NL6702137A - - Google Patents

Info

Publication number: NL6702137A
Authority: NL; Netherlands

Application number

NL6702137A

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1966-02-23

Filing date

1967-02-13

Publication date

1967-08-24

1967-02-13 Application filed filed Critical

1967-08-24 Publication of NL6702137A publication Critical patent/NL6702137A/xx

Links

Classifications

- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
- C30B31/106—Continuous processes
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S118/00—Coating apparatus
- Y10S118/90—Semiconductor vapor doping
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/006—Apparatus
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/907—Continuous processing

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Crystallography & Structural Chemistry (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physics & Mathematics (AREA)
Condensed Matter Physics & Semiconductors (AREA)
General Physics & Mathematics (AREA)
Manufacturing & Machinery (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Power Engineering (AREA)
Crystals, And After-Treatments Of Crystals (AREA)
Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

NL6702137A 1966-02-23 1967-02-13 NL6702137A (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US52928866A	1966-02-23	1966-02-23

Publications (1)

Publication Number	Publication Date
NL6702137A true NL6702137A (de)	1967-08-24

Family

ID=24109272

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL6702137A NL6702137A (de)	1966-02-23	1967-02-13

Country Status (5)

Country	Link
US (1)	US3473510A (de)
DE (1)	DE1619950A1 (de)
FR (1)	FR1511289A (de)
GB (1)	GB1156615A (de)
NL (1)	NL6702137A (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3598082A (en) *	1969-08-14	1971-08-10	Texas Instruments Inc	Continuous epitaxial deposition system
US3645545A (en) *	1970-07-30	1972-02-29	Ibm	Entrance-exit atmospheric isolation device
US3659551A (en) *	1970-08-10	1972-05-02	Anchor Hocking Corp	Glass treating tunnel
US3658032A (en) *	1970-11-05	1972-04-25	Fairchild Camera Instr Co	Reactor for the formation of material on a substrate
US3710757A (en) *	1970-12-09	1973-01-16	Texas Instruments Inc	Continuous deposition system
US3703881A (en) *	1971-05-13	1972-11-28	Us Air Force	Apparatus for ultra-high vacuum in situ thin film studies
US3805736A (en) *	1971-12-27	1974-04-23	Ibm	Apparatus for diffusion limited mass transport
US3780696A (en) *	1972-07-11	1973-12-25	Us Army	Substrate holder for arc plasma deposition
US4075972A (en) *	1975-08-20	1978-02-28	Nippondenso Co., Ltd.	Apparatus for thermal diffusion of semiconductor devices
US4048955A (en) *	1975-09-02	1977-09-20	Texas Instruments Incorporated	Continuous chemical vapor deposition reactor
JPS5936417B2 (ja) *	1975-11-26	1984-09-04	株式会社デンソー	半導体基板への高周波誘導加熱による拡散装置
US4116733A (en) *	1977-10-06	1978-09-26	Rca Corporation	Vapor phase growth technique of III-V compounds utilizing a preheating step
FR2427141B1 (de) *	1978-05-31	1980-10-10	Saint Gobain
US4218214A (en) *	1979-02-05	1980-08-19	Rca Corporation	Guide wing for a furnace paddle
US4389562A (en) *	1981-08-05	1983-06-21	Hatco Corporation	Conveyor oven
US4477718A (en) *	1983-01-10	1984-10-16	Radiant Technology Corporation	Infrared furnace with controlled environment
GB8421162D0 (en) *	1984-08-21	1984-09-26	British Telecomm	Growth of semi-conductors
US5259883A (en) *	1988-02-16	1993-11-09	Kabushiki Kaisha Toshiba	Method of thermally processing semiconductor wafers and an apparatus therefor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US1465071A (en) *	1919-07-24	1923-08-14	David S Baker	Drying apparatus
US2873222A (en) *	1957-11-07	1959-02-10	Bell Telephone Labor Inc	Vapor-solid diffusion of semiconductive material
GB1011274A (en) *	1963-06-08	1965-11-24	Westland Aircraft Ltd	Means and method for preparing gas-treated objects
US3279964A (en) *	1965-06-03	1966-10-18	Btu Eng Corp	Method for continuous gas diffusion

1966
- 1966-02-23 US US529288A patent/US3473510A/en not_active Expired - Lifetime
1967
- 1967-02-13 NL NL6702137A patent/NL6702137A/xx unknown
- 1967-02-13 FR FR94660A patent/FR1511289A/fr not_active Expired
- 1967-02-16 GB GB7492/67A patent/GB1156615A/en not_active Expired
- 1967-02-17 DE DE19671619950 patent/DE1619950A1/de active Pending

Also Published As

Publication number	Publication date
GB1156615A (en)	1969-07-02
DE1619950A1 (de)	1971-02-18
FR1511289A (fr)	1968-01-26
US3473510A (en)	1969-10-21

Publication	Publication Date	Title
AT281852B (de)	1970-06-10
AU5917865A (de)	1967-11-23
AU428063B2 (de)	1972-09-13
AU1141566A (de)	1968-03-21
AU433222B2 (de)	1973-03-01
AU5895065A (de)	1967-11-09
AU612166A (de)	1968-01-04
AU6703465A (de)	1968-04-26
AU1393566A (de)	1968-05-16
AU1111066A (de)	1968-03-21
AU1144366A (de)	1968-04-26
BE691727A (de)	1967-05-29
BE624223A (de)
BE691595A (de)	1967-05-29
BE691432A (de)	1967-05-29
BE675139A (de)	1966-05-03
BE675084A (de)	1966-04-03
BE674987A (de)	1966-06-16
BE674882A (de)	1966-05-03
BE674792A (de)	1966-05-03
BE674777A (de)	1966-05-03
BE674713A (de)	1966-05-03
BE692013A (de)	1967-06-30
BE673316A (de)
BE692533A (de)	1967-07-12