SE9900124D0 - Method and device for inspecting objects - Google Patents

Method and device for inspecting objects

Info

Publication number
SE9900124D0
SE9900124D0 SE9900124A SE9900124A SE9900124D0 SE 9900124 D0 SE9900124 D0 SE 9900124D0 SE 9900124 A SE9900124 A SE 9900124A SE 9900124 A SE9900124 A SE 9900124A SE 9900124 D0 SE9900124 D0 SE 9900124D0
Authority
SE
Sweden
Prior art keywords
objects
substrate
image
sensor
radiator
Prior art date
Application number
SE9900124A
Other languages
English (en)
Other versions
SE9900124L (sv
SE514859C2 (sv
Inventor
Gunnar Bostroem
Mattias Johannesson
Simon Sandgren
Hans Aahlen
Original Assignee
Mydata Automation Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mydata Automation Ab filed Critical Mydata Automation Ab
Priority to SE9900124A priority Critical patent/SE514859C2/sv
Publication of SE9900124D0 publication Critical patent/SE9900124D0/sv
Priority to PCT/SE1999/002349 priority patent/WO2000042381A1/en
Priority to JP2000593911A priority patent/JP4515638B2/ja
Priority to DE69926659T priority patent/DE69926659T2/de
Priority to AU30902/00A priority patent/AU3090200A/en
Priority to AT99964865T priority patent/ATE301818T1/de
Priority to EP99964865A priority patent/EP1153265B1/en
Priority to KR1020017009038A priority patent/KR100602765B1/ko
Priority to ES99964865T priority patent/ES2247853T3/es
Priority to CNB998155934A priority patent/CN1179192C/zh
Publication of SE9900124L publication Critical patent/SE9900124L/sv
Publication of SE514859C2 publication Critical patent/SE514859C2/sv
Priority to US09/906,656 priority patent/US6496254B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/04—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Die Bonding (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
SE9900124A 1999-01-18 1999-01-18 Förfarande och anordning för undersökning av objekt på ett substrat genom att ta bilder av substratet och analysera dessa SE514859C2 (sv)

Priority Applications (11)

Application Number Priority Date Filing Date Title
SE9900124A SE514859C2 (sv) 1999-01-18 1999-01-18 Förfarande och anordning för undersökning av objekt på ett substrat genom att ta bilder av substratet och analysera dessa
CNB998155934A CN1179192C (zh) 1999-01-18 1999-12-14 检测物体的方法和装置
AU30902/00A AU3090200A (en) 1999-01-18 1999-12-14 Method and device for inspecting objects
JP2000593911A JP4515638B2 (ja) 1999-01-18 1999-12-14 対象物を検査する方法と装置
DE69926659T DE69926659T2 (de) 1999-01-18 1999-12-14 Verfahren und vorrichtung für die optische Inspektion von Objekten auf einem Substrat
PCT/SE1999/002349 WO2000042381A1 (en) 1999-01-18 1999-12-14 Method and device for inspecting objects
AT99964865T ATE301818T1 (de) 1999-01-18 1999-12-14 Verfahren und vorrichtung für die optische inspektion von objekten auf einem substrat
EP99964865A EP1153265B1 (en) 1999-01-18 1999-12-14 Method and device for optically inspecting objects on a substrate
KR1020017009038A KR100602765B1 (ko) 1999-01-18 1999-12-14 대상체를 검사하기 위한 방법 및 장치
ES99964865T ES2247853T3 (es) 1999-01-18 1999-12-14 Metodo y dispositivo para la inspeccion optica de objetos situados sobre un sustrato.
US09/906,656 US6496254B2 (en) 1999-01-18 2001-07-18 Method and device for inspecting objects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9900124A SE514859C2 (sv) 1999-01-18 1999-01-18 Förfarande och anordning för undersökning av objekt på ett substrat genom att ta bilder av substratet och analysera dessa

Publications (3)

Publication Number Publication Date
SE9900124D0 true SE9900124D0 (sv) 1999-01-18
SE9900124L SE9900124L (sv) 2000-09-12
SE514859C2 SE514859C2 (sv) 2001-05-07

Family

ID=20414123

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9900124A SE514859C2 (sv) 1999-01-18 1999-01-18 Förfarande och anordning för undersökning av objekt på ett substrat genom att ta bilder av substratet och analysera dessa

Country Status (11)

Country Link
US (1) US6496254B2 (sv)
EP (1) EP1153265B1 (sv)
JP (1) JP4515638B2 (sv)
KR (1) KR100602765B1 (sv)
CN (1) CN1179192C (sv)
AT (1) ATE301818T1 (sv)
AU (1) AU3090200A (sv)
DE (1) DE69926659T2 (sv)
ES (1) ES2247853T3 (sv)
SE (1) SE514859C2 (sv)
WO (1) WO2000042381A1 (sv)

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SE518642C2 (sv) 2000-07-11 2002-11-05 Mydata Automation Ab Förfarande, anordning för att förse ett substrat med visköst medium, anordning för korrigering av applikationsfel samt användningen av utskjutnings- organ för korrigering av appliceringsfel
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JP4777310B2 (ja) * 2007-07-31 2011-09-21 シャープ株式会社 検査装置、検査方法、検査システム、カラーフィルタの製造方法、検査装置制御プログラム、及び該プログラムを記録したコンピュータ読み取り可能な記録媒体
ATE433562T1 (de) * 2007-08-14 2009-06-15 Sick Ag Verfahren und vorrichtung zur dynamischen erzeugung und weitergabe von geometriedaten
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US8059280B2 (en) 2008-01-31 2011-11-15 Cyberoptics Corporation Method for three-dimensional imaging using multi-phase structured light
DE102008014690A1 (de) * 2008-03-18 2009-09-24 Conti Temic Microelectronic Gmbh Verfahren zur Herstellung von Schaltungsträgern
KR20110043616A (ko) 2008-07-22 2011-04-27 오르보테크 엘티디. 효과적인 원격중심 광학 시스템(ｅｔｏｓ)
KR101503304B1 (ko) * 2008-10-23 2015-03-17 대우조선해양 주식회사 레이저 포인터를 이용하는 러그 용접 로봇의 위치 및 자세 세팅방법
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CN102954759A (zh) * 2011-08-31 2013-03-06 陈启宏 箱体运输测算装置及箱体运输测算方法
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DE102014114506B4 (de) * 2014-10-07 2020-06-04 Sick Ag Kamera zur Montage an einer Fördereinrichtung und Verfahren zur Inspektion oder Identifikation
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US10349491B2 (en) 2015-01-19 2019-07-09 Tetra Tech, Inc. Light emission power control apparatus and method
US10362293B2 (en) 2015-02-20 2019-07-23 Tetra Tech, Inc. 3D track assessment system and method
CN105675614A (zh) * 2016-02-19 2016-06-15 清华大学 一种包装袋封口质量检测设备和包装袋封口质量检测方法
US10572992B2 (en) * 2017-12-28 2020-02-25 Intel Corporation 2D metrology technique for solder paste inspection
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Also Published As

Publication number Publication date
AU3090200A (en) 2000-08-01
SE9900124L (sv) 2000-09-12
ES2247853T3 (es) 2006-03-01
JP4515638B2 (ja) 2010-08-04
CN1333869A (zh) 2002-01-30
SE514859C2 (sv) 2001-05-07
EP1153265A1 (en) 2001-11-14
WO2000042381A1 (en) 2000-07-20
DE69926659T2 (de) 2006-06-08
JP2002535606A (ja) 2002-10-22
KR20010101576A (ko) 2001-11-14
KR100602765B1 (ko) 2006-07-24
EP1153265B1 (en) 2005-08-10
ATE301818T1 (de) 2005-08-15
US20020030808A1 (en) 2002-03-14
US6496254B2 (en) 2002-12-17
CN1179192C (zh) 2004-12-08
DE69926659D1 (de) 2005-09-15

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