SG11201903240PA - Magnetic material sputtering target and method for manufacturing same - Google Patents

Magnetic material sputtering target and method for manufacturing same

Info

Publication number
SG11201903240PA
SG11201903240PA SG11201903240PA SG11201903240PA SG11201903240PA SG 11201903240P A SG11201903240P A SG 11201903240PA SG 11201903240P A SG11201903240P A SG 11201903240PA SG 11201903240P A SG11201903240P A SG 11201903240PA SG 11201903240P A SG11201903240P A SG 11201903240PA
Authority
SG
Singapore
Prior art keywords
sputtering target
oxides
magnetic material
manufacturing same
material sputtering
Prior art date
Application number
SG11201903240PA
Inventor
Yuki Furuya
Original Assignee
Jx Nippon Mining & Metals Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jx Nippon Mining & Metals Corp filed Critical Jx Nippon Mining & Metals Corp
Publication of SG11201903240PA publication Critical patent/SG11201903240PA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851—Coating a support with a magnetic layer by sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Powder Metallurgy (AREA)

Abstract

PCTJP/043990 MAGNETIC MATERIAL SPUTTERING TARGET AND METHOD FOR 5 MANUFACTURING SAME Provided is a magnetic sputtering target which includes oxides having a melting point of 500°C or lower, and the magnetic sputtering target is characterized by an average number density of oxides having a grain size of 10 pm or more on a 10 sputter surface of the sputtering target is 5/mm 2 or less. The present invention addresses the problem of providing a sputtering target and a method for manufacturing the same, whereby the generation of particles or abnormal electric discharge caused by oxides in the sputtering target, particularly coarsely grown oxides, can be reduced. 15 Fig. 3 22
SG11201903240PA 2016-12-28 2017-12-07 Magnetic material sputtering target and method for manufacturing same SG11201903240PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016255597 2016-12-28
PCT/JP2017/043990 WO2018123500A1 (en) 2016-12-28 2017-12-07 Magnetic material sputtering target and method for manufacturing same

Publications (1)

Publication Number Publication Date
SG11201903240PA true SG11201903240PA (en) 2019-05-30

Family

ID=62710993

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201903240PA SG11201903240PA (en) 2016-12-28 2017-12-07 Magnetic material sputtering target and method for manufacturing same

Country Status (6)

Country Link
JP (1) JP6734399B2 (en)
CN (1) CN109844167B (en)
MY (1) MY191374A (en)
SG (1) SG11201903240PA (en)
TW (1) TWI753073B (en)
WO (1) WO2018123500A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020066114A1 (en) * 2018-09-25 2020-04-02 Ｊｘ金属株式会社 Sputtering target and powder for producing sputtering target
JP7462636B2 (en) * 2019-07-18 2024-04-05 田中貴金属工業株式会社 Sputtering targets for magnetic recording media
TWI834072B (en) * 2021-10-22 2024-03-01 光洋應用材料科技股份有限公司 Ru-al alloy target and method of preparing the same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7186471B2 (en) * 2002-02-28 2007-03-06 Seagate Technology Llc Chemically ordered, cobalt-three platinum alloys for magnetic recording
JP4962905B2 (en) * 2007-03-12 2012-06-27 三菱マテリアル株式会社 Method for producing Co-based sintered alloy sputtering target for forming magnetic recording film with less generation of particles
MY150804A (en) * 2009-03-27 2014-02-28 Jx Nippon Mining & Metals Corp Nonmagnetic material particle-dispersed ferromagnetic material sputtering target
US9269389B2 (en) * 2009-12-11 2016-02-23 Jx Nippon Mining & Metals Corporation Sputtering target of magnetic material
MY158512A (en) * 2010-12-09 2016-10-14 Jx Nippon Mining & Metals Corp Ferromagnetic material sputtering target
CN103261470B (en) * 2010-12-17 2015-02-18 吉坤日矿日石金属株式会社 Ferromagnetic material sputtering target
SG189257A1 (en) * 2010-12-17 2013-05-31 Jx Nippon Mining & Metals Corp Sputtering target for magnetic recording film and method for producing same
WO2013125469A1 (en) * 2012-02-22 2013-08-29 Jx日鉱日石金属株式会社 Magnetic material sputtering target and manufacturing method for same
JP6005767B2 (en) * 2014-01-17 2016-10-12 Ｊｘ金属株式会社 Sputtering target for magnetic recording media
SG11201606737UA (en) * 2014-09-04 2016-09-29 Jx Nippon Mining & Metals Corp Sputtering target
US10837101B2 (en) * 2016-03-31 2020-11-17 Jx Nippon Mining & Metals Corporation Ferromagnetic material sputtering target

Also Published As

Publication number Publication date
JPWO2018123500A1 (en) 2019-03-28
JP6734399B2 (en) 2020-08-05
WO2018123500A1 (en) 2018-07-05
CN109844167B (en) 2022-01-04
CN109844167A (en) 2019-06-04
MY191374A (en) 2022-06-21
TW201835361A (en) 2018-10-01
TWI753073B (en) 2022-01-21

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