KR950028641U - 반도체 소자 제조시 사용되는 축소 노광 장치 - Google Patents
반도체 소자 제조시 사용되는 축소 노광 장치Info
- Publication number
- KR950028641U KR950028641U KR2019940004658U KR19940004658U KR950028641U KR 950028641 U KR950028641 U KR 950028641U KR 2019940004658 U KR2019940004658 U KR 2019940004658U KR 19940004658 U KR19940004658 U KR 19940004658U KR 950028641 U KR950028641 U KR 950028641U
- Authority
- KR
- South Korea
- Prior art keywords
- reduced exposure
- semiconductor device
- device used
- device manufacturing
- exposure device
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
- G03F7/701—Off-axis setting using an aperture
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR94004658U KR970007069Y1 (en) | 1994-03-09 | 1994-03-09 | Photolithography apparatus for a semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR94004658U KR970007069Y1 (en) | 1994-03-09 | 1994-03-09 | Photolithography apparatus for a semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950028641U true KR950028641U (ko) | 1995-10-20 |
KR970007069Y1 KR970007069Y1 (en) | 1997-07-15 |
Family
ID=19378622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR94004658U KR970007069Y1 (en) | 1994-03-09 | 1994-03-09 | Photolithography apparatus for a semiconductor |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970007069Y1 (ko) |
-
1994
- 1994-03-09 KR KR94004658U patent/KR970007069Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR970007069Y1 (en) | 1997-07-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20081027 Year of fee payment: 12 |
|
EXPY | Expiration of term |