NL2027244A - A graphene membrane optical fiber f-p resonator with photothermal stress regulation and control, manufacturing method thereof - Google Patents

A graphene membrane optical fiber f-p resonator with photothermal stress regulation and control, manufacturing method thereof Download PDF

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NL2027244A
NL2027244A NL2027244A NL2027244A NL2027244A NL 2027244 A NL2027244 A NL 2027244A NL 2027244 A NL2027244 A NL 2027244A NL 2027244 A NL2027244 A NL 2027244A NL 2027244 A NL2027244 A NL 2027244A
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fiber
resonator
graphene membrane
quartz capillary
photothermal
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NL2027244A
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NL2027244B1 (en
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Li Ziang
Li Cheng
Fan Shangchun
Liu Huan
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Univ Beihang
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29358—Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator
    • G02B6/29359—Cavity formed by light guide ends, e.g. fibre Fabry Pérot [FFP]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
    • G02B6/29398—Temperature insensitivity

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

The present invention discloses a graphene membrane fiber F-P resonator with photothermal stress regulation and a manufacturing method thereof. The resonator takes graphene membrane as a resonant sensitive element, and the laser excitation end and the detection end adopt a structure in which the quartz capillary is combined with the ceramic ferrule. The method comprises: 1) welding the single-mode fiber and the quartz capillary with a fiber fusion splicer, and cutting the quartz capillary to a certain length with a fiber ultrasonic cutting knife, to form an initial cavity length of the Fabry-Perot interference cavity; 2) assembling the cut single-mode fiber-quartz capillary structure and the ceramic ferrule, and transferring the graphene membrane on the end surface of the ferrule; 3) fixing and aligning the regulating end structure assembled from the multi-mode fiber and the ceramic ferrule with the excitation end through a ceramic bushing, and 4) through adjusting distance between the multi-mode fiber end face and the graphene membrane, bonding and encapsulating the tail part of the ceramic ferrule and the fiber with epoxy resin. The present invention has the advantages of small structural size and adjustable membrane stress and resonant frequency.

Description

A GRAPHENE MEMBRANE OPTICAL FIBER F-P RESONATOR WITH PHOTOTHERMAL STRESS REGULATION AND CONTROL, MANUFACTURING METHOD THEREOF
FIELD OF THE INVENTION The present invention relates to the technical field of resonators and optical fiber sensing, in particular relates to a graphene membrane optical fiber F-P resonator with photothermal stress regulation and control, and a manufacturing method thereof.
BACKGROUND Since 2004, owing to excellent thermal, mechanical and electrical properties, graphene has attracted extensive attention and lots of researches from scholars at home and abroad, and has an important application potential in the field of micro-nano sensors. Graphene is a crystal with a two-dimensional structure, and the thickness of a single layer is merely 0.335nm (please refer to: Novoselov K S, Geim A K, Morozov S V, et al. Electric field effect in atomically thin carbon films[J]. Science, 2004, 306(5696): 666-669.). Graphene is also the known material with the highest strength currently, with a fracture strength of 130GPa and an elastic modulus of 1.0TPa (please refer to: Lee C, Wei X, Kysar J] W, et al. Measurement of the elastic properties and intrinsic strength of monolayer graphene[J]. Science, 2008, 321(5887):385-388.). In addition, graphene also has a favorable thermal property, the thermal conductivity of a single layer of graphene is as high as S300W(m-K) (please refer to: Balandin A A, Ghosh S, Bao W, et al. Superior thermal conductivity of single-layer graphene[J]. Nano letters, 2008, 8(3): 902-907.), and the thermal expansion coefficient is -7x10-6K-1 (please refer to Bao W, Miao F, Chen Z, et al. Controlled ripple texturing of suspended graphene and ultrathin graphite membranes[J]. Nature Nanotechnology, 2009, 4(9):562-566.). These excellent properties of graphene provide possibility for the 1 graphene to become a resonator based on photothermal excitation and optical detection.
At present, the research of the graphene resonator mainly involves realization of excitation and vibration pick-up manners, improvement of quality factors and tuning of resonant frequencies.
For example, in 2007, J.
Scott Bunch et al. from Cornell University of the U.S applied graphene membrane to a resonator for the first time, a single layer and multiple layers of graphene membranes manufactured by utilizing a mechanical exfoliation method are transferred to a silicon dioxide groove, two ends of which are provided with a positive electrode and a negative electrode.
The graphene membranes and the silicon dioxide groove as a whole form a nano electromechanical system, and resonant frequency of graphene and quality factors are measured through methods of electrostatic excitation and optical interference detection (please refer to: J Scott B, Zande A M V D, Verbridge S S, et al.
Electromechanical resonators from graphene sheets.[J]. Science, 2007, 315(5811):490-493.). In 2009, Changyao Chen et al. manufactured a single-layer graphene resonator, and researched influence of ambient temperature on the resonant frequency and quality factor.
Experimental results show that, compared with normal temperature, the resonator shows a favorable resonant property under a low temperature (please refer to: Chen C, Rosenblatt S, Bolotin K 1, et al.
Property of monolayer graphene nanomechanical resonators with electrical readout[J]. Nature Nanotechnology, 2009, 4(12):861-867.). In 2011, Robert A.
Barton et al. utilized the graphene membrane prepared from a chemical vapor deposition method to design and manufacture circular mechanical resonators with different diameters, and removed PMMA on the surface of graphene membrane through a high-temperature manner.
Experimental results show that the resonant frequency of the resonator increases along with a decrease in the size of the membrane, the quality factor is dramatically improved along with an increase in the size of the membrane, and prove that the graphene resonator can realize a superhigh quality factor (please refer to: Barton R A, Ilic B, Van d Z AM, et al.
High, size-dependent quality factor in an array of graphene mechanical resonators[J]. Nano Letters, 2011, 11(3):1232-1236.). In 2013, Changyao Chen et al. prepared a graphene nano mechanical resonator, realized adjustment of tensile force of the graphene membrane 2 through the manner of static electricity regulation, and further changed the resonant frequency of the resonator to realize tuning (Chen C, Lee S, Deshpande V V, et al. Graphene mechanical oscillators with tunable frequency[J]. Nature Nanotechnology, 2013, 8(12):923-927.). In 2018, Dejan Davidovikj et al. introduced a graphene membrane mechanical resonator with controllable temperature and resonant frequency, the plate heater in the experiment can adjust the tensile force in the plane of the suspended two-dimensional material membrane, realizes tuning of the tensile force in the plane of the suspended graphene membrane by utilizing direct current Joule heating, and improves resonant frequency and quality factor, which also reveals the potential value of regulation of the graphene membrane resonator (please refer to Davidovikj D, Poot M, Cartamil-Bueno S J, et al. On-chip heaters for tension tuning of graphene nanodrums[J]. Nano Letters, 2018, 18(5):2852-2858.). In the same year, Robin J. Dolleman et al. experimented and demonstrated parameter resonance of the suspended single-layer graphene membrane, increased the laser driving voltage to adjust the prestressing force to record different modes of the resonator, and analyzed theoretically the photothermal stress regulation principles of graphene membranes (please refer to: Dolleman R J, Houri S, Chandrashekar A, et al. Opto-thermally excited multi-mode parametric resonance in graphene membranes[J]. Scientific Reports, 2018, 8(1):9366-9373.).
In summary, based on the above analysis, scholars at home and abroad researched less on stress regulation and control of a graphene membrane resonator, and most researches are to adjust the graphene membrane through changing parameters at an excitation end or environmental factors, thereby that not only causes great damage to the membrane, but also changes initial state of the resonator so as to influence experimental results. To this end, in the present invention, graphene membrane is taken as a resonant sensitive element of the resonator, and by utilizing favorable thermal and mechanical properties of graphene, a graphene membrane resonator which can realize photothermal stress regulation by utilizing fiber and a manufacturing method thereof are proposed. In the method, on the basis of a traditional graphene 3 membrane F-P probe structure, a photothermal regulation and control structure is added, and thermal stress regulation of the graphene membrane can be realized on line, thereby avoiding influence of a change in the state of an excitation end or environmental factors in actual application on the resonant property of the graphene resonator, and having such advantages as small structural size, novel design, adjustable membrane stress and resonant frequency and improved quality factors and sensitivity.
SUMMARY OF THE INVENTION The purpose of the present invention is to provide a graphene membrane optical fiber F-P resonator with a small size of the structure andnovel design, which may realize photothermal regulation and control on membrane stress, and a manufacturing method thereof. The resonator is composed of an excitation detection end and a regulating and controlling end, and may realize photothermal stress regulation and control on the graphene membrane in the resonator. To achieve the above objective, the present invention is realized through the following technical solutions: The design and manufacturing method of the graphene membrane fiber F-P resonator regulated and controlled through photothermal stress provided in the present invention includes the following steps: step 1, removing a coating layer on the outer layer of a single-mode fiber and a metal protection layer outside the quartz capillary, removing impurities attached onto the surface, cutting flat the end surfaces of the fiber and the quartz capillary by utilizing a fiber ultrasonic cutting knife, and grinding and polishing the end surfaces of the fiber and the quartz capillary, such that the inclined angle of each end surface is controlled within 0.2°; 4 step 2, welding the single-mode fiber and the quartz capillary in step 1 by utilizing a fiber fusion splicer, to ensure firm welding point; step 3, cutting the welded single-mode fiber and the quartz capillary in step 2 by utilizing a fiber ultrasonic cutting knife, wherein the cutting point is close to the quartz capillary, then grinding and polishing the end surface of the capillary, and removing impurities on the surface and inside of the quartz capillary with an ultrasonic cleaner; step 4, inserting the cut single-mode fiber - quartz capillary structure in step 3 into the inside of a ceramic ferrule with a three-dimensional fiber micro-motion platform, and bonding the tail parts of the quartz capillary and the ceramic ferrule with epoxy resin adhesive after the end surface of the quartz capillary is flush with the end surface of the ceramic ferrule; step 5, transferring the graphene membrane to the surface of the probe structure in step 4, drying and processing the graphene membrane which is transferred to the base of the ferrule by utilizing a heating incubator, to finish manufacturing of the excitation detection end of the probe of the resonator; step 6, removing the coating layer on the outer layer of the multi-mode fiber, cutting flat the end surface by utilizing a fiber ultrasonic cutting knife, and transferring to the inside of the ceramic ferrule, to finish manufacturing of the photothermal regulating and controlling end of the probe of the resonator; and step 7, fixing and aligning the photothermal excitation detection end and the regulating and controlling end of the probe in step 5 and step 6 by utilizing a ceramic bushing, adjusting the distance between the multi-mode fiber and the graphene membrane by aid of a three-dimensional fiber micro-motion platform, and sealing the tail parts of the multi-mode fiber and the ceramic ferrule with epoxy resin adhesive, to finish manufacturing of the graphene membrane resonator with regulatable and controllable fiber photothermal stress.
Wherein the graphene membrane resonator includes excitation detection, and photothermal regulation and control, with the functions respectively being excitation/ vibration pick-up of the resonator and photothermal stress regulation of the graphene membrane.
Wherein the quartz capillary in step 1 is a hollow structure, the outer diameter of which is 125um and is matched with the diameter of a single-mode fiber, and the inner diameter of which is 50pm.
Wherein the excitation detection end of the probe of a resonator in step 5 has an inner and an outer layer of structure, wherein the outer layer is a ceramic ferrule structure, and plays a role of protecting and supporting the graphene membrane; and the inner layer is a single-mode fiber - quartz capillary structure which is flush with the end surface of the ceramic ferrule so as to realize excitation and vibration pick-up to the graphene membrane.
Wherein the graphene membrane in step 5 is simultaneously attached onto the end surfaces of the ceramic ferrule and the quartz capillary, and the size corresponding to the peripheral clamped conditions of the graphene circular diaphragm is consistent with the size of the used quartz capillary.
Wherein a multi-mode fiber core is used on the side of the photothermal regulating and controlling end of the probe of the resonator in step 6, however, type of the fiber is not limited to the above, and it can be expanded to single-mode fiber, photonic crystal fiber, etc.
Wherein an inner diameter of the ceramic bushing in step 7 is used for alignment of graphene membrane and multi-mode fiber attached onto the end surface of the quartz 6 capillary.
Moreover, the ceramic bushing may use a notching or closed structure according to requirements of application conditions.
Wherein the graphene membrane used by the diaphragm-type fiber F-P resonator can be in a single layer, few layers or multiple layers, and can also be a circular diaphragm, a beam diaphragm or of other structures.
The diaphragm is not limited to graphene membrane, and can be expanded to other sensitive diaphragms, such as a silicon membrane, a silver membrane, a MoS; and other organic diaphragms.
The present invention further provides a graphene membrane optical fiber F-P resonator with photothermal stress regulation and control, and the resonator is manufactured through the above method of manufacturing.
The present invention has the following advantages compared with the prior art: (1) The excitation and vibration pick-up of the resonator in the present invention respectively adopt methods of photothermal excitation and fiber interference detection, which may avoid mechanical contact between elements to a certain extent and eliminate frictional force, further effectively avoid influences of such external factors as electromagnetic interference and chemical corrosion, to obtain a favorable sensitivity and signal to noise ratio; (2) The sensitive elements of the resonator in the present invention adopt the graphene membrane with favorable thermal and mechanical properties, its ultrathin thickness enables the graphene membrane to have a high dynamic range and measurement precision, and impermeability can also sense a pressure change to realize resonant measurement of pressure; (3) The quartz capillary adopted in the present invention is a hollow structure, whose small size of an inner diameter may effectively improve the resonant frequency of the 7 resonator and reduce amplitude of the graphene membrane so as to avoid the phenomenon of distortion of interference light in a spatial light detection method, and beneficially reduce such shortcomings as damage and folds produced during the transfer process of the graphene membrane; (4) The excitation detection end of the probe in the present invention includes a ceramic ferrule portion and a single-mode fiber - quartz capillary portion, and the ceramic ferrule may effectively protect its internal quartz capillary structure and support the graphene membrane; (5) Alignment of the excitation detection end and the photothermal regulating and controlling structure is realized through the ceramic bushing in the present invention, and on the other side of the excitation detection end, thermal stress regulation and control are performed on the graphene membrane by utilizing the fiber laser, so as to avoid a change of the structure of the excitation end and influence of a change in the vibrating environment of the resonator caused by the change of the structure of the excitation end on the resonant property; and (6) The present invention has such advantages as simple manufacturing, small structural size, high sensitivity, resistance to chemical corrosion and electromagnetic interference, and regulatable and controllable photothermal stress of the graphene membrane, and can be used in many fields like aerospace and biomedicine.
BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a structural schematic diagram of a graphene membrane optical fiber F-P resonator with photothermal stress regulation and control of the present invention; Fig. 2 is a manufacturing flow diagram of a graphene membrane optical fiber F-P resonator with photothermal stress regulation and control of the present invention; 8
Fig. 3 is a manufacturing process flow diagram of a graphene membrane optical fiber F-P resonator with photothermal stress regulation and control of the present invention, wherein Fig. 3(a) shows alignment of end surfaces of a quartz capillary and a single-mode fiber, Fig. 3(b) shows determination of length of an initial cavity of an F-P interference cavity, Fig. 3(c) shows manufacturing of an excitation detection end of a probe of a resonator, Fig. 3(d) shows manufacturing of a photothermal regulating and controlling end of a probe of a resonator, and Fig. 3(e) shows manufacturing of a graphene membrane resonator with photothermal stress regulation and control. Reference numerals in the figures: 1, the tail end of single-mode fiber, 2, epoxy resin adhesive, 3, single-mode fiber, 4, ceramic ferrule used for an excitation detection end, 5, quartz capillary, 6, ceramic bushing, 7, graphene membrane, 8, ceramic ferrule used for a regulating and controlling end, 9, multi-mode fiber, 10, the tail end of multi-mode fiber.
DETAILED DESCRIPTION The present invention will be described in detail below in combination with accompanying drawings, as a part of the present description, principles of the present invention are illustrated through embodiments, and other aspects, characteristics and advantages of the present invention will become apparent through the detailed description. Fig. 1 is a structural schematic diagram of a graphene membrane optical fiber F-P resonator of the present invention. The resonator is mainly composed of an excitation detection end and a regulating and controlling end, the excitation detection end mainly includes a single-mode fiber 3, a ceramic ferrule 4, a quartz capillary 5 and a graphene membrane 6, and the regulating end mainly includes a ceramic ferrule 8 and a multi-mode fiber 9. The graphene membrane 6 is not limited to be in multiple layers, 9 and can be in a single layer or in few layers, the shape of the graphene membrane 6 is a circular diaphragm; the outer diameter of the single-mode fiber 3 and the multi-mode fiber 9 1s 125um; the inner diameter of the ceramic ferrule is 125um, and the outer diameter is 2.5mm; the outer diameter of the quartz capillary is 125um, and the inner diameter is S0um; and the inner diameter of the ceramic bushing is 2.5mm.
Fig. 2 and Fig. 3 respectively show a manufacturing flow diagram and a manufacturing process flow diagram of a graphene membrane optical fiber F-P resonator with photothermal stress regulation and control.
Based on the manufacturing flow as shown in Fig. 2, in reference with the process flow as shown in Fig. 3, the manufacturing process of the graphene membrane optical fiber F-P resonator is described with the peripheral clamped graphene circular diaphragm being a resonant sensitive element as an example.
Firstly, a coating layer is stripped off at 2cm from the end surface of the single-mode fiber 3 with a wire stripper, further dust-free paper is used to dip into alcohol to gently wipe the single-mode fiber 3 along an axial direction so as to remove impurities attached onto the surface.
Afterwards, the end surface of the single-mode fiber 3 is cut flat with a fiber cutting knife, and then the end surface is grinded and polished with a fiber grinding machine, further the single-mode fiber 3 is cleaned with alcohol and then placed at one end of a fiber fusion splicer (Fujikura-80C), further still, the cutting angle of the single-mode fiber 3 is observed in a panel of the fusion splicer and the angle is controlled to be within 0.2°. If the angle is too large, the fiber needs to be cut or grinded again.
A layer of metal protection layer is outside the quartz capillary 5, and should be burned with a flame for about Ss, and then wiped with alcohol.
Afterwards, the end surface of the quartz capillary 5 1s cut flat with a fiber ultrasonic cutting knife, and the end surface is also polished and grinded with a fiber grinder, and then placed at the other end of the fiber fusion splicer, further the cutting effect is observed, and the cutting angle is still controlled to be within 0.2°.
Afterwards, the fusion splicer is adjusted to be in a multi-mode fiber splicing mode. The welding parameter is adjusted appropriately, and the interval between the end surface of the quartz capillary 5 and the end surface of the single-mode fiber 3 is set to be 15um (as shown in Fig. 3a). The premelting power is 20bit; the premelting time is 80ms; the first discharge power is 15bit; the discharge time is 100ms; the second discharge power is 30bit; and the discharge time is 180ms. A tensile test is performed after welding, and then the welding point is observed to ensure flat welding surface without obvious swelling and depression, bubbles or misplacement. In this way, the two ends of the welded single-mode fiber 3 and the quartz capillary 5 are clamped tightly with a fiber ultrasonic cutting knife. The head of the cutting knife is aligned with the welding point, and the cutting knife 1s placed under an integrated microscope where the position of the welding point is adjusted, such that the head of the cutting knife is arranged within a range of 50-100um from the welding point for cutting. Therefore, the length between the cutting point and the end surface of the single-mode fiber 3 can be determined to be the initial cavity length of the F-P interference cavity (as shown in Fig. 3b).
Then, the combined structure manufactured from the single-mode fiber 3 and the quartz capillary 5, and the ceramic ferrule 4 are respectively placed into an ultrasonic cleaner to clean for 10min. Then the two are fixed at two ends of a three-dimensional fiber micro-motion platform, and the relative position of the end surface between the combined structure constituted by the single-mode fiber 3 - quartz capillary 5 and the ceramic ferrule 4 is observed with a microscope. The rotary knob at the side of the three-dimensional fiber micro-motion platform is adjusted to enable the combined structure to enter the inside of the ceramic ferrule 4. When the end surface of the quartz capillary S 1s flush with the end surface of the ceramic ferrule 4, the tail part of the ceramic ferrule 4 and the single-mode fiber 3 are bonded firmly with epoxy resin adhesive 2, and cured for 30min, after thatthe cured structure is subjected to end surface grinding and polishing by utilizing a fiber grinding machine, and then it is placed in an ultrasonic cleaner to clean for Smin. On this basis, the graphene 11 membrane 7 is transferred based on the end surface of the ferrule structure, such that the graphene membrane 7 is simultaneously attached onto the end surfaces of the quartz capillary 5 and the ceramic ferrule 4. A probe transferred with a graphene membrane 7 is placed in an incubator, and is heated at 50°C for 30min for drying treatment, so as to finish the manufacturing of the excitation detection end of the probe of the resonator (as shown in Fig. 3¢).
Afterwards, the coating layer on the outer layer of the multi-mode fiber 9 is removed, further dust-free paper is used to dip into alcohol to gently wipe the multi-mode fiber 9 along an axial direction, so as to remove impurities attached onto the surface. The end surface of the multi-mode fiber 9 is cut flat with a fiber cutting knife, further the end surface is grinded and polished with a fiber grinding machine, and then the multi-mode fiber 9 is cleaned with alcohol and then transferred into the inside of the ceramic ferrule 8, so as to finish manufacturing of the photothermal regulating and controlling end of the probe of the resonator (as shown in Fig. 3d).
Finally, the excitation detection end and regulating and controlling end of the manufactured probe are fixed and aligned with a ceramic bushing 6, further the distance between the multi-mode fiber 9 and the graphene membrane 7 is adjusted by aid of the three-dimensional fiber micro-motion platform, and then the tail parts of the multi-mode fiber 9 and the ceramic ferrule 8 are sealed with epoxy resin adhesive 2, so as to finish manufacturing of the graphene membrane resonator with regulatable and controllable optical fiber photothermal stress (as shown in Fig. 3e). The excitation and vibration pick-up of the manufactured graphene membrane fiber F-P resonator in the present invention respectively adopt a method of photothermal excitation and optical detection, which may effectively reduce frictional force and further effectively avoid influences of such external factors as electromagnetic interference and chemical corrosion, and to obtain a favorable sensitivity and signal to noise ratio, and the resonator has such advantages as simple manufacturing, small structural size, high sensitivity, and regulatable and controllable photothermal stress of the graphene 12 membrane, and can be used in many fields like aerospace and biomedicine. 13

Claims (9)

ConclusiesConclusions 1. Een vervaardigingswerkwijze voor een grafeenmembraan-optische- vezel-F-P-resonator met fotothermische spanningsregulering en -regeling, omvattende de volgende stappen: stap 1, het verwijderen van een deklaag op een buitenlaag van een enkele-modus-vezel en een metalen beschermingslaag buiten het kwartscapillair, het verwijderen van op het oppervlak gehechte onzuiverheden, het vlak snijden van de eindoppervlakken van de vezel en het kwartscapillair door gebruik van een vezel-ultrasoon-snijmes, en het slijpen en polijsten van de eindvlakken van de vezel en het kwartscapillair, zodanig dat de hellingshoek van elk eindoppervlak binnen 0,2° wordt geregeld; stap 2, het lassen van de enkele-modus-vezel en de kwartscapillair in stap 1 door gebruik van een vezelfusielasser, om trekkrachttest uit te voeren en stevig laspunt te verzekeren; stap 3, het snijden van de gelaste kwartscapillair in stap 2 door gebruik van een vezel-ultrasoon-snij-mes, waarbij het snijpunt nabij het laspunt is, dan het slijpen en polijsten van het eindoppervlak van het kwartscapillair, en het verwijderen van onzuiverheden op het oppervlak en binnenzijde van het kwartscapillair met een ultrasone reiniger; stap 4, het insteken van de gesneden enkele-modus-vezel-kwarts- capillair-structuur in stap 3 in de binnenzijde van een keramische verbindingsring met een driedimensionaal vezelmicrobewegingsplatform, en het verbinden van de uiteinden van het kwartscapillair en de keramische verbindingsring met epoxyharshechtmiddel nadat het eindoppervlak van het kwartscapillair gelijk is met het eindoppervlak van de keramische verbindingsring;A manufacturing method for a graphene membrane optical fiber FP resonator with photothermal stress regulation and control, comprising the steps of: Step 1, removing a coating on an outer layer of a single mode fiber and an outer metal protective layer the quartz capillary, removing impurities adhering to the surface, plane cutting the end surfaces of the fiber and the quartz capillary using a fiber ultrasonic cutting knife, and grinding and polishing the end faces of the fiber and the quartz capillary, such that the angle of inclination of each end surface is controlled within 0.2°; step 2, welding the single mode fiber and the quartz capillary in step 1 by using a fiber fusion welder, to perform tensile test and ensure solid welding point; step 3, cutting the welded quartz capillary in step 2 by using a fiber ultrasonic cutting knife, the cutting point is near the welding point, then grinding and polishing the end surface of the quartz capillary, and removing impurities on the surface and inside of the quartz capillary with an ultrasonic cleaner; step 4, inserting the cut single mode fiber quartz capillary structure in step 3 into the inside of a ceramic connection ring with a three-dimensional fiber micromotion platform, and connecting the ends of the quartz capillary and the ceramic connection ring with epoxy resin adhesive after the end surface of the quartz capillary is flush with the end surface of the ceramic connecting ring; stap 5, het overbrengen van het grafeenmembraan op de eindoppervlakken van het kwartscapillair en de keramische verbindingsring in stap 4, waarbij het grafeenmembraan dat naar de basis van de verbindingsring wordt overgebracht wordt gedroogd en verwerkt door gebruik van een verwarmingskamer, om vervaardiging van het excitatiedetectie-einde van de sonde van de resonator te voltooien; stap 6, het verwijderen van de deklaag op de buitenlaag van de multimodusvezel, het vlak snijden van het eindoppervlak door gebruik van een vezel-ultrasoon-snijmes, en het overbrengen naar de binnenzijde van de keramische verbindingsring, om vervaardiging van het fotothermische- reguleer-en-regel-einde van de sonde van de resonator te voltooien; en stap 7, het vastmaken en uitlijnen van het fotothermische-step 5, transferring the graphene membrane to the end surfaces of the quartz capillary and the ceramic bonding ring in step 4, wherein the graphene membrane transferred to the base of the bonding ring is dried and processed by using a heating chamber to manufacture the excitation sensing device end of the resonator probe; step 6, removing the coating on the outer layer of the multimode fiber, cutting the end surface flat by using a fiber ultrasonic cutting knife, and transferring it to the inside of the ceramic bonding ring, to manufacture the photothermal regulating to complete the en-line end of the resonator probe; and step 7, securing and aligning the photothermal excitatiedetectie-einde en het reguleer-en-regeleinde van de sonde in stap 5 en stap 6 door gebruik van een keramische huls, het aanpassen van de afstand tussen de multimodusvezel en het grafeenmembraan met hulp van een driedimensionaal vezelmicrobewegingsplatform, en het afdichten van de uiteinden van de multimodusvezel en de keramische verbindingsring met epoxyharshechtmiddel, om vervaardiging van de grafeenmembraanresonator met reguleerbare en regelbare vezel- fotothermische-spanning te voltooien.excitation sensing end and the control-and-control end of the probe in step 5 and step 6 by using a ceramic sleeve, adjusting the distance between the multimode fiber and the graphene membrane using a three-dimensional fiber micromotion platform, and sealing the ends of the multimode fiber and the ceramic bonding ring with epoxy resin adhesive, to complete fabrication of the graphene membrane resonator with controllable and controllable fiber photothermal stress. 2. De vervaardigingswerkwijze voor een grafeenmembraan-optische- vezel-F-P-resonator met fotothermische spanningsregulering en -regeling volgens conclusie 1, waarbij de grafeenmembraanresonator excitatiedetectie en fotothermische regulering omvat, waarbij de functies respectievelijk het opnemen van excitatie/vibratie van de resonator en fotothermischespanningsregulering en -regeling van het grafeenmembraan zijn.The manufacturing method for a graphene membrane optical fiber FP resonator with photothermal voltage regulation and control according to claim 1, wherein the graphene membrane resonator comprises excitation detection and photothermal regulation, wherein the functions respectively include excitation/vibration of the resonator and photothermal voltage regulation and regulation of the graphene membrane. 3. De vervaardigingswerkwijze voor een grafeenmembraan-optische- vezel-F-P-resonator met fotothermische spanningsregulering en -regeling volgens conclusie 1, waarbij het kwartscapillair in stap 1 een holle structuur is, waarvan de buitendiameter 125 um is die is aangepast bij de diameter van een enkele-modus-vezel, en waarvan de binnendiameter 50 um is.The manufacturing method for a graphene membrane optical fiber FP resonator with photothermal stress regulation and control according to claim 1, wherein the quartz capillary in step 1 is a hollow structure, the outer diameter of which is 125 µm matched to the diameter of a single mode fiber, and whose inner diameter is 50 µm. 4. De vervaardigingswerkwijze voor een grafeenmembraan-optische- vezel-F-P-resonator met fotothermische spanningsregulering en -regeling volgens conclusie 1, waarbij het excitatiedetectie-einde van de sonde van een resonator in stap 5 een binnen- en een buitenlaag van structuur heeft, waarbij de buitenlaag een keramische-verbindingsring-structuur is, en een rol speelt van het beschermen en steunen van het grafeenmembraan; de binnenlaag een enkele-modus-vezel-kwartscapillair-structuur is die gelijk is met het eindoppervlak van de keramische verbindingsring om zo opname van excitatie en vibratie naar het grafeenmembraan te realiseren.The manufacturing method for a graphene membrane optical fiber FP resonator with photothermal voltage regulation and control according to claim 1, wherein the excitation detecting end of the probe of a resonator in step 5 has an inner and an outer layer of structure, wherein the outer layer is a ceramic bonding ring structure, and plays a role of protecting and supporting the graphene membrane; the inner layer is a single mode fiber quartz capillary structure which is flush with the end surface of the ceramic bonding ring so as to realize excitation and vibration absorption to the graphene membrane. 5. De vervaardigingswerkwijze voor een grafeenmembraan-optische- vezel-F-P-resonator met fotothermische spanningsregulering en -regeling volgens conclusie 1, waarbij het grafeenmembraan in stap 5 tegelijkertijd op de eindoppervlakken van de keramische verbindingsring en het kwartscapillair wordt gehecht, en het formaat dat correspondeert met de perifere geklemde omstandigheden van het grafeen-circulair-diafragma consistent is met het formaat van het gebruikte kwartscapillair.The manufacturing method for a graphene membrane optical fiber FP resonator with photothermal stress regulation and control according to claim 1, wherein the graphene membrane is bonded to the end surfaces of the ceramic bonding ring and the quartz capillary simultaneously in step 5, and the corresponding size with the peripheral clamped conditions of the graphene circular diaphragm is consistent with the size of the quartz capillary used. 6. De vervaardigingswerkwijze voor een grafeenmembraan-optische- vezel-F-P-resonator met fotothermische spanningsregulering en -regeling volgens conclusie 1, waarbij een multimodusvezel wordt gebruikt aan de zijde van het fotothermische-reguleer-en-regel-einde van de sonde van de resonator in stap 6, of een enkele-modus-vezel of een fotonisch-kristal-vezel kan worden gebruikt.The manufacturing method for a graphene membrane optical fiber FP resonator with photothermal voltage regulation and control according to claim 1, wherein a multimode fiber is used on the photothermal regulating-and-control end side of the probe of the resonator in step 6, whether a single mode fiber or a photonic crystal fiber can be used. 7. De vervaardigingswerkwijze voor een grafeenmembraan-optische- vezel-F-P-resonator met fotothermische spanningsregulering en -regeling volgens conclusie 1, waarbij de keramische huls in stap 7 wordt gebruikt voor uitlijning van grafeenmembraan en multimodusvezel gehecht op het eindoppervlak van het kwartscapillair, bovendien, de keramische huls kan een inkeping of gesloten structuur gebruiken volgens vereisten van toepassingsomstandigheden.The manufacturing method for a graphene membrane optical fiber FP resonator with photothermal stress regulation and control according to claim 1, wherein the ceramic sleeve is used in step 7 for alignment of graphene membrane and multimode fiber bonded to the end surface of the quartz capillary, in addition, the ceramic sleeve can use notch or closed structure according to requirements of application conditions. 8. De vervaardigingswerkwijze voor een grafeenmembraan-optische- vezel-F-P-resonator met fotothermische spanningsregulering en -regeling volgens conclusie 1, waarbij het door het diafragma-type vezel-F-P-resonator gebruikte grafeenmembraan in een enkele laag of meerdere lagen kan zijn voorzien, en ook een circulair diafragma of een balkdiafragma kan zijn, of een siliconemembraan, een zilvermembraan, een MoSs- en andere organische diafragma’s kan zijn.The manufacturing method for a graphene membrane optical fiber FP resonator with photothermal stress regulation and control according to claim 1, wherein the graphene membrane used by the diaphragm type fiber FP resonator may be provided in a single layer or multiple layers, and may also be a circular diaphragm or a beam diaphragm, or may be a silicone diaphragm, a silver diaphragm, a MoSs and other organic diaphragms. 9. Een grafeenmembraan-optische-vezel-F-P-resonator met fotothermische spanningsregulering en -regeling, waarbij de resonator is vervaardigd via de vervaardigingswerkwijze volgens een van de conclusies 1 tot en met 8.A graphene membrane optical fiber F-P resonator with photothermal stress regulation and control, the resonator being manufactured by the manufacturing method according to any one of claims 1 to 8.
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