SG91278A1 - Saw wire and method for the cutting lapping of hard brittle workpieces - Google Patents

Saw wire and method for the cutting lapping of hard brittle workpieces

Info

Publication number
SG91278A1
SG91278A1 SG200002850A SG200002850A SG91278A1 SG 91278 A1 SG91278 A1 SG 91278A1 SG 200002850 A SG200002850 A SG 200002850A SG 200002850 A SG200002850 A SG 200002850A SG 91278 A1 SG91278 A1 SG 91278A1
Authority
SG
Singapore
Prior art keywords
saw wire
hard brittle
brittle workpieces
cutting lapping
lapping
Prior art date
Application number
SG200002850A
Other languages
English (en)
Inventor
Kaeser Maximilian
Andrae Christian
Original Assignee
Wacker Siltronic Halbleitermat
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Siltronic Halbleitermat filed Critical Wacker Siltronic Halbleitermat
Publication of SG91278A1 publication Critical patent/SG91278A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
    • B23D57/0053—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
SG200002850A 1999-08-05 2000-05-23 Saw wire and method for the cutting lapping of hard brittle workpieces SG91278A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19936834A DE19936834A1 (de) 1999-08-05 1999-08-05 Sägedraht und Verfahren zum Trennläppen von sprödharten Werkstücken

Publications (1)

Publication Number Publication Date
SG91278A1 true SG91278A1 (en) 2002-09-17

Family

ID=7917237

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200002850A SG91278A1 (en) 1999-08-05 2000-05-23 Saw wire and method for the cutting lapping of hard brittle workpieces

Country Status (6)

Country Link
US (1) US6554686B1 (ko)
EP (1) EP1074366A1 (ko)
JP (1) JP2001062699A (ko)
KR (1) KR20010049960A (ko)
DE (1) DE19936834A1 (ko)
SG (1) SG91278A1 (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10237247B4 (de) * 2002-08-14 2004-09-09 Siltronic Ag Verfahren zur Herstellung einer Halbleiterscheibe aus Silicium
DE10247893A1 (de) * 2002-10-14 2004-04-22 Mitsubishi Polyester Film Gmbh Mehrschichtige, biaxial orientierte Polyesterfolie, Verfahren zu ihrer Herstellung und ihre Verwendung
DE10247894A1 (de) * 2002-10-14 2004-04-22 Mitsubishi Polyester Film Gmbh Mehrschichtige, biaxial orientierte Polyesterfolie, Verfahren zu ihrer Herstellung und ihre Verwendung
DE102006020824B3 (de) * 2006-05-04 2007-06-28 Siltronic Ag Verfahren zum Trennläppen eines Werkstückes
KR101069557B1 (ko) 2008-03-03 2011-10-05 홍덕정선 주식회사 절삭성이 우수한 케이블 소우
DE102018218016A1 (de) 2018-10-22 2020-04-23 Siltronic Ag Verfahren und Vorrichtung zum gleichzeitigen Trennen einer Vielzahl von Scheiben von einem Werkstück

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08216012A (ja) * 1995-02-17 1996-08-27 Sumitomo Metal Ind Ltd マルチワイヤソーによる切断方法及び装置
JPH10138114A (ja) * 1996-11-08 1998-05-26 Hitachi Cable Ltd ワイヤソー用ワイヤ
JPH1142547A (ja) * 1997-07-28 1999-02-16 Tokyo Seimitsu Co Ltd 固定砥粒ワイヤソー及びその被加工物切断方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01281865A (ja) 1988-05-09 1989-11-13 Nippon Mining Co Ltd マルチワイヤソー
DE3942671A1 (de) * 1989-12-22 1991-06-27 Wacker Chemitronic Drahtsaege zum abtrennen von scheiben von stab- oder blockfoermigen werkstuecken und ihre verwendung
US5216999A (en) * 1991-01-25 1993-06-08 Ehwa Diamond Ind. Co., Ltd. Wire saw
AT398935B (de) * 1992-10-21 1995-02-27 Swarovski Tyrolit Schleif Sägeseildrehvorrichtung
JPH07314435A (ja) * 1994-05-19 1995-12-05 M Setetsuku Kk ワイヤソー装置
DE19802938A1 (de) * 1998-01-27 1999-07-29 Buediam Diamantwerkzeuge R Und Sägeseil mit Sägeperle
JPH11254288A (ja) * 1998-03-11 1999-09-21 Toray Eng Co Ltd ワイヤソー

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08216012A (ja) * 1995-02-17 1996-08-27 Sumitomo Metal Ind Ltd マルチワイヤソーによる切断方法及び装置
JPH10138114A (ja) * 1996-11-08 1998-05-26 Hitachi Cable Ltd ワイヤソー用ワイヤ
JPH1142547A (ja) * 1997-07-28 1999-02-16 Tokyo Seimitsu Co Ltd 固定砥粒ワイヤソー及びその被加工物切断方法

Also Published As

Publication number Publication date
US6554686B1 (en) 2003-04-29
EP1074366A1 (de) 2001-02-07
DE19936834A1 (de) 2001-02-15
JP2001062699A (ja) 2001-03-13
KR20010049960A (ko) 2001-06-15

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