NO320487B1 - Transduser - Google Patents
Transduser Download PDFInfo
- Publication number
- NO320487B1 NO320487B1 NO19993448A NO993448A NO320487B1 NO 320487 B1 NO320487 B1 NO 320487B1 NO 19993448 A NO19993448 A NO 19993448A NO 993448 A NO993448 A NO 993448A NO 320487 B1 NO320487 B1 NO 320487B1
- Authority
- NO
- Norway
- Prior art keywords
- electrode
- fixed electrode
- transducer
- substrate
- layer
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims description 97
- 239000012528 membrane Substances 0.000 claims description 80
- 239000000463 material Substances 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000001312 dry etching Methods 0.000 claims description 4
- 239000003990 capacitor Substances 0.000 description 102
- 238000006243 chemical reaction Methods 0.000 description 34
- 230000008859 change Effects 0.000 description 32
- 238000006073 displacement reaction Methods 0.000 description 19
- 230000003071 parasitic effect Effects 0.000 description 18
- 239000011651 chromium Substances 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 16
- 238000010276 construction Methods 0.000 description 13
- 230000003321 amplification Effects 0.000 description 12
- 238000003199 nucleic acid amplification method Methods 0.000 description 12
- 230000035945 sensitivity Effects 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 229910052814 silicon oxide Inorganic materials 0.000 description 11
- 230000005684 electric field Effects 0.000 description 10
- 239000004020 conductor Substances 0.000 description 9
- 238000005530 etching Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 239000012535 impurity Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 230000003068 static effect Effects 0.000 description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000001131 transforming effect Effects 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000003518 caustics Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000009499 grossing Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Surgical Instruments (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21343298A JP4124867B2 (ja) | 1998-07-14 | 1998-07-14 | 変換装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| NO993448D0 NO993448D0 (no) | 1999-07-13 |
| NO993448L NO993448L (no) | 2000-01-17 |
| NO320487B1 true NO320487B1 (no) | 2005-12-12 |
Family
ID=16639140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO19993448A NO320487B1 (no) | 1998-07-14 | 1999-07-13 | Transduser |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6145384A (de) |
| EP (1) | EP0973012B1 (de) |
| JP (1) | JP4124867B2 (de) |
| CN (1) | CN1141564C (de) |
| DE (1) | DE69912887T2 (de) |
| DK (1) | DK0973012T3 (de) |
| NO (1) | NO320487B1 (de) |
Families Citing this family (42)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW546480B (en) * | 2000-03-07 | 2003-08-11 | Sumitomo Metal Ind | Circuit, apparatus and method for inspecting impedance |
| JP4773630B2 (ja) * | 2001-05-15 | 2011-09-14 | 株式会社デンソー | ダイアフラム型半導体装置とその製造方法 |
| US20040232503A1 (en) * | 2001-06-12 | 2004-11-25 | Shinya Sato | Semiconductor device and method of producing the same |
| TWI221196B (en) * | 2001-09-06 | 2004-09-21 | Tokyo Electron Ltd | Impedance measuring circuit, its method, and electrostatic capacitance measuring circuit |
| EP1424563B1 (de) * | 2001-09-06 | 2010-07-21 | Tokyo Electron Limited | Kapazitätsmessschaltung, kapazitätsmessinstrument und mikrofoneinrichtung |
| TWI221195B (en) * | 2001-09-06 | 2004-09-21 | Tokyo Electron Ltd | Electrostatic capacitance measuring circuit, electrostatic capacitance measuring instrument, and microphone device |
| US7088112B2 (en) * | 2001-09-06 | 2006-08-08 | Tokyo Electron Limited | Sensor capacity sensing apparatus and sensor capacity sensing method |
| AU2003238880A1 (en) * | 2002-06-07 | 2003-12-22 | California Institute Of Technology | Electret generator apparatus and method |
| AU2003238881A1 (en) * | 2002-06-07 | 2003-12-22 | California Institute Of Technology | Method and resulting device for fabricating electret materials on bulk substrates |
| WO2004016168A1 (en) * | 2002-08-19 | 2004-02-26 | Czarnek & Orkin Laboratories, Inc. | Capacitive uterine contraction sensor |
| JP3930862B2 (ja) | 2004-02-13 | 2007-06-13 | 東京エレクトロン株式会社 | 容量型センサ |
| US8581610B2 (en) * | 2004-04-21 | 2013-11-12 | Charles A Miller | Method of designing an application specific probe card test system |
| JP4463653B2 (ja) * | 2004-05-10 | 2010-05-19 | 株式会社フジクラ | ハイブリッドセンサ |
| CN101592499B (zh) * | 2004-05-10 | 2011-11-09 | 株式会社藤仓 | 静电电容传感器 |
| US7489141B1 (en) | 2004-08-18 | 2009-02-10 | Environmental Metrology Corporation | Surface micro sensor and method |
| US7560788B2 (en) * | 2004-09-20 | 2009-07-14 | General Electric Company | Microelectromechanical system pressure sensor and method for making and using |
| US7317317B1 (en) * | 2004-11-02 | 2008-01-08 | Environmental Metrology Corporation | Shielded micro sensor and method for electrochemically monitoring residue in micro features |
| US7332902B1 (en) * | 2004-11-02 | 2008-02-19 | Environmental Metrology Corporation | Micro sensor for electrochemically monitoring residue in micro channels |
| US7932726B1 (en) | 2005-08-16 | 2011-04-26 | Environmental Metrology Corporation | Method of design optimization and monitoring the clean/rinse/dry processes of patterned wafers using an electro-chemical residue sensor (ECRS) |
| US7448277B2 (en) * | 2006-08-31 | 2008-11-11 | Evigia Systems, Inc. | Capacitive pressure sensor and method therefor |
| CN102132228B (zh) * | 2008-09-03 | 2014-01-01 | 水岛昌德 | 输入装置 |
| US7902851B2 (en) | 2009-06-10 | 2011-03-08 | Medtronic, Inc. | Hermeticity testing |
| US8172760B2 (en) | 2009-06-18 | 2012-05-08 | Medtronic, Inc. | Medical device encapsulated within bonded dies |
| JP4585615B1 (ja) * | 2010-02-03 | 2010-11-24 | 株式会社オーギャ | 入力装置 |
| US8666505B2 (en) | 2010-10-26 | 2014-03-04 | Medtronic, Inc. | Wafer-scale package including power source |
| US8424388B2 (en) * | 2011-01-28 | 2013-04-23 | Medtronic, Inc. | Implantable capacitive pressure sensor apparatus and methods regarding same |
| GB2491111B (en) * | 2011-05-19 | 2015-08-19 | Oxford Instr Nanotechnology Tools Ltd | Charge-sensitive amplifier |
| US20120308066A1 (en) * | 2011-06-03 | 2012-12-06 | Hung-Jen Chen | Combined micro-electro-mechanical systems microphone and method for manufacturing the same |
| JP6111434B2 (ja) * | 2012-03-09 | 2017-04-12 | パナソニックＩｐマネジメント株式会社 | 慣性力センサ |
| CN104748769B (zh) * | 2013-12-25 | 2017-08-04 | 北京纳米能源与***研究所 | 一种基于静电感应的传感器以及传感方法 |
| JP6452140B2 (ja) * | 2014-02-19 | 2019-01-16 | 本田技研工業株式会社 | 距離センサ及び計測方法 |
| JP6555869B2 (ja) * | 2014-10-17 | 2019-08-07 | キヤノン株式会社 | 静電容量型トランスデューサ |
| US9826308B2 (en) | 2015-02-12 | 2017-11-21 | Apple Inc. | Capacitive displacement sensing circuit with a guard voltage source |
| KR101739791B1 (ko) * | 2015-05-11 | 2017-05-26 | 주식회사 하이딥 | 압력 센싱 장치, 압력 검출기 및 이들을 포함하는 장치 |
| CN105547553B (zh) * | 2015-12-15 | 2018-06-05 | 北京理工大学 | 基于压电驻极体的无源高灵敏冲击力传感器及其测试方法 |
| US9933867B2 (en) | 2015-12-30 | 2018-04-03 | Synaptics Incorporated | Active pen capacitive displacement gauge |
| TWI677669B (zh) * | 2016-09-20 | 2019-11-21 | 友達光電股份有限公司 | 壓力感測陣列與壓力感測方法 |
| JP6527193B2 (ja) * | 2017-04-07 | 2019-06-05 | 株式会社鷺宮製作所 | 圧力センサ |
| KR20220061222A (ko) * | 2019-11-07 | 2022-05-12 | 알프스 알파인 가부시키가이샤 | 정전 용량 검출 장치 및 정전 용량 검출 방법 |
| CN110794273A (zh) * | 2019-11-19 | 2020-02-14 | 哈尔滨理工大学 | 含有高压驱动保护电极的电位时域谱测试*** |
| EP4009006A1 (de) * | 2020-12-01 | 2022-06-08 | NXP USA, Inc. | Sensoreinheit mit reduktion von störeinstreuungen und betriebsverfahren |
| CN118056117A (zh) * | 2021-10-05 | 2024-05-17 | 株式会社村田制作所 | 压力传感器构造和压力传感器装置 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3417626A (en) * | 1965-05-25 | 1968-12-24 | Gen Precision Inc | Single-axis accelerometer |
| JPS6165114A (ja) * | 1984-09-06 | 1986-04-03 | Yokogawa Hokushin Electric Corp | 容量式変換装置 |
| JP2517467B2 (ja) * | 1990-10-05 | 1996-07-24 | 山武ハネウエル株式会社 | 静電容量式圧力センサ |
| JPH05231890A (ja) * | 1992-02-19 | 1993-09-07 | Yokogawa Electric Corp | 容量式電磁流量計 |
| FR2687777B1 (fr) * | 1992-02-20 | 1994-05-20 | Sextant Avionique | Micro-capteur capacitif a faible capacite parasite et procede de fabrication. |
| JPH0569631U (ja) * | 1992-02-24 | 1993-09-21 | 横河電機株式会社 | 容量式電磁流量計 |
| US5459368A (en) * | 1993-08-06 | 1995-10-17 | Matsushita Electric Industrial Co., Ltd. | Surface acoustic wave device mounted module |
| JPH0784554A (ja) * | 1993-09-20 | 1995-03-31 | Toshiba Corp | 液晶表示装置 |
| JP3217560B2 (ja) * | 1993-11-15 | 2001-10-09 | 株式会社東芝 | 半導体装置 |
| US5646348A (en) * | 1994-08-29 | 1997-07-08 | The Charles Stark Draper Laboratory, Inc. | Micromechanical sensor with a guard band electrode and fabrication technique therefor |
| US5545912A (en) * | 1994-10-27 | 1996-08-13 | Motorola, Inc. | Electronic device enclosure including a conductive cap and substrate |
| JPH09257832A (ja) * | 1996-03-26 | 1997-10-03 | Matsushita Electric Works Ltd | エレクトレット応用装置及びその製造方法 |
| JPH09257618A (ja) * | 1996-03-26 | 1997-10-03 | Toyota Central Res & Dev Lab Inc | 静電容量型圧力センサおよびその製造方法 |
| JPH1038508A (ja) * | 1996-07-22 | 1998-02-13 | Hewlett Packard Co <Hp> | 位置検出装置及び位置決め装置 |
-
1998
- 1998-07-14 JP JP21343298A patent/JP4124867B2/ja not_active Expired - Fee Related
-
1999
- 1999-07-05 DE DE69912887T patent/DE69912887T2/de not_active Expired - Lifetime
- 1999-07-05 EP EP99305319A patent/EP0973012B1/de not_active Expired - Lifetime
- 1999-07-05 DK DK99305319T patent/DK0973012T3/da active
- 1999-07-08 US US09/348,827 patent/US6145384A/en not_active Expired - Fee Related
- 1999-07-13 NO NO19993448A patent/NO320487B1/no not_active IP Right Cessation
- 1999-07-14 CN CNB99110451XA patent/CN1141564C/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1141564C (zh) | 2004-03-10 |
| JP4124867B2 (ja) | 2008-07-23 |
| EP0973012B1 (de) | 2003-11-19 |
| JP2000028462A (ja) | 2000-01-28 |
| CN1243244A (zh) | 2000-02-02 |
| DE69912887D1 (de) | 2003-12-24 |
| EP0973012A1 (de) | 2000-01-19 |
| NO993448D0 (no) | 1999-07-13 |
| US6145384A (en) | 2000-11-14 |
| DE69912887T2 (de) | 2004-11-04 |
| NO993448L (no) | 2000-01-17 |
| DK0973012T3 (da) | 2004-03-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM1K | Lapsed by not paying the annual fees |