MX2021007957A - Aparato para inspeccionar cuerpos semejantes a una placa. - Google Patents
Aparato para inspeccionar cuerpos semejantes a una placa.Info
- Publication number
- MX2021007957A MX2021007957A MX2021007957A MX2021007957A MX2021007957A MX 2021007957 A MX2021007957 A MX 2021007957A MX 2021007957 A MX2021007957 A MX 2021007957A MX 2021007957 A MX2021007957 A MX 2021007957A MX 2021007957 A MX2021007957 A MX 2021007957A
- Authority
- MX
- Mexico
- Prior art keywords
- light
- plate
- emitting unit
- surface parts
- light emitting
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N2021/845—Objects on a conveyor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8841—Illumination and detection on two sides of object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
- G01N21/9503—Wafer edge inspection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/10—Scanning
- G01N2201/104—Mechano-optical scan, i.e. object and beam moving
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Signal Processing (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Se proporciona un aparato de inspección para un cuerpo semejante a una placa que inspecciona las partes superficiales laterales del cuerpo semejante a una placa que tiene, sobre cada uno del lado superficial superior y el lado superficial inferior del mismo, un material de recubrimiento semejante a una lámina. El aparato de inspección tiene: una unidad emisora de luz que irradia con luz las partes superficiales laterales; una unidad receptora de luz que recibe la luz reflejada por las partes superficiales laterales; medios de transporte para mover al menos uno entre la unidad emisora de luz y el cuerpo semejante a una placa y para cambiar la posición de la luz emitida desde la unidad emisora de luz en las partes superficiales laterales; y una unidad de determinación que cambia la posición de la luz, emitida por la unidad emisora de luz en la parte superficial lateral, en la dirección longitudinal de las partes superficiales laterales por los medios de transporte y que determina si las partes superficiales laterales del cuerpo semejante a una placa tienen un defecto usando la luz emitida desde la unidad emisora de luz.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019036625 | 2019-02-28 | ||
PCT/JP2020/003214 WO2020174990A1 (ja) | 2019-02-28 | 2020-01-29 | 板状体の検査装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
MX2021007957A true MX2021007957A (es) | 2021-08-11 |
Family
ID=72239702
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2021007957A MX2021007957A (es) | 2019-02-28 | 2020-01-29 | Aparato para inspeccionar cuerpos semejantes a una placa. |
Country Status (12)
Country | Link |
---|---|
US (1) | US11692944B2 (es) |
EP (1) | EP3882610A4 (es) |
JP (1) | JP7246774B2 (es) |
KR (1) | KR20210129038A (es) |
CN (1) | CN113196042A (es) |
AU (1) | AU2020228819A1 (es) |
BR (1) | BR112021011472A2 (es) |
CA (1) | CA3124335A1 (es) |
MX (1) | MX2021007957A (es) |
PH (1) | PH12021551501A1 (es) |
SG (1) | SG11202107495UA (es) |
WO (1) | WO2020174990A1 (es) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN215574703U (zh) * | 2021-05-19 | 2022-01-18 | 富泰华工业(深圳)有限公司 | 检测装置 |
Family Cites Families (45)
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JPH05346319A (ja) * | 1992-06-15 | 1993-12-27 | Yamatake Honeywell Co Ltd | 板状連続物体の面検査装置 |
SE516607C2 (sv) * | 1995-12-04 | 2002-02-05 | Optonova Ab | Sätt och anordning vid kantavkänning |
JPH10142159A (ja) * | 1996-11-07 | 1998-05-29 | Ngk Spark Plug Co Ltd | 配線基板の側面外観検査装置とこれを用いた検査方法 |
JPH11148902A (ja) | 1997-11-17 | 1999-06-02 | Mitsubishi Chemical Corp | 平板状基板の表面欠陥検査装置 |
JP3859859B2 (ja) * | 1998-03-18 | 2006-12-20 | セントラル硝子株式会社 | 透明板状体の欠陥検出方法および装置 |
JP3377753B2 (ja) * | 1998-08-28 | 2003-02-17 | 吉野石膏株式会社 | エッジ角度検出装置及びエッジ角度検出方法 |
JP2000111485A (ja) * | 1998-10-07 | 2000-04-21 | Mitsubishi Rayon Co Ltd | ディスク外周側面の欠陥検査装置および方法 |
KR100387524B1 (ko) * | 2001-01-26 | 2003-06-18 | 삼성전자주식회사 | 반도체 웨이퍼 위치 상태 감지 시스템과 이를 이용하는 반도체장치 제조 설비 및 그에 따른 웨이퍼 위치 상태 감지방법 |
WO2002097410A1 (en) * | 2001-05-31 | 2002-12-05 | Millenium Venture Holdings Ltd. | Method and apparatus of in-process inspection |
WO2003044507A1 (fr) * | 2001-11-20 | 2003-05-30 | Mitsuboshi Diamond Industrial Co., Ltd. | Procede et dispositif de controle des faces d'extremite de substrats en materiau cassant |
JP2004325389A (ja) * | 2003-04-28 | 2004-11-18 | Renesas Technology Corp | 端部検査装置 |
JP2007003332A (ja) | 2005-06-23 | 2007-01-11 | Canon Chemicals Inc | 板状体側面の欠陥検出方法及び欠陥検出装置 |
JP2007033240A (ja) | 2005-07-27 | 2007-02-08 | Canon Chemicals Inc | 板状体の欠陥検出方法及び欠陥検出装置 |
JP2007125581A (ja) * | 2005-11-04 | 2007-05-24 | Jfe Steel Kk | 鋼板の欠陥マーキングと欠陥除去方法およびその装置 |
JP2007147433A (ja) * | 2005-11-28 | 2007-06-14 | Nano Scope Ltd | セラミック板の欠陥検出方法と装置 |
JP2007198762A (ja) * | 2006-01-24 | 2007-08-09 | Canon Chemicals Inc | 欠陥検出方法および欠陥検出装置 |
US20090122304A1 (en) * | 2006-05-02 | 2009-05-14 | Accretech Usa, Inc. | Apparatus and Method for Wafer Edge Exclusion Measurement |
KR100856296B1 (ko) * | 2006-12-26 | 2008-09-03 | 주식회사 포스코 | 열연 압연시 강판의 측면 형상 측정 장치 및 그 방법 |
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KR102368169B1 (ko) * | 2017-04-18 | 2022-03-02 | 코닝 인코포레이티드 | 기판 엣지부 검사 장치, 시스템 및 검사 방법 |
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-
2020
- 2020-01-29 WO PCT/JP2020/003214 patent/WO2020174990A1/ja active Application Filing
- 2020-01-29 JP JP2021501782A patent/JP7246774B2/ja active Active
- 2020-01-29 SG SG11202107495UA patent/SG11202107495UA/en unknown
- 2020-01-29 MX MX2021007957A patent/MX2021007957A/es unknown
- 2020-01-29 CA CA3124335A patent/CA3124335A1/en active Pending
- 2020-01-29 US US17/417,866 patent/US11692944B2/en active Active
- 2020-01-29 CN CN202080006985.2A patent/CN113196042A/zh active Pending
- 2020-01-29 BR BR112021011472-6A patent/BR112021011472A2/pt unknown
- 2020-01-29 EP EP20763636.6A patent/EP3882610A4/en active Pending
- 2020-01-29 KR KR1020217023092A patent/KR20210129038A/ko active Search and Examination
- 2020-01-29 AU AU2020228819A patent/AU2020228819A1/en active Pending
-
2021
- 2021-06-23 PH PH12021551501A patent/PH12021551501A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
US11692944B2 (en) | 2023-07-04 |
JPWO2020174990A1 (es) | 2020-09-03 |
EP3882610A4 (en) | 2022-01-19 |
CA3124335A1 (en) | 2020-09-03 |
KR20210129038A (ko) | 2021-10-27 |
CN113196042A (zh) | 2021-07-30 |
JP7246774B2 (ja) | 2023-03-28 |
EP3882610A1 (en) | 2021-09-22 |
BR112021011472A2 (pt) | 2021-08-31 |
US20220099589A1 (en) | 2022-03-31 |
AU2020228819A1 (en) | 2021-07-15 |
SG11202107495UA (en) | 2021-08-30 |
PH12021551501A1 (en) | 2022-02-28 |
WO2020174990A1 (ja) | 2020-09-03 |
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