KR970059837U - Semiconductor wafer chuck cleaning device - Google Patents
Semiconductor wafer chuck cleaning deviceInfo
- Publication number
- KR970059837U KR970059837U KR2019960008469U KR19960008469U KR970059837U KR 970059837 U KR970059837 U KR 970059837U KR 2019960008469 U KR2019960008469 U KR 2019960008469U KR 19960008469 U KR19960008469 U KR 19960008469U KR 970059837 U KR970059837 U KR 970059837U
- Authority
- KR
- South Korea
- Prior art keywords
- cleaning device
- semiconductor wafer
- wafer chuck
- chuck cleaning
- semiconductor
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960008469U KR200259444Y1 (en) | 1996-04-18 | 1996-04-18 | Cleaning device for semiconductor wafer chuck |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960008469U KR200259444Y1 (en) | 1996-04-18 | 1996-04-18 | Cleaning device for semiconductor wafer chuck |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970059837U true KR970059837U (en) | 1997-11-10 |
KR200259444Y1 KR200259444Y1 (en) | 2002-04-22 |
Family
ID=70918110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960008469U KR200259444Y1 (en) | 1996-04-18 | 1996-04-18 | Cleaning device for semiconductor wafer chuck |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200259444Y1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100476861B1 (en) * | 1997-06-16 | 2005-06-29 | 삼성전자주식회사 | Holder cleaner of semiconductor stepper facility |
-
1996
- 1996-04-18 KR KR2019960008469U patent/KR200259444Y1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100476861B1 (en) * | 1997-06-16 | 2005-06-29 | 삼성전자주식회사 | Holder cleaner of semiconductor stepper facility |
Also Published As
Publication number | Publication date |
---|---|
KR200259444Y1 (en) | 2002-04-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20061122 Year of fee payment: 6 |
|
LAPS | Lapse due to unpaid annual fee |