KR970053276A - Electron scanning microscope for semiconductor device manufacturing - Google Patents
Electron scanning microscope for semiconductor device manufacturing Download PDFInfo
- Publication number
- KR970053276A KR970053276A KR1019950072234A KR19950072234A KR970053276A KR 970053276 A KR970053276 A KR 970053276A KR 1019950072234 A KR1019950072234 A KR 1019950072234A KR 19950072234 A KR19950072234 A KR 19950072234A KR 970053276 A KR970053276 A KR 970053276A
- Authority
- KR
- South Korea
- Prior art keywords
- chamber
- semiconductor device
- scanning microscope
- electron scanning
- manufacturing
- Prior art date
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- Electron Sources, Ion Sources (AREA)
Abstract
1. 청구범위에 기재된 발명이 속한 기술분야1. TECHNICAL FIELD OF THE INVENTION
반도체 소자 제조용 장치.Device for manufacturing semiconductor device.
2. 발명이 해결하려고 하는 기술적 과제2. The technical problem to be solved by the invention
종래의 SEM은 챔버 내의 진공 펌핑이 완전히 수행되지 않아 잔류 미세한 파티클의 산란으로 전자밤의 경로가 간섭을 받아 정확한 이미지를 얻을 수 없다는 문제점을 해결하고자 함.The conventional SEM is to solve the problem that the vacuum pumping in the chamber is not performed completely, the electron night path is interfered with the scattering of the remaining fine particles to obtain an accurate image.
3. 발명의 해결방법의 요지3. Summary of Solution to Invention
SEM의 얼라인먼트 코일이 설치된 제3챔버와 콘덴서 렌즈가 설치된 제2챔버와의 사이에, 그리고 디텍터 렌즈가 설치된 제4쳄버와의 사이에 공간을 차단하기 위한 차단 수단을 설치함으로써 종래와 동일한 챔버내의 동일한 진공 펌프로도 효율적으로 배기를 실시하는 반도체 소자 제조용 전자 주사 현미경을 제공하고자 함.In the same chamber as in the prior art, a blocking means for blocking the space is provided between the third chamber in which the SEM alignment coil is installed and the second chamber in which the condenser lens is installed, and the fourth chamber in which the detector lens is installed. The present invention aims to provide an electron scanning microscope for manufacturing a semiconductor device which exhausts efficiently even with a vacuum pump.
4. 발명의 중요한 용도4. Important uses of the invention
반도체 소자 제조용 전자 주사 현미경을 제조하는데 이용됨.Used to prepare electron scanning microscope for semiconductor device manufacturing.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제1도는 본 발명의 반도체 소자 제조용 전자 주사 현미경의 설치도.1 is an installation diagram of an electron scanning microscope for producing a semiconductor device of the present invention.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950072234A KR970053276A (en) | 1995-12-29 | 1995-12-29 | Electron scanning microscope for semiconductor device manufacturing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950072234A KR970053276A (en) | 1995-12-29 | 1995-12-29 | Electron scanning microscope for semiconductor device manufacturing |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970053276A true KR970053276A (en) | 1997-07-31 |
Family
ID=66640838
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950072234A KR970053276A (en) | 1995-12-29 | 1995-12-29 | Electron scanning microscope for semiconductor device manufacturing |
Country Status (1)
Country | Link |
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KR (1) | KR970053276A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101395258B1 (en) * | 2013-11-22 | 2014-05-15 | 한국기계연구원 | Scanning electron microscope with detatchable vaccum chamber unit and scanning method using the same |
KR101395261B1 (en) * | 2013-12-03 | 2014-05-15 | 한국기계연구원 | A movable vacuum chamber and scanning electron microscope with a movable vacuum chamber and scanning method |
-
1995
- 1995-12-29 KR KR1019950072234A patent/KR970053276A/en not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101395258B1 (en) * | 2013-11-22 | 2014-05-15 | 한국기계연구원 | Scanning electron microscope with detatchable vaccum chamber unit and scanning method using the same |
KR101395261B1 (en) * | 2013-12-03 | 2014-05-15 | 한국기계연구원 | A movable vacuum chamber and scanning electron microscope with a movable vacuum chamber and scanning method |
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WITN | Withdrawal due to no request for examination |