TW200507021A - Methods and apparatus for sealing an opening of a processing chamber - Google Patents
Methods and apparatus for sealing an opening of a processing chamberInfo
- Publication number
- TW200507021A TW200507021A TW093113500A TW93113500A TW200507021A TW 200507021 A TW200507021 A TW 200507021A TW 093113500 A TW093113500 A TW 093113500A TW 93113500 A TW93113500 A TW 93113500A TW 200507021 A TW200507021 A TW 200507021A
- Authority
- TW
- Taiwan
- Prior art keywords
- wall
- opening
- sealing portion
- contact
- sealing
- Prior art date
Links
- 238000007789 sealing Methods 0.000 title abstract 6
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sliding Valves (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Details Of Valves (AREA)
- Closures For Containers (AREA)
- Lift Valve (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US47014003P | 2003-05-13 | 2003-05-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200507021A true TW200507021A (en) | 2005-02-16 |
TWI283428B TWI283428B (en) | 2007-07-01 |
Family
ID=33452371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093113500A TWI283428B (en) | 2003-05-13 | 2004-05-13 | Methods and apparatus for sealing an opening of a processing chamber |
Country Status (6)
Country | Link |
---|---|
US (2) | US7086638B2 (zh) |
JP (2) | JP2006526125A (zh) |
KR (1) | KR100914087B1 (zh) |
CN (1) | CN100408902C (zh) |
TW (1) | TWI283428B (zh) |
WO (1) | WO2004102055A1 (zh) |
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KR100914087B1 (ko) | 2003-05-13 | 2009-08-27 | 어플라이드 머티어리얼스, 인코포레이티드 | 처리 챔버의 개구를 밀봉하기 위한 방법 및 장치 |
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ATE360180T1 (de) * | 2004-03-15 | 2007-05-15 | Applied Materials Gmbh & Co Kg | Vakuumbehandlungsanlage mit umsetzbarem wartungsventil |
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-
2004
- 2004-05-12 KR KR1020057020672A patent/KR100914087B1/ko active IP Right Grant
- 2004-05-12 US US10/844,974 patent/US7086638B2/en not_active Expired - Lifetime
- 2004-05-12 JP JP2006514355A patent/JP2006526125A/ja active Pending
- 2004-05-12 WO PCT/US2004/015000 patent/WO2004102055A1/en active Application Filing
- 2004-05-12 CN CNB2004800128207A patent/CN100408902C/zh not_active Expired - Lifetime
- 2004-05-13 TW TW093113500A patent/TWI283428B/zh not_active IP Right Cessation
-
2006
- 2006-07-03 US US11/480,615 patent/US20060249701A1/en not_active Abandoned
-
2010
- 2010-06-02 JP JP2010127011A patent/JP5592166B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP5592166B2 (ja) | 2014-09-17 |
CN1788175A (zh) | 2006-06-14 |
CN100408902C (zh) | 2008-08-06 |
JP2010281446A (ja) | 2010-12-16 |
KR20050121750A (ko) | 2005-12-27 |
TWI283428B (en) | 2007-07-01 |
WO2004102055A1 (en) | 2004-11-25 |
US7086638B2 (en) | 2006-08-08 |
US20060249701A1 (en) | 2006-11-09 |
JP2006526125A (ja) | 2006-11-16 |
US20040245489A1 (en) | 2004-12-09 |
KR100914087B1 (ko) | 2009-08-27 |
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