SG10201504229UA - Polishing Apparatus - Google Patents

Polishing Apparatus

Info

Publication number
SG10201504229UA
SG10201504229UA SG10201504229UA SG10201504229UA SG10201504229UA SG 10201504229U A SG10201504229U A SG 10201504229UA SG 10201504229U A SG10201504229U A SG 10201504229UA SG 10201504229U A SG10201504229U A SG 10201504229UA SG 10201504229U A SG10201504229U A SG 10201504229UA
Authority
SG
Singapore
Prior art keywords
polishing apparatus
polishing
Prior art date
Application number
SG10201504229UA
Inventor
Hiroyuki Shinozaki
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of SG10201504229UA publication Critical patent/SG10201504229UA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • B24B37/107—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • B24B41/047—Grinding heads for working on plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Support Of The Bearing (AREA)
  • Mounting Of Bearings Or Others (AREA)
  • Rolling Contact Bearings (AREA)
SG10201504229UA 2014-05-30 2015-05-28 Polishing Apparatus SG10201504229UA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014112479A JP6216686B2 (en) 2014-05-30 2014-05-30 Polishing equipment

Publications (1)

Publication Number Publication Date
SG10201504229UA true SG10201504229UA (en) 2015-12-30

Family

ID=54700712

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201504229UA SG10201504229UA (en) 2014-05-30 2015-05-28 Polishing Apparatus

Country Status (3)

Country Link
US (1) US10029343B2 (en)
JP (1) JP6216686B2 (en)
SG (1) SG10201504229UA (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6216686B2 (en) * 2014-05-30 2017-10-18 株式会社荏原製作所 Polishing equipment
KR200486931Y1 (en) * 2016-06-28 2018-07-16 주식회사 한국가스기술공사 Lapping guide jig for safty-valve

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IE42317B1 (en) * 1973-12-17 1980-07-16 Olrik H A device for converting rotary motion to axial motion and a method of applying the device for truing, polishing or calibrating a cylindrical body.
JPH09207065A (en) 1996-02-05 1997-08-12 Ebara Corp Polishing device
US5951368A (en) 1996-05-29 1999-09-14 Ebara Corporation Polishing apparatus
JPH1058308A (en) * 1996-05-29 1998-03-03 Ebara Corp Polishing device
JP2000052233A (en) 1998-08-10 2000-02-22 Sony Corp Polishing device
JP2000094309A (en) * 1998-09-18 2000-04-04 Toshiba Corp Polishing device
JP3862920B2 (en) * 1999-03-11 2006-12-27 株式会社荏原製作所 Polishing apparatus provided with attitude control device for substrate holding device
JP3772946B2 (en) 1999-03-11 2006-05-10 株式会社荏原製作所 Dressing apparatus and polishing apparatus provided with the dressing apparatus
US6354907B1 (en) 1999-03-11 2002-03-12 Ebara Corporation Polishing apparatus including attitude controller for turntable and/or wafer carrier
JP4814677B2 (en) 2006-03-31 2011-11-16 株式会社荏原製作所 Substrate holding device and polishing device
JP2009079737A (en) * 2007-09-27 2009-04-16 Fujitsu Ltd Rotating shaft adjustment mechanism
JP5578519B2 (en) * 2010-06-11 2014-08-27 秀和工業株式会社 Polishing apparatus and polishing method
US10702972B2 (en) * 2012-05-31 2020-07-07 Ebara Corporation Polishing apparatus
US9199354B2 (en) * 2012-10-29 2015-12-01 Wayne O. Duescher Flexible diaphragm post-type floating and rigid abrading workholder
TWI656944B (en) * 2014-05-14 2019-04-21 日商荏原製作所股份有限公司 Polishing apparatus
JP6216686B2 (en) * 2014-05-30 2017-10-18 株式会社荏原製作所 Polishing equipment

Also Published As

Publication number Publication date
JP6216686B2 (en) 2017-10-18
JP2015226938A (en) 2015-12-17
US10029343B2 (en) 2018-07-24
US20150343593A1 (en) 2015-12-03

Similar Documents

Publication Publication Date Title
GB201406873D0 (en) Cleaning apparatus
HK1225227A1 (en) Apparatus
SG10201503514TA (en) Polishing apparatus
SG10201502285YA (en) Polishing apparatus
GB201416729D0 (en) Apparatus
SG10201502030UA (en) Substrate polishing apparatus
SG10201501193YA (en) Polishing apparatus
SG10201604365YA (en) Polishing apparatus
SG10201608734WA (en) Polishing apparatus
SG10201701239TA (en) Polishing apparatus
SG11201702302QA (en) Polishing apparatus
SG10201504316QA (en) Polishing Apparatus
SG10201503374QA (en) Substrate Polishing Apparatus
SG11201700400UA (en) Polishing apparatus
SG10201505284QA (en) Polishing apparatus
GB201417753D0 (en) Apparatus
GB2534660B8 (en) Apparatus
GB2531031B (en) Apparatus
SG10201607697VA (en) Polishing apparatus
GB201602164D0 (en) Polishing apparatus
SG11201800897PA (en) Polishing apparatus
SG10201504229UA (en) Polishing Apparatus
GB2532807B (en) Apparatus
GB201402233D0 (en) Apparatus
GB2519222B (en) Apparatus