KR920008212A - 코팅막의 제조방법 및 제조장치 - Google Patents
코팅막의 제조방법 및 제조장치 Download PDFInfo
- Publication number
- KR920008212A KR920008212A KR1019910018192A KR910018192A KR920008212A KR 920008212 A KR920008212 A KR 920008212A KR 1019910018192 A KR1019910018192 A KR 1019910018192A KR 910018192 A KR910018192 A KR 910018192A KR 920008212 A KR920008212 A KR 920008212A
- Authority
- KR
- South Korea
- Prior art keywords
- plasma
- discharge
- coating film
- mixed layer
- diamond
- Prior art date
Links
- 239000011248 coating agent Substances 0.000 title claims 11
- 238000000576 coating method Methods 0.000 title claims 11
- 238000004519 manufacturing process Methods 0.000 title claims 8
- 239000007921 spray Substances 0.000 claims description 20
- 230000015556 catabolic process Effects 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 claims 16
- 239000010432 diamond Substances 0.000 claims 8
- 229910003460 diamond Inorganic materials 0.000 claims 8
- 238000000034 method Methods 0.000 claims 6
- 238000007750 plasma spraying Methods 0.000 claims 6
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 4
- 238000002347 injection Methods 0.000 claims 3
- 239000007924 injection Substances 0.000 claims 3
- 230000006837 decompression Effects 0.000 claims 2
- 238000007664 blowing Methods 0.000 claims 1
- 238000007654 immersion Methods 0.000 claims 1
- 239000012071 phase Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/276—Diamond only using plasma jets
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/278—Diamond only doping or introduction of a secondary phase in the diamond
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/134—Plasma spraying
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Coating By Spraying Or Casting (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Carbon And Carbon Compounds (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 실시예에 따른 두개의 DC 플라즈마 톨취를 가지는 성막의 단면도,
제2도는 본 발명의 또 다른 실시예에 따른 RF 플라즈마 톨취를 가지는 성막의 단면도,
제3도는 본 발명의 또다른 실시예에 따른 레이저 브레이크다운 플라즈마 톨취를 가지는 성막 장치의 단면도.
Claims (12)
- 플라즈마 분사 물질 및 다이아몬드의 혼합층을 형성하는 단계, 플라즈마 분사 톨취에 의하여 플라즈마 분사를 실시하는 단계, 동시에 기판상에 상기 혼합층을 형성하기 위하여 CVD 플라즈마 톨취에 의하여 플라즈마 CVD를 실시하는 단계로 이루어진 코팅막 제조방법.
- 제1항에 있어서, 코팅막이 플라즈마를 발생하기 위하여 DC방전, RF방전, 및 레이저 브레이크 다운 방전으로 이루어진 그룹으로부터 선택된 하나 이상의 부재를 사용하므로 상기 플라즈마 분사를 처리하고 플라즈마를 발생하기 위하여 DC방전 및 레이저 브레이크 다운 방전으로 이루어진 그룹으로부터 선택된 하나 이상의 부재를 사용하여 상기 플라즈마 CVD를 처리하여 생상된 코팅막 제조방법.
- 제2항에 있어서, 상기 플라즈마 분사가 플라즈마를 발생하기 위하여 RF방전 및 레이저 브레이크 다운 방전으로 이루어지는 그룹으로부터 선택된 하나 이상의 부재를 사용하여 처리되며 상기 플라즈마 CVD는 레이져 브레이크 다운 방전을 사용하여 처리되는 코팅막 제조방법.
- 플라즈마 분사 물질 및 다이아몬드의 혼합층을 형성하는 단계를 포함하며 RF 방전 및 레이저 브레이크 다운 방전 중 어느 하나를 사용하여 단일 플라즈마에 의하여 플라즈마를 발생하는 단계로 이루어지고 상기 혼합층을 형성하기 위하여 플라즈마 분사 및 플라즈마 CVD를 처리하는 코팅막 제조방법.
- 제1항에 있어서, 상기 플라즈마 분사가 와이어의 형성에서 플라즈마 분사 물질을 공급하는 동안 처리되는 코팅막 제조방법.
- 플라즈마 분사 물질 및 다이아몬드 혼합층을 형성하는 단계를 포함하고, 상기 혼합층을 형성하기 위하여 와이어의 형성에서 플라즈마 분사물질을 공급하는 동안 플라즈마 분사를 처리하는 단계를 함유함이 특징인 코팅막 제조방법.
- 플라즈마 분사 물질 및 다이아몬드의 혼합층이 형성 가능하며 배출 장치에 연결된 감압 챔버, 가스 공급 수단을 포함하는 다이아몬드 기상을 형성하는 것이 가능한 상기 감압 침버에 정돈된 첫번째 플라즈마 톨취, 플라즈마 분사 물질 공급 수단을 포함하는 플라즈마 분사를 처리 가능한 상기 감압 챔버에 정돈된 두번째 플라즈마 톨취로 이루어지는 코팅막 제조장치.
- 제7항에 있어서, 상기 첫번째 플라즈마 톨치는 DC방전 및 ㄹ이저 브레이크 다운 방전 중 어느 하나를 사용하여 플라즈마를 발생할 수 있는 플라즈마 톨취에 의하여 구성되며 상기 두번째 플라즈마 톨취는 DC 방전 및 RF방전 및 레이저 브레이크 다운 방전 중 어느 하나를 사용하여 플라즈마를 발생할 수 있는 플라즈마 톨취로 구성된 코팅막 제조장치.
- 제8항에 있어서, 상기 첫번째 플라즈마 톨취가 레이저 브레이크 다운 방전을 사용하여 발생할 수 있는 플라즈마 톨취에 의하여 구성되고 두번째 플라즈마 톨취가 RF 방전 및 레이저 브레이크 다운 방전 중 어느 하나를 사용하여 플라즈마를 발생할 수 있는 플라즈마 톨취에 의하여 구성된 코팅막 제조방법.
- 플라즈마 분사 물질 및 다이아몬드의 혼합층이 형성 가능하며 배출 장치에 연결된 감압 챔버 및 가스 공급수단 및 플라즈마 분사 물질 공급 수단을 가지며 다이아몬드 기상을 형성하고 플라즈마 분사 물질의 플라즈마 분사를 처리하기 위하여 RF 방전 및 레이저 브레이크 다운 방전 중 어느 하나에 의하여 플라즈마는 발생 가능한 상기 감압 챔버 내에 정돈된 플라즈마 톨취로 이루어진 코팅막 제조장치.
- 제7항에 있어서, 상기 플라즈마 분사 물질 공급 수단이 와이어의 형성에 있어 플라즈마 분사 물질을 공급하는 와이어 공급 장치에 의하여 구성된 코팅막 제조장치.
- 플라즈마 분사 물질 및 다이아몬드 혼합층이 형성 가능하며 플라즈마 톨취가 상기 감입 챔버에 정돈되고 가스 공급 수단 및 플라즈마 분사 물질 공급이 와이어 형에서 플라즈마 분사 물질을 공급가능하고 플라즈마 분사물질의 플라즈마 분사가 처리 가능한 코팅막 제조장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2278229A JP2938552B2 (ja) | 1990-10-17 | 1990-10-17 | コーティング膜の製造方法およびコーティング膜の製造装置 |
JP90-278229 | 1990-10-17 | ||
JP2-278229 | 1990-10-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR920008212A true KR920008212A (ko) | 1992-05-27 |
KR940002751B1 KR940002751B1 (ko) | 1994-04-02 |
Family
ID=17594421
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910018192A KR940002751B1 (ko) | 1990-10-17 | 1991-10-16 | 코팅막의 제조방법 및 제조장치 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5314726A (ko) |
EP (1) | EP0481722B1 (ko) |
JP (1) | JP2938552B2 (ko) |
KR (1) | KR940002751B1 (ko) |
DE (1) | DE69106834T2 (ko) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4112156A1 (de) * | 1991-04-13 | 1992-10-15 | Lugscheider Erich | Mit hilfe eines plasmabrenners aufgebrachte beschichtung sowie plasmabrenner |
US5370299A (en) * | 1992-04-23 | 1994-12-06 | Sumitomo Electric Industries, Ltd. | Bonding tool having diamond head and method of manufacturing the same |
US5565249A (en) * | 1992-05-07 | 1996-10-15 | Fujitsu Limited | Method for producing diamond by a DC plasma jet |
DE4322804A1 (de) * | 1993-07-08 | 1995-01-12 | Wacker Chemie Gmbh | Verfahren zur Herstellung von hochdisperser Kieselsäure und Vorrichtung zur Durchführung des Verfahrens |
GB2282390B (en) * | 1993-09-23 | 1997-04-30 | Opa | Method for obtaining diamond and diamond-like films |
JP3166919B2 (ja) * | 1993-10-29 | 2001-05-14 | ウンアクシス バルツェルス アクチェンゲゼルシャフト | 被覆体とこの被覆体を製造する方法およびその使用 |
AU8066694A (en) * | 1993-11-23 | 1995-06-13 | Plasmoteg Engineering Center | An abrasive material for precision surface treatment and a method for the manufacturing thereof |
US5643343A (en) * | 1993-11-23 | 1997-07-01 | Selifanov; Oleg Vladimirovich | Abrasive material for precision surface treatment and a method for the manufacturing thereof |
JP3774904B2 (ja) * | 1994-01-27 | 2006-05-17 | 住友電気工業株式会社 | 平坦なダイヤモンド膜の合成法とダイヤモンド自立膜及びダイヤモンド膜の研磨方法 |
US5711773A (en) * | 1994-11-17 | 1998-01-27 | Plasmoteg Engineering Center | Abrasive material for precision surface treatment and a method for the manufacturing thereof |
US5759623A (en) * | 1995-09-14 | 1998-06-02 | Universite De Montreal | Method for producing a high adhesion thin film of diamond on a Fe-based substrate |
DE19958473A1 (de) * | 1999-12-04 | 2001-06-07 | Bosch Gmbh Robert | Verfahren zur Herstellung von Kompositschichten mit einer Plasmastrahlquelle |
DE19958474A1 (de) * | 1999-12-04 | 2001-06-21 | Bosch Gmbh Robert | Verfahren zur Erzeugung von Funktionsschichten mit einer Plasmastrahlquelle |
JP4549553B2 (ja) * | 2001-02-19 | 2010-09-22 | 吉田 豊信 | 熱プラズマを用いた成膜装置 |
US7444883B2 (en) * | 2005-12-22 | 2008-11-04 | Honeywell International Inc. | Vibrating beam force transducer |
JP4983091B2 (ja) * | 2006-05-02 | 2012-07-25 | 東京エレクトロン株式会社 | 電解質膜の形成方法、成膜装置及び固体燃料電池 |
DE102007047629A1 (de) * | 2007-04-13 | 2008-10-16 | Stein, Ralf | Verfahren zum Aufbringen einer hochfesten Beschichtung auf Werkstücke und/oder Werkstoffe |
EP1980645A1 (de) * | 2007-04-13 | 2008-10-15 | Ralf Stein | Verfahren zum Aufbringen einer mehrlagigen Beschichtung auf Werkstücke und/oder Werkstoffe |
CA2658210A1 (en) * | 2008-04-04 | 2009-10-04 | Sulzer Metco Ag | Method and apparatus for the coating and for the surface treatment of substrates by means of a plasma beam |
AU2012277526B2 (en) * | 2011-06-28 | 2016-11-03 | Mtix Limited | Method and apparatus for surface treatment of materials utilizing multiple combined energy sources |
CN102400084B (zh) * | 2011-10-19 | 2013-04-24 | 北京科技大学 | 一种致密钨涂层的制备方法 |
DE102013010126B4 (de) * | 2013-06-18 | 2015-12-31 | Häuser & Co. GmbH | Plasmapulverspritzverfahren und Vorrichtung zur Beschichtung von Paneelen für Kesselwände in Verbindung mit einem Laserstrahlgerät |
JP2015090916A (ja) * | 2013-11-06 | 2015-05-11 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
DE102014221735A1 (de) * | 2014-10-24 | 2016-04-28 | Mahle Lnternational Gmbh | Thermisches Spritzverfahren und Vorrichtung dafür |
CN107447179B (zh) * | 2017-07-21 | 2019-12-10 | 上海交通大学 | 一种复合热喷涂方法 |
JP7421018B1 (ja) * | 2022-04-26 | 2024-01-23 | 住友化学株式会社 | ダイヤモンド膜堆積基板、およびダイヤモンド膜堆積基板の製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59166673A (ja) * | 1983-03-11 | 1984-09-20 | Mitsubishi Metal Corp | 耐摩耗性のすぐれた表面被覆工具部材 |
JP2555045B2 (ja) * | 1987-01-19 | 1996-11-20 | 株式会社日立製作所 | 薄膜形成方法及びその装置 |
DE3706340A1 (de) * | 1987-02-27 | 1988-09-08 | Winter & Sohn Ernst | Verfahren zum auftragen einer verschleissschutzschicht und danach hergestelltes erzeugnis |
JPS6433096A (en) * | 1987-04-03 | 1989-02-02 | Fujitsu Ltd | Gaseous phase synthesis for diamond |
DE3884653T2 (de) * | 1987-04-03 | 1994-02-03 | Fujitsu Ltd | Verfahren und Vorrichtung zur Gasphasenabscheidung von Diamant. |
JP2628601B2 (ja) * | 1988-07-12 | 1997-07-09 | 富士通株式会社 | ダイアモンド被覆超硬合金および超硬合金のダイアモンド被覆方法 |
US4928879A (en) * | 1988-12-22 | 1990-05-29 | The Perkin-Elmer Corporation | Wire and power thermal spray gun |
US4981717A (en) * | 1989-02-24 | 1991-01-01 | Mcdonnell Douglas Corporation | Diamond like coating and method of forming |
JPH02248397A (ja) * | 1989-03-20 | 1990-10-04 | Onoda Cement Co Ltd | ダイヤモンドの製造装置および製造方法 |
US5047612A (en) * | 1990-02-05 | 1991-09-10 | General Electric Company | Apparatus and method for controlling powder deposition in a plasma spray process |
-
1990
- 1990-10-17 JP JP2278229A patent/JP2938552B2/ja not_active Expired - Fee Related
-
1991
- 1991-09-30 US US07/767,890 patent/US5314726A/en not_active Expired - Lifetime
- 1991-10-15 DE DE69106834T patent/DE69106834T2/de not_active Expired - Fee Related
- 1991-10-15 EP EP91309476A patent/EP0481722B1/en not_active Expired - Lifetime
- 1991-10-16 KR KR1019910018192A patent/KR940002751B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2938552B2 (ja) | 1999-08-23 |
US5314726A (en) | 1994-05-24 |
EP0481722B1 (en) | 1995-01-18 |
EP0481722A1 (en) | 1992-04-22 |
KR940002751B1 (ko) | 1994-04-02 |
JPH04157177A (ja) | 1992-05-29 |
DE69106834D1 (de) | 1995-03-02 |
DE69106834T2 (de) | 1995-05-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR920008212A (ko) | 코팅막의 제조방법 및 제조장치 | |
ATE430376T1 (de) | Plasmareaktor zur behandlung von grossflächigen substraten | |
ATE181116T1 (de) | Verfahren und vorrichtung zur behandlung von substratoberflächen | |
KR950701768A (ko) | 균일한 전기장이 유전체 창에 의해 유도되는 플라즈마 처리 장치 및 방법(plasma treatment dapparatus and method in which a uniform electric field is induced by a dielectric window) | |
KR960032633A (ko) | 플라즈마 에칭방법 | |
AU2003246887A1 (en) | Application of a coating forming material onto at least one substrate | |
ES2067098T3 (es) | Procedimiento e instalacion para el tratamiento reactivo reforzado por descarga por arco de tension continua de producto. | |
JPS5715870A (en) | Pretreatment for painting of polyolefin product | |
KR960026267A (ko) | 고융점금속박막의 형성방법 | |
DE59908436D1 (de) | Verfahren zur herstellung haftfester oberflächenbeschichtungen | |
EP0099724A3 (en) | Deposition of coatings upon substrates utilising a high pressure, non-local thermal equilibrium arc plasma | |
DE59813873D1 (de) | Verfahren und Anlage zur Herstellung beschichteter Werkstücke | |
BR0307769A (pt) | Processo de limpeza por plasma da superfìcie de um material recoberto com uma substância orgânica, e instalação para a sua realização | |
PL1641572T3 (pl) | Laserowe usuwanie warstwy lub powłoki z podłoża | |
US20080280065A1 (en) | Method and Device for Generating a Low-Pressure Plasma and Applications of the Low-Pressure Plasma | |
ES2151633T3 (es) | Procedimiento y dispositivo para el decapado de un substrato metalico. | |
TW368491B (en) | Ozone generating apparatus | |
DE69901455T2 (de) | Verfahren zum vakuumbeschichten eines gewölbten substrates | |
DE10010126C2 (de) | Verfahren und Vorrichtung zum Plasmabehandeln der Oberfläche von Substraten durch Ionenbeschuß | |
US20160215377A1 (en) | Methods for Plasma Treatment on a Can Component, Feedstock & Tooling | |
KR940008913A (ko) | 인쇄가능한 표면을 지니는 폴리옥시메틸렌물품, 이것에 인쇄적성을 부여하는 방법 및 인쇄방법 | |
US20100024845A1 (en) | Process and apparatus for degreasing objects or materials by means of oxidative free radicals | |
KR920000109A (ko) | 마이크로파 플라즈마 강화 cvd법을 이용한 박막형성 방법 및 장치, 그리고 그 용도 | |
KR970030456A (ko) | 실리콘 웨이퍼 식각 처리의 개량된 방법 | |
WO2002078749A2 (en) | Atmospheric pressure rf plasma source using ambient air and complex molecular gases |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
G160 | Decision to publish patent application | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20060327 Year of fee payment: 13 |
|
LAPS | Lapse due to unpaid annual fee |