KR970001248A - 비-다공성의 고순도 용융 실리카 유리의 제조방법 - Google Patents

비-다공성의 고순도 용융 실리카 유리의 제조방법 Download PDF

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Publication number
KR970001248A
KR970001248A KR1019960020410A KR19960020410A KR970001248A KR 970001248 A KR970001248 A KR 970001248A KR 1019960020410 A KR1019960020410 A KR 1019960020410A KR 19960020410 A KR19960020410 A KR 19960020410A KR 970001248 A KR970001248 A KR 970001248A
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South Korea
Prior art keywords
reducing atmosphere
hydrogen
fused silica
high purity
silica glass
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KR1019960020410A
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English (en)
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제롬 아라우조 로저
프란시스 보렐리 니콜라스
루이즈 호우글린 크리스틴
스미스 찰렌
Original Assignee
알프레드 엘. 미첼슨
코닝 인코오포레이티드
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Application filed by 알프레드 엘. 미첼슨, 코닝 인코오포레이티드 filed Critical 알프레드 엘. 미첼슨
Publication of KR970001248A publication Critical patent/KR970001248A/ko

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1453—Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00—Glass manufacturing
    • Y10S65/90—Drying, dehydration, minimizing oh groups

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Glass Compositions (AREA)
  • Glass Melting And Manufacturing (AREA)

Abstract

본 발명은 248㎚ 엑시머 레이저-유발 광학적 손상에 큰 저항성을 갖는 고순도 용융 실리카 유리를 제조에 관한 것으로, 더욱 상세하게는, 본 발명은 용융 실리카의 광학 부재 또는 블랭크에 관한 것이다.

Description

비-다공성의 고순도 용융 실리카 유리의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (8)

  1. a) 산화 또는 불꽃 가수분해를 이용한 열적 분해를 통해 SiO2로 전환될 수 있는 실리콘을 함유하는 기상 화합물을 포함하는 가스 스트림을 제조하는 단계; b) 상기 가스 스트림을 연소 버어너의 불꽃에 통과시켜 무정형 입자의 용융된 SiO2를 형성시키는 단계; c) 무정형 입자를 지지체 위에 증착시키는 단계; d) 무정형 입자를 환원 분위기에 노출시키는 단계; 및 e) 상기 무정형 입자 증착물을 비-다공성의 바디로 고화시키기 위해 환원 분위기의 온도를 상승시키는 단계를 포함하는 것을 특징으로 하는 비-다공성의 고순도 용융 실리카 유리의 제조방법.
  2. 제1항에 있어서, 상기 (e) 단계에서 환원 분위기의 온도가 1000 내지 1400℃의 범위로 상승됨을 특징으로 하는 비-다공성 고순도 용융 실리카 유리의 제조방법.
  3. 제1항에 있어서, 상기 환원 분위기가 적어도 하나의 수소, 일산화탄소, 디보란, 하이드라진을 포함하는 것을 특징으로 하는 비-다공성 고순도 용융 실리카 유리의 제조방법.
  4. 제3항에 있어서, 상기 환원 분위기가 수소, 또는 수소 및 헬륨을 포함하는 것을 특징으로 하는 비-다공성 고순도 용융 실리카 유리의 제조방법.
  5. 제4항에 있어서, 상기 환원 분위기가 전체 혼합물 중 1 내지 10% 양의 수소를 포함하는 것을 특징으로 하는 비-다공성 고순도 용융 실리카 유리의 제조방법.
  6. 제1항에 있어서, 상기 실리콘-함유 화합물은 할로겐화합물이 없는 폴리메틸실록산을 포함하는 것을 특징으로 하는 비-다공성 고순도 용융 실리카 유리의 제조방법.
  7. 제6항에 있어서, 상기 폴리메틸실록산이 헥사메틸디실록산, 폴리 메틸사이클로실록산 및 이들의 혼합물로부터 선택됨을 특징으로 하는 비-다공성 고순도 용융 실리카 유리의 제조방법.
  8. 제7항에 있어서, 상기 폴리메틸사이클로실록산이 옥타메틸사이클로테트라실록산, 데카메틸사이클로펜타실록산, 헥사메틸사이클로트리실록산 및 이들의 혼합물로 이루어진 군으로부터 선택됨을 특징으로 하는 비-다공성 고순도 용융 실리카 유리의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960020410A 1995-06-07 1996-06-07 비-다공성의 고순도 용융 실리카 유리의 제조방법 KR970001248A (ko)

Applications Claiming Priority (2)

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US48446595A 1995-06-07 1995-06-07
US08/484,465 1995-06-07

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KR970001248A true KR970001248A (ko) 1997-01-21

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Country Link
US (1) US5735921A (ko)
EP (1) EP0747327B2 (ko)
JP (1) JP4173564B2 (ko)
KR (1) KR970001248A (ko)
DE (1) DE69601749T3 (ko)

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KR20170058662A (ko) * 2015-11-19 2017-05-29 (주)엘지하우시스 인조대리석의 절단 휨 방지방법

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Also Published As

Publication number Publication date
JPH092835A (ja) 1997-01-07
EP0747327A1 (en) 1996-12-11
US5735921A (en) 1998-04-07
DE69601749T2 (de) 1999-10-21
DE69601749T3 (de) 2004-04-29
JP4173564B2 (ja) 2008-10-29
EP0747327B2 (en) 2003-08-27
DE69601749D1 (de) 1999-04-22
EP0747327B1 (en) 1999-03-17

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