MX9800986A - Deposito de vapor quimico y formacion de polvo usando pulverizacion termica con soluciones de fluido supercritico o casi supercritico. - Google Patents

Deposito de vapor quimico y formacion de polvo usando pulverizacion termica con soluciones de fluido supercritico o casi supercritico.

Info

Publication number
MX9800986A
MX9800986A MX9800986A MX9800986A MX9800986A MX 9800986 A MX9800986 A MX 9800986A MX 9800986 A MX9800986 A MX 9800986A MX 9800986 A MX9800986 A MX 9800986A MX 9800986 A MX9800986 A MX 9800986A
Authority
MX
Mexico
Prior art keywords
flame
vapor deposition
chemical vapor
plasma torch
supercritical
Prior art date
Application number
MX9800986A
Other languages
English (en)
Other versions
MXPA98000986A (es
Inventor
Andrew T Hunt
Original Assignee
Microcoating Technologies
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microcoating Technologies filed Critical Microcoating Technologies
Publication of MX9800986A publication Critical patent/MX9800986A/es
Publication of MXPA98000986A publication Critical patent/MXPA98000986A/es

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/16—Making metallic powder or suspensions thereof using chemical processes
    • B22F9/18—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
    • B22F9/28—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from gaseous metal compounds
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/14—Methods for preparing oxides or hydroxides in general
    • C01B13/34—Methods for preparing oxides or hydroxides in general by oxidation or hydrolysis of sprayed or atomised solutions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
    • B05D1/08—Flame spraying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2401/00—Form of the coating product, e.g. solution, water dispersion, powders or the like
    • B05D2401/90—Form of the coating product, e.g. solution, water dispersion, powders or the like at least one component of the composition being in supercritical state or close to supercritical state
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals
    • Y02P20/54—Improvements relating to the production of bulk chemicals using solvents, e.g. supercritical solvents or ionic liquids
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/256—Heavy metal or aluminum or compound thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Dispersion Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Nozzles (AREA)
  • Manufacturing Of Micro-Capsules (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

Un método para el deposito de vapor químico usando una atomizacion muy fina o vaporizacion de un reacitvo que contiene fluido líquido o similar a líquido casi en su temperatura supercrítica, donde la solucion atomizada o vaporizada resultante se introduce en una flama o soplete de plasma, y se forma un polvo o un revestimiento depositado en un substrato. La flama de combustion puede ser estable desde 10 torr a multiples atmosferas, y proporciona el ambiente energético en el cual el reactivo contenido dentro del fluido se puede hacer reaccionar para formar el polvo deseado o el material de revestimiento en un substrato. El soporte de plasma produce igualmente el ambiente de energía requerido, pero, diferente de la flama, no se necesita un oxidante de modo que se pueden formar materiales estables en solo presiones parciales de oxígeno muy bajas. Usando ya sea el soplete de plasma o el plasma de combustion se pueden depositar revestimientos y polvos formados en la atmosfera abierta sin la necesidad de una cámara de reaccion, pero se puede usar una cámara por varias razones incluyendo la separacion del proceso del medio ambiente y la regulacion de la presion.
MXPA/A/1998/000986A 1995-08-04 1998-02-04 Deposito de vapor quimico y formacion de polvo usando pulverizacion termica con soluciones de fluido supercritico o casi supercritico MXPA98000986A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US208495P 1995-08-04 1995-08-04
US60/002,084 1995-08-04

Publications (2)

Publication Number Publication Date
MX9800986A true MX9800986A (es) 1998-09-30
MXPA98000986A MXPA98000986A (es) 1998-11-16

Family

ID=

Also Published As

Publication number Publication date
US20010039919A1 (en) 2001-11-15
EP0848658B1 (en) 2006-10-11
US20050019551A1 (en) 2005-01-27
DE69636627D1 (de) 2006-11-23
EP0848658A1 (en) 1998-06-24
JP4047382B2 (ja) 2008-02-13
US6793975B2 (en) 2004-09-21
DE69636627T2 (de) 2007-08-30
WO1997005994A1 (en) 1997-02-20
JPH11510855A (ja) 1999-09-21
PT848658E (pt) 2007-01-31
US5997956A (en) 1999-12-07
KR100479485B1 (ko) 2005-09-07
EP0848658A4 (en) 2001-04-04
US20020015797A1 (en) 2002-02-07
BR9610069A (pt) 2000-05-09
US6132653A (en) 2000-10-17
KR19990036147A (ko) 1999-05-25
ATE342154T1 (de) 2006-11-15

Similar Documents

Publication Publication Date Title
EP0848658A4 (en) CHEMICAL VAPOR DEPOSITION AND POWDER FORMATION BY HOT METALIZATION WITH QUASI-OVERCRITICAL AND SURCRITICAL FLUID SOLUTIONS
CA2269862C (en) Apparatus and process for controlled atmosphere chemical vapor deposition
KR960701236A (ko) 필름 및 코우팅의 연소 화학적 증기 증착을 위한 방법 및 장치(method and apparatus for the combustion chemical vapor deposition of films and coatings)
US5945162A (en) Method and device for introducing precursors into chamber for chemical vapor deposition
JP3078835B2 (ja) 化学蒸着のための気化反応物の製造方法
TW362118B (en) Method for depositing amorphous SiNC coatings
TW348267B (en) Chemical vapor deposition device
WO2000042236A3 (en) Processing system and method for chemical vapor deposition
EP0905276A3 (en) Apparatus for vaporizing and supplying a material
GB1448848A (en) Method for increasing rate of coating using vaporized reactants
TW371774B (en) Liquid vaporizer system and method
TW328971B (en) Method for depositing Si-O containing coatings
CA2051554A1 (en) Thin film deposition method
KR960001163A (ko) 전이금속-크롬-알루미늄-이트륨-기저 코팅물중에 분산된 카바이드 입자의 제조방법
CA2110647A1 (en) Vapour Generator for Chemical Vapour Deposition Systems
ES2009963A6 (es) Un aparato para depositar una pelicula sobre una superficie de un sustrato, y procedimiento correspondiente.
Wood et al. Coating particles by chemical vapor deposition in fluidized bed reactors
EP0437946A3 (en) Web barrier packaging material
US7784306B1 (en) Material deposition
Domrachev et al. The Formation of Inorganic Coatings in the Decomposition of Organometallic Compounds
JPS57123969A (en) Formation of zinc oxide film by vapor phase method using plasma
SU732408A1 (ru) Способ нанесени хромовых покрытий
JPS6362881A (ja) 金属アルコラ−トを用いたプラズマ化学蒸着法
Jang et al. Kinetics of Titanium Deposition on Stainless Steel at Elevated Temperatures
JPH02129370A (ja) Ｃｖｄ装置への液化性原料導入法

Legal Events

Date Code Title Description
FG Grant or registration