KR960031402A - 세라믹스의 접합 구조 및 그 제조 방법 - Google Patents
세라믹스의 접합 구조 및 그 제조 방법 Download PDFInfo
- Publication number
- KR960031402A KR960031402A KR1019960002909A KR19960002909A KR960031402A KR 960031402 A KR960031402 A KR 960031402A KR 1019960002909 A KR1019960002909 A KR 1019960002909A KR 19960002909 A KR19960002909 A KR 19960002909A KR 960031402 A KR960031402 A KR 960031402A
- Authority
- KR
- South Korea
- Prior art keywords
- metal
- ceramic
- bonding
- bonded
- group
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
- C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/121—Metallic interlayers based on aluminium
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/123—Metallic interlayers based on iron group metals, e.g. steel
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/124—Metallic interlayers based on copper
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/126—Metallic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/126—Metallic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
- C04B2237/127—The active component for bonding being a refractory metal
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/366—Aluminium nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/40—Metallic
- C04B2237/402—Aluminium
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/40—Metallic
- C04B2237/405—Iron metal group, e.g. Co or Ni
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/40—Metallic
- C04B2237/407—Copper
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/59—Aspects relating to the structure of the interlayer
- C04B2237/595—Aspects relating to the structure of the interlayer whereby the interlayer is continuous, but heterogeneous on macro-scale, e.g. one part of the interlayer being a joining material, another part being an electrode material
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/62—Forming laminates or joined articles comprising holes, channels or other types of openings
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/76—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/76—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc
- C04B2237/765—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc at least one member being a tube
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/80—Joining the largest surface of one substrate with a smaller surface of the other substrate, e.g. butt joining or forming a T-joint
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/84—Joining of a first substrate with a second substrate at least partially inside the first substrate, where the bonding area is at the inside of the first substrate, e.g. one tube inside another tube
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S228/00—Metal fusion bonding
- Y10S228/903—Metal to nonmetal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12576—Boride, carbide or nitride component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12583—Component contains compound of adjacent metal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12736—Al-base component
- Y10T428/12743—Next to refractory [Group IVB, VB, or VIB] metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12736—Al-base component
- Y10T428/1275—Next to Group VIII or IB metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12736—Al-base component
- Y10T428/12764—Next to Al-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
- Y10T428/12826—Group VIB metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
- Y10T428/12826—Group VIB metal-base component
- Y10T428/1284—W-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
- Y10T428/12944—Ni-base component
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
Abstract
접합 강도가 높고, 할로겐계 부식성 가스에 대한 부식성이 양호한, 세라믹 부재와 금속 접합 부재와의 접합 구조를 제공한다.
세라믹 부재(1)와 금속 접합 부재(12a)가, 납재로 이루어진 접합층에 의하여 접합되어 있다. 세라믹 부재(1)에 금속 부재(7)가 매설되어 있고, 세라믹 부재(1)의 접합층과 접촉하는 접합면(8a)에 금속 부재(7)의 일부가 노출되어 금속노출부(7a)를 형성하고 있고, 이 접합면(8a)에 따라 세라믹 부재(1)와 금속노출부(7a)가, 각각 접합층에 대하여 접합하고 있다. 바람직하게는, 세라믹부재(1)를 구성하는 세라믹이 질화 알루미늄이고, 접합층이 적어도 주성분이 동, 알루미늄 및 니켈로 이루어진 군에서 선택된 금속으로 이루어진 연속상을 구비하고 있고, 또한 마그네슘, 티타늄, 지르코늄 및 팔라듐으로 이루어진 군에서 선택된 활성 금속을 함유하고 있다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
Claims (13)
- 세라믹 부재와 금속 접합 부재가 납재로 이루어진 접합층에 의하여 접합되어 있는 세라믹의 접합 구조에 있어서, 상기 세라믹 부재에 금속 부재가 매설되어 있고, 상기 세라믹 부재의 상기 접합층과 접촉하는 접합면에 상기 금속 부재의 일부가 노출되어 금속노출부를 형성하고 있고, 이 접합면에 따라 세라믹 부재와 상기 금속노출부가 각각 상기 접합층에 대하여 접합하고 있는 것을 특징으로 하는 세라믹의 접합 구조.
- 제1항에 있어서, 상기 세라믹 부재를 구성하는 세라믹이, 질화 알루미늄인 것을 특징으로 하는 세라믹의 접합 구조.
- 제2항에 있어서, 상기 접합층이 적어도 주성분이 동, 알루미늄 및 니켈로 이루어진 군에서 선택된 금속으로 이루어진 연속상을 구비하고 있고, 또한 마그네슘, 티타늄, 지르코늄 및 팔라듐으로 이루어진 군에서 선택된 1종 이상의 활성 금속을 10중량% 이하 함유하고 있는 것을 특징으로 하는 세라믹의 접합 구조.
- 제1항에 있어서, 상기 금속 접합 부재를 구성하는 금속이, 니켈, 동, 알루미늄 및 이들의 합금으로 이루어진 군에서 선택된 금속인 것을 특징으로 하는 세라믹의 접합 구조.
- 제4항에 있어서, 상기 금속 접합 부재를 구성하는 금속이, 니켈이고, 또한 상기 금속 접합 부재상에, 니켈-알루미늄 금속간 화합물로 이루어진 반응층이 형성되어 있는 것을 특징으로 하는 세라믹의 접합 구조.
- 제3항에 있어서, 상기 연속상의 주성분이 알루미늄이고, 이 연속상 중에 마그네슘이 응고되어 있는 것을 특징으로 하는 세라믹의 접합 구조.
- 제3항에 있어서, 상기 연속상 중에, 니켈-알루미늄 금속간 화합물로 이루어진 분산상이 형성되어 있는 것을 특징으로 하는 세라믹의 접합 구조.
- 제1항에 있어서, 상기 금속 부재가 몰리브덴, 텅스텐 및 몰리브덴과 텅스텐과의 합금으로 이루어진 군에서 선택된 금속인 것을 특징으로 하는 세라믹의 접합 구조.
- 제1항에 있어서, 상기 금속노출부가 망상 구조를 이루고 있고, 이 망상 구조의 사이에 상기 세라믹 부재가 노출하고 있는 것을 특징으로 하는 세라믹의 접합 구조.
- 청구항 제1항 기재의 세라믹의 접합 구조를 제조하는 방법으로서, 상기 세라믹 부재의 접합면에 상기 금속 부재의 일부를 노출시켜 상기 금속노출부를 형성하고, 이 접합면에 따라 납재를 접촉시켜 납땜을 행함으로써, 상기 세라믹 부재와 상기 금속노출부를 각각 상기 접합층에 대하여 접합시키는 것을 특징으로 하는 세라믹의 접합 구조의 제조 방법.
- 제10항에 있어서, 상기 납재 중에, 주성분으로서, 동, 알루미늄 및 니켈로 이루어진 군에서 선택된 금속이 함유되어 있고, 마그네슘, 티타늄, 지르코늄 및 팔라듐으로 이루어진 군에서 선택된 1종 이상의 활성 금속 0.3중량% 아상, 20중량% 이하 함유되어 있는 것을 특징으로 하는 세라믹의 접합 구조의 제조 방법.
- 제11항에 있어서, 상기 납재 중에 제3성분이 50중량% 이하 함유되어 있는 것을 특징으로 하는 세라믹의 접합 구조의 제조 방법.
- 제10항에 있어서, 상기 세라믹 부재의 접합면 또는 상기 납재의 상기 세라믹 부재 측의 표면에 동, 알루미늄, 니켈, 마그네슘, 티타늄, 지르코늄 및 팔라듐으로 이루어진 군에서 선택된 금속으로 이루어진 막을 형성하는 것을 특징으로 하는 세라믹의 접합 구조의 제조 방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019980049525A KR100199337B1 (en) | 1995-02-09 | 1998-11-18 | Junction structure of ceramics and method for preparing the same |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2165895 | 1995-02-09 | ||
JP95-21658 | 1995-02-09 | ||
JP96-24836 | 1996-01-19 | ||
JP02483696A JP3813654B2 (ja) | 1995-02-09 | 1996-01-19 | セラミックスの接合構造およびその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960031402A true KR960031402A (ko) | 1996-09-17 |
Family
ID=26358756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960002909A KR960031402A (ko) | 1995-02-09 | 1996-02-07 | 세라믹스의 접합 구조 및 그 제조 방법 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6020076A (ko) |
EP (1) | EP0726239B1 (ko) |
JP (1) | JP3813654B2 (ko) |
KR (1) | KR960031402A (ko) |
DE (1) | DE69609742T2 (ko) |
TW (1) | TW397808B (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210043586A (ko) * | 2018-08-28 | 2021-04-21 | 미쓰비시 마테리알 가부시키가이샤 | 구리/세라믹스 접합체, 절연 회로 기판, 및 구리/세라믹스 접합체의 제조 방법, 및 절연 회로 기판의 제조 방법 |
KR20220054461A (ko) * | 2019-12-02 | 2022-05-02 | 미쓰비시 마테리알 가부시키가이샤 | 구리/세라믹스 접합체, 절연 회로 기판, 및 구리/세라믹스 접합체의 제조 방법, 절연 회로 기판의 제조 방법 |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3790000B2 (ja) * | 1997-01-27 | 2006-06-28 | 日本碍子株式会社 | セラミックス部材と電力供給用コネクターとの接合構造 |
JP3954177B2 (ja) * | 1997-01-29 | 2007-08-08 | 日本碍子株式会社 | 金属部材とセラミックス部材との接合構造およびその製造方法 |
JP3746594B2 (ja) | 1997-06-20 | 2006-02-15 | 日本碍子株式会社 | セラミックスの接合構造およびその製造方法 |
JP3541702B2 (ja) * | 1998-01-16 | 2004-07-14 | 株式会社デンソー | セラミック−金属接合体及びその製造方法 |
JP2000106391A (ja) * | 1998-07-28 | 2000-04-11 | Ngk Insulators Ltd | 半導体支持装置、その製造方法、接合体の製造方法および接合体 |
DE19923865A1 (de) * | 1999-05-25 | 2000-11-30 | Voith Sulzer Papiertech Patent | Verfahren zur Herstellung von Garnituren für das mechanische Bearbeiten von wasserhaltigem Papierfaserstoff |
JP4005268B2 (ja) | 1999-06-01 | 2007-11-07 | 日本碍子株式会社 | セラミックスと金属との接合構造およびこれに使用する中間挿入材 |
JP2002293655A (ja) | 2001-03-29 | 2002-10-09 | Ngk Insulators Ltd | 金属端子とセラミック部材との接合構造、金属部材とセラミック部材との接合構造および金属端子とセラミック部材との接合材 |
US20050106794A1 (en) * | 2002-03-26 | 2005-05-19 | Fuji Electric Holdings Co., Ltd. | Method of manufacturing a semiconductor device |
JP4107643B2 (ja) | 2002-07-23 | 2008-06-25 | 日本碍子株式会社 | 接合体の製造方法 |
US7252872B2 (en) * | 2003-01-29 | 2007-08-07 | Ngk Insulators, Ltd. | Joined structures of ceramics |
JP4008401B2 (ja) * | 2003-09-22 | 2007-11-14 | 日本碍子株式会社 | 基板載置台の製造方法 |
WO2005122252A1 (en) * | 2004-05-04 | 2005-12-22 | S-Bond Technologies, Llc | Electronic package formed using low-temperature active solder including indium, bismuth, and/or cadmium |
JP4510745B2 (ja) * | 2005-10-28 | 2010-07-28 | 日本碍子株式会社 | セラミックス基材と電力供給用コネクタの接合構造 |
JP4531004B2 (ja) | 2006-03-24 | 2010-08-25 | 日本碍子株式会社 | 加熱装置 |
US20070251938A1 (en) * | 2006-04-26 | 2007-11-01 | Watlow Electric Manufacturing Company | Ceramic heater and method of securing a thermocouple thereto |
JP4421595B2 (ja) | 2006-11-16 | 2010-02-24 | 日本碍子株式会社 | 加熱装置 |
JP4858319B2 (ja) * | 2007-06-07 | 2012-01-18 | 住友電気工業株式会社 | ウェハ保持体の電極接続構造 |
DE102007029031A1 (de) * | 2007-06-23 | 2008-12-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum dauerhaften Verbinden zweier Komponenten durch Löten mit Glas- oder Metalllot |
JP5345449B2 (ja) * | 2008-07-01 | 2013-11-20 | 日本碍子株式会社 | 接合構造体及びその製造方法 |
JP2010114351A (ja) * | 2008-11-10 | 2010-05-20 | Ngk Spark Plug Co Ltd | 静電チャック装置 |
DE102011103746A1 (de) * | 2011-05-31 | 2012-12-06 | Ixys Semiconductor Gmbh | Verfahren zum Fügen von Metall-Keramik-Substraten an Metallkörpern |
JP5348439B2 (ja) * | 2011-09-30 | 2013-11-20 | Toto株式会社 | 静電チャック |
US9624137B2 (en) * | 2011-11-30 | 2017-04-18 | Component Re-Engineering Company, Inc. | Low temperature method for hermetically joining non-diffusing ceramic materials |
US20130189022A1 (en) * | 2011-11-30 | 2013-07-25 | Component Re-Engineering Company, Inc. | Hermetically Joined Plate And Shaft Devices |
JP6886128B2 (ja) * | 2016-11-29 | 2021-06-16 | 住友電気工業株式会社 | ウエハ保持体 |
TWI746807B (zh) * | 2017-02-28 | 2021-11-21 | 日商三菱綜合材料股份有限公司 | 銅/陶瓷接合體,絕緣電路基板,及銅/陶瓷接合體的製造方法,絕緣電路基板的製造方法 |
JP6965768B2 (ja) * | 2017-02-28 | 2021-11-10 | 三菱マテリアル株式会社 | 銅/セラミックス接合体、絶縁回路基板、及び、銅/セラミックス接合体の製造方法、絶縁回路基板の製造方法 |
US10882130B2 (en) * | 2018-04-17 | 2021-01-05 | Watlow Electric Manufacturing Company | Ceramic-aluminum assembly with bonding trenches |
WO2020044593A1 (ja) * | 2018-08-28 | 2020-03-05 | 三菱マテリアル株式会社 | 銅/セラミックス接合体、絶縁回路基板、及び、銅/セラミックス接合体の製造方法、及び、絶縁回路基板の製造方法 |
WO2021206394A1 (ko) * | 2020-04-07 | 2021-10-14 | 주식회사 아모센스 | 폴딩 플레이트 및 그 제조방법 |
DE102020111698A1 (de) * | 2020-04-29 | 2021-11-04 | Rogers Germany Gmbh | Verfahren zur Herstellung eines Metall-Keramik-Substrats und ein Metall-Keramik-Substrat hergestellt mit einem solchen Verfahren |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4530884A (en) * | 1976-04-05 | 1985-07-23 | Brunswick Corporation | Ceramic-metal laminate |
US4639388A (en) * | 1985-02-12 | 1987-01-27 | Chromalloy American Corporation | Ceramic-metal composites |
US4596354A (en) * | 1985-07-03 | 1986-06-24 | The United States Of America As Represented By The United States Department Of Energy | Oxidation resistant filler metals for direct brazing of structural ceramics |
US4987035A (en) * | 1987-10-07 | 1991-01-22 | Norton Company | Ceramic joints |
GB8821044D0 (en) * | 1988-09-08 | 1988-10-05 | Metal Box Plc | Method of bonding tool material to holder & tools made by method |
US5115962A (en) * | 1988-12-20 | 1992-05-26 | United Technologies Corporation | Method of attaching ceramic fiber arrays to metallic substrates |
US4979977A (en) * | 1989-09-18 | 1990-12-25 | Ppg Industries, Inc. | Bending iron having member to effect reverse bend and method of using same |
US4983213A (en) * | 1989-10-12 | 1991-01-08 | Gte Products Corporation | Titanium hydride |
JPH0775717B2 (ja) * | 1992-09-22 | 1995-08-16 | 日本碍子株式会社 | 有機性汚泥の嫌気性消化処理方法 |
EP0703837B1 (en) * | 1993-04-30 | 2002-12-18 | Foster Miller, Inc. | A reinforced joint for composite structures and method of joining composite parts |
US5643539A (en) * | 1994-03-04 | 1997-07-01 | Salem Engelhard | Regenerative incineration system |
JP3505212B2 (ja) * | 1994-03-09 | 2004-03-08 | 株式会社東芝 | 接合体および接合体の製造方法 |
-
1996
- 1996-01-19 JP JP02483696A patent/JP3813654B2/ja not_active Expired - Lifetime
- 1996-02-02 US US08/590,026 patent/US6020076A/en not_active Expired - Lifetime
- 1996-02-07 KR KR1019960002909A patent/KR960031402A/ko not_active Application Discontinuation
- 1996-02-07 EP EP96300812A patent/EP0726239B1/en not_active Expired - Lifetime
- 1996-02-07 TW TW085101483A patent/TW397808B/zh not_active IP Right Cessation
- 1996-02-07 DE DE69609742T patent/DE69609742T2/de not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210043586A (ko) * | 2018-08-28 | 2021-04-21 | 미쓰비시 마테리알 가부시키가이샤 | 구리/세라믹스 접합체, 절연 회로 기판, 및 구리/세라믹스 접합체의 제조 방법, 및 절연 회로 기판의 제조 방법 |
KR20220054461A (ko) * | 2019-12-02 | 2022-05-02 | 미쓰비시 마테리알 가부시키가이샤 | 구리/세라믹스 접합체, 절연 회로 기판, 및 구리/세라믹스 접합체의 제조 방법, 절연 회로 기판의 제조 방법 |
US11638350B2 (en) | 2019-12-02 | 2023-04-25 | Mitsubishi Materials Corporation | Copper/ceramic bonded body, insulating circuit board, method for producing copper/ceramic bonded body, and method for producing insulating circuit board |
Also Published As
Publication number | Publication date |
---|---|
US6020076A (en) | 2000-02-01 |
EP0726239B1 (en) | 2000-08-16 |
DE69609742T2 (de) | 2001-05-03 |
DE69609742D1 (de) | 2000-09-21 |
JP3813654B2 (ja) | 2006-08-23 |
EP0726239A2 (en) | 1996-08-14 |
EP0726239A3 (en) | 1996-11-27 |
JPH08277173A (ja) | 1996-10-22 |
TW397808B (en) | 2000-07-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR960031402A (ko) | 세라믹스의 접합 구조 및 그 제조 방법 | |
KR960031401A (ko) | 접합체, 내식성 접합 재료 및 접합체의 제조 방법 | |
US4448605A (en) | Ductile brazing alloys containing reactive metals | |
KR950702463A (ko) | 주석-비스무트 솔더 페이스트 및 고온 특성이 개량된 접속을 형성하는데 페이스트를 사용하는 방법(Tin Bismuth Solder Paste, And Method Using Paste To Form Connection Having Improved High Temperature Properties) | |
US4684052A (en) | Method of brazing carbide using copper-zinc-manganese-nickel alloys | |
USRE34819E (en) | Gold-nickel-titanium brazing alloy | |
US4447391A (en) | Brazing alloy containing reactive metals, precious metals, boron and nickel | |
JP2007136551A (ja) | WC−Coをチタン合金にロウ付けするための金/ニッケル/銅/アルミニウム/銀ロウ付け合金 | |
MXPA03003792A (es) | Producto de cobresoldadura con temperatura de fusion baja. | |
US4603090A (en) | Ductile titanium-indium-copper brazing alloy | |
ATE338737T1 (de) | Hartlötbare metallisierungen für diamantbauteile | |
AU581323B2 (en) | Copper-zinc-manganese-nickel alloys | |
US4606981A (en) | Ductile brazing alloys containing reactive metals | |
EP0135603B1 (en) | Ductile low temperature brazing alloy | |
JP2777707B2 (ja) | 接合体 | |
EP0587307A1 (en) | Aluminium alloys | |
JPH07126079A (ja) | セラミックス接合用ろう材 | |
JPH0288482A (ja) | セラミックスのメタライズ又は接合方法 | |
JPH07223090A (ja) | アルミニウム合金と銅の接合用ろう材およびこのろう材によって接合された複合材 | |
US4661416A (en) | Ductile reactive metal-indium-copper brazing alloy article | |
US4684579A (en) | Ductile low temperature brazing alloy foil | |
US4678636A (en) | Ductile brazing alloy containing reactive metals and precious metals | |
Okamura | Brazing ceramics and metals | |
US5273832A (en) | Gold-nickel-vanadium braze joint | |
JP2755455B2 (ja) | セラミックス接合用ろう粉末 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
AMND | Amendment | ||
AMND | Amendment | ||
E902 | Notification of reason for refusal | ||
AMND | Amendment | ||
E601 | Decision to refuse application | ||
J201 | Request for trial against refusal decision | ||
J301 | Trial decision |
Free format text: TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 19981028 Effective date: 19990223 |