KR910004296A - 만곡 필라멘트 및 기판 냉각 수단을 포함하는 합성 다이어몬드 도포 장치 - Google Patents
만곡 필라멘트 및 기판 냉각 수단을 포함하는 합성 다이어몬드 도포 장치 Download PDFInfo
- Publication number
- KR910004296A KR910004296A KR1019900011874A KR900011874A KR910004296A KR 910004296 A KR910004296 A KR 910004296A KR 1019900011874 A KR1019900011874 A KR 1019900011874A KR 900011874 A KR900011874 A KR 900011874A KR 910004296 A KR910004296 A KR 910004296A
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- filaments
- diamond coating
- pair
- diamond
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
- C23C16/463—Cooling of the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
내용 없음.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 장치의 개략적인 측면도,
제2도는 제1도의 2-2선을 취한 상기 장치의 단면도,
제3도는 제2도의 3-3을 취한 단면도.
Claims (6)
- 화학 증착에 의해 기판상에 다이어몬드의 도포를 위한 장치로서, 대기압이하의 압력으로 유지되고 적어도 하나의 유입구수단과 거어도 하나의 배출구 수단을 가진 폐쇄된 반응실과, 상기 기판들사이에 가스유동을 허용하기 위하여 이격되고 서로에 대하여 평행한 상기 반응실 내에 상기 기판을 지지하기 위한 지지 수단과, 한쌍의 고정 전극의 각 단부에서 부착고정 되고 상기 기판에 평행하고 실제적으로 동일한 거리에 있는 단일 평면내에서 만곡되도록 압축응력을 받는 수직으로 연장된 직선의 전도성의 복수의 필라멘트를 구비한 저항가열 수단과, 상기 필라멘트로 부터 대향 측면상의 상기 한기판에 인접하게 위치한 기판 냉각 수단을 구비한 다이어몬드 도포장치.
- 제1항에 있어서, 각각의 상기 기판의 상기 필라멘트로부터 대향 측면상의 한쌍의 기판 냉각 수단을 포함한 다이어몬드 도포장치.제2항에 있어서, 필라멘트가 텅스텐을 구비한 다이어몬드 도포장치.
- 제2항에 있어서, 필라멘트가 텅스텐을 구비한 다이어몬드 도포장치.
- 제3항에 있어서, 기판 냉각 수단을 냉각 수의 통로를 위한 설비를 가지 구리를 구비한 다이어몬드 도포장치.
- 제3항에 있어서, 기판으로부터 기판 냉각 수단까지의 거리를 조정하기 위한 수단을 구비한 다이어몬드 도포장치.
- 화학증착에 의해 한쌍의 평면 수직 기판상에 다이어몬드의 도포를 하기 위한 장치로서, 대기압이하의 압력으로 유지되고 적어도 하나의 유입구 수단과 적어도 하나의 배출구 수단을 가진 폐쇄된 반응실과, 상기 반응실내에 상기 기판을 지지하기 위한지지 수단과, 한쌍의 고정된 전극의 각 단부에 고정되고 상기 기판에 평행하고 실제적으로 동일 거리에 있는 단일 평면내에서 만곡되도록 압축 응력을 받는 상기 기판으로부터 실제적으로 동일한 거리에 위치된 수직으로 연장된 복수의 직선 텅스텐 필라멘트를 구비한 저항가열수단과, 냉각수의 통과를 위한 설비를 가진 구리를 구비하고 상기필라멘트로부터 대향 측면상의 상기 기판에 인접하게 위치한 한쌍의 제거 가능한 히트 싱크를 구비한 것을 특징으로 하는 다이어몬드 도포장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/389,212 US4953499A (en) | 1989-08-03 | 1989-08-03 | Apparatus for synthetic diamond deposition including curved filaments and substrate cooling means |
US389,212 | 1989-08-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR910004296A true KR910004296A (ko) | 1991-03-28 |
Family
ID=23537321
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019900011874A KR910004296A (ko) | 1989-08-03 | 1990-08-02 | 만곡 필라멘트 및 기판 냉각 수단을 포함하는 합성 다이어몬드 도포 장치 |
Country Status (8)
Country | Link |
---|---|
US (1) | US4953499A (ko) |
EP (1) | EP0417434B1 (ko) |
JP (1) | JPH03115576A (ko) |
KR (1) | KR910004296A (ko) |
AT (1) | ATE107368T1 (ko) |
DE (1) | DE69009915T2 (ko) |
IE (1) | IE901920A1 (ko) |
ZA (1) | ZA905696B (ko) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6413589B1 (en) | 1988-11-29 | 2002-07-02 | Chou H. Li | Ceramic coating method |
DE69127609T2 (de) * | 1990-07-18 | 1998-01-22 | Sumitomo Electric Industries | Vorrichtung und verfahren zur herstellung von diamanten |
US5096736A (en) * | 1990-08-07 | 1992-03-17 | General Electric Company | Cvd diamond for coating twist drills |
US5256206A (en) * | 1990-08-07 | 1993-10-26 | General Electric Company | CVD diamond for coating twist drills |
ATE134223T1 (de) * | 1990-12-24 | 1996-02-15 | Gen Electric | Verkleidung aus metall zur steigerung der wachstumsgeschwindigkeit beim aufdampfen von diamant mittels cvd |
US5145712A (en) * | 1991-02-08 | 1992-09-08 | Center For Innovative Technology | Chemical deposition of diamond |
US5429069A (en) * | 1991-07-11 | 1995-07-04 | Fang; Pao-Hsien | Method for growing diamond crystals utilizing a diffusion fed epitaxy |
US5240749A (en) * | 1991-08-27 | 1993-08-31 | University Of Central Florida | Method for growing a diamond thin film on a substrate by plasma enhanced chemical vapor deposition |
GB9123331D0 (en) * | 1991-11-04 | 1991-12-18 | De Beers Ind Diamond | Apparatus for depositing a material on a substrate by chemical vapour deposition |
US5479874A (en) * | 1993-09-29 | 1996-01-02 | General Electric Company | CVD diamond production using preheating |
US5397396A (en) * | 1993-12-27 | 1995-03-14 | General Electric Company | Apparatus for chemical vapor deposition of diamond including thermal spreader |
US5424096A (en) * | 1994-02-14 | 1995-06-13 | General Electric Company | HF-CVD method for forming diamond |
US5833753A (en) * | 1995-12-20 | 1998-11-10 | Sp 3, Inc. | Reactor having an array of heating filaments and a filament force regulator |
US5776553A (en) * | 1996-02-23 | 1998-07-07 | Saint Gobain/Norton Industrial Ceramics Corp. | Method for depositing diamond films by dielectric barrier discharge |
US6082294A (en) * | 1996-06-07 | 2000-07-04 | Saint-Gobain Industrial Ceramics, Inc. | Method and apparatus for depositing diamond film |
DE19701696C2 (de) * | 1997-01-20 | 1999-02-18 | Fraunhofer Ges Forschung | Vorrichtung und Verfahren zur Beschichtung eines Substrates mittels eines chemischen Gasphasenabscheideverfahrens |
US6286206B1 (en) | 1997-02-25 | 2001-09-11 | Chou H. Li | Heat-resistant electronic systems and circuit boards |
US5937514A (en) | 1997-02-25 | 1999-08-17 | Li; Chou H. | Method of making a heat-resistant system |
US6676492B2 (en) | 1998-12-15 | 2004-01-13 | Chou H. Li | Chemical mechanical polishing |
US6976904B2 (en) * | 1998-07-09 | 2005-12-20 | Li Family Holdings, Ltd. | Chemical mechanical polishing slurry |
US6458017B1 (en) | 1998-12-15 | 2002-10-01 | Chou H. Li | Planarizing method |
US6692574B1 (en) * | 1999-08-30 | 2004-02-17 | Si Diamond Technology, Inc. | Gas dispersion apparatus for use in a hot filament chemical vapor deposition chamber |
JP2005179744A (ja) * | 2003-12-19 | 2005-07-07 | Toshiba Corp | 触媒cvd装置及び触媒cvd法 |
US20090017258A1 (en) * | 2007-07-10 | 2009-01-15 | Carlisle John A | Diamond film deposition |
DE102008044028A1 (de) * | 2008-11-24 | 2010-08-12 | Cemecon Ag | Vorrichtung und Verfahren zum Beschichten eines Substrats mittels CVD |
US8852347B2 (en) * | 2010-06-11 | 2014-10-07 | Tokyo Electron Limited | Apparatus for chemical vapor deposition control |
DE102011014204B4 (de) | 2011-03-17 | 2022-04-07 | Universität Rostock | Verfahren zur Synthese von Diamanten |
CN112323046B (zh) * | 2020-08-31 | 2023-02-21 | 广东鼎泰机器人科技有限公司 | 一种涂层机的真空加热装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4593644A (en) * | 1983-10-26 | 1986-06-10 | Rca Corporation | Continuous in-line deposition system |
US4859490A (en) * | 1986-07-23 | 1989-08-22 | Sumitomo Electric Industries, Ltd. | Method for synthesizing diamond |
US4816291A (en) * | 1987-08-19 | 1989-03-28 | The Regents Of The University Of California | Process for making diamond, doped diamond, diamond-cubic boron nitride composite films |
US4958592A (en) * | 1988-08-22 | 1990-09-25 | General Electric Company | Resistance heater for diamond production by CVD |
-
1989
- 1989-08-03 US US07/389,212 patent/US4953499A/en not_active Expired - Fee Related
-
1990
- 1990-05-29 IE IE192090A patent/IE901920A1/en unknown
- 1990-07-19 ZA ZA905696A patent/ZA905696B/xx unknown
- 1990-07-23 DE DE69009915T patent/DE69009915T2/de not_active Expired - Fee Related
- 1990-07-23 AT AT90114049T patent/ATE107368T1/de not_active IP Right Cessation
- 1990-07-23 EP EP90114049A patent/EP0417434B1/en not_active Expired - Lifetime
- 1990-08-02 KR KR1019900011874A patent/KR910004296A/ko not_active Application Discontinuation
- 1990-08-03 JP JP2205338A patent/JPH03115576A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
ATE107368T1 (de) | 1994-07-15 |
EP0417434B1 (en) | 1994-06-15 |
ZA905696B (en) | 1991-07-31 |
DE69009915D1 (de) | 1994-07-21 |
IE901920A1 (en) | 1991-02-13 |
JPH03115576A (ja) | 1991-05-16 |
DE69009915T2 (de) | 1994-11-17 |
US4953499A (en) | 1990-09-04 |
EP0417434A1 (en) | 1991-03-20 |
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