JP4979429B2 - 真空バルブ - Google Patents
真空バルブ Download PDFInfo
- Publication number
- JP4979429B2 JP4979429B2 JP2007077403A JP2007077403A JP4979429B2 JP 4979429 B2 JP4979429 B2 JP 4979429B2 JP 2007077403 A JP2007077403 A JP 2007077403A JP 2007077403 A JP2007077403 A JP 2007077403A JP 4979429 B2 JP4979429 B2 JP 4979429B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- vacuum valve
- drive piston
- vacuum
- disc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
- F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Details Of Valves (AREA)
- Sliding Valves (AREA)
- Fluid-Driven Valves (AREA)
Description
Claims (9)
- 向かい合っている壁(4)(5)を貫通する入口部(2)および出口部(3)と、前記入口部(2)を囲むバルブシート(13)とを備えているバルブケース(1)と、
真空バルブの開放および閉塞のために軸(9)のまわりに回転可能かつ軸方向に移動可能なシャフト(8)に固定された駆動アーム(7)に取り付けられ、かつ、前記バルブケース(1)の内部空間(10)に収容されたバルブディスク(6)と、
前記シャフト(8)を回転させるための回転駆動機構を有し、前記バルブディスク(6)を、前記バルブディスク(6)が前記バルブシート(13)に押し付けられている閉位置から、前記バルブディスク(6)が前記シャフト(8)の軸方向に動くことによって前記バルブシート(13)から離反している中間位置を経て、前記バルブディスク(6)が前記入口部(2)を開放する開位置に駆動可能な駆動装置とを備えている真空バルブであって、
前記駆動装置は前記バルブディスク(6)の内部空間(19)に配置された駆動ピストン(20)をさらに備え、前記駆動ピストン(20)は少なくとも前記出口部(3)よりもその中心軸(22)から径方向外側に広がっている周辺部分を有し、当該周辺部分には前記出口部(3)に向く側に複数のタペット(23)が設けられ、
前記複数のタペット(23)は前記バルブディスク(6)の前記内部空間(19)から外に出され、前記バルブディスク(6)の閉位置において前記出口部(3)の横の領域で前記バルブケース(1)に当接し、前記バルブディスク(6)を前記バルブシート(13)に押し付け、
前記複数のタペット(23)は前記バルブディスク(6)を前記閉位置から前記中間位置に動かすために前記駆動ピストン(20)が動くことにより前記バルブケース(1)から離反可能であり、少なくともバネ要素(31)が前記シャフト(8)をその軸方向に動かすことによって前記バルブディスク(6)を前記中間位置に動かすことを特徴とする真空バルブ。 - 請求項1記載の真空バルブにおいて、
前記入口部(2)および前記出口部(3)が円形状に形成され、かつ、相互に同軸に配置されていることを特徴とする真空バルブ。 - 請求項2記載の真空バルブにおいて、
前記バルブディスク(6)が前記入口部(2)の軸方向から見て円形状に形成されていることを特徴とする真空バルブ。 - 請求項3記載の真空バルブにおいて、
前記駆動ピストン(20)が前記出口部の軸方向から見て円形状に形成されていることを特徴とする真空バルブ。 - 請求項1〜4のうちいずれか1つに記載の真空バルブにおいて、
前記複数のタペット(23)が前記駆動ピストン(20)の周辺領域に配置され、かつ、前記駆動ピストン(20)の周方向に相互に離反していることを特徴とする真空バルブ。 - 請求項1〜5のうちいずれか1つに記載の真空バルブにおいて、
前記複数のタペット(23)が外ネジを有し、前記外ネジにより前記駆動ピストン(20)の内ネジに螺着されていることを特徴とする真空バルブ。 - 請求項1〜6のうちいずれか1つに記載の真空バルブにおいて、
前記駆動ピストン(20)が圧縮空気によって作動することを特徴とする真空バルブ。 - 請求項7記載の真空バルブにおいて、
前記駆動ピストン(20)がバネ(26)により終端位置に向かって付勢されていることを特徴とする真空バルブ。 - 請求項8記載の真空バルブにおいて、
前記バルブディスク(6)の前記内部空間(19)において、
少なくとも前記バネ(26)の力に抗して前記駆動ピストン(20)を動かすために圧縮空気が導入される第1部分空間と、当該内部空間(19)からその遮断状態を維持したまま前記複数のタペット(23)が外に出される部分空間との間に、当該圧縮空気が導入される前記第1部分空間から遮断され、通路(30)を通じて大気に連通されるまたは空気が吸引される第2部分空間が存在することを特徴とする真空バルブ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ATA559/2006 | 2006-03-31 | ||
AT5592006 | 2006-03-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007271080A JP2007271080A (ja) | 2007-10-18 |
JP4979429B2 true JP4979429B2 (ja) | 2012-07-18 |
Family
ID=38674080
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007077403A Expired - Fee Related JP4979429B2 (ja) | 2006-03-31 | 2007-03-23 | 真空バルブ |
Country Status (4)
Country | Link |
---|---|
US (1) | US7413162B2 (ja) |
JP (1) | JP4979429B2 (ja) |
KR (1) | KR20070098684A (ja) |
CN (1) | CN101046258B (ja) |
Families Citing this family (44)
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JP5108292B2 (ja) * | 2005-12-20 | 2012-12-26 | ヴィ・エイ・ティー ホールディング アクチェンゲゼルシャフト | 振り子式真空バルブおよびスライドゲート真空バルブ |
TWI388754B (zh) * | 2006-06-16 | 2013-03-11 | Vat Holding Ag | 真空閥 |
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TW201124655A (en) | 2009-09-03 | 2011-07-16 | Ulvac Inc | Gate valve |
JP5620862B2 (ja) * | 2011-03-17 | 2014-11-05 | 株式会社アルバック | 仕切弁 |
JP5613087B2 (ja) * | 2011-03-17 | 2014-10-22 | 株式会社アルバック | 仕切弁 |
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EP2728226B1 (de) * | 2012-10-31 | 2015-03-25 | VAT Holding AG | Vakuumventil |
KR101528458B1 (ko) * | 2013-01-18 | 2015-06-18 | (주) 유앤아이솔루션 | 슬라이딩 역압 차단 밸브 |
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JP6507516B2 (ja) * | 2014-08-06 | 2019-05-08 | 株式会社島津製作所 | 真空バルブ |
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2007
- 2007-03-23 JP JP2007077403A patent/JP4979429B2/ja not_active Expired - Fee Related
- 2007-03-29 US US11/693,257 patent/US7413162B2/en not_active Expired - Fee Related
- 2007-03-29 KR KR1020070031062A patent/KR20070098684A/ko not_active Application Discontinuation
- 2007-03-30 CN CN2007100922004A patent/CN101046258B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20070228314A1 (en) | 2007-10-04 |
US7413162B2 (en) | 2008-08-19 |
KR20070098684A (ko) | 2007-10-05 |
JP2007271080A (ja) | 2007-10-18 |
CN101046258B (zh) | 2010-08-11 |
CN101046258A (zh) | 2007-10-03 |
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