V-V of Fig. 3 (b).
圖6係表示圖丨洗淨裝置之高壓液體噴霧洗淨裝置之 一實施形態之局部有缺口之前視圖。 圖7係圖6之高壓液體喷霧洗淨裝置之俯視圖。 圖8(a)係表示圖6高壓液體噴霧洗淨裝置之一高壓液 體喷嘴例子之前視圖。 圖8(b)係圖8(〇之珊_珊線之剖面圖。 圖9係表示圖6高壓液體噴霧洗淨裝置之一水洗構件 例子之側視圖，且係相當於圖6之]X 線視圖。 圖10係表示圖1洗淨裝置之一最終洗淨裝置例子之前 26 200528202 視圖。 圖11係表示圖1洗淨裝置之-除水裝置實施形態之前 視圖。 圖12係圖U之除水裝置之俯視圖。 且俜11除水裝置中之水洗構件之側視圖 且係相S於圖11中ΧΙΙΙ_ΧΙΙΙ線視圖。 圖14⑷係表示圖u除水裝置之除水 且係相當於圖1 1之XIV_XIV線視圖。 ⑨視圖Fig. 6 is a partially cutaway front view showing one embodiment of the high-pressure liquid spray cleaning device of the cleaning device of Fig. FIG. 7 is a top view of the high-pressure liquid spray cleaning device of FIG. 6. FIG. 8 (a) is a front view showing an example of a high-pressure liquid nozzle of the high-pressure liquid spray cleaning device of FIG. 6. FIG. Fig. 8 (b) is a cross-sectional view of the San-Shan line of Fig. 8 (0. Fig. 9 is a side view showing an example of a water-washing member of the high-pressure liquid spray cleaning device of Fig. 6, and is equivalent to X-ray of Fig. 6) Fig. 10 is a view showing one example of the final cleaning device 26 200528202 of the cleaning device of Fig. 1. Fig. 11 is a front view showing the embodiment of the water-removing device of the cleaning device of Fig. 1. Fig. 12 is the water-removing device of Fig. U The top view of the device. And the side view of the water-washing member in the 除 11 water removal device is a view of the line XIIII_XΙΙΙ in Figure 11. Figure 14 shows the water removal of the water removal device in Figure u and is equivalent to XIV_XIV of Figure 11. Line view. ⑨ view
圖14(b)係圖14(a)之俯視圖。 (二）元件代表符號Fig. 14 (b) is a top view of Fig. 14 (a). (B) the symbol of the component
1 洗淨設備 2 帶式輸送機 3 清潔劑洗淨裝置 4 高壓液體噴霧洗淨裝置 5 最終洗淨裝置 6 除水裝置 8 流體導件 9 框構件 10 導板 11 流體喷出部 11a 第1流體噴出部 lib 第2流體噴出部 lie 流體噴嘴 12 清潔劑供應管 27 200528202 13 清潔劑喷嘴 14 空氣幕構件 15 供氣管 16 空氣喷嘴 17 接水管道 18 集水管 19 高壓液體喷霧構件 20 高壓液體喷霧嘴 20a 旋轉軸 20b 平衡配重 21 線性導引機構 22 移動式流體導件 23 上下流體導件 24 水洗構件 25 供水管 26 水喷嘴 27 流體導件 27a 上游側部分 27b 下游側部分 28、29 水洗構件 30 除水構件 31 供水管 32 水喷嘴 33 供氣管 28 2005282021 Washing equipment 2 Belt conveyor 3 Detergent washing device 4 High-pressure liquid spray washing device 5 Final washing device 6 Dewatering device 8 Fluid guide 9 Frame member 10 Guide plate 11 Fluid ejection unit 11a First fluid Ejection section lib 2nd fluid ejection section lie Fluid nozzle 12 Detergent supply pipe 27 200528202 13 Detergent nozzle 14 Air curtain member 15 Air supply pipe 16 Air nozzle 17 Water pipe 18 Water collecting pipe 19 High-pressure liquid spray member 20 High-pressure liquid spray Nozzle 20a Rotary shaft 20b Balance weight 21 Linear guide mechanism 22 Mobile fluid guide 23 Upper and lower fluid guide 24 Water washing member 25 Water supply pipe 26 Water nozzle 27 Fluid guide 27a Upstream portion 27b Downstream portion 28, 29 Washing member 30 Water removal member 31 Water supply pipe 32 Water nozzle 33 Air supply pipe 28 200528202
34 細缝 35 隔離板 41 喷嘴支架 41a 噴嘴支撐部 41b 基部 42 底架 43 旋紐 G 平板玻璃 L 平板玻璃之通過線 N 膜狀氣流（氣刀）34 Slit 35 Isolation plate 41 Nozzle holder 41a Nozzle support 41b Base 42 Underframe 43 Knob G Plate glass L Passing line of plate glass N Film-like airflow (air knife)
2929
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002340764A JP2004174308A (en) | 2002-11-25 | 2002-11-25 | Sheet material washing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200528202A true TW200528202A (en) | 2005-09-01 |
| TWI344398B TWI344398B (en) | 2011-07-01 |
Family
ID=32703300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW93103883A TW200528202A (en) | 2002-11-25 | 2004-02-18 | Sheet material washing equipment |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2004174308A (en) |
| TW (1) | TW200528202A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI610868B (en) * | 2012-03-06 | 2018-01-11 | 大福股份有限公司 | Cleaning apparatus |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4669760B2 (en) * | 2004-09-14 | 2011-04-13 | 芝浦メカトロニクス株式会社 | Substrate processing apparatus and processing method |
| KR101284681B1 (en) | 2007-02-15 | 2013-07-16 | 주식회사 케이씨텍 | Cleaning device for substrate and method thereof |
| WO2010014167A2 (en) * | 2008-07-31 | 2010-02-04 | Corning Incorporated | Devices for vertical treatment of glass |
| JP5717526B2 (en) * | 2011-04-26 | 2015-05-13 | 化研テック株式会社 | Partial cleaning apparatus and partial cleaning method |
| US20190010074A1 (en) * | 2015-08-21 | 2019-01-10 | Corning Incorporated | Methods of processing a glass web |
| JP7187551B2 (en) * | 2017-10-06 | 2022-12-12 | コーニング インコーポレイテッド | Glass sheet processing apparatus and method |
| CN108372147B (en) * | 2018-04-24 | 2023-11-28 | 江苏金鼎建设集团有限公司 | Efficient wallboard belt cleaning device |
| CN113070265A (en) * | 2021-04-06 | 2021-07-06 | 安徽新佰德新型材料有限公司 | High-pressure cleaning equipment and method for colored crystal glass |
| CN113770143B (en) * | 2021-08-30 | 2022-07-12 | 蚌埠高华电子股份有限公司 | Device and method for cleaning grinding residues of liquid crystal glass substrate |
| CN115285696B (en) * | 2022-10-09 | 2022-12-09 | 山东阅航环保科技有限公司 | Two-sided cleaning line of cavity glass |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS589670Y2 (en) * | 1978-09-20 | 1983-02-22 | 日立造船株式会社 | Tube sheet cleaning equipment |
| JPS6028385B2 (en) * | 1980-04-26 | 1985-07-04 | 呉船産業株式会社 | washing drying equipment |
| JPH10118583A (en) * | 1996-10-24 | 1998-05-12 | Nippon Electric Glass Co Ltd | Cleaning device for planar matter |
| JP2000044287A (en) * | 1998-07-28 | 2000-02-15 | Shirai Tekkosho:Kk | Draining device for washing sheet glass |
| JP2001213517A (en) * | 1999-11-24 | 2001-08-07 | Daiichi Shisetsu Kogyo Kk | Conveying device for plate member |
| DE10130999A1 (en) * | 2000-06-29 | 2002-04-18 | D M S Co | Multifunction cleaning module of a manufacturing device for flat screens and cleaning device using the same |
| JP2002308423A (en) * | 2001-04-18 | 2002-10-23 | Corning Japan Kk | Plate material carrying method and plate material carrying device |
-
2002
- 2002-11-25 JP JP2002340764A patent/JP2004174308A/en active Pending
-
2004
- 2004-02-18 TW TW93103883A patent/TW200528202A/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI610868B (en) * | 2012-03-06 | 2018-01-11 | 大福股份有限公司 | Cleaning apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004174308A (en) | 2004-06-24 |
| TWI344398B (en) | 2011-07-01 |
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