TW200507021A - Methods and apparatus for sealing an opening of a processing chamber - Google Patents

Methods and apparatus for sealing an opening of a processing chamber

Info

Publication number
TW200507021A
TW200507021A TW093113500A TW93113500A TW200507021A TW 200507021 A TW200507021 A TW 200507021A TW 093113500 A TW093113500 A TW 093113500A TW 93113500 A TW93113500 A TW 93113500A TW 200507021 A TW200507021 A TW 200507021A
Authority
TW
Taiwan
Prior art keywords
wall
opening
sealing portion
contact
sealing
Prior art date
Application number
TW093113500A
Other languages
English (en)
Other versions
TWI283428B (en
Inventor
Shinichi Kurita
Ke-Ling Lee
Wendell T Blonigan
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of TW200507021A publication Critical patent/TW200507021A/zh
Application granted granted Critical
Publication of TWI283428B publication Critical patent/TWI283428B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Details Of Valves (AREA)
  • Closures For Containers (AREA)
  • Lift Valve (AREA)
TW093113500A 2003-05-13 2004-05-13 Methods and apparatus for sealing an opening of a processing chamber TWI283428B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US47014003P 2003-05-13 2003-05-13

Publications (2)

Publication Number Publication Date
TW200507021A true TW200507021A (en) 2005-02-16
TWI283428B TWI283428B (en) 2007-07-01

Family

ID=33452371

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093113500A TWI283428B (en) 2003-05-13 2004-05-13 Methods and apparatus for sealing an opening of a processing chamber

Country Status (6)

Country Link
US (2) US7086638B2 (zh)
JP (2) JP2006526125A (zh)
KR (1) KR100914087B1 (zh)
CN (1) CN100408902C (zh)
TW (1) TWI283428B (zh)
WO (1) WO2004102055A1 (zh)

Families Citing this family (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100914087B1 (ko) 2003-05-13 2009-08-27 어플라이드 머티어리얼스, 인코포레이티드 처리 챔버의 개구를 밀봉하기 위한 방법 및 장치
KR100960030B1 (ko) * 2004-03-12 2010-05-28 배트 홀딩 아게 진공 게이트 밸브
ATE360180T1 (de) * 2004-03-15 2007-05-15 Applied Materials Gmbh & Co Kg Vakuumbehandlungsanlage mit umsetzbarem wartungsventil
CN1778986B (zh) * 2004-06-02 2015-08-19 应用材料公司 用于密封腔室的方法和装置
US8648977B2 (en) * 2004-06-02 2014-02-11 Applied Materials, Inc. Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors
US20060102282A1 (en) * 2004-11-15 2006-05-18 Supercritical Systems, Inc. Method and apparatus for selectively filtering residue from a processing chamber
US7767145B2 (en) 2005-03-28 2010-08-03 Toyko Electron Limited High pressure fourier transform infrared cell
US20060226117A1 (en) * 2005-03-29 2006-10-12 Bertram Ronald T Phase change based heating element system and method
US7494107B2 (en) * 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US20060225769A1 (en) * 2005-03-30 2006-10-12 Gentaro Goshi Isothermal control of a process chamber
US7469715B2 (en) * 2005-07-01 2008-12-30 Applied Materials, Inc. Chamber isolation valve RF grounding
US7771150B2 (en) 2005-08-26 2010-08-10 Jusung Engineering Co., Ltd. Gate valve and substrate-treating apparatus including the same
DE102005040741B4 (de) * 2005-08-26 2007-06-14 Asys Automatic Systems Gmbh & Co. Kg Bearbeitungsanlage modularen Aufbaus für flächige Substrate
JP4979429B2 (ja) * 2006-03-31 2012-07-18 バット ホールディング アーゲー 真空バルブ
JP2010520621A (ja) * 2007-03-01 2010-06-10 アプライド マテリアルズ インコーポレイテッド スリットバルブドアの密閉圧力の制御
WO2008106634A2 (en) * 2007-03-01 2008-09-04 Applied Materials, Inc. Floating slit valve for transfer chamber interface
US8082741B2 (en) * 2007-05-15 2011-12-27 Brooks Automation, Inc. Integral facet cryopump, water vapor pump, or high vacuum pump
KR101588565B1 (ko) * 2007-11-01 2016-01-26 어플라이드 머티어리얼스, 인코포레이티드 프로세싱 챔버의 개구를 밀봉하는 방법 및 장치
US8377213B2 (en) 2008-05-05 2013-02-19 Applied Materials, Inc. Slit valve having increased flow uniformity
JP5528452B2 (ja) 2008-08-28 2014-06-25 アプライド マテリアルズ インコーポレイテッド Ｏリングを可動合わせ部へ結合する溝付きｔｓｓｌドア
US8297591B2 (en) * 2008-08-29 2012-10-30 Applied Materials, Inc. Slit valve control
US20100098518A1 (en) * 2008-10-20 2010-04-22 Applied Materials, Inc. In/out door for a vacuum chamber
EP2287501A1 (de) * 2009-08-19 2011-02-23 VAT Holding AG Ventil zum im Wesentlichen gasdichten Unterbrechen eines Fliesswegs
KR101762984B1 (ko) 2010-01-29 2017-07-28 배트 홀딩 아게 개구부를 폐쇄하기 위한 도어
US8641014B2 (en) 2010-09-10 2014-02-04 Applied Materials, Inc. Gate valve
EP2551564A1 (de) * 2011-07-28 2013-01-30 VAT Holding AG Ventil zum im Wesentlichen gasdichten Unterbrechen eines Fliesswegs
US9086172B2 (en) * 2012-07-19 2015-07-21 Vat Holding Ag Vacuum valve
US9086173B2 (en) * 2012-07-19 2015-07-21 Vat Holding Ag Vacuum valve
KR101528458B1 (ko) * 2013-01-18 2015-06-18 (주) 유앤아이솔루션 슬라이딩 역압 차단 밸브
WO2014174926A1 (ja) * 2013-04-22 2014-10-30 Ckd株式会社 ゲートバルブ
CN104421437B (zh) * 2013-08-20 2017-10-17 中微半导体设备(上海)有限公司 活动阀门、活动屏蔽门及真空处理***
TWI656293B (zh) * 2014-04-25 2019-04-11 瑞士商Ｖａｔ控股股份有限公司 閥
MY190405A (en) * 2014-12-19 2022-04-21 Vat Holding Ag Door for closing a chamber opening in a chamber wall of a vacuum chamber
US9638335B2 (en) 2015-01-08 2017-05-02 King Lai Hygienic Materials Co., Ltd. Double sealing valve
DE102015106916A1 (de) * 2015-05-04 2016-11-10 M. Braun Inertgas-Systeme Gmbh Transferventil
JP6797177B2 (ja) * 2015-08-06 2020-12-09 バット ホールディング アーゲー バルブ
US10975896B2 (en) 2015-08-10 2021-04-13 Vat Holding Ag Pneumatic valve drive
EP3211281A1 (de) * 2016-02-24 2017-08-30 VAT Holding AG Vakuumventil zum schliessen eines fliesswegs mit zweiteiligem ventilteller
US10224224B2 (en) * 2017-03-10 2019-03-05 Micromaterials, LLC High pressure wafer processing systems and related methods
US10622214B2 (en) 2017-05-25 2020-04-14 Applied Materials, Inc. Tungsten defluorination by high pressure treatment
JP6902409B2 (ja) * 2017-06-23 2021-07-14 東京エレクトロン株式会社 プラズマ処理装置
US10276411B2 (en) 2017-08-18 2019-04-30 Applied Materials, Inc. High pressure and high temperature anneal chamber
WO2019036157A1 (en) 2017-08-18 2019-02-21 Applied Materials, Inc. HIGH PRESSURE AND HIGH TEMPERATURE RECOVERY CHAMBER
CN111095524B (zh) 2017-09-12 2023-10-03 应用材料公司 用于使用保护阻挡物层制造半导体结构的设备和方法
KR102392753B1 (ko) * 2017-09-25 2022-05-03 주식회사 만도 브레이크 시스템용 솔레노이드 밸브
US10636629B2 (en) 2017-10-05 2020-04-28 Applied Materials, Inc. Split slit liner door
CN117936420A (zh) 2017-11-11 2024-04-26 微材料有限责任公司 用于高压处理腔室的气体输送***
CN111432920A (zh) 2017-11-17 2020-07-17 应用材料公司 用于高压处理***的冷凝器***
KR20230079236A (ko) 2018-03-09 2023-06-05 어플라이드 머티어리얼스, 인코포레이티드 금속 함유 재료들을 위한 고압 어닐링 프로세스
US10950429B2 (en) 2018-05-08 2021-03-16 Applied Materials, Inc. Methods of forming amorphous carbon hard mask layers and hard mask layers formed therefrom
US10748783B2 (en) 2018-07-25 2020-08-18 Applied Materials, Inc. Gas delivery module
US10675581B2 (en) 2018-08-06 2020-06-09 Applied Materials, Inc. Gas abatement apparatus
CN112996950B (zh) 2018-11-16 2024-04-05 应用材料公司 使用增强扩散工艺的膜沉积
WO2020117462A1 (en) 2018-12-07 2020-06-11 Applied Materials, Inc. Semiconductor processing system
US11901222B2 (en) 2020-02-17 2024-02-13 Applied Materials, Inc. Multi-step process for flowable gap-fill film
US11328943B2 (en) * 2020-04-03 2022-05-10 Applied Materials, Inc. Dual gate and single actuator system
TWI730808B (zh) * 2020-06-11 2021-06-11 新萊應材科技有限公司 二向移動之閥件驅動裝置
CN112392978A (zh) * 2020-11-11 2021-02-23 上海华力集成电路制造有限公司 狭缝阀装置

Family Cites Families (82)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US597549A (en) * 1898-01-18 Horseshoe-pad
US2184892A (en) * 1938-01-14 1939-12-26 Dickinson John Arthur Valve
US2476711A (en) * 1943-11-12 1949-07-19 Samuel H Edwards Valve
GB851444A (en) 1956-06-05 1960-10-19 Commissariat Energie Atomique Improvements in or relating to vacuum control valves
US3040773A (en) * 1959-09-04 1962-06-26 Crane Co Combined valve actuating and indicator mechanism
US3152786A (en) * 1961-03-01 1964-10-13 Gray Tool Co Bifaced gate valve having tapered seat sealing surfaces
FR1538390A (fr) * 1967-06-27 1968-09-06 Alcatel Sa Vanne de grand diamètre pour ultravide
US3524467A (en) * 1967-10-13 1970-08-18 Exxon Research Engineering Co Fluid expanded disk valve
US3717322A (en) * 1970-10-27 1973-02-20 Verreries Appliquees Shutter valves for high-vacuum applications
CH546912A (de) * 1971-10-25 1974-03-15 Vat Ag Schnellschlussventil.
US4359203A (en) * 1974-02-08 1982-11-16 Electro Nucleonics, Inc. Valve assembly
US3931953A (en) * 1974-05-09 1976-01-13 Communications Satellite Corporation (Comsat) Ultra high vacuum valve
CH582842A5 (zh) * 1974-07-15 1976-12-15 Vat Ag
US4075787A (en) * 1975-07-07 1978-02-28 American Sterilizer Company Inflatable pouch to seal
US4070001A (en) * 1976-07-06 1978-01-24 Musgrove Ronald R Vacuum safety valve
DE2639198C3 (de) 1976-08-31 1981-11-26 Messerschmitt-Bölkow-Blohm GmbH, 8000 München Absperrschieber
US4131131A (en) 1977-06-22 1978-12-26 Dayco Corporation Valve construction
US4164211A (en) 1977-10-03 1979-08-14 American Air Filter Company, Inc. Damper assembly
US4157169A (en) * 1977-10-12 1979-06-05 Torr Vacuum Products Fluid operated gate valve for use with vacuum equipment
US4238111A (en) * 1978-08-04 1980-12-09 Torr Vacuum Products, Inc. Gate valve for use with vacuum equipment
CH636422A5 (de) * 1979-02-26 1983-05-31 Balzers Hochvakuum Hochvakuumventil.
CH649359A5 (de) 1980-11-26 1985-05-15 Sulzer Ag Plattenschieber.
US4381100A (en) * 1981-01-02 1983-04-26 Fairchild Industries, Inc. Valve and valving apparatus
JPS58195158U (ja) * 1982-12-27 1983-12-26 株式会社大阪真空機器製作所 ゲ−トバルブ
JPS60136671A (ja) * 1983-12-26 1985-07-20 Fuji Seikou Kk ゲ−トバルブのシ−ル構造
US5110249A (en) * 1986-10-23 1992-05-05 Innotec Group, Inc. Transport system for inline vacuum processing
US4721282A (en) * 1986-12-16 1988-01-26 Lam Research Corporation Vacuum chamber gate valve
US4763602A (en) 1987-02-25 1988-08-16 Glasstech Solar, Inc. Thin film deposition apparatus including a vacuum transport mechanism
US4785962A (en) * 1987-04-20 1988-11-22 Applied Materials, Inc. Vacuum chamber slit valve
JPH01261573A (ja) * 1988-04-08 1989-10-18 Kokusai Electric Co Ltd 真空仕切弁
DE3831249A1 (de) * 1988-09-14 1990-03-22 Schertler Siegfried Ventilschieber
JPH02186172A (ja) * 1989-01-10 1990-07-20 Irie Koken Kk 無しゅう動ゲートバルブ用弁体
US5002255A (en) * 1989-03-03 1991-03-26 Irie Koken Kabushiki Kaisha Non-sliding gate valve for high vacuum use
FR2648533B1 (fr) * 1989-06-14 1991-09-06 Coureau Ets Jc Dispositif de commande de vanne et vanne comportant un tel dispositif de commande
US5120019A (en) * 1989-08-03 1992-06-09 Brooks Automation, Inc. Valve
GB2240157A (en) 1990-01-12 1991-07-24 Colin Badham Flow control valve for fluid materials
JPH03234979A (ja) 1990-02-09 1991-10-18 Canon Inc 仕切り弁
DE4011274C1 (zh) * 1990-04-06 1991-08-01 Zimmermann & Jansen Gmbh, 5160 Dueren, De
US5226632A (en) 1990-04-20 1993-07-13 Applied Materials, Inc. Slit valve apparatus and method
DE4027610C2 (de) 1990-08-31 1996-06-13 Festo Kg Ventil
US5169125A (en) 1991-03-05 1992-12-08 Baker Hughes Incorporated Self-aligning gate valve
US5116023A (en) * 1991-05-14 1992-05-26 Mdc Vacuum Products Corporation Low vibration high vacuum gate valve
US5275303A (en) * 1992-02-03 1994-01-04 Applied Materials, Inc. Valve closure mechanism for semiconductor deposition apparatus
JP2655576B2 (ja) * 1992-09-30 1997-09-24 信越半導体株式会社 単結晶引上装置におけるアイソレーションバルブ
US5363872A (en) * 1993-03-16 1994-11-15 Applied Materials, Inc. Low particulate slit valve system and method for controlling same
US5511799A (en) 1993-06-07 1996-04-30 Applied Materials, Inc. Sealing device useful in semiconductor processing apparatus for bridging materials having a thermal expansion differential
US5379983A (en) * 1993-12-21 1995-01-10 Vat Holding Ag Shut-off valves for pipelines
DE4414176A1 (de) 1994-04-22 1995-10-26 Zimmermann & Jansen Gmbh Plattenschieber
DE4418019A1 (de) 1994-05-24 1995-11-30 Vse Vakuumtechn Gmbh Ventilmechanik für ein Vakuumventil
US5560586A (en) 1994-05-25 1996-10-01 Anelva Corporation Main valve
JP2766190B2 (ja) * 1994-07-28 1998-06-18 入江工研株式会社 無しゅう動真空ゲートバルブ
TW295677B (zh) * 1994-08-19 1997-01-11 Tokyo Electron Co Ltd
US5597184A (en) 1994-09-30 1997-01-28 High Vacuum Apparatus Mfg., Inc. Quick release clamp for bonnet and flange of gate valves
DE19601541A1 (de) * 1995-01-27 1996-08-01 Seiko Seiki Kk In einer Vakuumumgebung einsetzbares Vertikaltransfersystem sowie dazugehöriges Absperrventilsystem
JPH08303630A (ja) * 1995-05-10 1996-11-22 Fujikin:Kk 制御器
US5577707A (en) * 1995-12-18 1996-11-26 Vat Holding Ag Slide valve
US5980194A (en) 1996-07-15 1999-11-09 Applied Materials, Inc. Wafer position error detection and correction system
US6032419A (en) 1997-04-08 2000-03-07 Tokyo Electron Limited Vacuum processing apparatus with low particle generating vacuum seal
US6045620A (en) * 1997-07-11 2000-04-04 Applied Materials, Inc. Two-piece slit valve insert for vacuum processing system
US6089543A (en) 1997-07-11 2000-07-18 Applied Materials, Inc. Two-piece slit valve door with molded-in-place seal for a vacuum processing system
US5791632A (en) 1997-07-14 1998-08-11 Brenes; Arthur Quick release slide lock for vacuum valve
US5975492A (en) * 1997-07-14 1999-11-02 Brenes; Arthur Bellows driver slot valve
US5881998A (en) 1997-07-14 1999-03-16 Brenes; Arthur Half profile slot valve
US5884899A (en) 1997-07-14 1999-03-23 Brenes; Arthur Half profile gate valve
US6105435A (en) 1997-10-24 2000-08-22 Cypress Semiconductor Corp. Circuit and apparatus for verifying a chamber seal, and method of depositing a material onto a substrate using the same
EP2099061A3 (en) 1997-11-28 2013-06-12 Mattson Technology, Inc. Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing
CH692821A5 (de) 1998-02-04 2002-11-15 Unaxis Trading Ag Vakuumventilplatte und Vakuumkammeranordnung mit einer solchen.
US6079693A (en) * 1998-05-20 2000-06-27 Applied Komatsu Technology, Inc. Isolation valves
US5971358A (en) * 1998-06-11 1999-10-26 Penn Troy Machine Co., Inc. Gate assembly for a double disk gate valve
US6192827B1 (en) 1998-07-03 2001-02-27 Applied Materials, Inc. Double slit-valve doors for plasma processing
US6173938B1 (en) 1998-09-22 2001-01-16 Applied Materials, Inc. Two speed air cylinder for slit valve motion control
DE19857201A1 (de) * 1998-12-11 2000-06-15 Leybold Systems Gmbh Schleusenventil
US6347918B1 (en) * 1999-01-27 2002-02-19 Applied Materials, Inc. Inflatable slit/gate valve
US6443426B1 (en) 1999-07-07 2002-09-03 Arthur Brenes Slide lock for vacuum valve
WO2001004522A1 (en) 1999-07-09 2001-01-18 Arthur Brenes Throttle gate valve
JP3388439B2 (ja) * 2000-03-21 2003-03-24 株式会社ブイテックス ゲートバルブ
US6390448B1 (en) * 2000-03-30 2002-05-21 Lam Research Corporation Single shaft dual cradle vacuum slot valve
EA003148B1 (ru) 2000-07-05 2003-02-27 Владимир Яковлевич ШИРИПОВ Вакуумный модуль (его варианты) и система модулей для нанесения покрытий на подложку
JP3425937B2 (ja) * 2000-12-04 2003-07-14 入江工研株式会社 ゲート弁
JP3425938B2 (ja) * 2000-12-14 2003-07-14 入江工研株式会社 ゲート弁
WO2004008828A2 (en) * 2002-07-22 2004-01-29 Mdc Vacuum Products Corporation High-vacuum valve with retractable valve plate to eliminate abrasion
KR100914087B1 (ko) 2003-05-13 2009-08-27 어플라이드 머티어리얼스, 인코포레이티드 처리 챔버의 개구를 밀봉하기 위한 방법 및 장치

Also Published As

Publication number Publication date
JP5592166B2 (ja) 2014-09-17
CN1788175A (zh) 2006-06-14
CN100408902C (zh) 2008-08-06
JP2010281446A (ja) 2010-12-16
KR20050121750A (ko) 2005-12-27
TWI283428B (en) 2007-07-01
WO2004102055A1 (en) 2004-11-25
US7086638B2 (en) 2006-08-08
US20060249701A1 (en) 2006-11-09
JP2006526125A (ja) 2006-11-16
US20040245489A1 (en) 2004-12-09
KR100914087B1 (ko) 2009-08-27

Similar Documents

Publication Publication Date Title
TW200507021A (en) Methods and apparatus for sealing an opening of a processing chamber
TW373242B (en) Chamber design with isolation valve to preserve vacuum during maintenance
ATE553810T1 (de) Medizinisches anti-rückzug-ventil
BR0314010A (pt) Válvula e sistema de estrangulamento do fundo de tambor de coque
WO2004007318A3 (en) Loadport apparatus and method for use thereof
TW200723475A (en) Chamber sealing valve
GB2415400A (en) An inlet device and a method of controlling the introduction of a fluid into a separator
WO2003060958A3 (en) Air bearing-sealed micro-processing chamber
NO20062462L (no) Ventil, saerlig en gassikkerhetsventil
ATE396522T1 (de) Abgedichtete steckverbindung durch eine trennwand und montageverfahren
EP1667179A3 (fr) Dispositif électrique de coupure avec recyclage des gaz de coupure
EP1939378A3 (de) Schließvorrichtung zum Verriegeln des Innenraums eines Gerätes und Gerät mit Schließvorrichtung
ATE546600T1 (de) Explosionsschutzschrank und explosionsschutzanordnung
MXPA04009493A (es) Valvula de compuerta de barril giratorio.
GB2419367B (en) Railway track construction shims and method of constructing railway track
CA2474090A1 (en) A container and method for preventing leakage therefrom through isolating deformation in the container
WO2005075772A3 (de) Anordnung mit einer plombe zum verschliessen einer öffnung eines gehäuses
WO2003030219A3 (en) High pressure processing chamber for multiple semiconductor substrates
BR0203855A (pt) Conjunto de cilindro para compressor
ATE483511T1 (de) Luftfiltergehäuse mit dichtungsmitteln
GB2395477A (en) Container, container closure and method
WO2005124269A3 (en) Purging an airlock of an explosion containment chamber
WO2002005330A3 (en) Door assembly for sealing an opening of a chamber
EP1413733A3 (de) Abdichtvorrichtung
HK1043161A1 (en) Lock for vacuum chamber

Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent