KR970062813A - Photoresist coating method - Google Patents

Photoresist coating method Download PDF

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Publication number
KR970062813A
KR970062813A KR1019960003145A KR19960003145A KR970062813A KR 970062813 A KR970062813 A KR 970062813A KR 1019960003145 A KR1019960003145 A KR 1019960003145A KR 19960003145 A KR19960003145 A KR 19960003145A KR 970062813 A KR970062813 A KR 970062813A
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KR
South Korea
Prior art keywords
organic solvent
photoresist
wafer
coating
coating method
Prior art date
Application number
KR1019960003145A
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Korean (ko)
Inventor
박태신
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960003145A priority Critical patent/KR970062813A/en
Publication of KR970062813A publication Critical patent/KR970062813A/en

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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

본 발명은 고집적 반도체 제조 공정에서 포토레지스트를 코팅하기 전에 유기용제를 이용한 전처리 공정을 실시하는 포토레지스트 코팅 방법에 관한 것이다.The present invention relates to a photoresist coating method for performing a pretreatment process using an organic solvent before coating a photoresist in a highly integrated semiconductor manufacturing process.

본 발명은 종래의 포토레지스터 코팅 공정을 진행하기 전에 유기용제를 미리 코팅 처리함으로써 소량의 포토 레지스트로도 웨이퍼의 코팅이 가능하도록 하는데 그 목적이 있다.It is an object of the present invention to coat a wafer with a small amount of photoresist by coating an organic solvent in advance before proceeding with a conventional photoresist coating process.

본 발명에 의하면 웨이퍼상에 포토레지스트의 코팅 공정을 진행하기 전에 유기용제로 미리 전처리함으로써 소량의 포토레지스트로도 웨이퍼의 코팅이 가능해 원가 절감의 효과가 있다.According to the present invention, the wafer can be coated with a small amount of photoresist by pre-treating the wafer with an organic solvent before the coating process of the photoresist is performed, thereby reducing the cost.

Description

포토레지스트 코팅 방법Photoresist coating method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제2도 내지 제3도는 본 발명에 따른 포토레지스트 코팅 공정을 나타내는 공정도.FIGS. 2 to 3 are process drawings showing a photoresist coating process according to the present invention. FIG.

Claims (4)

웨이퍼상에 유기용제를 코팅하는 단계와, 상기 유기용제상에 포토레지스트를 코팅하는 단계로 이루어진 것을 특징으로 하는 포토레지스트 코팅 방법.Coating an organic solvent on the wafer; and coating a photoresist on the organic solvent. 제1항에 있어서, 상기 웨이퍼상에 균일한 두께의 유기용제막을 형성하기 위해 회전하고 있는 상기 웨이퍼 상에 상기 유기용제를 일정하게 살포하는 것을 특징으로 하는 포토레지스트 코팅 방법.The method of claim 1, wherein the organic solvent is uniformly distributed on the rotating wafer so as to form an organic solvent film having a uniform thickness on the wafer. 제1항에 있어서, 상기 유기용제를 상기 웨이퍼상에 떨어뜨린 후 상기 유기용제를 포함한 상기 웨이퍼를 회전시켜 균일한 두께의 유기용제막을 형성하는 것을 특징으로 하는 포토레지스트 코팅 방법.The method of claim 1, wherein the organic solvent is dropped on the wafer, and the wafer including the organic solvent is rotated to form an organic solvent film having a uniform thickness. 제1항 내지 제3항 중 어느 한 항에 있어서, 상기 유기용제는 상기 포토레지스트를 구성하는 유기용제 성분과 동일한 것을 특징으로 하는 포토레지스트 코팅 방법.The method for coating a photoresist according to any one of claims 1 to 3, wherein the organic solvent is the same as the organic solvent component constituting the photoresist. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960003145A 1996-02-09 1996-02-09 Photoresist coating method KR970062813A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960003145A KR970062813A (en) 1996-02-09 1996-02-09 Photoresist coating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960003145A KR970062813A (en) 1996-02-09 1996-02-09 Photoresist coating method

Publications (1)

Publication Number Publication Date
KR970062813A true KR970062813A (en) 1997-09-12

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960003145A KR970062813A (en) 1996-02-09 1996-02-09 Photoresist coating method

Country Status (1)

Country Link
KR (1) KR970062813A (en)

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