MX2021007957A - Aparato para inspeccionar cuerpos semejantes a una placa. - Google Patents

Aparato para inspeccionar cuerpos semejantes a una placa.

Info

Publication number
MX2021007957A
MX2021007957A MX2021007957A MX2021007957A MX2021007957A MX 2021007957 A MX2021007957 A MX 2021007957A MX 2021007957 A MX2021007957 A MX 2021007957A MX 2021007957 A MX2021007957 A MX 2021007957A MX 2021007957 A MX2021007957 A MX 2021007957A
Authority
MX
Mexico
Prior art keywords
light
plate
emitting unit
surface parts
light emitting
Prior art date
Application number
MX2021007957A
Other languages
English (en)
Inventor
Yuichi Hirooka
Kenichi Hashikura
Original Assignee
Yoshino Gypsum Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yoshino Gypsum Co filed Critical Yoshino Gypsum Co
Publication of MX2021007957A publication Critical patent/MX2021007957A/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/845—Objects on a conveyor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8841—Illumination and detection on two sides of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G01N21/9503—Wafer edge inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/104—Mechano-optical scan, i.e. object and beam moving

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Se proporciona un aparato de inspección para un cuerpo semejante a una placa que inspecciona las partes superficiales laterales del cuerpo semejante a una placa que tiene, sobre cada uno del lado superficial superior y el lado superficial inferior del mismo, un material de recubrimiento semejante a una lámina. El aparato de inspección tiene: una unidad emisora de luz que irradia con luz las partes superficiales laterales; una unidad receptora de luz que recibe la luz reflejada por las partes superficiales laterales; medios de transporte para mover al menos uno entre la unidad emisora de luz y el cuerpo semejante a una placa y para cambiar la posición de la luz emitida desde la unidad emisora de luz en las partes superficiales laterales; y una unidad de determinación que cambia la posición de la luz, emitida por la unidad emisora de luz en la parte superficial lateral, en la dirección longitudinal de las partes superficiales laterales por los medios de transporte y que determina si las partes superficiales laterales del cuerpo semejante a una placa tienen un defecto usando la luz emitida desde la unidad emisora de luz.
MX2021007957A 2019-02-28 2020-01-29 Aparato para inspeccionar cuerpos semejantes a una placa. MX2021007957A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019036625 2019-02-28
PCT/JP2020/003214 WO2020174990A1 (ja) 2019-02-28 2020-01-29 板状体の検査装置

Publications (1)

Publication Number Publication Date
MX2021007957A true MX2021007957A (es) 2021-08-11

Family

ID=72239702

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2021007957A MX2021007957A (es) 2019-02-28 2020-01-29 Aparato para inspeccionar cuerpos semejantes a una placa.

Country Status (12)

Country Link
US (1) US11692944B2 (es)
EP (1) EP3882610A4 (es)
JP (1) JP7246774B2 (es)
KR (1) KR20210129038A (es)
CN (1) CN113196042A (es)
AU (1) AU2020228819A1 (es)
BR (1) BR112021011472A2 (es)
CA (1) CA3124335A1 (es)
MX (1) MX2021007957A (es)
PH (1) PH12021551501A1 (es)
SG (1) SG11202107495UA (es)
WO (1) WO2020174990A1 (es)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN215574703U (zh) * 2021-05-19 2022-01-18 富泰华工业（深圳）有限公司 检测装置

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Also Published As

Publication number Publication date
US11692944B2 (en) 2023-07-04
JPWO2020174990A1 (es) 2020-09-03
EP3882610A4 (en) 2022-01-19
CA3124335A1 (en) 2020-09-03
KR20210129038A (ko) 2021-10-27
CN113196042A (zh) 2021-07-30
JP7246774B2 (ja) 2023-03-28
EP3882610A1 (en) 2021-09-22
BR112021011472A2 (pt) 2021-08-31
US20220099589A1 (en) 2022-03-31
AU2020228819A1 (en) 2021-07-15
SG11202107495UA (en) 2021-08-30
PH12021551501A1 (en) 2022-02-28
WO2020174990A1 (ja) 2020-09-03

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