KR950032730A - 다이아몬드 화학 증착 장치 및 방법 - Google Patents
다이아몬드 화학 증착 장치 및 방법 Download PDFInfo
- Publication number
- KR950032730A KR950032730A KR1019950002577A KR19950002577A KR950032730A KR 950032730 A KR950032730 A KR 950032730A KR 1019950002577 A KR1019950002577 A KR 1019950002577A KR 19950002577 A KR19950002577 A KR 19950002577A KR 950032730 A KR950032730 A KR 950032730A
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- filament
- diamond
- vapor deposition
- chemical vapor
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/279—Diamond only control of diamond crystallography
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
다이아몬드는 화학 증착법에 의해서 수소-탄화수소 가스의 혼합물을 고온의 필라멘트에 의해 활성화함으로써 기재상에 생성된다. 상기 기재의 에지부는 상기 필라멘트로부터 약 1mm 이하, 바람직하게는 약 0.3 내지 0.7mm의 거리에서 필라멘트를 향하고 있으며, 상기 기재는 다이아몬드가 그 위에 형성됨에 따라 필라멘트에 대해 이동하여 상기 간격을 유지한다. 다이아몬드 생성은 증가된 속도로 진행되며, 특정한 조건하에서 단결정으로 생성된다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 일실시예에 따른 장치의 단면도, 제2도는 제1도의 2-2선을 따라 취한 단면도.
Claims (10)
- 다이아몬드 화학 증착 장치에 있어서: 약 2500℃까지 온도에 대하여 내성이 있는 적어도 하나의 필라멘트와, 다이아몬드 코팅을 수용할 수 있는 적어도 하나의 기재와, 상기 필라멘트를 향하는 에지부가 상기 필라멘트로부터 약 1mm까지 이격된 거리에 유지되도록 상기 기재를 보유함과 아울러 상기 기재를 상기 필라멘트에 대해 연속적으로 이동시키기 위한 수단과, 상기 필라멘트를 가열하기 위한 수단과, 가스를 상기 필라멘트 및 상기 기재와 접촉하도록 공급하기 위한 수단과, 상기 필라멘트와 기재를 대기압 미만의 압력으로 유지하기에 적합한 밀폐체를 포함하는 다이아몬드 화학 증착 장치.
- 제1항에 있어서, 상기 기재와 필라멘트 사이의 거리는 약 0.25 내지 1mm 범위인 다이아몬드 화학 증착 장치.
- 제2항에 있어서, 상기 기재를 보유하기 위한 수단은 기재 냉각 수단을 포함하는 다이아몬드 화학 증착 장치.
- 제1항에 있어서, 상기 기재의 평면에 수직인 적어도 두개의 필라멘트를 포함하며, 상기 기재로부터 상기 필라멘트의 반대쪽에 상기 가스 공급 수단을 구비한 다이아몬드 화학 증착 장치.
- 제1항에 있어서, 단일 필라멘트와, 복수의 기재를 포함하는 다이아몬트 화학 증착 장치.
- 제1항에 있어서, 상기 기재의 상기 에지부는 상기 필라멘트와 평행한 다이아몬드 화학 증착 장치.
- 제1항에 있어서, 상기 기재를 보유하기 위한 수단은 그것의 에지부가 상기 필라멘트와 수직인 위치와 평행한 위치 사이에서 상기 기재를 회전시키기에 적합한 다이아몬드 화학 증착 장치.
- 화학 증착법에 의해서 기재상에 다이아몬드를 용착시키기 위한 방법에 있어서, 상기 필라멘트로부터 적어도 하나의 필라멘트를 향하는 에지부가 약 1mm까지의 거리에 배치되도록 상기 기재를 위치설정시키는 단계와, 상기 필라멘트를 약 1800 내지 2500℃ 범위의 온도로 가열하는 단계와, 상기 기재를 대기압 미만의 압력에 유지시키고, 수소와 탄화수소 가스의 혼합물을 상기 필라멘트 및 상기 기재와 접촉하도록 통과시킴으로써, 상기 기재의 에지부상에 다이아몬드가 형성되게 하는 단계와, 상기 필라멘트에 대해 상기 기재를 이동시킴으로써, 상기 필라멘트와 상기 기재상에 형성된 다이아몬드 사이에 약 1mm까지의 간격이 유지되도록 하는 단계를 포함하는, 화학 증착법에 의해서 기재상에 다이아몬드를 용착시키기 위한 방법.
- 제8항에 있어서, 상기 기재의 에지부는 상기 기재의 두께와 대략 동일한 길이를 갖는, 화학 증착법에 의해서 기재상에 다이아몬드를 용착시키기 위한 방법.
- 제8항에 있어서, 다이아몬드 성장은 상기 기재가 상기 필라멘트와 수직일 때 시작되고, 단결정 다이아몬드 성장을 시작할 때 상기 기재가 상기 필라멘트와 평행한 위치로 회전되는, 화학 증착법에 의해서 기재상에 다이아몬드를 용착시키기 위한 방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US19495894A | 1994-02-14 | 1994-02-14 | |
US08/194,958 | 1994-02-14 | ||
US08/261,358 US5424096A (en) | 1994-02-14 | 1994-06-13 | HF-CVD method for forming diamond |
US08/261,358 | 1994-06-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950032730A true KR950032730A (ko) | 1995-12-22 |
Family
ID=26890562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950002577A KR950032730A (ko) | 1994-02-14 | 1995-02-13 | 다이아몬드 화학 증착 장치 및 방법 |
Country Status (4)
Country | Link |
---|---|
US (2) | US5424096A (ko) |
EP (1) | EP0671481A1 (ko) |
JP (1) | JPH07277889A (ko) |
KR (1) | KR950032730A (ko) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6413589B1 (en) | 1988-11-29 | 2002-07-02 | Chou H. Li | Ceramic coating method |
JP3498363B2 (ja) * | 1994-06-13 | 2004-02-16 | 住友電気工業株式会社 | ダイヤモンドの合成方法 |
DE4427714C2 (de) * | 1994-08-05 | 1996-07-11 | Daimler Benz Ag | Verfahren zum Bekeimen eines Substrats zur späteren Herstellung einer Komposit-Struktur |
US6286206B1 (en) | 1997-02-25 | 2001-09-11 | Chou H. Li | Heat-resistant electronic systems and circuit boards |
US5937514A (en) | 1997-02-25 | 1999-08-17 | Li; Chou H. | Method of making a heat-resistant system |
US6976904B2 (en) * | 1998-07-09 | 2005-12-20 | Li Family Holdings, Ltd. | Chemical mechanical polishing slurry |
US6676492B2 (en) | 1998-12-15 | 2004-01-13 | Chou H. Li | Chemical mechanical polishing |
US6458017B1 (en) | 1998-12-15 | 2002-10-01 | Chou H. Li | Planarizing method |
US6692574B1 (en) * | 1999-08-30 | 2004-02-17 | Si Diamond Technology, Inc. | Gas dispersion apparatus for use in a hot filament chemical vapor deposition chamber |
US20090017258A1 (en) * | 2007-07-10 | 2009-01-15 | Carlisle John A | Diamond film deposition |
US20090191336A1 (en) * | 2008-01-30 | 2009-07-30 | Mohan Chandra | Method and apparatus for simpified startup of chemical vapor deposition of polysilicon |
US20100080902A1 (en) * | 2008-09-29 | 2010-04-01 | Farid Arifuddin | Method and apparatus for low cost production of polysilicon using siemen's reactors |
DE102009023471B4 (de) * | 2009-06-02 | 2012-08-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Beschichtungsanlage und -verfahren |
US10808319B1 (en) * | 2010-02-26 | 2020-10-20 | Quantum Innovations, Inc. | System and method for vapor deposition of substrates with circular substrate frame that rotates in a planetary motion and curved lens support arms |
US20120213929A1 (en) * | 2011-02-18 | 2012-08-23 | Tokyo Electron Limited | Method of operating filament assisted chemical vapor deposition system |
US9469918B2 (en) | 2014-01-24 | 2016-10-18 | Ii-Vi Incorporated | Substrate including a diamond layer and a composite layer of diamond and silicon carbide, and, optionally, silicon |
CN109234806A (zh) * | 2018-11-21 | 2019-01-18 | 中国科学院大学 | 一种双频射频等离子体沉积单晶金刚石的方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4056208A (en) * | 1976-08-11 | 1977-11-01 | George Wyatt Prejean | Caustic-resistant polymer coatings for glass |
JPS6043483A (ja) * | 1983-08-16 | 1985-03-08 | Toshiba Corp | 耐摩耗ジルコニウム合金とその製造方法 |
US4816286A (en) * | 1985-11-25 | 1989-03-28 | Showa Denko Kabushiki Kaisha | Process for synthesis of diamond by CVD |
US5182093A (en) * | 1990-01-08 | 1993-01-26 | Celestech, Inc. | Diamond deposition cell |
JPH0316998A (ja) * | 1989-06-14 | 1991-01-24 | Hitachi Ltd | 光学部品およびその製造方法 |
US4953499A (en) * | 1989-08-03 | 1990-09-04 | General Electric Company | Apparatus for synthetic diamond deposition including curved filaments and substrate cooling means |
WO1992001828A1 (en) * | 1990-07-18 | 1992-02-06 | Sumitomo Electric Industries, Ltd. | Method and device for manufacturing diamond |
EP0492160A1 (en) * | 1990-12-20 | 1992-07-01 | General Electric Company | Symmetric CVD diamond articles and method of their preparation |
-
1994
- 1994-06-13 US US08/261,358 patent/US5424096A/en not_active Expired - Fee Related
- 1994-12-27 US US08/364,568 patent/US5437728A/en not_active Expired - Fee Related
-
1995
- 1995-01-27 EP EP95300514A patent/EP0671481A1/en not_active Withdrawn
- 1995-02-10 JP JP7022149A patent/JPH07277889A/ja not_active Withdrawn
- 1995-02-13 KR KR1019950002577A patent/KR950032730A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
US5437728A (en) | 1995-08-01 |
JPH07277889A (ja) | 1995-10-24 |
US5424096A (en) | 1995-06-13 |
EP0671481A1 (en) | 1995-09-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR950032730A (ko) | 다이아몬드 화학 증착 장치 및 방법 | |
Bachmann et al. | Towards a general concept of diamond chemical vapour deposition | |
KR880003403A (ko) | 화학적 기상 성장법과 그장치 | |
KR880002251A (ko) | 박막형성장치와 이를 이용한 박막형성방법 | |
DE69009915D1 (de) | Vorrichtung zur synthetischen Diamantherstellung mit gebogenen Filamenten und Substratkühlungseinrichtung. | |
ATE107365T1 (de) | Vorrichtung zur abscheidung von synthetischem diamant, die unter federdruck stehende drähte enthält. | |
KR960013989A (ko) | 고 열전도성 다이아몬드 필름 구조물 | |
GB1448848A (en) | Method for increasing rate of coating using vaporized reactants | |
ZA955235B (en) | Membrane pore size reduction and sealing of membrane defects by interfacial chemical vapor deposition with ozone and another gas phase reactant | |
KR970021367A (ko) | 플라즈마 화학 기상 성장법에 의해 비결정 탄소 박막을 형성하기 위한 방법 및 장치 | |
KR900013101A (ko) | 저압 증기상 성장장치 | |
KR900006474A (ko) | 플라즈마 가공방법 및 이의 생성물 | |
TW348272B (en) | Method and apparatus for depositing planar and highly oriented layers | |
TW430882B (en) | Plasma film forming method | |
KR960034479A (ko) | 산화물박막의 제조방법 및 그것에 사용되는 화학증착장치 | |
KR950006969A (ko) | 성막장치 및 성막방법 | |
KR940001263A (ko) | 성막장치 | |
AT400041B (de) | Hartmetall-substrat mit diamantschicht hoher haftfestigkeit | |
PE61596A1 (es) | Proceso para la produccion de un recubrimiento de proteccion sobre la superficie de un articulo de vidrio o ceramica | |
SE9200555D0 (sv) | A method of coating a piezoelectric substrate | |
KR960001187A (ko) | 다이아몬드 모자이크 및 그것을 생산하기 위한 방법 | |
Dua et al. | Large area diamond deposition in HFCVD technique employing convective flow of gases | |
US20150159268A1 (en) | Method of deposition of highly scratch-resistant diamond films onto glass substrates by use of a plasma-enhanced chemical vapor deposition | |
US3211583A (en) | Pyrolytic deposition of germanium | |
Yoshimoto et al. | Low temperature growth of pyrolytic carbon with well-ordered graphite structure by chemical vapour deposition methods |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |