KR970030120A - FED spacer manufacturing method using sand blast method - Google Patents
FED spacer manufacturing method using sand blast method Download PDFInfo
- Publication number
- KR970030120A KR970030120A KR1019950045650A KR19950045650A KR970030120A KR 970030120 A KR970030120 A KR 970030120A KR 1019950045650 A KR1019950045650 A KR 1019950045650A KR 19950045650 A KR19950045650 A KR 19950045650A KR 970030120 A KR970030120 A KR 970030120A
- Authority
- KR
- South Korea
- Prior art keywords
- forming
- sand blast
- spacer
- metal mask
- fed
- Prior art date
Links
Abstract
본 발명은 투명전극(2)과 형광층이 형성된 애노우드 기판(1) 위에 스페이서용 물질(4)을 전면에 형성하는 단계와, 스페이서용 물질(4) 위에 금속마스크(5)를 형성시키는 단계와, 금속 마스크(5)를 이용하여 샌드 블래스트법에 의해 불필요한 부분을 제거하므로써 스페이서(4a)를 형성하는 단계로 이루어지는 샌드 블래스트법을 이용한 FED용 스페이서 형성방법을 제공하는 것이다. 그로 인해, 고밀도이며 미세 패턴이 가능한 소자를 제작할 수 있다.The present invention provides a method of forming a spacer material 4 on the entire surface of an anode substrate 1 on which a transparent electrode 2 and a fluorescent layer are formed, and forming a metal mask 5 on the spacer material 4. In addition, the present invention provides a method for forming a spacer for FED using the sand blast method, which comprises forming a spacer 4a by removing unnecessary portions by the sand blast method using the metal mask 5. Therefore, the element which can be a high density and a fine pattern can be manufactured.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제1a도 내지 제1c도는 본 발명에 의한 FED용 스페이서의 형성방법을 설명하는 단면도.1A to 1C are cross-sectional views illustrating a method of forming a spacer for an FED according to the present invention.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950045650A KR970030120A (en) | 1995-11-30 | 1995-11-30 | FED spacer manufacturing method using sand blast method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950045650A KR970030120A (en) | 1995-11-30 | 1995-11-30 | FED spacer manufacturing method using sand blast method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR970030120A true KR970030120A (en) | 1997-06-26 |
Family
ID=66593468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019950045650A KR970030120A (en) | 1995-11-30 | 1995-11-30 | FED spacer manufacturing method using sand blast method |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR970030120A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100884373B1 (en) * | 2007-01-08 | 2009-02-17 | 타퉁 컴퍼니 리미티드 | Method for manufacturing spacer of field emitters and base material utilized for the spacer |
-
1995
- 1995-11-30 KR KR1019950045650A patent/KR970030120A/en not_active Application Discontinuation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100884373B1 (en) * | 2007-01-08 | 2009-02-17 | 타퉁 컴퍼니 리미티드 | Method for manufacturing spacer of field emitters and base material utilized for the spacer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2002016106A3 (en) | Differentially cured materials and process for forming same | |
| BR0109647B1 (en) | electrically conductive surface treated metal element and forming process thereof. | |
| KR930020494A (en) | Method for producing an electrically insulating material sheet having a hole or cavity pattern | |
| DE59508829D1 (en) | Process for producing structures | |
| ATE216322T1 (en) | DIAMOND MARKING PROCESS | |
| TW328167B (en) | Method for manufacturing lead frame | |
| KR840003878A (en) | Reactive ion etching of soft magnetic substrates | |
| KR970077254A (en) | Plasma Etching Method and Plasma Etching Apparatus | |
| KR970030120A (en) | FED spacer manufacturing method using sand blast method | |
| KR910012644A (en) | High efficiency heat transfer surface manufacturing method and heat transfer surface produced by such method | |
| TW350961B (en) | Plasma display panel and method of fabricating the same (case 2) | |
| EP0098922A3 (en) | Process for selectively generating positive and negative resist patterns from a single exposure pattern | |
| EP0984328A3 (en) | A method of surface etching silica glass, for instance for fabricating phase masks | |
| TW348229B (en) | X-ray mask and its fabrication method | |
| TW364204B (en) | Method for producing semiconductor capacitor of the semiconductor and its eletrode plate | |
| KR970023598A (en) | Field emission micro-tip and its manufacturing method | |
| TW329032B (en) | Gate electrode | |
| UA9881A (en) | Manufacturing method for electromagnetic matrix screens | |
| JPS56148846A (en) | Manufacture of circuit pattern | |
| KR970030068A (en) | Manufacturing method of spacer for FED | |
| KR880008435A (en) | Manufacturing method of electrode plate for gas discharge panel | |
| JPS6484224A (en) | Electrode forming method | |
| TW262572B (en) | A process of preventing integrated circuit from generating defects | |
| JPS5711450A (en) | Manufacture of fluorescent display tube | |
| JPS56114951A (en) | Method for correcting mask pattern defect |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E601 | Decision to refuse application |