SG11201401813PA - Recycling method for polishing agent - Google Patents

Recycling method for polishing agent

Info

Publication number
SG11201401813PA
SG11201401813PA SG11201401813PA SG11201401813PA SG11201401813PA SG 11201401813P A SG11201401813P A SG 11201401813PA SG 11201401813P A SG11201401813P A SG 11201401813PA SG 11201401813P A SG11201401813P A SG 11201401813PA SG 11201401813P A SG11201401813P A SG 11201401813PA
Authority
SG
Singapore
Prior art keywords
polishing agent
recycling method
recycling
polishing
agent
Prior art date
Application number
SG11201401813PA
Inventor
Taishi Uehara
Koji Fujita
Yoshihiro Honma
Original Assignee
Dowa Eco System Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dowa Eco System Co Ltd filed Critical Dowa Eco System Co Ltd
Publication of SG11201401813PA publication Critical patent/SG11201401813PA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
SG11201401813PA 2011-11-09 2012-11-08 Recycling method for polishing agent SG11201401813PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011245153 2011-11-09
PCT/JP2012/078942 WO2013069720A1 (en) 2011-11-09 2012-11-08 Recycling method for polishing agent

Publications (1)

Publication Number Publication Date
SG11201401813PA true SG11201401813PA (en) 2014-09-26

Family

ID=48290090

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201401813PA SG11201401813PA (en) 2011-11-09 2012-11-08 Recycling method for polishing agent

Country Status (3)

Country Link
JP (1) JPWO2013069720A1 (en)
SG (1) SG11201401813PA (en)
WO (1) WO2013069720A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3326755A1 (en) * 2016-11-23 2018-05-30 Menzerna Polishing Compounds GmbH & Co. KG Method for surface treatment, use of an additive and surface treatment article
CN113913156B (en) * 2017-10-31 2022-06-24 Hoya株式会社 Polishing liquid, method for producing glass substrate, and method for producing magnetic disk
US20220111489A1 (en) * 2019-01-10 2022-04-14 Konica Minolta, Inc. Polishing agent regenerating method and polishing agent recycle processing system
JP2022172678A (en) * 2021-05-06 2022-11-17 コニカミノルタ株式会社 Method for preparing recycled/regenerated polishing agent slurry and polishing agent slurry

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3446988B2 (en) * 1997-04-10 2003-09-16 三井金属鉱業株式会社 Method for recovering abrasive raw materials from waste cerium abrasive
JP4729428B2 (en) * 2006-04-07 2011-07-20 Ａｇｃセイミケミカル株式会社 Regeneration method of cerium-based abrasive
JP2008124213A (en) * 2006-11-10 2008-05-29 Nippon Valqua Ind Ltd Method of recycling used cmp slurry
JP4969313B2 (en) * 2007-05-11 2012-07-04 Ａｇｃセイミケミカル株式会社 Recovery method of rare earth elements
WO2010084635A1 (en) * 2009-01-23 2010-07-29 財団法人大阪産業振興機構 Mixture treatment method and treatment device

Also Published As

Publication number Publication date
WO2013069720A1 (en) 2013-05-16
JPWO2013069720A1 (en) 2015-04-02

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