KR970019157U - Etching agent recycling device for wet etching equipment - Google Patents

Etching agent recycling device for wet etching equipment

Info

Publication number
KR970019157U
KR970019157U KR2019950029980U KR19950029980U KR970019157U KR 970019157 U KR970019157 U KR 970019157U KR 2019950029980 U KR2019950029980 U KR 2019950029980U KR 19950029980 U KR19950029980 U KR 19950029980U KR 970019157 U KR970019157 U KR 970019157U
Authority
KR
South Korea
Prior art keywords
recycling device
etching
agent recycling
equipment
wet etching
Prior art date
Application number
KR2019950029980U
Other languages
Korean (ko)
Other versions
KR0122318Y1 (en
Inventor
윤기채
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950029980U priority Critical patent/KR0122318Y1/en
Publication of KR970019157U publication Critical patent/KR970019157U/en
Application granted granted Critical
Publication of KR0122318Y1 publication Critical patent/KR0122318Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
KR2019950029980U 1995-10-24 1995-10-24 Etechant recycle device of wet etching apparatus KR0122318Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950029980U KR0122318Y1 (en) 1995-10-24 1995-10-24 Etechant recycle device of wet etching apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950029980U KR0122318Y1 (en) 1995-10-24 1995-10-24 Etechant recycle device of wet etching apparatus

Publications (2)

Publication Number Publication Date
KR970019157U true KR970019157U (en) 1997-05-26
KR0122318Y1 KR0122318Y1 (en) 1998-07-15

Family

ID=19426773

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950029980U KR0122318Y1 (en) 1995-10-24 1995-10-24 Etechant recycle device of wet etching apparatus

Country Status (1)

Country Link
KR (1) KR0122318Y1 (en)

Also Published As

Publication number Publication date
KR0122318Y1 (en) 1998-07-15

Similar Documents

Publication Publication Date Title
DE59611361D1 (en) stripping device
ID15816A (en) DRY EQUIPMENT
DE59805616D1 (en) stripping device
DE69617740T2 (en) stripping device
DE69615782T2 (en) Wet friction-connection apparatus
KR970004367U (en) Wet Dust Removal Device
KR970019157U (en) Etching agent recycling device for wet etching equipment
KR960019072U (en) Photoresist roll coating device
KR970002736U (en) Wet etching equipment
KR970045362U (en) Semiconductor exposure equipment
KR970025113U (en) Wet etching device
KR970003211U (en) Wet process equipment
KR970046728U (en) Dry etching device
KR970046745U (en) Dry etching device
KR960019097U (en) Interlock device for dry etching equipment
KR960025314U (en) Wet station device
KR970025114U (en) Etching Equipment
KR960019095U (en) Semiconductor Device Dry Etching Equipment
KR980005346U (en) Photoresist removal device
KR970003204U (en) Wafer Drying Equipment
KR970046715U (en) Wafer Drying Equipment
KR970046716U (en) Wafer Drying Equipment
TW325215U (en) Removing device for etched dry film
KR970015298U (en) Stage used for etching equipment
KR970046789U (en) Critical dimension measuring equipment

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20040326

Year of fee payment: 7

LAPS Lapse due to unpaid annual fee