KR970059837U - Semiconductor wafer chuck cleaning device - Google Patents

Semiconductor wafer chuck cleaning device

Info

Publication number
KR970059837U
KR970059837U KR2019960008469U KR19960008469U KR970059837U KR 970059837 U KR970059837 U KR 970059837U KR 2019960008469 U KR2019960008469 U KR 2019960008469U KR 19960008469 U KR19960008469 U KR 19960008469U KR 970059837 U KR970059837 U KR 970059837U
Authority
KR
South Korea
Prior art keywords
cleaning device
semiconductor wafer
wafer chuck
chuck cleaning
semiconductor
Prior art date
Application number
KR2019960008469U
Other languages
Korean (ko)
Other versions
KR200259444Y1 (en
Inventor
김철호
Original Assignee
현대반도체 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체 주식회사 filed Critical 현대반도체 주식회사
Priority to KR2019960008469U priority Critical patent/KR200259444Y1/en
Publication of KR970059837U publication Critical patent/KR970059837U/en
Application granted granted Critical
Publication of KR200259444Y1 publication Critical patent/KR200259444Y1/en

Links

KR2019960008469U 1996-04-18 1996-04-18 Cleaning device for semiconductor wafer chuck KR200259444Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960008469U KR200259444Y1 (en) 1996-04-18 1996-04-18 Cleaning device for semiconductor wafer chuck

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960008469U KR200259444Y1 (en) 1996-04-18 1996-04-18 Cleaning device for semiconductor wafer chuck

Publications (2)

Publication Number Publication Date
KR970059837U true KR970059837U (en) 1997-11-10
KR200259444Y1 KR200259444Y1 (en) 2002-04-22

Family

ID=70918110

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960008469U KR200259444Y1 (en) 1996-04-18 1996-04-18 Cleaning device for semiconductor wafer chuck

Country Status (1)

Country Link
KR (1) KR200259444Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100476861B1 (en) * 1997-06-16 2005-06-29 삼성전자주식회사 Holder cleaner of semiconductor stepper facility

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100476861B1 (en) * 1997-06-16 2005-06-29 삼성전자주식회사 Holder cleaner of semiconductor stepper facility

Also Published As

Publication number Publication date
KR200259444Y1 (en) 2002-04-22

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Legal Events

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Payment date: 20061122

Year of fee payment: 6

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