SE9500849D0 - Methods for the manufacturing of micromachined structures and micromachined structures manufactured using such methods - Google Patents
Methods for the manufacturing of micromachined structures and micromachined structures manufactured using such methodsInfo
- Publication number
- SE9500849D0 SE9500849D0 SE9500849A SE9500849A SE9500849D0 SE 9500849 D0 SE9500849 D0 SE 9500849D0 SE 9500849 A SE9500849 A SE 9500849A SE 9500849 A SE9500849 A SE 9500849A SE 9500849 D0 SE9500849 D0 SE 9500849D0
- Authority
- SE
- Sweden
- Prior art keywords
- methods
- pct
- micromachined structures
- contact zone
- substrate
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 5
- 238000000034 method Methods 0.000 title abstract 4
- 239000000758 substrate Substances 0.000 abstract 5
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
- B81C1/0092—For avoiding stiction during the manufacturing process of the device, e.g. during wet etching
- B81C1/00952—Treatments or methods for avoiding stiction during the manufacturing process not provided for in groups B81C1/00928 - B81C1/00944
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12389—All metal or with adjacent metals having variation in thickness
- Y10T428/12396—Discontinuous surface component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12472—Microscopic interfacial wave or roughness
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12486—Laterally noncoextensive components [e.g., embedded, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12528—Semiconductor component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12542—More than one such component
- Y10T428/12549—Adjacent to each other
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12556—Organic component
- Y10T428/12569—Synthetic resin
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12674—Ge- or Si-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
- Y10T428/12875—Platinum group metal-base component
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9500849A SE9500849D0 (sv) | 1995-03-10 | 1995-03-10 | Methods for the manufacturing of micromachined structures and micromachined structures manufactured using such methods |
JP52751496A JP4056559B2 (ja) | 1995-03-10 | 1996-03-08 | マイクロ機械加工構造物の製法およびかかる方法を使用して製造されたマイクロ機械加工構造物 |
PCT/SE1996/000308 WO1996028841A1 (en) | 1995-03-10 | 1996-03-08 | A method for the manufacturing of micromachined structures and a micromachined structure manufactured using such method |
DE69634010T DE69634010T2 (de) | 1995-03-10 | 1996-03-08 | Ein verfahren zum herstellen von mikrogefertigten strukturen |
EP96906987A EP0870319B1 (en) | 1995-03-10 | 1996-03-08 | A method for the manufacturing of micromachined structures |
US08/913,232 US6103399A (en) | 1995-03-10 | 1996-03-08 | Method for the manufacturing of micromachined structures and a micromachined structure manufactured using such method |
AU50179/96A AU5017996A (en) | 1995-03-10 | 1996-03-08 | A method for the manufacturing of micromachined structures and a micromachined structure manufactured using such method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9500849A SE9500849D0 (sv) | 1995-03-10 | 1995-03-10 | Methods for the manufacturing of micromachined structures and micromachined structures manufactured using such methods |
Publications (1)
Publication Number | Publication Date |
---|---|
SE9500849D0 true SE9500849D0 (sv) | 1995-03-10 |
Family
ID=20397494
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE9500849A SE9500849D0 (sv) | 1995-03-10 | 1995-03-10 | Methods for the manufacturing of micromachined structures and micromachined structures manufactured using such methods |
Country Status (7)
Country | Link |
---|---|
US (1) | US6103399A (sv) |
EP (1) | EP0870319B1 (sv) |
JP (1) | JP4056559B2 (sv) |
AU (1) | AU5017996A (sv) |
DE (1) | DE69634010T2 (sv) |
SE (1) | SE9500849D0 (sv) |
WO (1) | WO1996028841A1 (sv) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6245444B1 (en) * | 1997-10-02 | 2001-06-12 | New Jersey Institute Of Technology | Micromachined element and method of fabrication thereof |
US6206914B1 (en) | 1998-04-30 | 2001-03-27 | Medtronic, Inc. | Implantable system with drug-eluting cells for on-demand local drug delivery |
US6101371A (en) * | 1998-09-12 | 2000-08-08 | Lucent Technologies, Inc. | Article comprising an inductor |
SE519023C2 (sv) | 1999-06-21 | 2002-12-23 | Micromuscle Ab | Kateterburna mikrokirurgiska verktygsset |
US6677225B1 (en) * | 2000-07-14 | 2004-01-13 | Zyvex Corporation | System and method for constraining totally released microcomponents |
AU2002227181A1 (en) * | 2000-11-16 | 2002-05-27 | Burstein Technologies, Inc. | Optical biodiscs with reflective layers |
US6812217B2 (en) | 2000-12-04 | 2004-11-02 | Medtronic, Inc. | Medical device and methods of use |
US6534249B2 (en) * | 2001-02-09 | 2003-03-18 | Xerox Corporation | Method of making low cost integrated out-of-plane micro-device structures |
US6838228B2 (en) * | 2001-05-14 | 2005-01-04 | Fairchild Semiconductor Corporation | System to enable photolithography on severe structure topologies |
DE10133014B4 (de) * | 2001-07-06 | 2005-01-20 | Forschungszentrum Karlsruhe Gmbh | Verfahren zur Erzeugung von dreidimensionalen, mikrostrukturierten Komponenten |
US7033514B2 (en) * | 2001-08-27 | 2006-04-25 | Micron Technology, Inc. | Method and apparatus for micromachining using a magnetic field and plasma etching |
WO2003025991A1 (en) * | 2001-09-17 | 2003-03-27 | Advion Biosciences, Inc. | Fabrication of a microchip-based electrospray device |
US6777319B2 (en) * | 2001-12-19 | 2004-08-17 | Formfactor, Inc. | Microelectronic spring contact repair |
SE0104452D0 (sv) * | 2001-12-28 | 2001-12-28 | Forskarpatent I Vaest Ab | Metod för framställning av nanostrukturer in-situ, och in-situ framställda nanostrukturer |
US6762116B1 (en) * | 2002-06-12 | 2004-07-13 | Zyvex Corporation | System and method for fabricating microcomponent parts on a substrate having pre-fabricated electronic circuitry thereon |
US7047638B2 (en) * | 2002-07-24 | 2006-05-23 | Formfactor, Inc | Method of making microelectronic spring contact array |
US7270940B2 (en) * | 2002-12-18 | 2007-09-18 | International Business Machines Corporation | Method of structuring of a substrate |
SE526192C2 (sv) * | 2003-04-17 | 2005-07-26 | Micromuscle Ab | Metod för att framställa en anordning |
US7096568B1 (en) | 2003-07-10 | 2006-08-29 | Zyvex Corporation | Method of manufacturing a microcomponent assembly |
US7025619B2 (en) * | 2004-02-13 | 2006-04-11 | Zyvex Corporation | Sockets for microassembly |
US6923669B1 (en) * | 2004-02-13 | 2005-08-02 | Zyvex Corporation | Microconnectors and non-powered microassembly therewith |
US6956219B2 (en) * | 2004-03-12 | 2005-10-18 | Zyvex Corporation | MEMS based charged particle deflector design |
US7081630B2 (en) * | 2004-03-12 | 2006-07-25 | Zyvex Corporation | Compact microcolumn for automated assembly |
US8152992B2 (en) * | 2004-08-31 | 2012-04-10 | University Of Maryland | Cell-based sensing: biological transduction of chemical stimuli to electrical signals (nose-on-a-chip) |
US7456092B2 (en) * | 2004-10-07 | 2008-11-25 | Palo Alto Research Center Incorporated | Self-releasing spring structures and methods |
US7314382B2 (en) | 2005-05-18 | 2008-01-01 | Zyvex Labs, Llc | Apparatus and methods of manufacturing and assembling microscale and nanoscale components and assemblies |
DE102006005517B3 (de) * | 2006-02-07 | 2007-03-15 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Ventil |
US9242073B2 (en) * | 2006-08-18 | 2016-01-26 | Boston Scientific Scimed, Inc. | Electrically actuated annelid |
US7605377B2 (en) * | 2006-10-17 | 2009-10-20 | Zyvex Corporation | On-chip reflectron and ion optics |
US7761966B2 (en) * | 2007-07-16 | 2010-07-27 | Touchdown Technologies, Inc. | Method for repairing a microelectromechanical system |
DE102018203065A1 (de) * | 2018-03-01 | 2019-09-05 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Injektors |
CN110643038A (zh) * | 2019-09-30 | 2020-01-03 | 天津大学 | 一种基于聚吡咯-宣纸致动器的制备方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5015906A (en) * | 1989-11-03 | 1991-05-14 | Princeton University | Electrostatic levitation control system for micromechanical devices |
JP2923813B2 (ja) * | 1991-06-11 | 1999-07-26 | キヤノン株式会社 | カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置 |
DE4223215C2 (de) * | 1992-07-15 | 1996-07-11 | Bosch Gmbh Robert | Verfahren zur Bearbeitung von Siliziumwafern |
DE4317274A1 (de) * | 1993-05-25 | 1994-12-01 | Bosch Gmbh Robert | Verfahren zur Herstellung oberflächen-mikromechanischer Strukturen |
US5475318A (en) * | 1993-10-29 | 1995-12-12 | Robert B. Marcus | Microprobe |
US5447600A (en) * | 1994-03-21 | 1995-09-05 | Texas Instruments | Polymeric coatings for micromechanical devices |
US5472539A (en) * | 1994-06-06 | 1995-12-05 | General Electric Company | Methods for forming and positioning moldable permanent magnets on electromagnetically actuated microfabricated components |
DE4423396C2 (de) * | 1994-07-04 | 2001-10-25 | Fraunhofer Ges Forschung | Verfahren zum Herstellen einer mikromechanischen Oberflächenstruktur |
US5658636A (en) * | 1995-01-27 | 1997-08-19 | Carnegie Mellon University | Method to prevent adhesion of micromechanical structures |
US5665648A (en) * | 1995-12-21 | 1997-09-09 | Hughes Electronics | Integrated circuit spring contact fabrication methods |
US5796152A (en) * | 1997-01-24 | 1998-08-18 | Roxburgh Ltd. | Cantilevered microstructure |
-
1995
- 1995-03-10 SE SE9500849A patent/SE9500849D0/sv unknown
-
1996
- 1996-03-08 JP JP52751496A patent/JP4056559B2/ja not_active Expired - Fee Related
- 1996-03-08 EP EP96906987A patent/EP0870319B1/en not_active Expired - Lifetime
- 1996-03-08 WO PCT/SE1996/000308 patent/WO1996028841A1/en active IP Right Grant
- 1996-03-08 DE DE69634010T patent/DE69634010T2/de not_active Expired - Lifetime
- 1996-03-08 US US08/913,232 patent/US6103399A/en not_active Expired - Fee Related
- 1996-03-08 AU AU50179/96A patent/AU5017996A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
DE69634010T2 (de) | 2005-12-15 |
EP0870319A1 (en) | 1998-10-14 |
JP4056559B2 (ja) | 2008-03-05 |
JPH11502061A (ja) | 1999-02-16 |
US6103399A (en) | 2000-08-15 |
WO1996028841A1 (en) | 1996-09-19 |
AU5017996A (en) | 1996-10-02 |
EP0870319B1 (en) | 2004-12-08 |
DE69634010D1 (de) | 2005-01-13 |
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