KR970065676A - 접착 테이프, 접착 테이프용 베이스 재료 및 그의 제조 방법 - Google Patents
접착 테이프, 접착 테이프용 베이스 재료 및 그의 제조 방법 Download PDFInfo
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- KR970065676A KR970065676A KR1019970008875A KR19970008875A KR970065676A KR 970065676 A KR970065676 A KR 970065676A KR 1019970008875 A KR1019970008875 A KR 1019970008875A KR 19970008875 A KR19970008875 A KR 19970008875A KR 970065676 A KR970065676 A KR 970065676A
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- Prior art keywords
- acrylate
- base material
- adhesive tape
- meth
- urethane acrylate
- Prior art date
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- 239000000463 material Substances 0.000 title claims abstract 20
- 239000002390 adhesive tape Substances 0.000 title claims abstract 12
- 238000004519 manufacturing process Methods 0.000 title claims abstract 3
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 claims abstract 13
- 239000000178 monomer Substances 0.000 claims abstract 10
- 239000012790 adhesive layer Substances 0.000 claims abstract 7
- 230000005855 radiation Effects 0.000 claims abstract 7
- 239000003085 diluting agent Substances 0.000 claims abstract 5
- 239000000203 mixture Substances 0.000 claims abstract 5
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims 10
- 238000000034 method Methods 0.000 claims 8
- 238000010790 dilution Methods 0.000 claims 5
- 239000012895 dilution Substances 0.000 claims 5
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical group C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 claims 3
- 239000000853 adhesive Substances 0.000 claims 3
- 230000001070 adhesive effect Effects 0.000 claims 3
- -1 ester diol Chemical class 0.000 claims 3
- QKQSRIKBWKJGHW-UHFFFAOYSA-N morpholine;prop-2-enoic acid Chemical group OC(=O)C=C.C1COCCN1 QKQSRIKBWKJGHW-UHFFFAOYSA-N 0.000 claims 3
- 150000001252 acrylic acid derivatives Chemical class 0.000 claims 2
- 230000001588 bifunctional effect Effects 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 241000251468 Actinopterygii Species 0.000 abstract 1
- 238000005336 cracking Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J175/00—Adhesives based on polyureas or polyurethanes; Adhesives based on derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
- C09J7/25—Plastics; Metallised plastics based on macromolecular compounds obtained otherwise than by reactions involving only carbon-to-carbon unsaturated bonds
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2475/00—Presence of polyurethane
- C09J2475/006—Presence of polyurethane in the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2809—Web or sheet containing structurally defined element or component and having an adhesive outermost layer including irradiated or wave energy treated component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2852—Adhesive compositions
- Y10T428/2861—Adhesive compositions having readily strippable combined with readily readhearable properties [e.g., stick-ons, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31551—Of polyamidoester [polyurethane, polyisocyanate, polycarbamate, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31551—Of polyamidoester [polyurethane, polyisocyanate, polycarbamate, etc.]
- Y10T428/31573—Next to addition polymer of ethylenically unsaturated monomer
- Y10T428/31576—Ester monomer type [polyvinylacetate, etc.]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Adhesive Tapes (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Jigs For Machine Tools (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Dicing (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
베이스 재료는 우레탄 아크릴레이트 올리고머 및 반응성 희석 단량체의 혼합물을 경화시켜 제조된 방사선 경화 재료를 가지며, 또한 10% 이상, 바람직하게 100% 이상의 파단 신장도를 나타낸다. 베이스 재료는 베이스 시트 상에 형성된 접착층을 갖는 접착 테이프의 베이스 시트로서 사용된다. 따라서, 신규한 베이스 재료 및 상기 베이스 재료를 갖는 접착 테이프에 더하여 그의 제조 방법이 제공된다. 또한, 접착 테이프는 반도체 웨이퍼의 배면 연마(back grinding) 및 다이싱(dicing)단계에서 균열, 칩-스캐터링 등의 문제를 야기하는 임의 피쉬 아이(fish eye)가 없는 편평한 표면을 가지며, 또한 접착 테이프는 통상의 테이프에 비하여 소정의 두께를 갖도록 매우 정밀하게 가공할 수 있다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
Claims (18)
10%이상, 바람직하게 100% 이상의 파단 신장도를 갖는, 우레탄 아크릴레이트 올리고머 및 반응성 희석 단량체의 혼합물을 경화시켜 제조된 방사선 경화 재료로 이루어진, 베이스 시트 상에 형성된 접착층을 갖는 접착 테이프의 베이스 시트로서 사용되는 베이스 재료.
제1항에 있어서, 상기 방사선 경화 재료의 초기 탄성율이 100 내지 100,000㎏/㎠, 바람직하게 500 내지 50,000㎏/㎠인 베이스 재료.
제1항에 있어서, 상기 우레탄 아크릴레이트 올리고머가 500 내지 100,000, 바람직하게 1,000 내지 30,000의 분자량을 가지며, 주 골격으로서 에스테르 디올을 갖는 2착용성 우레탄 아크릴레이트인 베이스 재료.
제1항에 있어서, 상기 반응성 희석 단량체는 모르폴린 아크릴레이트, 이소보르닐 (메트)아크릴레이트, 디시클로펜타닐 (메트)아크릴레이트, 디시클로펜테닐 (메트)아크릴레이트 및 메톡실레이트 시클로데카트리엔 아크릴레이트의 군으로부터 선택되는 1종 이상인 베이스 재료.
제1항에 있어서, 상기 우레탄 아크릴레이트 올리고머 및 상기 반응성 희석 단량체 사이의 혼합비가 95 내지 5:5 내지 95, 바람직하게 50 내지 70:50 내지 30인 베이스 재료.
제1항에 있어서, 상기 접착층이 제거가능한 접착제로 구성되는 베이스 재료.
우레탄 아크릴레이트 올리고머 및 반응성 희석제 단량체 혼합물을 제조하는 단계, 및 혼합물을 방사선 조사하여 베이스 재료로서 10% 이상, 바람직하게 100% 이상의 파단 신장도를 갖는 방사선 경화 재료를 얻는 단계로 이루어진, 베이스 시트 상에 형성된 접착층을 갖는 접착 테이프의 베이스 시트로서 사용되는 베이스 재료의 제조 방법.
제7항에 있어서, 상기 방사선 경화 재료의 초기 탄성율이 100 내지 100,000㎏/㎠, 바람직하게 500 내지 50,000㎏/㎠인 방법.
제7항에 있어서, 상기 우레탄 아크릴레이트 올리고머가 500 내지 100,000, 바람직하게 1,000 내지 30,000의 분자량을 가지며, 주 골격으로서 에스테르 디올을 갖는 2작용성 우레탄 아크릴레이트인 방법.
제7항에 있어서, 상기 반응성 희석 단량체는 모르폴린 아크릴레이트, 이소보르닐 (메트)아크릴레이트, 디시클로펜타닐 (메트)아크릴레이트, 디시클로펜테닐 (메트)아크릴레이트 및 메톡실레이트 시클로데카트리엔 아크릴레이트의 군으로부터 선택되는 1종 이상인 방법.
제7항에 있어서, 상기 우레탄 아크릴레이트 올리고머 및 상기 반응성 희석 단량체 사이의 혼합비가 95 내지 5:5 내지 95, 바람직하게 50 내지 70:50 내지 30인 방법.
제7항에 있어서, 상기 접착층이 제거가능한 접착제로 구성되는 방법.
10%이상, 바람직하게 100% 이상의 파단 신장도를 갖는, 우레탄 아크릴레이트 올리고머 및 반응성 희석 단량체의 혼합물을 경화시켜 제조된 방사선 경화 재료로 이루어진, 베이스 시트의 적어도 1개의 표면 상에 형성된 접착층을 갖는 접착 테이프.
제13항에 있어서, 상기 방사선 경화 재료의 초기 탄성율이 100 내지 100,000㎏/㎠, 바람직하게는 500 내지 50,000㎏/㎠인 접착 테이프.
제13항에 있어서, 상기 우레탄 아크릴레이트 올리고머가 500 내지 100,000, 바람직하게 1,000 내지 30,000의 분자량을 가지며, 주 골격으로서 에스테르 디올을 갖는 2착용성 우레탄 아크릴레이트인 접착 테이프.
제13항에 있어서, 상기 반응성 희석 단량체는 모르폴린 아크릴레이트, 이소보르닐 (메트)아크릴레이트, 디시클로펜타닐 (메트)아크릴레이트, 디시클로펜테닐 (메트)아크릴레이트 및 메톡실레이트 시클로데카트리엔 아크릴레이트의 군으로부터 선택되는 것인 접착 테이프.
제13항에 있어서, 상기 우레탄 아크릴레이트 올리고머 및 상기 반응성 희석 단량체 사이의 혼합비가 95 내지 5:5 내지 95, 바람직하게 50 내지 70:50 내지 30인 접착 테이프.
제13항에 있어서, 상기 접착층이 제거가능한 접착제로 구성되는 접착 테이프.
※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP96-059651 | 1996-03-15 | ||
JP5965196A JP3177149B2 (ja) | 1996-03-15 | 1996-03-15 | 粘着テープ用基材、該基材を用いた粘着テープ、および該基材の製造方法 |
JP96-059,651 | 1996-03-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970065676A true KR970065676A (ko) | 1997-10-13 |
KR100489844B1 KR100489844B1 (ko) | 2005-12-27 |
Family
ID=13119328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019970008875A KR100489844B1 (ko) | 1996-03-15 | 1997-03-15 | 접착테이프,접착테이프용베이스재료및그의제조방법 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6139953A (ko) |
EP (1) | EP0798355B1 (ko) |
JP (1) | JP3177149B2 (ko) |
KR (1) | KR100489844B1 (ko) |
DE (1) | DE69722498T2 (ko) |
SG (1) | SG70000A1 (ko) |
TW (1) | TW360904B (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100655036B1 (ko) * | 1998-08-26 | 2006-12-07 | 린텍 가부시키가이샤 | 양면점착시트 및 그 사용 방법 |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10337823A (ja) * | 1997-04-11 | 1998-12-22 | Lintec Corp | 基材および該基材を用いた粘着テープ |
US5972152A (en) * | 1997-05-16 | 1999-10-26 | Micron Communications, Inc. | Methods of fixturing flexible circuit substrates and a processing carrier, processing a flexible circuit and processing a flexible circuit substrate relative to a processing carrier |
JP3739570B2 (ja) * | 1998-06-02 | 2006-01-25 | リンテック株式会社 | 粘着シートおよびその利用方法 |
JP3383227B2 (ja) * | 1998-11-06 | 2003-03-04 | リンテック株式会社 | 半導体ウエハの裏面研削方法 |
JP2002141306A (ja) * | 2000-11-02 | 2002-05-17 | Lintec Corp | ダイシングシート |
JP2003096140A (ja) * | 2001-09-20 | 2003-04-03 | Nitto Denko Corp | 複合フィルムおよび粘着シート |
US7018268B2 (en) * | 2002-04-09 | 2006-03-28 | Strasbaugh | Protection of work piece during surface processing |
US20050153129A1 (en) * | 2002-07-26 | 2005-07-14 | Nitto Denko Corporation | Pressure-sensitive adhesive sheet, method for producing the same and method for using the same as well as a multi-layer sheet for use in the pressure-sensitive adhesive sheet and method for producing the same |
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-
1996
- 1996-03-15 JP JP5965196A patent/JP3177149B2/ja not_active Expired - Lifetime
-
1997
- 1997-03-13 TW TW086103106A patent/TW360904B/zh not_active IP Right Cessation
- 1997-03-13 US US08/815,950 patent/US6139953A/en not_active Expired - Lifetime
- 1997-03-14 EP EP97104402A patent/EP0798355B1/en not_active Expired - Lifetime
- 1997-03-14 DE DE69722498T patent/DE69722498T2/de not_active Expired - Lifetime
- 1997-03-14 SG SG1997000779A patent/SG70000A1/en unknown
- 1997-03-15 KR KR1019970008875A patent/KR100489844B1/ko active IP Right Grant
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100655036B1 (ko) * | 1998-08-26 | 2006-12-07 | 린텍 가부시키가이샤 | 양면점착시트 및 그 사용 방법 |
Also Published As
Publication number | Publication date |
---|---|
TW360904B (en) | 1999-06-11 |
JPH09253964A (ja) | 1997-09-30 |
DE69722498D1 (de) | 2003-07-10 |
EP0798355A3 (en) | 1998-09-09 |
DE69722498T2 (de) | 2004-05-06 |
EP0798355A2 (en) | 1997-10-01 |
JP3177149B2 (ja) | 2001-06-18 |
KR100489844B1 (ko) | 2005-12-27 |
EP0798355B1 (en) | 2003-06-04 |
US6139953A (en) | 2000-10-31 |
SG70000A1 (en) | 2000-01-25 |
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