KR980700133A - 세정방법 및 세정장치(Cleaning Method and Cleaning Apparatus) - Google Patents

세정방법 및 세정장치(Cleaning Method and Cleaning Apparatus) Download PDF

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KR980700133A
KR980700133A KR1019970704108A KR19970704108A KR980700133A KR 980700133 A KR980700133 A KR 980700133A KR 1019970704108 A KR1019970704108 A KR 1019970704108A KR 19970704108 A KR19970704108 A KR 19970704108A KR 980700133 A KR980700133 A KR 980700133A
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South Korea
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cleaning
cleaning agent
cleaned
agent
steam
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KR1019970704108A
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English (en)
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미노루 이나다
키미아키 가부키
야스타카 이마조
노리아키 야기
노부히로 사이토
Original Assignee
나시무로 다이조
가부시키가이샤 도시바
우치노 마사히데
져판 필드 가부시키가이샤
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Application filed by 나시무로 다이조, 가부시키가이샤 도시바, 우치노 마사히데, 져판 필드 가부시키가이샤 filed Critical 나시무로 다이조
Publication of KR980700133A publication Critical patent/KR980700133A/ko

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    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/37—Polymers
    • C11D3/3703—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C11D3/373—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds containing silicones
    • C11D3/3734—Cyclic silicones
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D12/00—Displacing liquid, e.g. from wet solids or from dispersions of liquids or from solids in liquids, by means of another liquid
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G65/00—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule
    • C08G65/002—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from unsaturated compounds
    • C08G65/005—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from unsaturated compounds containing halogens
    • C08G65/007—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from unsaturated compounds containing halogens containing fluorine
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    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L71/00—Compositions of polyethers obtained by reactions forming an ether link in the main chain; Compositions of derivatives of such polymers
    • C08L71/02—Polyalkylene oxides
    • C—CHEMISTRY; METALLURGY
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    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/0005—Other compounding ingredients characterised by their effect
    • C11D3/0078—Compositions for cleaning contact lenses, spectacles or lenses
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
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    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
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    • C11D3/18—Hydrocarbons
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/37—Polymers
    • C11D3/3703—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C11D3/373—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds containing silicones
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/43—Solvents
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    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
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    • C11D7/5009—Organic solvents containing phosphorus, sulfur or silicon, e.g. dimethylsulfoxide
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    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
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    • C11D7/5018—Halogenated solvents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/024—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing hydrocarbons
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/032—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing oxygen-containing compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/04—Apparatus
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/02—Anionic compounds
    • C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
    • C11D1/29—Sulfates of polyoxyalkylene ethers
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
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    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/02—Anionic compounds
    • C11D1/34—Derivatives of acids of phosphorus
    • C11D1/345—Phosphates or phosphites
    • C—CHEMISTRY; METALLURGY
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    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/38—Cationic compounds
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    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
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    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/66—Non-ionic compounds
    • C11D1/74—Carboxylates or sulfonates esters of polyoxyalkylene glycols
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    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
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    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
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    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
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    • C11D2111/16—Metals
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    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
    • C—CHEMISTRY; METALLURGY
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    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/40—Specific cleaning or washing processes
    • C11D2111/44—Multi-step processes
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    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/20—Organic compounds containing oxygen
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    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/28—Organic compounds containing halogen
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
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  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Dispersion Chemistry (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Detergent Compositions (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Extraction Or Liquid Replacement (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

본원 발명은 세정방법 및 세정장치에 관한 것으로 유기규소계 세정제나 이소파라핀계 세정제등으로 이루어지는 기초세정제에 세정성능 향상제로서 계면활성제나 친수성용제를 첨가배합한 세정제로 세정하며 상기 제1 세정공정을 거친 피세정물을 상기 기초세정제로 세척 세정한후 온풍건조나 증기전조에 의헤 건조마무리를 하고 기초세정제는 회수 재이용할 수 있기 때문에 복수의 세정제를 사용할 경우에 경제성이 향상되며 유기규소계 세정제나 이소파라핀계 세정제에 계면활성제나 친수성용제를 첨가배합한 세정제를 사용하고 있기 때문에 플론계에 필적하는 탈지 세정성이나 수분제거성, 환경에 대한 안정성을 얻을수 있는 것을 특징으로 한다.

Description

세정방법 및 세정장치(Cleaning Method and Cleaning Apparatus)
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 하나의 실시예 세정장치의 구성을 나타내는 도면.

Claims (20)

  1. (a) 세정제로 피세정물을 세정하는 단계 및 (b) 상기 세정 단계를 거친 후 증기 건조 처리에 의해 피세정물을 건조하는 단계를 포함하며, 상기 건조 단계는 상기 세정제와 상이한 증기세정제로 실행되며, 상기 증기세정제는 상기 세정제와 상호 용해되며 100cal/g이하의 증발 잠열 및 50 내지 150℃의 비점을 가지는 것을 특징으로 하는 세정방법.
  2. 제1항에 있어서, 상기 증기세정제가 50cal/g이하의 증발 잠열을 가지는 것을 특징으로 하는 세정방법.
  3. 제1항에 있어서 상기 세정제가 실리콘-함유 세정제 및 4 내지 30개의 탄소 원자를 가진 지방족 탄화수소 세정제로 구성된 그룹으로부터 선택되는 적어도 하나의 비수계 세정제이며, 상기 실리콘-함유 세정제가 하기 일반식(Ⅰ)에 의해 표시되는 직쇄 폴리오르가노실록산 및
    하기 일반식(Ⅱ)에 의해 표시되는 고리모양 폴리오르가노실록산
    (상기 식에서 R은 치환 또는 비치환 탄화수소기, 1은 0내지 5의 정수이며, m은 3내지 7의 정수임)으로 구성되는 그룹으로부터 선택되는 적어도 하나의 저분자량 폴리오르가노실록산을 포함하고, 상기 지방족 탄화수소 세정제가 4 내지 30개의 탄소 원자를 가진 휘발성 이소파라핀, 휘발성 노말파라핀 및 휘발성 시클로올레핀으로 구성된 그룹으로부터 선택되는 적어도 하나의 세정제를 함유하는 것을 특징으로 하는 세정방법.
  4. 제1항에 있어서 상기 피세정물이 금속 부품, 세라믹 부품, 유리부품, 경질 표면을 가지는 플라스틱부품, 표면 처리되거나 코팅된 부품, 전기 부품, 반도체 부품, 광학부품, 정밀 기계부품, 및 공업 부품으로 구성된 그룹으로부터 선택되는 적도 한가지 인것을 특징으로 하는 세정방법.
  5. (a) 기초 세정제 및 세정성능 향상제를 함유하는 혼합물로 피세정물을 세정하는 단계: (b) 기초 세정제 만으로 피세정물을 세정하는 단계 :(c) 상기 기초 세정제만으로 피세정물을 세정한 후 증기 건조 처리에 의해 피세정물을 건조시키는 단계로 구성되며, 상기 건조는 세정제와는 상이한 증기세정제로 실행되고, 상기 증기세정제는 상기 기초 세정제와 상호 용해되며 100cal/g이하의 증발 잠열 및 50 내지 150℃의 비점을 가지는 것을 특징으로 하는 세정방법.
  6. 제5항에 있어서 상기 증기세정제가 50cal/g이하의 증발 잠열을 가지는 것을 특징으로 하는 세정방법.
  7. 제5항에 있어서 상기 기초 세정제가 실리콘-함유 세정제 및 4 내지 30개의 탄소 원자를 가진 지방족 탄화수소 세정제로 구성된 그룹으로부터 선택되는 적어도 하나의 비수계 세정제로 구성되고, 상기 실리콘-함유 세정제가 하기 일반식(Ⅰ)에 의해 표시되는 직쇄 폴리오르가노실록산 및
    하기 일반식(Ⅱ)에 의해 표시되는 고리모양 폴리오르가노실록산
    (상기 식에서 R은 치환 또는 비치환 탄화수소기, 1은 0 내지 5의 정수이며,m은 3 내지 7의 정수임)으로 구성되는 그룹으로부터 선택되는 적어도 하나의 저분자량 폴리오르가노실록산을 포함하고, 상기 지방족 탄화수소 세정제가 4 내지 30개의 탄소 원자를 가진 휘발성 이소파라핀, 휘발성 노말파라핀 및 휘발성 시클로올레핀으로 구성된 그룹으로부터 선택되는 적어도 하나의 세정제를 함유하는 것을 특징으로 하는 세정방법.
  8. 제5항에 있어서, 상기 세정성능 향상제가 표면활성제 및 친수성 용제로 구성된 그룹으로부터 선택되는 적어도 하나인 것을 특징으로 하는 세정방법.
  9. 제5항에 있어서, 상기 피세정물이 금속부품 세라믹 부품, 유리 부품, 경질 표면을 가지는 플라스틱 부품 표면 처리되거나 코팅된 부품, 전기 부품, 반도체 부품, 광학 부품, 정밀 기계 부품 및 공업 부품으로 구성된 그룹으로부터 선택되는 적어도 하나인 것을 특징으로 하는 세정 방법.
  10. 제5항에 있어서, 상기 방법이 연속적이고 단계 (a)에서 사용되는 기초 세정제 및 단계 (b)에서 사용되는 기초 세정제 둘 다 재순환되어 재사용되는 것을 특징으로 하는 방법.
  11. 제1항에 있어서, 상기 증기세정제가 증기 건조 처리시 상기 세정제와 상호 용해되는 것을 특징으로 하는 세정방법.
  12. 제5항에 있어서, 상기 증기세정제가 증기 건조 처리시 상기 세정제와 상호 용해되는 것을 특징으로 하는 세정방법.
  13. 제1항에 있어서, 상기 세정제가 피세정물의 표면에 남아 있는 수분을 제거하는 것을 특징으로 하는 세정방법.
  14. 제1항에 있어서, 상기 세정제가 피세정물의 표면에 남아 있는 액체를 제거하는 것을 특징으로 하는 세정방법.
  15. 제5항에 있어서, 상기 세정제가 피세정물의 표면에 남아 있는 수분을 제거하는 것을 특징으로 하는 세정방법.
  16. 제5항에 있어서, 상기 세정제가 피세정물의 표면에 남아있는 액체을 제거하는 것을 특징으로 하는 세정방법.
  17. 세정제로 피세정물을 세정하는 제1 세정공정 및 제1 세정공정을 거친 상기 피세정물을 증기 건조 처리에 의해 건조하는 제2 건조 공정으로 이루어지는 세정 공정의 상기 증기 건조 처리에 사용되는 증기 건조 조성물에 있어서 상기 증기 건조 조성물은 상기 세정제와는 상이한 것으로서 상기 세정제와 상호 용해되며, 증발 잠열이 100cal/g이하이고 비점이 50℃ 내지 150℃인 증기 건조 조성물.
  18. 제17항에 있어서, 상기 증기 세정 조성물이 증기 건조 처리시 상기 세정제와 상호 용해되는 조성물로 이루어지는 것을 특징으로 하는 증기세정 조성물.
  19. 기초 세정제와 세정 성능 향상제를 포함하는 혼합물로 피세정물을 세정하는 제 1 세정 공정: 상기 기초 세정제 단독으로 상기 피세정물을 세정하는 제 2 세정공정: 및 제 2 세정 공정을 거친 상기 피세정물을 증기 건조 처리에 의해 건조하는 제 3 건조 공정으로 이루어지는 세정 공정의 상기 증기 건조 처리에 사용되는 증기 건조조성물에 있어서 상기 증기 세정 조성물은 상기 세정제와는 상이한 것으로서 상기 세정제와 상호 용해되며 증발점열이 100cal/g이하이고, 비점이 50℃ 내지 150℃이 증기 건조 조성물.
  20. 제19항에 있어서, 상기 증기 세정 조성물이 증기 건조 처리시 상기 세정제와 상호 용해되는 조성물로 이루어지는 것을 특징으로 하는 증기세정 조성물.
    ※ 참고사항: 최초출원내용에 의하여 공개하는 것임.
KR1019970704108A 1990-03-16 1991-03-15 세정방법 및 세정장치(Cleaning Method and Cleaning Apparatus) KR980700133A (ko)

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DE69126648D1 (de) 1997-07-31
WO1991013697A1 (fr) 1991-09-19
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JP2723359B2 (ja) 1998-03-09
JP2763270B2 (ja) 1998-06-11
KR0145061B1 (ko) 1998-08-17
EP0717129A2 (en) 1996-06-19
EP0757119A2 (en) 1997-02-05
EP0717128A3 (en) 1996-09-11
SG48276A1 (en) 1998-04-17
AU646246B2 (en) 1994-02-17
SG44844A1 (en) 1997-12-19

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